CN-122016095-A - Multidimensional tactile sensing unit, tactile sensing system and manufacturing method

CN122016095ACN 122016095 ACN122016095 ACN 122016095ACN-122016095-A

Abstract

The application relates to the technical field of tactile sensation, in particular to a multidimensional tactile sensation sensing unit, a tactile sensation sensing system and a manufacturing method. The elastic cantilever structure comprises a piezoresistive layer, an insulating layer, a first bonding layer, a second electrode layer, a dielectric layer, a butt joint anchor point and an elastic cantilever, wherein the piezoresistive layer is evaporated on the first surface of the elastic cantilever, the first electrode layer is evaporated on the surface of the piezoresistive layer, the insulating layer is evaporated on the second surface of the elastic cantilever, the first bonding layer is evaporated on the surface of the insulating layer, the first surface of the super-sliding layer is bonded on the surface of the first bonding layer, the second electrode layer is evaporated on the first surface of a supporting substrate, the first surface of the dielectric layer is deposited on the first surface and the peripheral side surface of the second electrode layer, the second surface of the super-sliding layer is in contact with the second surface of the dielectric layer, the peripheral side of the second surface of the dielectric layer is provided with butt joint anchor points corresponding to the elastic cantilever one by one, and each butt joint anchor point is respectively and elastically connected with one elastic cantilever. According to the application, the interface super-slip is used as a mechanical information carrier to be applied to tactile perception, so that the perception sensitivity, the multidimensional decoupling capacity and the sensing service life are improved.

Inventors

MIAO RUI
HUANG XUANYU
HUANG YICHENG
HAN YU
ZHENG QUANSHUI

Assignees

深圳清华大学研究院
清华大学深圳国际研究生院

Dates

Publication Date: 20260512
Application Date: 20260130

Claims (10)

1. The multidimensional touch sensing unit is characterized by comprising an elastic cantilever beam (1) with at least two elastic cantilevers, a piezoresistive layer (2) for adjusting a resistance value according to an external normal force, a first electrode layer (3), an insulating layer (4), a first bonding layer (5), an ultra-sliding layer (6), a dielectric layer (7), a second electrode layer (8) and a supporting substrate (9); the piezoresistive layer (2) is evaporated on the first surface of the elastic cantilever beam (1), and the first electrode layer (3) is evaporated on the surface of the piezoresistive layer (2) and used for acquiring a normal electric signal through the resistance value of the current piezoresistive layer (2); the insulating layer (4) is evaporated on the second surface of the elastic cantilever beam (1), the first bonding layer (5) is evaporated on the surface of the insulating layer (4), and the first surface of the super-sliding layer (6) is bonded on the surface of the first bonding layer (5); A second electrode layer (8) is evaporated on the first surface of the supporting substrate (9), the first surface of the dielectric layer (7) is deposited on the first surface and the peripheral side surface of the second electrode layer (8), and the second surface of the super-slip layer (6) is contacted with the second surface of the dielectric layer (7) and used for sliding the super-slip layer (6) according to external shearing force so as to adjust the effective overlapping area of the super-slip layer (6) and the second electrode layer (8) and obtain shearing electric signals; And the periphery of the second surface of the dielectric layer (7) is provided with butt joint anchor points corresponding to the elastic cantilevers one by one, and each butt joint anchor point is respectively and elastically connected with one elastic cantilever and is used for being driven to recover by the elastic restoring force of the elastic cantilever beam (1) in the sliding process.
2. The multi-dimensional tactile sensing unit according to claim 1, wherein non-axiom contact is formed between the super-slip layer (6) and the dielectric layer (7), and the super-slip layer (6) is made of any one of single crystal graphite, graphene and hexagonal boron nitride.
3. The multi-dimensional tactile sensation sensing unit according to claim 1, characterized in that the total thickness of the super-slip layer (6) is not more than 200nm.
4. A multi-dimensional tactile sensing unit according to claim 1, characterized in that the roughness Ra of the dielectric layer (7) is less than 1nm.
5. The multi-dimensional tactile sensing unit according to claim 1, wherein the piezoresistive layer (2) is a single crystal silicon microstructure.
6. The multi-dimensional tactile sensor unit of claim 5 wherein said single crystal silicon microstructure is made of at least one of a single crystal silicon microbeam structure, a single crystal silicon thin film structure.
7. The multi-dimensional tactile sensation sensing unit according to claim 1, wherein the material of the insulating layer (4) is silicon dioxide.
8. The multi-dimensional tactile sensing unit according to claim 1, wherein the second electrode layer (8) is of a multi-electrode structure or of an asymmetric electrode structure, and is configured to present different change rules in the effective overlapping area between the super-slip layer (6) and the second electrode layer (8) under the action of shearing forces in different directions, so as to distinguish the direction and magnitude of the shearing forces.
9. A multi-dimensional force touch sensing system, which is characterized by being manufactured by integrating a multi-dimensional touch sensing unit, a signal conditioning circuit, an analog-to-digital conversion circuit and a data processing module according to any one of claims 1-8.
10. A method for manufacturing a multi-dimensional tactile sensation sensing unit according to any one of claims 1-8, wherein the method comprises: Providing a support substrate (9), and depositing a sacrificial layer on a first surface of the support substrate (9); Etching the sacrificial layer to define an anchoring position, and sputtering the etched surface of the sacrificial layer to form a seed layer; electroplating on the seed layer based on the anchoring position to form a first salient point and a fixed anchor point, and constructing an elastic cantilever beam (1) based on the first salient point and the fixed anchor point; evaporating and forming a piezoresistive layer (2) on the first surface of the elastic cantilever beam (1), and evaporating and forming a first electrode layer (3) on the surface of the piezoresistive layer (2); Removing the sacrificial layer, evaporating and forming an insulating layer (4) on the second surface of the elastic cantilever beam (1), evaporating and forming a first bonding layer (5) on the surface of the insulating layer (4), and bonding and assembling an ultra-sliding layer (6) to the first bonding layer (5) to obtain a dynamic sensing module; evaporating and forming a second electrode layer (8) on the first surface of the supporting substrate (9), and depositing and forming a dielectric layer (7) on the surface of the second electrode layer (8); Defining a butt joint area on the dielectric layer (7), electroplating to form a nickel electrode layer (10) in the butt joint area, and evaporating to form a second bonding layer (11) on the surface of the nickel electrode layer (10) to form a static sensing module; And bonding and assembling the dynamic sensing module and the static sensing module through the first bonding layer (5) and the second bonding layer (11) to obtain the multidimensional tactile sensing unit.

