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CN-122015795-A - Single-axis MEMS gyroscope

CN122015795ACN 122015795 ACN122015795 ACN 122015795ACN-122015795-A

Abstract

The invention relates to a single-axis MEMS gyroscope, which comprises a substrate, an anchor point component, a motion component and an electrode component, wherein the motion component comprises a driving frame, a mass block and a detection frame, the driving frame is connected with a first anchor point through a first rigid beam, the driving frame has the degree of freedom of linear motion along the X-axis direction relative to the substrate, the mass block is connected with the driving frame through a first decoupling beam, the detection frame is connected with a second anchor point through a second rigid beam, the detection frame has the degree of freedom of linear motion along the X-axis direction relative to the substrate, the detection frame is also connected with a support beam through a first coupling beam, the extending direction of the first coupling beam forms an acute angle with the X-axis direction and the Y-axis direction, the first coupling beam is provided with a first end and a second end in the extending direction, the first end of the first coupling beam is connected with the support beam, the second end of the first coupling beam is connected with the detection frame, the support beam is connected with a third anchor point, and the support beam is connected with the mass block through a second decoupling beam. The invention can realize the amplifying effect from the displacement of the mass block to the displacement of the detection frame.

Inventors

  • ZHANG YUHUA
  • ZHOU JINGCHUAN
  • ZHU ZEHUA

Assignees

  • 苏州亿波达微系统技术有限公司

Dates

Publication Date
20260512
Application Date
20260129

Claims (10)

