CN-122015796-A - High-precision cavity optical power micro gyroscope based on magnetostrictive material driving and angular velocity measuring method

CN122015796ACN 122015796 ACN122015796 ACN 122015796ACN-122015796-A

Abstract

The application discloses a high-precision cavity optical power micro gyroscope based on magnetostrictive material driving and an angular velocity measuring method, which belong to the technical field of high-precision angular velocity measurement. The application integrates magnetostrictive materials into the driving frame of the gyroscope, does not need a capacitance comb tooth structure required by electrostatic driving, avoids electrostatic attraction failure risk, improves driving stability and environmental adaptability, is compatible with SOI processing technology, and can effectively ensure angular velocity detection sensitivity and long-term working reliability of the cavity optical force micro gyroscope.

Inventors

WANG CHANGSONG
HUANG HAODONG
CAI ZIQING
WANG MAOYUAN
HUANG YONGJUN
FAN BOYU

Assignees

电子科技大学

Dates

Publication Date: 20260512
Application Date: 20260302

Claims (9)

1. A high precision cavity optical power micro-gyroscope based on magnetostrictive material driving, the gyroscope comprising: The front surface of the base is used for fixing the mechanical structure, and the back surface of the base is used for fixing the magnetostriction driving structure; the mechanical structure comprises a mass block and a supporting beam, wherein the mass block comprises a driving mass block, a core mass block and a detecting mass block, the core mass block is positioned at the central part of the gyroscope and is respectively connected with the driving mass block and the detecting mass block through a cantilever beam arm, the driving mass block is matched with a magnetostrictive driving structure to enable the gyroscope to realize vibration output and realize motion decoupling of driving and detecting modes, and the supporting beam comprises a driving supporting beam and a detecting supporting beam which are matched with the driving mass block and the detecting mass block to realize motion decoupling of the driving and detecting modes; a magnetostrictive driving structure comprising a plurality of layers of magnetostrictive films, wherein the layers of magnetostrictive films bulge out of plane, and the out-of-plane bulge direction is aligned with the driving direction of the gyroscope chip; an optical structure comprising a cavity optical power system and a waveguide structure, the cavity optical power system and the waveguide structure being coupled, the optical structure being fixed to both ends of the mechanical structure.
2. The magnetostrictive material driven high precision cavity force micro gyroscope of claim 1, wherein the driving mass and the proof mass are rigidly connected by a U-beam embedded inside the proof mass.
3. The magnetostrictive material driven high precision cavity optical power micro gyroscope of claim 1, wherein the cavity optical power system comprises an optical micro cavity, and the optical micro cavity is arranged on the detection mass block in an up-down symmetrical way to form a differential detection configuration.
4. The magnetostrictive material driven high-precision cavity optical power micro gyroscope according to claim 1, wherein the magnetostrictive driving structure is electrically connected with an external magnetic field generating device, and the magnetostrictive material is subjected to directional elastic deformation by regulating the intensity and frequency of the external magnetic field so as to drive the driving mass block and the core mass block to make simple harmonic vibration along the driving direction.
5. The magnetostrictive material driven high precision cavity optical power micro gyroscope according to claim 1, wherein the mechanical structure is fixedly connected with the base through fixing columns arranged at four corners, and the height of the fixing columns is consistent with the suspension height of the mechanical structure.
6. The magnetostrictive material driven high precision cavity optical power micro gyroscope of claim 1, wherein the magnetostrictive driving structure is fixed to the base by sputter deposition, low temperature bonding or annealing lamination process.
7. The magnetostrictive material driven high precision cavity optical power micro gyroscope of claim 4, wherein the magnetostrictive driving structure is placed in a vacuum cavity.
8. The magnetostrictive material driven high precision cavity optical power micro gyroscope of claim 3, wherein the optical microcavity comprises a two-dimensional photonic crystal microcavity.
9. A method for measuring angular velocity of a high-precision cavity-power micro-gyroscope based on magnetostrictive material driving, the method being implemented based on the cavity-power micro-gyroscope according to any one of claims 1 to 8, the method comprising: The angular velocity magnitude and direction are characterized by measuring the offset of the oscillation frequency of the proof mass.

