CN-122015928-A - Silicon-based landfill fan-out integrated packaging structure of coal mining machine multiparameter sensor

CN122015928ACN 122015928 ACN122015928 ACN 122015928ACN-122015928-A

Abstract

The application discloses a silicon-based landfill fan-out integrated packaging structure of a multiparameter sensor of a coal mining machine, which comprises a sensor shell provided with a U-shaped clamping groove and an M12 interface, wherein a silicon-based carrier provided with a multi-modularized groove body is packaged inside the sensor shell. The sensor core particles such as temperature, gas, vibration and gesture are fixed in the carrier groove by utilizing the differential buried layer, and are combined with the carrier through the heat conduction buffer layer so as to absorb vibration, and meanwhile, heat is efficiently conducted out by utilizing the good heat conduction characteristic of the silicon-based carrier. And an insulating layer and a fan-out wiring layer are covered above the core particles, so that in-situ digitization and convergence transmission of multipath signals are realized. The outer layer is covered with a polyimide explosion-proof layer and a metal explosion-proof ring to form an intrinsic safety seal. According to the application, the external wiring harness and the mounting interface are reduced through high-density integration, the anti-interference capability is improved by utilizing source end digitization and differential transmission, and the multi-stage protection structure is suitable for severe working conditions of strong underground vibration, high gas and limited heat dissipation.

Inventors

WANG QI
HUANG ZIMING
YANG JIANWEI
WANG YANG
SUN XIAODONG
GAO LEI
ZHAO TIELIN
JI LEI
ZHANG TONG
Fan Zimo

Assignees

中煤科工开采研究院有限公司
天地(榆林)开采工程技术有限公司

Dates

Publication Date: 20260512
Application Date: 20251229

Claims (10)

1. Silicon-based landfill fan-out integrated packaging structure of coal-winning machine multiparameter sensor, its characterized in that includes: the sensor comprises a sensor shell (1), wherein a U-shaped clamping groove (2) and an M12 screwing interface (3) are arranged on the side surface of the sensor shell; The silicon-based carrier (4) is positioned in the sensor shell (1), and a plurality of groove bodies for accommodating sensor core particles of different types are formed in the silicon-based carrier (4); a sensor landfill layer (5) filled in and on the surface of the groove body of the silicon-based carrier (4) for fixing sensor core particles; an insulating layer (6) covering the sensor landfill layer (5); the fan-out wiring layer (7) is positioned on the insulating layer (6), is electrically connected with the sensor core particles in the sensor landfill layer (5) through the conductive via holes, and is used for converging and connecting multiple paths of sensor signals to the M12 screwing interface (3); and the explosion-proof protection layer (8) is covered on the fan-out wiring layer (7), and an annular metal explosion-proof ring (9) is arranged at the edge of the packaging structure.
2. The silicon-based landfill fan-out integrated packaging structure of the coal mining machine multiparameter sensor according to claim 1, wherein the groove bodies on the silicon-based carrier (4) are distributed in a modularized manner, and specifically comprises: a temperature groove (401) located in the edge region; a grid-shaped heat dissipation groove (402) disposed adjacent to the temperature groove (401); An inclined groove (403) at the center of the carrier; and a gas tank (404), a signal conditioning chip tank (406), an accelerometer tank (407), a vibration tank (408) and two reserved tanks (409) which are distributed in other areas of the carrier.
3. The silicon-based landfill fan-out integrated packaging structure of the coal mining machine multiparameter sensor according to claim 2, wherein a gas flow hole (405) penetrating through the silicon-based carrier (4) is formed at the bottom of the gas tank (404) or at a corresponding position, and the gas flow hole (405) is a micropore array structure formed by a plurality of micropores and is used for communicating the external environment with gas sensor core particles arranged in the gas tank (404).
4. The silicon-based landfill fan-out integrated package structure of the coal mining machine multiparameter sensor according to claim 1, wherein the sensor landfill layer (5) adopts a differential package structure, comprising: A semi-wrap package (502) for a sensor pellet mounted within the gas tank (404), the semi-wrap package (502) exposing a gas sensitive face of the sensor pellet or covering only a thin layer of gas permeable material; and full-wrapping packaging (503) is applied to other sensor core particles except the gas sensor, so that the sensor core particles are fully wrapped by packaging materials.
5. The silicon-based landfill fan-out integrated packaging structure of the coal mining machine multiparameter sensor according to claim 4, characterized in that a heat conducting buffer layer (501) is further arranged between the bottom of the sensor landfill layer (5) and the silicon-based carrier (4), and the heat conducting buffer layer (501) is made of a heat conducting and elastic material and is used for conducting heat and absorbing vibration impact.
6. The silicon-based landfill fan-out integrated packaging structure of the coal mining machine multiparameter sensor according to claim 2, characterized in that a silicon-based heat dissipation grid with a depth of 100 μm is etched in the heat dissipation groove (402), and the thickness of the silicon wall between the temperature groove (401) and the heat dissipation groove (402) enables the temperature sensor core particle to rapidly sense the thermal state of the coal mining machine body conducted through the silicon-based carrier (4).
7. The silicon-based landfill fan-out integrated packaging structure of the coal mining machine multiparameter sensor according to claim 2, wherein the vibration groove (408) and the accelerometer groove (407) are attached to the bottom of the silicon-based carrier (4) and are arranged with a space of at least 1mm reserved between the vibration groove and the accelerometer groove to inhibit signal crosstalk, and the dip angle groove (403) is located in the geometric center of the silicon-based carrier (4) and is used for providing a stable attitude measurement reference.
8. The silicon-based landfill fan-out integrated packaging structure of the coal mining machine multiparameter sensor, according to claim 1, is characterized in that the fan-out wiring layer (7) comprises a double-layer copper wiring structure, a signal transmission line, a grounding line and an SPI bus conversion unit are integrated in the double-layer copper wiring structure, and after the fan-out wiring layer (7) converts analog signals of sensor core particles into digital signals, the digital signals are led out to the M12 screwing interface (3) through a single differential signal line.
9. The silicon-based landfill fan-out integrated packaging structure of the coal mining machine multiparameter sensor, which is characterized in that the explosion-proof protection layer (8) is made of polyimide composite material, completely covers the surface of the fan-out wiring layer (7) and extends to the side surface of the silicon-based carrier (4), and the annular metal explosion-proof ring (9) is embedded in the edge of the explosion-proof protection layer (8) and is insulated and isolated from the electrical pins of the M12 screwing interface (3).
10. The silicon-based landfill fan-out integrated packaging structure of the coal mining machine multiparameter sensor according to claim 1, wherein a plurality of ceramic positioning protruding points are integrated at the bottom of the sensor shell (1), and the U-shaped clamping groove (2) is of a plug-in structure arranged on the side face of the shell and is used for being matched and fixed with a coal mining machine mounting seat.