  1. 1. A single axis MEMS gyroscope characterized by a central symmetrical structure, the single axis MEMS gyroscope comprising: A substrate; the anchor point component is fixedly arranged on the substrate and comprises a first anchor point, a second anchor point and a third anchor point; The motion assembly comprises a driving frame, a mass block and a detection frame, wherein the driving frame is connected with the first anchor point through a first rigid beam, the driving frame has a degree of freedom of linear motion along the X-axis direction relative to the substrate, the mass block is connected with the driving frame through a first decoupling beam, the detection frame is connected with the second anchor point through a second rigid beam, the detection frame has a degree of freedom of linear motion along the X-axis direction relative to the substrate, the detection frame is also connected with a support beam through a first coupling beam, the extending direction of the first coupling beam forms an acute angle with the X-axis direction and the Y-axis direction, the first coupling beam has a first end and a second end in the extending direction, the first end of the first coupling beam is connected with the support beam, the second end of the first coupling beam is connected with the detection frame, the support beam is connected with the third anchor point is connected with the mass block through a second decoupling beam; The electrode assembly comprises a driving mode excitation electrode and a sensitive mode detection electrode, wherein the driving mode excitation electrode is used for driving the driving frame to perform linear motion along the X-axis direction, and the sensitive mode detection electrode is used for detecting displacement of the detection frame in the linear motion along the X-axis direction; in a driving mode, the electrode assembly drives the driving frame to linearly move along the X-axis direction, and the driving frame drives the connected mass block to linearly move along the X-axis direction; In the detection mode, the mass block moves linearly along the Y-axis direction under the action of the Coriolis force, and the mass block drives the connected detection frame to move linearly along the X-axis direction.
  2. 2. The single-axis MEMS gyroscope of claim 1, wherein the motion assembly comprises a motion unit, the motion unit comprises two driving frames, two mass blocks and two detection frames, the two driving frames are arranged at intervals along the Y-axis direction, the two mass blocks are arranged at intervals along the Y-axis direction and are respectively connected with the two driving frames through the first decoupling beam, and the two detection frames are arranged along the X-axis direction and are arranged between the two mass blocks and are connected through the second coupling beam; At the same time, the moving directions of the two mass blocks in the same moving unit are opposite, and the moving directions of the two detection frames are opposite.
  3. 3. The single-axis MEMS gyroscope according to claim 2, wherein one side of each mass block facing the detection frame is provided with one support beam, two ends of each support beam along the X-axis direction are respectively connected with two ends of the adjacent mass block along the X-axis direction through one second decoupling beam, and two ends of each support beam along the X-axis direction are respectively connected with two ends of the two detection frames far away from the center of the motion unit along the X-axis direction through one first coupling beam; The distance between the first end of the first coupling beam and the center of the motion unit along the X-axis direction is greater than the distance between the second end of the first coupling beam and the center of the motion unit along the X-axis direction.
  4. 4. The single-axis MEMS gyroscope of claim 2, wherein the motion assembly comprises two motion units, each of the motion units having the mass embedded inside the drive frame connected thereto, the two motion units being arranged along the X-axis direction and adjacent ones of the drive frames being connected by a third coupling beam; At the same time, the movement directions of the two movement units are opposite.
  5. 5. The single-axis MEMS gyroscope of claim 4, wherein one support beam is disposed on a side of the two masses aligned in the X-axis direction toward the inspection frame, each end of each support beam in the X-axis direction is connected to both ends of the adjacent mass in the X-axis direction through two second decoupling beams, and each end of each support beam in the X-axis direction is connected to both ends of the two inspection frames in the X-axis direction through the first coupling beams; The distance between the first end of the first coupling beam and the center of the motion unit along the X-axis direction is smaller than the distance between the second end of the first coupling beam and the center of the motion unit along the X-axis direction.
  6. 6. The single-axis MEMS gyroscope of claim 2, wherein the motion assembly comprises two motion units, each of the motion units has one of the mass blocks embedded inside the driving frame connected thereto and located at one end of the motion assembly in the Y-axis direction, the other mass block embedded inside the driving frame connected thereto and located at the other end of the motion assembly in the Y-axis direction, the remaining two mass blocks of the two motion units are located at the center of the motion assembly and fixed to each other to form a mass group, and the remaining two driving frames of the two motion units are respectively located at both sides of the mass group in the X-axis direction; At the same time, the movement directions of the two movement units are opposite.
  7. 7. The single-axis MEMS gyroscope of claim 6, wherein one side of each of the masses facing the detection frame is provided with one support beam, a midpoint of each of the support beams in the X-axis direction is connected to a point on the Y-axis direction symmetry axis of the mass through one of the first decoupling beams, and a midpoint of each of the support beams in the X-axis direction is connected to a point on the X-axis direction symmetry axis of two of the detection frames through two of the first coupling beams; The distance between the first end of the first coupling beam and the center of the motion unit along the X-axis direction is smaller than the distance between the second end of the first coupling beam and the center of the motion unit along the X-axis direction.
  8. 8. The single-axis MEMS gyroscope of claim 1, wherein the motion assembly comprises four drive frames, four proof masses, and two sense frames, the four drive frames being rectangular arrays along the X-axis and Y-axis, the four proof masses being rectangular arrays along the X-axis and Y-axis and being embedded and connected to the four drive frames, respectively, one of the sense frames being disposed between two proof masses aligned along the Y-axis, the other of the sense frames being disposed between two other proof masses aligned along the Y-axis; At the same time, the movement directions of the two mass blocks arranged along the X-axis direction are opposite, the movement directions of the two mass blocks arranged along the Y-axis direction are opposite, and the movement directions of the two detection frames arranged along the X-axis direction are the same.
  9. 9. The single-axis MEMS gyroscope of claim 8, wherein one side of the two masses aligned in the X-axis direction toward the inspection frame is provided with one support beam, each end of each support beam in the X-axis direction is connected to both ends of the mass adjacent thereto in the X-axis direction through two second decoupling beams, and each end of each support beam in the X-axis direction is connected to both ends of the inspection frame adjacent thereto in the X-axis direction through two first coupling beams; the distance between the first end of the first coupling beam and the center of the motion assembly along the X-axis direction is smaller than the distance between the second end of the first coupling beam and the center of the motion assembly along the X-axis direction.
  10. 10. The single-axis MEMS gyroscope according to any one of claims 1 to 9, wherein the anchor assembly further comprises a fourth anchor, levers are further provided on both sides of the motion assembly in the X-axis direction, the levers are connected to the fourth anchor via torsion beams, the levers have a degree of freedom of rotating around the Z-axis direction with respect to the substrate, both ends of the levers in the length direction are connected to two drive frames closest in the Y-axis direction via fourth coupling beams, respectively, and the two drive frames closest in the Y-axis direction move in opposite directions.