Description

High-precision cavity optical power micro gyroscope based on magnetostrictive material driving and angular velocity measuring method Technical Field The application belongs to the technical field of high-precision angular velocity measurement, and particularly relates to a high-precision cavity optical power micro gyroscope driven by a magnetostrictive material and an angular velocity measurement method. Background In recent years, with the deep fusion of micro-nano manufacturing and photoelectron technology, a cavity optical force sensor system shows irreplaceable advantages in the accurate detection field of physical quantities such as micro displacement, mass, temperature, acceleration, angular velocity and the like by virtue of detection sensitivity, and has wide application potential particularly in scenes with strict requirements on detection precision and environmental adaptability such as aerospace, resource exploration, biomedical and the like. The core of the cavity optical sensor is to realize energy exchange and signal conversion through strong coupling action between the light and the mechanical vibrator, and the performance quality of the cavity optical sensor directly depends on the driving efficiency of the mechanical vibrator and the stability of the light-machine coupling. The traditional cavity optical power gyroscope mainly adopts electrostatic comb teeth for driving, the driving force provided by the electrostatic comb teeth is generated by relying on electrostatic force between the comb teeth, and comb teeth parameters are required to be finely designed, but in practice, the uneven comb teeth intervals are easily caused due to process errors such as thickness deviation of a device layer, processing burrs and the like, so that electrostatic attraction is caused. Secondly, the electrostatic comb teeth are driven by applying driving voltage through gold wire bonding or an external probe, so that cross coupling exists between an optical structure and an electrical structure, and the measurement accuracy and stability of the gyroscope are seriously affected. Meanwhile, due to the problems of complex gold wire bonding process, poor contact of probes and the like, the long-term reliability of a driving system is further reduced. Disclosure of Invention The application aims to overcome the defects of the prior art, provides a high-precision cavity optical power micro gyroscope based on magnetostrictive material driving and an angular velocity measuring method, and solves the problems of complex processing technology, cross coupling of an optical structure and an electrical structure in a driving mode and the like of the traditional cavity optical power gyroscope. The aim of the application is achieved by the following technical scheme: A magnetostrictive material drive-based high precision cavity optical power micro-gyroscope, the gyroscope comprising: The front surface of the base is used for fixing the mechanical structure, and the back surface of the base is used for fixing the magnetostriction driving structure; the mechanical structure comprises a mass block and a supporting beam, wherein the mass block comprises a driving mass block, a core mass block and a detecting mass block, the core mass block is positioned at the central part of the gyroscope and is respectively connected with the driving mass block and the detecting mass block through a cantilever beam arm, the driving mass block is matched with a magnetostrictive driving structure to enable the gyroscope to realize vibration output and realize motion decoupling of driving and detecting modes, and the supporting beam comprises a driving supporting beam and a detecting supporting beam which are matched with the driving mass block and the detecting mass block to realize motion decoupling of the driving and detecting modes; a magnetostrictive driving structure comprising a plurality of layers of magnetostrictive films, wherein the layers of magnetostrictive films bulge out of plane, and the out-of-plane bulge direction is aligned with the driving direction of the gyroscope chip; an optical structure comprising a cavity optical power system and a waveguide structure, the cavity optical power system and the waveguide structure being coupled, the optical structure being fixed to both ends of the mechanical structure. Further, the driving mass block and the detecting mass block are rigidly connected through a U-shaped beam embedded in the detecting mass block. Further, the cavity optical power system comprises an optical microcavity, and the optical microcavity is arranged on the detection mass block in an up-down symmetrical mode to form a differential detection configuration. Further, the magnetostrictive driving structure is electrically connected with the external magnetic field generating device, and the magnetostrictive material is enabled to generate directional elastic deformation by adjusting and controlling the intensity and th