CN-122015653-A - Pressure driving device, displacement amplifier and detection device

CN122015653ACN 122015653 ACN122015653 ACN 122015653ACN-122015653-A

Abstract

The disclosure provides a pressure driving device, a displacement amplifier and a detection device, and relates to the technical field of displacement detection, wherein the device comprises a measurement assembly formed by stacking a plurality of van der Waals material layers, wherein any one van der Waals material layer is in non-public contact with an adjacent van der Waals material layer; an external force is applied above the measuring assembly, the application direction of the external force is perpendicular to the van der Waals material layers, any one van der Waals material layer is dissociated from the adjacent van der Waals material layer, the van der Waals material layer moves towards the direction perpendicular to the application direction of the external force, and the movement displacement of the van der Waals material is positively related to the magnitude of the external force. The measuring assembly formed by the Van der Waals material layers is used for measuring the piece to be measured, so that the induction precision can be improved, the induction lower limit can be reduced, and the induction to the micro-motion can be realized.

Inventors

WU TIELIN
PENG DELI
WU ZHANGHUI
NIE JINHUI
ZHENG QUANSHUI

Assignees

清华大学深圳国际研究生院
清华大学
深圳清华大学研究院

Dates

Publication Date: 20260512
Application Date: 20260105

Claims (10)

1. A pressure drive apparatus, comprising: A measurement assembly comprising a stack of a plurality of layers of van der Waals materials, any one of the layers of van der Waals materials being in non-metric contact with an adjacent layer of van der Waals material; And an external force is applied above the measuring assembly, the application direction of the external force is perpendicular to the van der Waals material layers, any one van der Waals material layer is dissociated from the adjacent van der Waals material layer, the van der Waals material layer moves towards the direction perpendicular to the application direction of the external force, and the movement displacement of the van der Waals material is positively correlated with the magnitude of the external force.
2. The apparatus of claim 1, wherein the apparatus further comprises: The van der waals material layer is stacked on the substrate; island lid, the island lid sets up measuring assembly's upper portion, the material of island lid is silica or metal.
3. The device of claim 1, wherein the external force applied over the measurement assembly is not less than 100 micro-newtons, and wherein the measurement assembly has a cross-section that is greater than or equal to 1 micron in length and width, and is less than or equal to 20 microns in length and width.
4. The device of claim 1, wherein the measurement assembly comprises at least 10 layers of van der waals material, all of which have a thickness greater than or equal to 1 micron and less than or equal to 100 microns.
5. The device of claim 1, wherein all layers of van der waals material of the measurement assembly are made of the same material, the material being one of graphene, hexagonal boron nitride, molybdenum disulfide, tungsten disulfide.
6. The device of claim 1, wherein the thickness of one side of any of the layers of van der waals material is less than the thickness of the other side in the direction of displacement movement.
7. The device according to any one of claims 1 to 6, characterized in that the external force is applied by the component to be detected at a constant velocity perpendicular to the layer of van der waals material.
8. A displacement amplifier comprising the pressure driving device according to any one of claims 1 to 7, wherein an external force applied to the pressure driving device is applied by a displacement moving member including a fixed portion and a moving portion, one end of which moves perpendicularly to a van der waals material layer of the pressure driving device.
9. A detection apparatus, characterized by comprising: A pressure-driven device as claimed in any one of claims 1 to 7 or a displacement amplifier as claimed in claim 8, and And the displacement sensor is used for detecting the displacement of the van der Waals material layer.
10. The apparatus of claim 9, wherein the displacement sensor comprises an optical signal emitter, an optical signal reflector, and a processor; The optical signal reflector is arranged on the upper part of the substrate of the pressure driving device and is positioned on one side of the measuring component of the pressure driving device; The optical signal emitter is arranged right above the optical signal reflector and is used for sending an optical signal to the optical signal reflector, and at least one van der Waals material layer of the measuring assembly is dissociated and ejected under the condition that the stress between the to-be-measured piece and the measuring assembly is changed, and the ejected van der Waals material layer blocks the optical signal sent by the optical signal emitter to the optical signal reflector; The processor generates a braking instruction in the event that the optical signal is blocked.

Description

Pressure driving device, displacement amplifier and detection device Technical Field The disclosure relates to the technical field of pressure driving, and in particular relates to a pressure driving device, a displacement amplifier and a detection device. Background In the prior art, the displacement sensor can only detect the displacement of millimeter level or above, and still cannot detect the small displacement, which is not beneficial to the processing of precision devices. The current pressure sensor has insufficient general precision in detecting pressure and cannot detect micro pressure. Therefore, there is a strong need for a reliable and straightforward way to amplify small movements such as displacements or pressures so that devices such as sensors can detect them and can be used in precision device processing. Disclosure of Invention The present disclosure aims to solve, at least to some extent, one of the technical problems in the related art. To this end, an object of the present disclosure is to propose a pressure driving device. A second object of the present disclosure is to propose a displacement amplifier. A third object of the present disclosure is to propose a detection device. To achieve the above object, an embodiment of a first aspect of the present disclosure provides a pressure driving device, including a measurement assembly formed by stacking a plurality of van der waals material layers, wherein any one of the van der waals material layers is in non-metric contact with an adjacent van der waals material layer, an external force is applied above the measurement assembly, a force application direction of the external force is perpendicular to the van der waals material layer, any one of the van der waals material layers is dissociated from the adjacent van der waals material layer, and the van der waals material layer moves toward a direction perpendicular to the force application direction of the external force, and a movement displacement of the van der waals material is positively correlated with a magnitude of the external force. According to one embodiment of the present disclosure, the device further comprises a substrate, the stack of layers of van der Waals material being disposed on the substrate. Island lid, the island lid sets up measuring assembly's upper portion, the material of island lid is silica or metal. According to one embodiment of the present disclosure, the external force applied over the measuring assembly is not less than 100 micro-newtons, and the length and width of the cross section of the measuring assembly are each greater than or equal to 1 micron and are each less than or equal to 20 microns. According to one embodiment of the present disclosure, the measurement assembly includes at least 10 layers of van der waals material, all of which have a thickness greater than or equal to 1 micron and less than or equal to 100 microns. According to one embodiment of the present disclosure, all van der waals material layers of the measurement assembly are made of the same material, which is one of graphene, hexagonal boron nitride, molybdenum disulfide, and tungsten disulfide. According to one embodiment of the present disclosure, the thickness of one side of any one of the van der waals material layers is smaller than the thickness of the other side thereof in the displacement movement direction. According to one embodiment of the disclosure, the external force is applied by the part to be detected at a constant speed perpendicular to the layer of van der waals material. To achieve the above object, a second aspect of the present disclosure provides a displacement amplifier including a pressure driving device according to the first aspect, wherein an external force applied to the pressure driving device is applied by a displacement moving member including a fixed portion and a moving portion, and one end of the moving portion moves perpendicular to a van der waals material layer of the pressure driving device. To achieve the above object, an embodiment of a third aspect of the present disclosure proposes a detection device comprising a pressure driving device as described in the embodiment of the first aspect or a displacement amplifier as described in the embodiment of the second aspect, and a displacement sensor for detecting a displacement of movement of the van der waals material layer. Therefore, the measuring component formed by the Van der Waals material layers is used for measuring the workpiece to be measured, so that the sensing precision can be improved, the sensing lower limit can be reduced, and the sensing of the micro motion can be realized. Drawings FIG. 1 is a schematic diagram of a pressure driven device according to one embodiment of the present disclosure; FIG. 2 is a schematic diagram of another pressure driven device according to one embodiment of the present disclosure; FIG. 3 is a displacement amplifier of one embodiment of the present