CN-122016106-A - Multichannel micro-nano metal sintering pressure head pressure detection system and method

CN122016106ACN 122016106 ACN122016106 ACN 122016106ACN-122016106-A

Abstract

The invention relates to the field of pressure detection of pressure heads, in particular to a multichannel micro-nano metal sintering pressure head pressure detection system and method. The system comprises a plurality of pressure sensor groups, a voltage acquisition unit and a controller, wherein each pressure sensor group is provided with a plurality of pressure sensors, each pressure sensor is used for detecting the pressure of one pressure head of the micro-nano metal sintering die, each temperature sensor is used for detecting the ambient temperature of the pressure sensor, the voltage acquisition unit is used for acquiring the power supply bus voltage of the pressure sensor, and the controller is respectively connected with the pressure sensor groups, the temperature sensors and the voltage acquisition unit and is used for compensating the signals output by the pressure sensor based on the ambient temperature and the power supply bus voltage to obtain the pressure value of the pressure head. The pressure sensor is used for compensating the pressure of each acquired pressure head by combining the ambient temperature of the pressure sensor and the voltage of the power supply bus, and the problem that the prior art cannot detect each pressure head with high precision, high accuracy and high stability is solved.

Inventors

LOU JIANHUA
PU YUN
DING SHENJIN

Assignees

快克智能装备股份有限公司

Dates

Publication Date: 20260512
Application Date: 20260414

Claims (10)

1. A multi-channel micro-nano metal sintering pressure head pressure detection system is characterized in that, Comprising the following steps: A plurality of pressure sensor groups, each pressure sensor group is provided with a plurality of pressure sensors, and each pressure sensor is used for detecting the pressure of one pressure head of the micro-nano metal sintering die; the temperature sensor is used for detecting the ambient temperature of the pressure sensor; The voltage acquisition unit is used for acquiring the voltage of a power supply bus of the pressure sensor, wherein a power supply outside the environment where the pressure sensor is positioned is connected with the power supply bus in the environment where the pressure sensor is positioned through a lead, and the power supply bus is connected with each pressure sensor; and the controller is respectively connected with the pressure sensor group, the temperature sensor and the voltage acquisition unit and is used for compensating signals output by the pressure sensor based on the ambient temperature and the voltage of the power supply bus to obtain the pressure value of the pressure head.
2. The multi-channel micro-nano metal sintering head pressure detection system according to claim 1, wherein, The controller is connected with the pressure sensors through the grouping control unit so as to control each pressure sensor group to be powered in sequence through the grouping control unit and enable control on each pressure sensor channel.
3. The multi-channel micro-nano metal sintering head pressure detection system according to claim 2, wherein, The grouping control unit comprises a power supply grouping control circuit and a pressure sensor signal gating control circuit, wherein, The power supply grouping control circuit is connected between the power supply bus and each pressure sensor group and is configured to enable the power supply bus to sequentially supply power to each pressure sensor group under the control of the controller; the pressure sensor signal gating control circuit is connected to the output end of each pressure sensor and is used for outputting one path of pressure sensor signal at most at the same time.
4. The multi-channel micro-nano metal sintering head pressure detection system according to claim 3, wherein, The pressure sensor signal gating control circuit comprises a plurality of multiplexing switches and a plurality of cascaded shift registers for converting serial to parallel output, The signal output end of each pressure sensor is connected with the signal input end of the corresponding multiplexing switch; each shift register corresponds to one pressure sensor group, and all multiplexing switches connected with the pressure sensor group are used for enabling all multiplexing switches to gate one path of pressure sensor signals at the same time for outputting.
5. The multi-channel micro-nano metal sintering head pressure detection system according to claim 4, wherein, The power supply grouping control circuit comprises a plurality of MOS tubes, each MOS tube corresponds to one pressure sensor group, the source electrode and the drain electrode of each MOS tube are respectively connected with a power supply bus and the corresponding pressure sensor group, and the grid electrode is connected with one parallel output pin of the corresponding shift register.
6. The multi-channel micro-nano metal sintering head pressure detection system according to claim 4, wherein, The packet control unit further includes: The first signal conditioning circuit comprises a resistor R10 connected in series between a signal output end HC1DS of the controller and a data input end HC1DS of the first shift register, and a capacitor C13 with one end connected with the data input end HC1DS of the first shift register and the other end connected with the ground VSS; The second signal conditioning circuit comprises a resistor R12 connected in series between a clock output end STCP of the controller and latch clock ends STCP of all shift registers, and a capacitor C16 with one end connected with the latch clock ends STCP of all shift registers and the other end connected with the ground VSS; the third signal conditioning circuit includes a resistor R13 connected in series between the clock output SHCP of the controller and the shift clock terminals SHCP of all shift registers, and a capacitor C18 having one end connected to the shift clock terminals SHCP of all shift registers and the other end connected to the ground VSS.
7. The multi-channel micro-nano metal sintering head pressure detection system according to claim 6, wherein, The packet control unit further includes: the transient suppression circuit comprises transient suppression diodes D2, D3 and D4 which are respectively correspondingly connected between the output ends of the first signal conditioning circuit, the second signal conditioning circuit and the third signal conditioning circuit and the ground VSS.
8. The multi-channel micro-nano metal sintering head pressure detection system according to claim 1, wherein, The voltage acquisition unit comprises a resistor voltage dividing circuit, a voltage following circuit and two filter circuits, wherein, Two input ends of the resistor voltage dividing circuit are respectively connected with a power supply bus and VSS ground, and an output end of the resistor voltage dividing circuit is connected with an input end of the voltage follower circuit; The input end and the output end of the voltage follower circuit are respectively provided with a filter circuit.
9. A multi-channel micro-nano metal sintering pressure head pressure detection method is characterized in that, Based on the multichannel micro-nano metal sintering pressure head detection system as set forth in claim 1, the method includes: collecting output signals of all pressure sensors in turn ; Acquiring power supply bus voltage acquired by a voltage acquisition unit Ambient temperature of pressure sensor detected by temperature sensor ; By means of Calculating the pressure value of each pressure head Wherein, the method comprises the steps of, K mn is the pressure calibration coefficient of the nth pressure sensor of the mth pressure sensor group, V J is the power supply bus voltage recorded during pressure calibration, and X (T) is the sensor pressure offset coefficient corresponding to the ambient temperature T.
10. The method for detecting the pressure of the multi-channel micro-nano metal sintering head according to claim 9, wherein, Based on the multi-channel micro-nano metal sintering pressure head pressure detection system as set forth in any one of claims 2-7, sequentially collecting output signals of all pressure sensors The method specifically comprises the following steps: Step a, initializing m=1, n=1; Enabling the power supply of the mth pressure sensor group through the grouping control unit; step c, enabling the signal output of the nth pressure sensor in the mth pressure sensor group through the grouping control unit, and collecting the output signal of the pressure sensor after waiting for the signal to be stable ; Step d, let n=n+1, return to step c, until N is greater than the total number N of pressure sensors in the mth pressure sensor group; Step e, let m=m+1, return to step b until M is greater than the total number M of pressure sensor groups.

