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CN-122015721-A - Process pipe detection device and detection method

CN122015721ACN 122015721 ACN122015721 ACN 122015721ACN-122015721-A

Abstract

The invention discloses a process tube detection device and a detection method, which relate to the technical field of process tube detection and comprise an operation table, a fixed seat, a first sealing ring and a second sealing ring, wherein the fixed seat, the first sealing ring and the second sealing ring are fixed at the top of the operation table, an annular groove is formed in the bottom of the inner side of the fixed seat, a plurality of partition plates which are uniformly distributed along the circumferential direction are arranged in the annular groove, the annular groove is divided into a plurality of independent air cavities by the plurality of partition plates, a sliding cavity is formed in the top of each air cavity, a detection unit for detecting an air leakage point is arranged in the sliding cavity, a sealing strip is arranged between the second sealing ring and each partition plate, and a clamping ring assembly is detachably arranged on the inner side of the fixed seat. Through setting up first sealing ring, second sealing ring, a plurality of independent air cavity and detecting element, can judge the position of gas leakage, be convenient for later stage can process the repair to the defect position pertinently, need not to reprocess whole terminal surface, can save time, improve repair efficiency, reduce the damage to the process tube.

Inventors

  • SUN QIAOYU
  • LIU YANG

Assignees

  • 辽宁汉京半导体材料有限公司

Dates

Publication Date
20260512
Application Date
20260413

Claims (7)

  1. 1. The utility model provides a technology pipe detection device, a serial communication port, including operation panel (1) and fixing base (8) at operation panel (1) top, first sealing ring (4) and second sealing ring (6), fixing base (8) inboard bottom is provided with the ring channel, be equipped with a plurality of baffle (9) along circumference evenly distributed in the ring channel, a plurality of baffle (9) separate into a plurality of independent air chambers (10) with the ring channel, sliding chamber (11) have all been seted up at every air chamber (10) top, install the detecting element that is used for detecting gas leakage point position in sliding chamber (11), a sealing strip (5) are all installed between second sealing ring (6) and every baffle (9), fixing base (8) inboard detachable is provided with the snap ring subassembly, the snap ring subassembly is provided with sealing member (19) with technology pipe bottom cooperation, sealing member (19) bottom is provided with the holding tank that corresponds with sealing strip (5); The operation panel (1) is last to have seted up first gas vent (2), second gas vent (3) and inlet port (7), first gas vent (2) are located first sealing ring (4) inboard, second gas vent (3) and inlet port (7) are located between first sealing ring (4) and second sealing ring (6), first gas vent (2) and second gas vent (3) bottom all communicate with air pump (23) through a gas-distributing pipe (24), all be provided with air pressure sensor and solenoid valve on two gas-distributing pipes (24), inlet port (7) bottom is provided with the valve.
  2. 2. The process tube detection device according to claim 1, wherein the detection unit comprises a transparent chuck (12) arranged at the top of the sliding cavity (11) and a support (25) arranged at the bottom of the sliding cavity (11), a sliding column (26) is fixedly arranged at the center of the support (25), a piston disc (27) is arranged on the sliding column (26) in a sliding mode, a pressure sensor (28) is arranged at the top of the support (25), a first spring (29) is arranged between the pressure sensor (28) and the piston disc (27), the first spring (29) is used for supporting the piston disc (27), the piston disc (27) is in contact sealing with the inner wall of the sliding cavity (11), and the pressure sensor (28), the air pump (23), the air pressure sensor and the electromagnetic valve are electrically connected with an external controller.
  3. 3. The process tube detection device according to claim 2, wherein the snap ring assembly further comprises an annular matching piece (15), the sealing piece (19) is matched with the bottom of the matching piece (15) in a clamping way, the sealing piece (19) is annular, the outer diameter of the sealing piece (19) is arranged corresponding to the fixed seat (8), the depth of a containing groove at the bottom of the sealing piece (19) is smaller than the height of the sealing strip (5), a plurality of positioning blocks (13) are fixedly arranged on the inner side of the fixed seat (8), and positioning grooves (20) which are in plug-in fit with the positioning blocks (13) are formed on the outer side of the sealing piece (19).
  4. 4. A process tube inspection device according to claim 3, further comprising a locking assembly, wherein the locking assembly comprises a mounting cavity (14) formed in the outer side of the top of the fixing seat (8) and a jack (17) formed in the outer side of the matching piece (15), the position of the jack (17) corresponds to the position of the positioning groove (20), a locking piece (30) is slidably arranged in the mounting cavity (14), one end of the locking piece (30) close to the matching piece (15) penetrates through the fixing seat (8) and is in plug-in fit with the jack (17), the other end of the locking piece (30) extends to the outer side of the fixing seat (8) and is connected with a pull handle (31), and a second spring (32) is arranged between the locking piece (30) and the mounting cavity (14).
  5. 5. A process tube inspection device according to claim 4, characterized in that the fitting (15) is provided with a first sealing ring (18) on the outside.
  6. 6. The process tube detection device according to claim 5, wherein the clamping ring assembly further comprises a clamping ring (21) located at the inner side of the matching piece (15), the clamping ring (21) comprises two semicircular rings which are clamped together, the bottoms of the two semicircular rings are respectively provided with a second sealing ring (22), and a rotating piece (16) for vertically limiting the clamping ring (21) is rotatably arranged at the top of the matching piece (15).
  7. 7. A process tube inspection method, wherein the process tube inspection apparatus of claim 6 is applied, comprising the steps of: Step 1, clamping and fixing a sealing element (19) and a matching element (15), inserting and matching a positioning groove (20) and a positioning block (13), inserting a locking element (30) into an inserting hole (17), completing the assembly among the sealing element (19), the matching element (15) and a fixed seat (8), inserting and placing a process pipe inside the sealing element (19), and enabling the bottom end surface of the process pipe to be attached and sealed with a first sealing ring (4), a second sealing ring (6) and a sealing strip (5); Step 2, firstly opening a valve at the bottom of an air pump (23), an air inlet hole (7) and an electromagnetic valve on an air distribution pipe (24) communicated with a first air hole (2), using the air pump (23) to carry out air suction, simultaneously using an air pressure sensor to detect an air pressure value, closing the air pump (23) and the electromagnetic valve after the air pressure value is reduced to a set value, monitoring the air pressure value through the air pressure sensor, and if the air pressure value is unchanged or the change rate is within a specified range, judging that the air tightness is qualified, and if the air pressure value is in a specified range, determining that no air leakage point exists at the position of a process pipe corresponding to the first sealing ring (4), and if the change rate of the air pressure value is beyond the specified range, determining that the air leakage point exists at the position of the process pipe corresponding to the first sealing ring (4), namely, the flatness of the end surface at the bottom of the process pipe is insufficient or scratch; And3, closing a valve at the bottom of the air inlet hole (7), opening the air pump (23) and the electromagnetic valves on the two air distribution pipes (24), pumping air by using the air pump (23), closing the air pump (23) and the two electromagnetic valves after the air pressure values in the two air distribution pipes (24) are reduced to set values, and in the pumping air process, if an air leakage point exists at the position of the process pipe corresponding to the second sealing ring (6), air in the air cavity (10) corresponding to the air leakage point also enters a space between the first sealing ring (4) and the second sealing ring (6) and is pumped away, so that the corresponding piston disc (27) moves downwards and compresses the first spring (29), the pressure sensor (28) sends a signal to an external controller after detecting the change of the elasticity, and the air leakage points in the area corresponding to the downwardly moving piston disc (27) can be judged, and if the position of the process pipe corresponding to the second sealing ring (6) does not have the air leakage point, the piston discs (27) do not move downwards, and the pressure sensor (28) does not send a signal to the external controller.