Description

Single-axis MEMS gyroscope Technical Field The invention relates to the technical field of detection, in particular to a single-axis MEMS gyroscope. Background MEMS (Micro Electro MECHANICAL SYSTEMS) gyroscopes, i.e. micromechanical gyroscopes, have been widely used in the fields of unmanned aerial vehicle, automotive electronics, industrial production, aerospace, etc. because of their small size, low cost, low power consumption, high integration and other advantages. With the development of related application fields and the gradual increase of detection requirements, the market demands for gyroscopes with small volume, high precision and high stability are increasingly urgent. Currently, a typical MEMS gyroscope is mainly a capacitive resonant gyroscope, and the basic principle of the MEMS gyroscope is to obtain the angular velocity by measuring energy conversion between different resonances caused by coriolis forces. The traditional MEMS gyroscope has the defects that the mechanical sensitivity of a sensitive mode is low, the signal to noise ratio of the whole sensor is difficult to improve, and the performance of high precision and low noise is difficult to further obtain. The invention improves the signal to noise ratio by introducing the sensitive mode mechanical sensitivity amplifying structure so as to realize the high-performance MEMS gyroscope with high precision and low noise. Meanwhile, the invention has simple structure and small processing difficulty, and is beneficial to realizing batch processing production. Disclosure of Invention Therefore, the single-axis MEMS gyroscope provided by the invention can realize the amplification effect from the displacement of the mass block to the displacement of the detection frame, reduce the quadrature error introduced by the process and lay a foundation for realizing the high-performance MEMS gyroscope. In order to solve the above technical problems, the present invention provides a uniaxial MEMS gyroscope, which is a centrosymmetric structure, and includes: A substrate; the anchor point component is fixedly arranged on the substrate and comprises a first anchor point, a second anchor point and a third anchor point; The motion assembly comprises a driving frame, a mass block and a detection frame, wherein the driving frame is connected with the first anchor point through a first rigid beam, the driving frame has a degree of freedom of linear motion along the X-axis direction relative to the substrate, the mass block is connected with the driving frame through a first decoupling beam, the detection frame is connected with the second anchor point through a second rigid beam, the detection frame has a degree of freedom of linear motion along the X-axis direction relative to the substrate, the detection frame is also connected with a support beam through a first coupling beam, the extending direction of the first coupling beam forms an acute angle with the X-axis direction and the Y-axis direction, the first coupling beam has a first end and a second end in the extending direction, the first end of the first coupling beam is connected with the support beam, the second end of the first coupling beam is connected with the detection frame, the support beam is connected with the third anchor point is connected with the mass block through a second decoupling beam; The electrode assembly comprises a driving mode excitation electrode and a sensitive mode detection electrode, wherein the driving mode excitation electrode is used for driving the driving frame to perform linear motion along the X-axis direction, and the sensitive mode detection electrode is used for detecting displacement of the detection frame in the linear motion along the X-axis direction; in a driving mode, the electrode assembly drives the driving frame to linearly move along the X-axis direction, and the driving frame drives the connected mass block to linearly move along the X-axis direction; In the detection mode, the mass block moves linearly along the Y-axis direction under the action of the Coriolis force, and the mass block drives the connected detection frame to move linearly along the X-axis direction. Further, the motion assembly comprises a motion unit, the motion unit comprises two driving frames, two mass blocks and two detection frames, the two driving frames are arranged at intervals along the Y-axis direction, the two mass blocks are arranged at intervals along the Y-axis direction and are respectively connected with the two driving frames through the first decoupling beam, and the two detection frames are arranged along the X-axis direction and are arranged between the two mass blocks and are connected through the second coupling beam; At the same time, the moving directions of the two mass blocks in the same moving unit are opposite, and the moving directions of the two detection frames are opposite. Further, one side of each mass block facing the detection frame is provided wit