CN-122015694-A - Surface type detection method and system

Abstract

The application relates to the technical field of optical detection and provides a surface type detection method and a surface type detection system, wherein the method controls a surface type detection system to output a detection light beam matched with a current detection mode according to the current detection mode; the method comprises the steps of obtaining an interference light beam which is transmitted by a detection light beam in a detection light path and returns after carrying phase information of a to-be-detected element, and determining surface type data corresponding to the to-be-detected element according to the interference light beam. The source matching strategy ensures that the returned detection light beam carrying effective phase information can be received even under the condition of complex or nonstandard light paths, thereby fundamentally optimizing the signal-to-noise ratio and contrast ratio of the original interference signal and remarkably improving the data precision and the system universality of the surface type detection.

Inventors

• Ge Kaidong
• LI WENQIANG

Assignees

• 北京创思工贸有限公司

Dates

Publication Date

20260512

Application Date

20260123

Claims (10)

1. 1. A method for detecting a surface shape, the method comprising: According to the current detection mode, controlling a surface type detection system to output a detection light beam matched with the current detection mode; acquiring an interference beam which is transmitted by the detection beam in a detection light path and returns after carrying phase information of a component to be detected; And determining the surface type data corresponding to the element to be tested according to the interference light beam.
2. 2. The method of claim 1, wherein controlling the area detection system to output a detection beam that matches a current detection pattern based on the current detection pattern comprises: If the current detection mode is a space shunt mode, the initial light beam output by the surface type detection system is spatially divided into a plurality of detection light beams corresponding to different transmission paths by utilizing a multi-channel light beam transmission assembly in the surface type detection system, and the plurality of detection light beams are spatially combined to form a cone-shaped detection light beam matched with the element to be detected.
3. 3. The method of claim 2, wherein acquiring the interference beam returned after the detection beam transmitted in the detection optical path and carrying the phase information of the element under test comprises: and receiving a test light beam which is returned to the surface type detection system through the element to be detected by the reflector component, and overlapping the test light beam with a reference light beam to form the interference light beam.
4. 4. The method of claim 1, wherein controlling the area detection system to output a detection beam that matches a current detection pattern based on the current detection pattern comprises: if the current detection mode is a wavelength tuning chromatography detection mode, acquiring the optical path distance of the current target subsurface in the element to be detected relative to the surface detection system; And determining a target wavelength parameter according to the optical path distance, and controlling a tunable light source in the surface type detection system to output the detection light beam conforming to the target wavelength parameter.
5. 5. The method of claim 4, wherein acquiring the interference beam returned after the detection beam transmitted in the detection path and carrying the phase information of the component under test comprises: And receiving a test light beam which is directly reflected by the current target subsurface and returns along an original light path, and enabling the test light beam and a reference light beam to be overlapped to form the interference light beam carrying the specific phase information of the current target subsurface.
6. 6. A method according to any one of claims 1-3, wherein determining the surface profile data corresponding to the component under test from the interference beam comprises: respectively carrying out phase analysis on the interference light beams returned by different subareas to obtain local surface type data corresponding to each interference light speed; constructing a full-caliber unified coordinate system aiming at the element to be detected according to the space geometric parameters of the surface type detection system; And mapping the local surface type data into the full-caliber unified coordinate system, and synthesizing a plurality of local surface type data into the complete surface type data of the element to be tested by utilizing overlapping data of adjacent subareas or a preset splicing algorithm.
7. 7. The method of any one of claims 1,4, and 5, wherein determining the surface profile data corresponding to the element under test from the interference beam comprises: Demodulating signals of the interference light beams obtained under different wavelength parameters, and respectively extracting discrete phase data of different target sub-surfaces of the element to be detected; acquiring three-dimensional coordinate information of effective pixel points in the discrete phase data; and carrying out multi-surface fitting on the three-dimensional coordinate information based on the theoretical geometric model of the element to be detected, and reconstructing to obtain comprehensive three-dimensional surface type data of the element to be detected.
8. 8. A surface type detection system, characterized in that the system comprises an interferometer, a design lens, the surface type detection system being adapted to perform the steps of the method according to any of the claims 1-7.
9. 9. The area detection system of claim 8, further comprising a mirror disposed on a side of the element under test facing away from the interferometer.
10. 10. The area detection system according to claim 8, wherein the design lens is configured to spatially divide the initial beam output by the area detection system into a plurality of detection beams corresponding to different transmission paths by using a multi-channel beam transmission assembly in the interferometer, and the plurality of detection beams are spatially combined to form a cone-shaped detection beam matched with the element to be detected.

Description

Surface type detection method and system Technical Field The application relates to the technical field of optical detection, in particular to a surface type detection method and system. Background Conical optical elements (such as aircraft hoods, conical mirrors of laser systems, etc.) have found wide application in the aerospace and high-energy laser fields due to their special aerodynamic profile or beam shaping function. Such elements typically have large steepness, large caliber, and rotationally symmetric geometric features, the area accuracy of which directly affects imaging quality or beam transmission quality. Because the upper part and the lower part of the product similar to the conical optical element are shielded, detection data are lost, technical detection difficulty exists, and related detection technical guidance is not provided. Disclosure of Invention In view of the above, the embodiments of the present application provide a method and a system for detecting a surface shape, so as to solve the problem that in the prior art, the surface shape of a tapered optical element cannot be detected. According to a first aspect of the embodiment of the application, a surface type detection method is provided, and the method comprises the steps of controlling a surface type detection system to output a detection light beam matched with a current detection mode according to the current detection mode, obtaining an interference light beam returned after the detection light beam is transmitted in a detection light path and carries phase information of a component to be detected, and determining surface type data corresponding to the component to be detected according to the interference light beam. In a second aspect of the embodiment of the application, a surface type detection system is provided, and the system comprises an interferometer and a design lens, wherein the surface type detection system is used for the steps of the method. In a third aspect of the embodiments of the present application, there is provided an electronic device comprising a memory, a processor and a computer program stored in the memory and executable on the processor, the processor implementing the steps of the above method when executing the computer program. In a fourth aspect of the embodiments of the present application, there is provided a computer readable storage medium storing a computer program which, when executed by a processor, implements the steps of the above method. Compared with the prior art, the method has the advantages that the method controls the surface type detection system to output the detection light beam matched with the current detection mode according to the current detection mode, obtains the interference light beam returned after the detection light beam is transmitted in the detection light path and carries the phase information of the element to be detected, and determines the surface type data corresponding to the element to be detected according to the interference light beam. The source matching strategy ensures that the returned detection light beam carrying effective phase information can be received even under the complex or nonstandard light path condition, thereby fundamentally optimizing the signal-to-noise ratio and contrast of the original interference signal, remarkably improving the data precision and the system universality of the surface type detection, and avoiding the problem that the surface type detection cannot be carried out on the conical optical element in the related technology. Drawings In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings used in the embodiments or the description of the prior art will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art. Fig. 1 is a schematic flow chart of a face type detection method according to an embodiment of the present application; FIG. 2 is a schematic flow chart of another face type detection method according to an embodiment of the present application; fig. 3 is a schematic diagram of a flip-up carrier stack according to an embodiment of the application. Detailed Description In the following description, for purposes of explanation and not limitation, specific details are set forth such as the particular system architecture, techniques, etc., in order to provide a thorough understanding of the embodiments of the present application. It will be apparent, however, to one skilled in the art that the present application may be practiced in other embodiments that depart from these specific details. In other instances, detailed descriptions of well-known systems, devices, circuits, and methods are omitted so as not to obscure the description of the prese