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CN-122015927-A - High-vacuum low-permeability microcrystalline glass cavity and preparation method thereof

CN122015927ACN 122015927 ACN122015927 ACN 122015927ACN-122015927-A

Abstract

The invention discloses a high-vacuum low-permeability glass ceramic cavity and a preparation method thereof, belonging to the fields of vacuum technology and quantum precision measurement equipment. The high-vacuum low-permeability glass ceramic cavity comprises a glass ceramic vacuum cavity (1), an ion pump part (2), a getter pump part (3) and an atomic preparation area part (4), wherein the glass ceramic vacuum cavity (1) comprises a cavity (11), ion pump interfaces (12), getter pump interfaces (13), an exhaust interface (14), an experiment interface (15) and a cover plate (16) for covering the exhaust interface (14) which are arranged on each side wall of the cavity (11), and the glass ceramic vacuum cavity (1) is connected with the ion pump part (2), the getter pump part (3) and the atomic preparation area part (4) through optical bonding or low-temperature bonding and is communicated with the ion pump interfaces (12), the getter pump interfaces (13) and the experiment interface (15).

Inventors

  • WANG YUCHEN
  • LIU YUANZHENG
  • LI PAN
  • Niu Kexiao
  • CHEN WEIQI

Assignees

  • 中国航空工业集团公司西安飞行自动控制研究所

Dates

Publication Date
20260512
Application Date
20251224

Claims (10)