Description

Multichannel micro-nano metal sintering pressure head pressure detection system and method Technical Field The invention relates to the field of pressure detection of pressure heads, in particular to a multichannel micro-nano metal sintering pressure head pressure detection system and method. Background The micro-nano metal sintering technology has become a key interconnection technology for packaging power modules such as silicon carbide, gallium nitride and the like by virtue of excellent heat conduction and electric conduction performance and high-temperature service reliability. In the process, the sintering die is used for reliably connecting the power chip and the substrate through the sintering layer of nano metal particles (such as nano silver and nano copper) under the condition of pressurizing and heating. In order to meet the high efficiency requirement of multi-chip parallel packaging, the micro-nano metal sintering die is generally integrated with a plurality of independent pressure head units to form a pressure head array. In the sintering process, each pressure head unit needs to apply accurate and uniform pressure to the corresponding chip so as to ensure that the density of the sintered layer is consistent and the thickness is uniform, thereby ensuring the integral electrothermal performance and long-term reliability of the module. Currently, most sintering equipment in the market adopts an integral pressure detection and control method. That is, the total pressure applied by the entire mold is detected by only one total force sensor, and the pressurizing mechanism is controlled by total pressure feedback. The method can not acquire the actual pressure value of a single pressure head unit, and when a certain pressure head is blocked due to particulate matter pollution, mechanical clamping stagnation and the like, or an overpressure or an underpressure occurs to an individual pressure head due to the difference of chip thickness tolerance and substrate flatness, the system can not sense and identify in real time. This directly results in poor consistency of the sintering quality of the product, and in severe cases, can cause hidden defects such as chip cracking or sintered layer voids, and the defects are difficult to trace. Therefore, it is necessary to detect the multiple pressures separately. Prior art solutions exist in which a separate pressure sensor is provided for each ram unit. However, such schemes commonly employ passive resistive pressure sensors. Although the signal acquisition principle of the sensor is relatively simple and low in cost, the sensor has the obvious defects that firstly, the micro-nano metal sintering process environment is harsh, the temperature is high (generally up to 200-300 ℃) and frequent temperature rise and reduction cycles are involved, the temperature coefficient of resistance of the passive resistance sensor is high, the sensor is susceptible to temperature drift to cause obvious reduction of measurement accuracy, secondly, the sensor outputs weak signals, the signal conditioning circuit is required to be high, noise interference is easy to be introduced in long-line transmission of multipath signals, and the accuracy and stability of pressure detection are further reduced. Therefore, how to realize independent pressure detection of the multi-pressure head unit of the micro-nano metal sintering die and ensure high precision and high stability of a detection system is a technical problem to be solved by the technicians in the field. Disclosure of Invention The technical problem to be solved by the invention is to overcome the defects of the prior art, and provide a multichannel micro-nano metal sintering pressure head pressure detection system which combines the ambient temperature of a pressure sensor and the power supply voltage to compensate the pressure of each acquired pressure head, thereby solving the problem that the prior art cannot detect each pressure head with high precision, high accuracy and high stability. In order to solve the technical problems, the technical scheme of the invention is that the multichannel micro-nano metal sintering pressure head pressure detection system comprises: A plurality of pressure sensor groups, each pressure sensor group is provided with a plurality of pressure sensors, and each pressure sensor is used for detecting the pressure of one pressure head of the micro-nano metal sintering die; the temperature sensor is used for detecting the ambient temperature of the pressure sensor; The voltage acquisition unit is used for acquiring the voltage of a power supply bus of the pressure sensor, wherein a power supply outside the environment where the pressure sensor is positioned is connected with the power supply bus in the environment where the pressure sensor is positioned through a lead, and the power supply bus is connected with each pressure sensor; and the controller is respectively connected with the pressure