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CN-122015725-A - Film thickness detector capable of dynamically compensating and eliminating environmental interference

CN122015725ACN 122015725 ACN122015725 ACN 122015725ACN-122015725-A

Abstract

The invention relates to the field of film thickness detection equipment, and discloses a film thickness detector capable of dynamically compensating and eliminating environmental interference, which comprises an X-ray thickness detector and a step cooling mechanism, wherein the step cooling mechanism comprises a cooling conveying component, the cooling conveying component comprises a heat preservation box, a plurality of groups of rubber sleeves are arranged in the heat preservation box at intervals, a positive and negative driving component is used for driving two rubber sleeves of the same group to rotate in opposite directions to convey a metal film, a water source is filled into the rubber sleeves of the same group in a matching manner with a temperature control conveying component, so that the temperatures of the rubber sleeves of the plurality groups are sequentially decreased in the conveying direction to form step cooling, the positive and negative driving component is used for injecting the water source into the rubber sleeves of the plurality groups through a hollow box, the temperature control conveying component enables the rubber sleeves of the plurality groups to form temperature decrease step steps in the conveying direction, the metal film is gradually cooled through the rubber sleeves of the plurality groups, so that condensed water drops on the surface due to quenching are avoided, and meanwhile, stable conveying of the metal film is ensured, no water drop interference during X-ray penetration, and thickness measurement precision are ensured.

Inventors

  • XIAO WENKE
  • FAN GUOJUN
  • ZENG QUNFANG
  • LI CHENGXIN

Assignees

  • 玻尔兹曼（广州）科技有限公司

Dates

Publication Date
20260512
Application Date
20260226

Claims (10)

  1. 1. The utility model provides a can dynamic compensation get rid of ambient interference's film thickness detector, includes X ray thickness gauge (100) and installs ladder cooling mechanism (200) on X ray thickness gauge (100), its characterized in that, ladder cooling mechanism (200) include: The cooling conveying assembly (210) comprises a heat preservation box (212) fixedly arranged on the X-ray thickness gauge (100); The rubber sleeves (211) are arranged in the heat preservation box (212) at intervals and are communicated through the temperature control conveying assemblies (250); The positive and negative driving assembly (220) is used for driving the same group of two rubber sleeves (211) to rotate in opposite directions so as to convey the metal film, and is matched with the temperature control conveying assembly (250) to pour water sources into the rubber sleeves (211) in multiple groups, so that the temperatures of the rubber sleeves (211) in multiple groups decrease in sequence along the direction of the conveying path of the metal film, stepped cooling is formed, and the conveying path, namely the advancing direction of the metal film from entering the first rubber sleeve (211) to entering the detection interval of the X-ray thickness gauge (100), is realized.
  2. 2. The apparatus as claimed in claim 1, wherein said cooling delivery assembly (210) further comprises: the hollowed-out driving roller (214) is fixedly arranged in the rubber sleeve (211); the first hollow rotary tube (216) is fixedly arranged on the hollow driving roller (214) and is communicated with the hollow driving roller (214).
  3. 3. The apparatus as claimed in claim 2, wherein said cooling delivery assembly (210) further comprises: a plurality of double-row pulleys (215) fixedly mounted on a plurality of the first hollow rotating pipes (216), respectively; And the driving belt (217) is used for driving the two adjacent double-row belt pulleys (215) to synchronously rotate.
  4. 4. A film thickness gauge capable of dynamically compensating for environmental disturbances in accordance with claim 2 wherein said positive and negative drive assembly (220) comprises: A liquid inlet pipe (224), two liquid outlet ends of which are fixedly provided with hollow boxes (223); a second fixed cover (221) fixedly mounted on the hollow box (223); One end of the first water pipe (222) is fixedly connected with the hollow box (223), and the other end of the first water pipe is fixedly connected with the second fixed cover (221).
  5. 5. The apparatus as claimed in claim 4, wherein said forward and reverse driving assembly (220) further comprises: The second hollow rotating pipe (226) is rotatably arranged on the hollow box (223) and is fixedly connected with the first hollow rotating pipe (216); The impeller (225) is positioned inside the hollow box (223) and is fixedly connected with the second hollow rotating pipe (226).
  6. 6. The apparatus as claimed in claim 2, wherein the step-down mechanism (200) further comprises an adjusting component (230), the adjusting component (230) comprising: the connecting block (234) is slidably arranged on the heat preservation box (212) and is rotationally connected with the first hollow rotating pipe (216); and a connection plate (233) for connecting two adjacent connection blocks (234).
  7. 7. The thin film thickness detector for eliminating environmental interference as defined in claim 6, characterized in that the adjustment assembly (230) further comprises: The positive and negative screw rod (235) is rotatably arranged on the rubber sleeve (211), and is in threaded connection with a threaded block (231) fixedly connected with the connecting block (234); the sliding rod (232) is fixedly arranged on the heat preservation box (212), and a threaded block (231) fixedly connected with the connecting block (234) is connected to the sliding rod.
  8. 8. The apparatus as claimed in claim 7, wherein said cooling delivery assembly (210) further comprises: a first fixed cover (213) fixedly mounted on the connection block (234); the temperature controlled delivery assembly (250) includes: A second delivery pipe (252) for communicating two adjacent first fixed covers (213), and having a check valve fixedly installed therein; and a folding heat preservation cover (251) with one end fixedly arranged on the heat preservation box (212) and the other end in sliding connection with the second conveying pipe (252).
  9. 9. The apparatus as claimed in claim 8, wherein said cooling delivery assembly (210) further comprises: a latch (218) fixedly mounted inside the first hollow rotating tube (216); the step-down mechanism (200) further includes a mixing assembly (240), the mixing assembly (240) including: a second outer post (242) is located inside the first hollow swivel tube (216).
  10. 10. A film thickness measuring apparatus capable of dynamically compensating for environmental disturbance according to claim 9, characterized in that the mixing assembly (240) further comprises: the first rotating shaft (244) is fixedly provided with a plurality of stirring plates (243) at the inner part of the hollow driving roller (214), and the first outer tooth column (241) meshed with the second outer tooth column (242) is fixedly provided at the inner part of the first hollow rotating tube (216).