  1. 1. The high-vacuum low-permeability glass ceramic cavity is characterized by comprising a glass ceramic vacuum cavity (1), an ion pump part (2), a getter pump part (3) and an atomic preparation area part (4), wherein the glass ceramic vacuum cavity (1) comprises a cavity (11), ion pump interfaces (12) arranged on the side walls of the cavity (11), a getter pump interface (13), an exhaust interface (14), an experiment interface (15) and a cover plate (16) for covering the exhaust interface (14), and the glass ceramic vacuum cavity (1) is connected with the ion pump part (2), the getter pump part (3) and the atomic preparation area part (4) through optical bonding or low-temperature bonding and is communicated with the ion pump interface (12), the getter pump interface (13) and the experiment interface (15).
  2. 2. The high-vacuum low-permeability glass ceramic cavity according to claim 1, wherein the ion pump interface (12), the getter pump interface (13), the exhaust interface (14) and the experimental interface (15) are round holes machined in the cavity (11), and the diameter of the round holes is 4-20mm.
  3. 3. The high-vacuum low-permeability glass ceramic cavity according to claim 1, wherein a photoresist area is arranged in a 5mm area adjacent to each of the ion pump interface (12), the getter pump interface (13), the exhaust interface (14) and the experiment interface (15) on the outer side surface of the cavity (11), and the area with the outer edge of 5mm is polished without scratches.
  4. 4. The high-vacuum low-permeability glass ceramic cavity according to claim 1, wherein the contact area between the outer side surface of the cavity (11) and the cover plate (16) is a photoresist area, and the area with the outer edge of 5mm is polished without scratches.
  5. 5. The high vacuum low permeability glass ceramic cavity according to claim 1, wherein the glass ceramic is lithium aluminum silicon glass ceramic or magnesium aluminum silicon glass ceramic, the crystal phase content is not less than 50%, and the thermal expansion coefficient is less than 5 x 10 -6 /K.
  6. 6. The high-vacuum low-permeability glass ceramic cavity according to claim 1, wherein the ion pump part (2) comprises an ion pump housing (21), a plurality of anode cylinders (22), two cathode plates (23), two magnet supports (24), two magnets (25) and electrodes (26), wherein the two cathode plates (23) are arranged in parallel in the ion pump housing (21), an anode cylinder (22) array is arranged between the two cathode plates (23), and a magnet (25) is arranged at the outer side of the ion pump housing (21) corresponding to the area of the two cathode plates (23) through the magnet supports (24), and a static magnetic field is formed between the two magnets; the ion pump shell (21) is made of microcrystalline glass, is manufactured through integrated molding processing or is manufactured through photo-adhesive bonding or low-temperature bonding of a plurality of single microcrystalline glass elements, and the inner wall is subjected to chemical polishing treatment; The magnet support (24) is of a detachable structure; The electrode (26) is made of a metal material with low air release rate, comprises oxygen-free copper or platinum, and is arranged on the ion pump housing (21) through a ceramic metallization sealing technology; The anode cylinder (22) is arranged between two cathode plates (23), high voltage of 1kV-10kV is applied through the electrode (26), and high vacuum preparation is realized under the magnetic field of 0.1-0.5T formed by the magnet (25).
  7. 7. The high vacuum low permeability glass ceramic cavity according to claim 1, wherein the getter pump portion (3) comprises a getter pump housing (31) and a getter (32) disposed inside the getter pump housing (31); The getter pump shell (31) is made of microcrystalline glass, is manufactured through integrated molding processing, or is manufactured through photo-adhesive bonding or low-temperature bonding of a plurality of single microcrystalline glass elements, and the inner wall is subjected to chemical polishing treatment; The getter (32) is a non-evaporable getter, and can continuously adsorb gas molecules after being activated at high temperature.
  8. 8. The high vacuum low permeability glass ceramic cavity according to claim 1, wherein the atomic preparation zone portion (4) comprises a preparation zone housing (41) and a gaseous atomic releasing agent (42) disposed within the preparation zone housing (41); The preparation area shell (41) is made of microcrystalline glass, is manufactured through integrated molding processing, or is manufactured through photo-adhesive bonding or low-temperature bonding of a plurality of single microcrystalline glass elements, and the inner wall is subjected to chemical polishing treatment; the gaseous atom releasing agent (42) is a metal compound, and can discharge adsorption gas or generate reduction reaction to release metal simple substance steam through heating.
  9. 9. The high vacuum low permeability glass-ceramic cavity according to claim 1, wherein the high vacuum low permeability glass-ceramic cavity is used for quantum sensors and quantum computers based on cold atomic systems.
  10. 10. The preparation method of the high-vacuum low-permeability glass ceramic cavity is characterized by comprising the following steps of: The method comprises the steps of S1, assembling a cavity, namely respectively assembling an ion pump part (2), a getter pump part (3), an atomic preparation area part (4) and a vacuum pre-preparation part (5) except for a magnet (25), connecting the cavity (11) with the ion pump part (2), the getter pump part (3) and the atomic preparation area part (4), wherein the connection mode is optical bonding or low-temperature bonding, placing a cover plate (16) in the center of a platform of a vacuum threaded rod (53), connecting the cavity (11) with the vacuum pre-preparation part (5), and the connection mode is indium sealing, so that a gap of 3-7mm is reserved between the cover plate (16) and the cavity (11), wherein the vacuum pre-preparation part (5) comprises a metal shell (51), a flange interface (52) and a vacuum threaded rod (53), the metal shell (51) is made of titanium alloy with a thermal expansion coefficient similar to that of microcrystalline glass, the metal shell (51) is in sealing connection with the cavity (11) in an indium sealing mode, and the top end of the vacuum threaded rod (53) is provided with a flat platform for supporting the cover plate (16) and realizing relative movement of the cover plate (11); S2, vacuum pre-pumping, namely connecting a vacuum leak detector to a flange interface (52), performing leak detection to verify the tightness of a cavity (11), an ion pump part (2), a getter pump part (3) and an atomic preparation area part (4), connecting a molecular pump group to the flange interface (52) and starting after the sealing is complete, and performing low-temperature baking on the assembled structure in an environment below 100 ℃ for 3-7 days; s3, high-temperature baking of the assembly, namely respectively surrounding induction heating coils on the peripheries of an ion pump part (2), a getter pump part (3) and an atomic preparation area part (4), alternately starting the coils, and carrying out local high-temperature treatment on internal metal or metal compound materials, wherein the baking lasts for 3-7 days; S4, sealing the exhaust hole, namely rotating the threaded rod (53) to enable the cover plate (16) to be close to the cavity (11) until the cover plate is contacted, and realizing the sealing connection between the cover plate (16) and the cavity (11) through optical cement bonding; s5, removing the vacuum pre-preparation part (5), namely removing the molecular pump group, surrounding the induction heating coil on the periphery of the metal shell (51), heating to 100-150 ℃ and maintaining until the indium sealing area falls off, and separating the vacuum pre-preparation part (5) from the cavity (11); S6, starting the vacuum chamber inner assembly, namely installing a magnet support (24) and a magnet (25) to the periphery of an ion pump shell (21) of the ion pump part (2), connecting an electrode (26) with a high-voltage electric starting ion pump, activating a getter (32) through a laser irradiation mode, starting the getter pump, and activating a gaseous atom releasing agent (42) through the laser irradiation mode to realize gaseous atom preparation.