Description

Process pipe detection device and detection method Technical Field The invention relates to the technical field of process pipe detection, in particular to a process pipe detection device and a process pipe detection method. Background In the field of semiconductor manufacturing and the like, a process tube is used as a core part in a Chemical Vapor Deposition (CVD) process, and the flatness of the bottom end surface of the process tube directly influences the sealing performance and the equipment operation reliability. If the flatness of the end face of the bottom of the process pipe is insufficient or the defects of scratch, dent and the like exist, the problems of air leakage and liquid leakage easily occur after assembly, the production efficiency is reduced, the product quality is unqualified, and even potential safety hazards are caused. The flatness detection device for the bottom end face of the existing process pipe is designed based on the air pressure detection principle, a core structure is generally that a plurality of concentric sealing rings with different diameters are arranged at a detection station, an air port is formed in the center of the station and is communicated with a bottom air extracting pump, and whether the end face is insufficient in flatness or scratched is judged through air pressure change of an air path after air extraction. However, in practical application, the traditional device can only judge whether air leakage occurs or not through the air pressure change of the whole air path, and cannot locate the air leakage area, so that the subsequent defect repair is not facilitated. Disclosure of Invention In order to solve the technical problems, the technical scheme provided by the invention is as follows: The invention provides a process tube detection device, which comprises an operation table, a fixed seat, a first sealing ring and a second sealing ring, wherein the fixed seat, the first sealing ring and the second sealing ring are fixed at the top of the operation table, an annular groove is arranged at the bottom of the inner side of the fixed seat, a plurality of partition plates which are uniformly distributed along the circumferential direction are arranged in the annular groove, the annular groove is divided into a plurality of independent air cavities by the plurality of partition plates, a sliding cavity is arranged at the top of each air cavity, a detection unit for detecting an air leakage point position is arranged in the sliding cavity, a sealing strip is arranged between the second sealing ring and each partition plate, a clamping ring assembly is detachably arranged on the inner side of the fixing seat, a sealing piece matched with the bottom of the process pipe is arranged on the clamping ring assembly, and an accommodating groove corresponding to the sealing strip is formed in the bottom of the sealing piece; The operation panel is last to have seted up first gas pocket, second gas pocket and inlet port, and first gas pocket is located first sealing ring inboard, and second gas pocket and inlet port are located between first sealing ring and the second sealing ring, and first gas pocket and second gas pocket bottom all are provided with air pressure sensor and solenoid valve on two gas-dividing pipes through a gas-dividing pipe and air pump intercommunication, and the inlet port bottom is provided with the valve. Preferably, the detecting unit comprises a transparent chuck arranged at the top of the sliding cavity and a support arranged at the bottom of the sliding cavity, a sliding column is fixedly arranged at the center of the support, a piston disc is arranged on the sliding column in a sliding mode, a pressure sensor is arranged at the top of the support, a first spring is arranged between the pressure sensor and the piston disc and used for supporting the piston disc, the piston disc is in contact sealing with the inner wall of the sliding cavity, and the pressure sensor, the air pump, the air pressure sensor and the electromagnetic valve are electrically connected with an external controller. Preferably, the snap ring assembly further comprises an annular matching piece, the sealing piece is matched with the bottom of the matching piece in a clamping way, the sealing piece is annular, the outer diameter of the sealing piece is arranged corresponding to the fixing seat, the depth of the containing groove at the bottom of the sealing piece is smaller than the height of the sealing strip, a plurality of positioning blocks are fixedly arranged on the inner side of the fixing seat, and positioning grooves matched with the positioning blocks in a plugging way are formed in the outer side of the sealing piece. Preferably, the locking assembly comprises a mounting cavity arranged outside the top of the fixing seat and a jack arranged outside the matching piece, the position of the jack corresponds to that of the positioning groove, a locking piece is arrang