Description

Silicon-based landfill fan-out integrated packaging structure of coal mining machine multiparameter sensor Technical Field The invention relates to the technical field of crossing of semiconductor packaging and underground mining monitoring technology, in particular to a silicon-based landfill fan-out integrated packaging structure of a multi-parameter sensor of a coal mining machine. Background The intelligent operation of the coal mining machine serving as core equipment of the fully-mechanized coal mining face is highly dependent on the real-time perception of key parameters such as cutting part temperature, machine body vibration, surrounding gas concentration, complete machine posture and the like. At present, a discrete sensor scheme is generally adopted in the industry, namely, independent sensor monomers are respectively configured for different parameters, and the sensor monomers are arranged at different positions of a rocker arm or a machine body of the coal mining machine in a scattered manner. The layout mode leads to the fact that a large number of installation hole sites are reserved on the surface of the machine body, and each sensor needs to be powered and data transmitted through independent cables, so that the number of external wire harnesses of the machine body is numerous and the trend is complicated. In the operation site with narrow underground space, moist environment and continuous coal drop splashing, the complex external wiring is extremely easy to scrape, break by winding or loose interface, and the starting-up rate and maintenance efficiency of equipment are seriously affected. In addition, the existing discrete monitoring system mostly adopts analog signals for long-distance transmission, and when the high-power variable-frequency speed regulating device of the coal mining machine works, the field electromagnetic environment is extremely complex, and an analog signal link is extremely easy to interfere to generate data distortion. Meanwhile, the general sensor packaging structure is generally difficult to consider underground special explosion-proof requirements and Gao Pinjiang vibration conditions, the internal chip and lead interconnection structure is easy to fatigue failure under long-term mechanical impact, and the heat dissipation problem in the airtight explosion-proof shell is also difficult to effectively solve, so that the long-term stability of the monitoring system is restricted. Disclosure of Invention Aiming at the defects of the prior art, the invention provides a silicon-based landfill fan-out integrated packaging structure of a multiparameter sensor of a coal mining machine, which solves the problems that an external wire harness of a machine body of the existing coal mining machine is complex and easy to damage, the long-distance analog signal transmission anti-interference capability is poor, and the traditional packaging structure is difficult to adapt to underground Gao Pinjiang vibration and explosion-proof heat dissipation requirements due to the discrete arrangement of the sensors. The silicon-based landfill fan-out integrated packaging structure of the coal mining machine multiparameter sensor comprises a sensor shell, a fan-out module and a fan-out module, wherein a U-shaped clamping groove and an M12 screwing interface are arranged on the side surface of the sensor shell; The silicon-based carrier is positioned in the sensor shell and provided with a plurality of grooves for accommodating sensor core particles of different types; The sensor landfill layer is filled in the groove body and the surface of the silicon-based carrier and is used for fixing sensor core particles; An insulating layer covering the sensor landfill layer; the fan-out wiring layer is positioned on the insulating layer, is electrically connected with the sensor core particles in the sensor landfill layer through the conductive via holes, and is used for converging and connecting multiple paths of sensor signals to the M12 screwing interface; and the explosion-proof protection layer is covered on the fan-out wiring layer, and an annular metal explosion-proof ring is arranged at the edge of the packaging structure. Preferably, the groove body on the silicon-based carrier is in modularized distribution, and specifically comprises: A temperature groove located in the edge region; Grid-shaped heat dissipation grooves arranged close to the temperature grooves; A tilt groove at the center of the carrier; and a gas tank, a signal conditioning chip tank, an accelerometer tank, a vibration tank and two reserved tanks which are distributed in other areas of the carrier. Preferably, the bottom or the corresponding position of the gas tank is provided with a gas flow hole penetrating through the silicon-based carrier, and the gas flow hole is of a micropore array structure formed by a plurality of micropores and is used for communicating the external environment with gas sensor core particle