Description

High-vacuum low-permeability microcrystalline glass cavity and preparation method thereof Technical Field The invention belongs to the field of vacuum technology and quantum precision measurement equipment, and particularly relates to a high-vacuum low-permeability glass ceramic cavity suitable for cold atomic quantum sensors (such as atomic clocks and atomic interferometers) and quantum computers and a preparation method thereof. Background In the technical field of cold atomic quantum, maintaining a long-term stable ultrahigh vacuum environment is a key for successful quantum sensing and quantum computing experiments. The core component of the cold atomic system is an ultra-high vacuum cavity which provides necessary vacuum environment for laser cooling, trapping and atomic control, and the vacuum degree of 10-7 Pa level is usually maintained. In the prior art, the vacuum cavity is mostly made of nonmagnetic stainless steel or metallic titanium materials and is connected with an external ion pump through a flange plate. Such metal cavities, while capable of meeting vacuum requirements, suffer from the following inherent disadvantages: 1. The thermal expansion coefficient of the material is mismatched, namely, the thermal expansion coefficient of the metal cavity and the glass light-transmitting window sheet is greatly different, and thermal stress is easy to generate when the temperature changes, so that the sealing is invalid or the vacuum degree is reduced. 2. The gas permeability is high, the barrier property of the metal material (particularly stainless steel) to small molecular gases such as hydrogen and the like is poor, the vacuum degree can be slowly reduced due to the gas permeability in long-term use, and the vacuum degree is obviously reduced particularly in a metal vacuum pipeline area. 3. The metal cavity needs to be in butt joint with the ion pump and the optical path system through complex connecting pieces, so that the system is large in size and weight, and the requirements of miniaturization and integration are difficult to meet. In order to overcome the problems, a technical scheme of adopting a glass vacuum cavity has appeared in recent years. So as to reduce weight and improve light permeability. However, the solution still uses a traditional metal-shell ion pump, and the sealing interface between glass and metal can still be a weak link for gas permeation. Still others use low coefficients of thermal expansion to improve stability, but do not address the problem of mismatch of ion pump housing and cavity materials. Therefore, a need exists for an all-glass integrated vacuum system that fundamentally reduces gas permeability and achieves a long-term stable ultra-high vacuum environment. Disclosure of Invention The invention aims to: The high-vacuum low-permeability microcrystalline glass cavity and the preparation method thereof are provided to solve the problems of high gas permeability and short vacuum service life caused by material mismatch in the prior art. The technical scheme is as follows: The high-vacuum low-permeability glass ceramic cavity comprises a glass ceramic vacuum cavity 1, an ion pump part 2, a getter pump part 3 and an atomic preparation area part 4, wherein the glass ceramic vacuum cavity 1 comprises a cavity 11, an ion pump interface 12, a getter pump interface 13, an exhaust interface 14, an experiment interface 15 and a cover plate 16 for covering the exhaust interface 14, which are arranged on each side wall of the cavity 11, and the glass ceramic vacuum cavity 1 is connected with the ion pump part 2, the getter pump part 3 and the atomic preparation area part 4 through optical bonding or low-temperature bonding and communicated with each other through the ion pump interface 12, the getter pump interface 13 and the experiment interface 15. Further, the ion pump interface 12, the getter pump interface 13, the exhaust interface 14 and the experiment interface 15 are round holes processed on the cavity 11, and the diameter of the round holes is 4-20mm. Further, a photoresist area is arranged in a 5mm area adjacent to each interface of the ion pump interface 12, the getter pump interface 13, the exhaust interface 14 and the experiment interface 15 on the outer side surface of the cavity 11, and the area with the outer edge of 5mm is polished without scratches. Further, the contact area between the outer side surface of the cavity 11 and the cover plate 16 is a photoresist area, and the area with the outer edge of 5mm is polished without scratches. Further, the glass ceramics is lithium aluminum silicon glass ceramics or magnesium aluminum silicon glass ceramics, the crystal phase content of the glass ceramics is not less than 50%, and the thermal expansion coefficient is less than 5 multiplied by 10 -6/K. Further, the ion pump part 2 comprises an ion pump housing 21, a plurality of anode cylinders 22, two cathode plates 23, two magnet supports 24, two magnets 25