Description

Film thickness detector capable of dynamically compensating and eliminating environmental interference Technical Field The invention belongs to the technical field of film thickness detection equipment, and particularly relates to a film thickness detector capable of dynamically compensating and eliminating environmental interference. Background The metal film has excellent conductivity, ductility and barrier property, is an important raw material for manufacturing products such as electronic elements, food packaging, anti-corrosion coatings and the like, and the thickness uniformity is a key index of the performance of the metal film, wherein the uneven conductivity can be caused by the overlarge thickness deviation of the metal film for the electronic circuit, and the barrier property and the tensile strength can be influenced by the thickness fluctuation of the metal film for the packaging, so that the quality of the products needs to be controlled in real time through online thickness detection in the continuous production process of the metal film, and the thickness meets the standard. There are many kinds of thickness gauges, in which the X-ray thickness gauge emits X-rays to a continuously conveyed metal film, calculates film thickness data by using an attenuation rule when the X-rays penetrate the film, and feeds back the film thickness data to a production control system in real time, so that the thickness of the metal film can be measured without contacting the metal film, and the thickness gauge is suitable for a continuous production process of the metal film. However, in the production process of the metal film, the measurement precision of the X-ray thickness gauge is easy to be interfered by the environment, the surface temperature of the metal film is usually up to 120-150 ℃ after production links such as rolling and extrusion, the metal film needs to be rapidly conveyed to the X-ray thickness gauge to finish detection so as to ensure the production continuity, the production environment temperature is usually 20-30 ℃ which is far lower than the surface temperature of the metal film, the two forms a significant temperature difference, if the metal film works in a humid environment, water vapor contained in the air condenses on the surface of the metal film, the water drops can directly interfere the detection of the X-ray thickness gauge, and the X-ray can scatter and refract when passing through the water drops, so that the radiation intensity signal received by the thickness gauge is distorted, and the true thickness of the metal film cannot be accurately reflected. Disclosure of Invention The invention aims to provide a film thickness detector capable of dynamically compensating and eliminating environmental interference, which is used for solving the technical problem that condensation water drops on the surface of a metal film affect thickness measurement accuracy in the prior art. In order to achieve the above purpose, the present invention adopts the following technical scheme: The film thickness detector comprises an X-ray thickness detector and a step cooling mechanism arranged on the X-ray thickness detector, wherein the step cooling mechanism comprises a cooling conveying component, a plurality of groups of rubber sleeves, a positive and negative driving component and a water source, wherein the cooling conveying component comprises a heat preservation box fixedly arranged on the X-ray thickness detector, the plurality of groups of rubber sleeves are arranged in the heat preservation box at intervals and are communicated through the plurality of groups of temperature control conveying components, the positive and negative driving component is used for driving the two rubber sleeves in the same group to rotate in opposite directions so as to convey metal films, and the temperature control conveying component is matched with the water source to fill water sources into the rubber sleeves in the plurality of groups, so that the temperatures of the rubber sleeves are sequentially decreased along the conveying path direction of the metal films to form step cooling, and the conveying path is the advancing direction of the metal films from entering the first rubber sleeve to the detecting section of the X-ray thickness detector. Preferably, the cooling conveying assembly further comprises a hollowed-out driving roller fixedly arranged in the rubber sleeve, and a first hollow rotary pipe fixedly arranged on the hollowed-out driving roller and communicated with the hollowed-out driving roller. Preferably, the cooling conveying assembly further comprises a plurality of double-row belt pulleys which are fixedly arranged on the plurality of first hollow rotating pipes respectively, and a driving belt which is used for driving two adjacent double-row belt pulleys to synchronously rotate. Preferably, the positive and negative driving assembly comprises a liquid inlet pipe, a second fixed cover a