Description

Multidimensional tactile sensing unit, tactile sensing system and manufacturing method Technical Field The application relates to the technical field of tactile sensation, in particular to a multidimensional tactile sensation sensing unit, a tactile sensation sensing system and a manufacturing method. Background The touch sensing is used as a key technology in front application such as man-machine interaction, intelligent robots, smart hands, electronic skin and the like, and the key aim is to accurately and stably acquire multidimensional mechanical information in the contact process, in particular to the magnitude and the direction of normal force and shearing force. In complex operation tasks, such as grabbing a slippery object or performing fine micro assembly, the system not only needs to sense whether contact exists, but also needs to distinguish the action direction and dynamic change of external force in real time, which puts higher requirements on the decoupling capacity, response linearity and long-term stability of the sensor. The current mainstream multidimensional touch sensor mainly relies on flexible elastomer materials as sensitive media, such as PDMS (Polydimethylsiloxane) to realize the conversion of force and electric signals, but the method faces multiple challenges in practical application, namely, firstly, the elastomer materials have obvious mechanical hysteresis and creep characteristics, so that the output signals drift under repeated loading, and the consistency of measurement is difficult to ensure; Secondly, normal force and shearing force often cause composite strain of materials at the same time, so that two types of signals are highly coupled in a sensing unit, and high-precision decoupling is difficult to realize even if a multi-electrode array or a complex algorithm is adopted; In addition, under the continuous shearing action, the sensing interface is inevitably rubbed and worn, so that the surface morphology and the contact characteristic are changed, the performance degradation of the device is accelerated, and the reliability and the service life of the device in a high-frequency and long-period application scene are severely limited. In summary, the current mainstream scheme still has obvious defects in considering high sensitivity, multidimensional decoupling capability and service life. Disclosure of Invention In order to overcome the defects of the prior art, the application provides a multidimensional tactile sensing unit, a tactile sensing system and a manufacturing method, wherein the interface super-slip is used as a mechanical information carrier to be applied to tactile sensing, so that the sensing sensitivity, multidimensional decoupling capacity and sensing service life are improved. The technical scheme adopted for solving the technical problems is as follows: In a first aspect, the application provides a multidimensional tactile sensing unit, which comprises an elastic cantilever beam (1) provided with at least two elastic cantilevers, a piezoresistive layer (2) for adjusting a resistance value according to an external normal force, a first electrode layer (3), an insulating layer (4), a first bonding layer (5), an ultra-sliding layer (6), a dielectric layer (7), a second electrode layer (8) and a supporting substrate (9); the piezoresistive layer (2) is evaporated on the first surface of the elastic cantilever beam (1), and the first electrode layer (3) is evaporated on the surface of the piezoresistive layer (2) and used for acquiring a normal electric signal through the resistance value of the current piezoresistive layer (2); the insulating layer (4) is evaporated on the second surface of the elastic cantilever beam (1), the first bonding layer (5) is evaporated on the surface of the insulating layer (4), and the first surface of the super-sliding layer (6) is bonded on the surface of the first bonding layer (5); A second electrode layer (8) is evaporated on the first surface of the supporting substrate (9), the first surface of the dielectric layer (7) is deposited on the first surface and the peripheral side surface of the second electrode layer (8), and the second surface of the super-slip layer (6) is contacted with the second surface of the dielectric layer (7) and used for sliding the super-slip layer (6) according to external shearing force so as to adjust the effective overlapping area of the super-slip layer (6) and the second electrode layer (8) and obtain shearing electric signals; And the periphery of the second surface of the dielectric layer (7) is provided with butt joint anchor points corresponding to the elastic cantilevers one by one, and each butt joint anchor point is respectively and elastically connected with one elastic cantilever and is used for being driven to recover by the elastic restoring force of the elastic cantilever beam (1) in the sliding process. Optionally, non-axiom contact is formed between the super-slip layer (6)