CN-122016136-A - Eddy current type force sensor

Abstract

The application provides an eddy current type force sensor, which comprises a signal acquisition circuit board and a metal structural member, wherein the signal acquisition circuit board is detachably connected with the metal structural member, a plurality of eddy current induction areas are formed between the signal acquisition circuit board and the metal structural member, the metal structural member is used for generating deformation under the action of force and driving the signal acquisition circuit board to generate displacement, the signal acquisition circuit board is used for generating and outputting sine wave signals corresponding to the eddy current induction areas when generating displacement, and the frequency of the sine wave signals is used for representing the six-dimensional component of the force so as to improve the acquisition precision of the eddy current type force sensor and reduce the cost of the eddy current type force sensor.

Inventors

• YANG FAN
• LI ZHENGMING
• XU XIONG

Assignees

• 节卡机器人股份有限公司

Dates

Publication Date

20260512

Application Date

20260212

Claims (10)

1. 1. The eddy current type force sensor is characterized by comprising a signal acquisition circuit board and a metal structural member; the signal acquisition circuit board is detachably connected with the metal structural part, and a plurality of eddy current induction areas are formed between the signal acquisition circuit board and the metal structural part; The metal structural member is used for generating deformation under the action of force and driving the signal acquisition circuit board to generate displacement; the signal acquisition circuit board is used for generating and outputting sine wave signals corresponding to the eddy current sensing areas when displacement is generated, and the frequency of the sine wave signals is used for representing the six-dimensional component of force.
2. 2. The eddy current force sensor of claim 1, wherein the signal acquisition circuit board comprises a first signal acquisition circuit board and a second signal acquisition circuit board; A plurality of first eddy current induction areas are formed between the first signal acquisition circuit board and the metal structural part; a plurality of second eddy current induction areas are formed between the second signal acquisition circuit board and the metal structural part; the first signal acquisition circuit board is used for generating and outputting first sine wave signals corresponding to each first eddy current induction area when displacement is generated, and the frequency of the first sine wave signals is used for representing three translation components of force; The second signal acquisition circuit board is used for generating and outputting second sine wave signals corresponding to each second eddy current sensing area when displacement is generated, and the frequency of the second sine wave signals is used for representing three rotation components of force.
3. 3. The eddy current force sensor of claim 2, wherein the first signal acquisition circuit board comprises a first signal acquisition circuit and a first planar coil; When an alternating current signal passes through the first plane coil, the first signal acquisition circuit board is used as a first polar plate, the metal structural part is used as a second polar plate, and the first signal acquisition circuit board and the metal structural part form a plurality of first equivalent inductors; The first signal acquisition circuit is used for acquiring the inductance variation of each first equivalent inductor when the first signal acquisition circuit board generates displacement, and generating and outputting a first sine wave signal corresponding to each first equivalent inductor according to the inductance variation of each first equivalent inductor.
4. 4. The eddy current force sensor of claim 2, wherein the second signal acquisition circuit board comprises a second signal acquisition circuit and a second planar coil; When an alternating current signal passes through the second plane coil, the second signal acquisition circuit board is used as a third polar plate, the metal structural member is used as a fourth polar plate, and the second signal acquisition circuit board and the metal structural member form a plurality of second equivalent inductors; The second signal acquisition circuit is used for acquiring the inductance variation of each second equivalent inductance when the second signal acquisition circuit board generates displacement, and generating and outputting second sine wave signals corresponding to each second equivalent inductance according to the inductance variation of each second equivalent inductance.
5. 5. The eddy current force sensor of claim 3, wherein the first signal acquisition circuit comprises a first amplification module and a first frequency selection module; The power supply end of the first amplifying module is connected with a power supply voltage, the input end of the first amplifying module is connected with the first output end of the first frequency selecting module, the first output end of the first amplifying module is connected with the input end of the first frequency selecting module, and the second output end of the first amplifying module is grounded; The second output end of the first frequency selecting module is grounded.
6. 6. The eddy current force sensor of claim 5, wherein the first signal acquisition circuit further comprises a first coupling module and a second coupling module; The input end of the first coupling module is connected with the first output end of the first frequency selection module, and the output end of the first coupling module is connected with the input end of the first amplifying module; the input end of the second coupling module is connected with the first output end of the first amplifying module, and the output end of the second coupling module is connected with the input end of the first frequency selecting module.
7. 7. The eddy current force sensor of claim 6, wherein the first amplification module comprises a first triode, a first resistor, a second resistor, a third resistor, a fourth resistor, and a first capacitor; The base electrode of the first triode is connected with the output end of the first coupling module, the first end of the first resistor and the first end of the second resistor, the collector electrode of the first triode is respectively connected with the first end of the fourth resistor and the input end of the second coupling module, and the emitter electrode of the first triode is respectively connected with one end of the third resistor and one end of the first capacitor; the second end of the first resistor is connected to the power supply voltage; The second end of the second resistor, the second end of the third resistor and the second end of the first capacitor are grounded.
8. 8. The eddy current force sensor of claim 6, wherein the first frequency selection module comprises a second capacitor, a third capacitor and a first inductor, wherein the first inductor is one of a plurality of first equivalent inductors formed by the first signal acquisition circuit board and the metal structural member; the first end of the second capacitor and the first end of the first inductor are connected with the output end of the second coupling module; A second end of the second capacitor and a first end of the third capacitor are grounded; The second end of the third capacitor and the second end of the first inductor are connected with the input end of the first coupling module.
9. 9. The eddy current force sensor of claim 6, wherein the first coupling module comprises a fourth capacitance; The first end of the fourth capacitor is connected with the first output end of the first frequency selection module; the second end of the fourth capacitor is connected with the input end of the first amplifying module.
10. 10. The eddy current force sensor of claim 6, wherein the second coupling module comprises a fifth capacitance; The first end of the fifth capacitor is connected with the first output end of the first amplifying module; and the second end of the fifth capacitor is connected with the input end of the first frequency selection module.

Description

Eddy current type force sensor Technical Field The application relates to the technical field of force sensors, in particular to an eddy current type force sensor. Background Along with the development trend that the robot and the environment are fused more and more tightly, the six-dimensional force sensor can more intelligently and safely interact with the environment and the human by providing feedback of force and moment with multiple dimensions, so that the reliability, adaptability and safety of the robot in complex tasks are remarkably improved. At present, the six-dimensional force sensor is mainly a strain gauge type six-dimensional force sensor, the strain gauge is required to be additionally used for completing force measurement requirements, the cost is increased, peristaltic drift of the resistance value of the strain gauge can occur under a static working condition, the accuracy can be maintained only by repeated calibration, and the maintenance cost is high. The resistance of the strain gage is also easily affected by the ambient temperature, the precision is lower in the complex ambient working condition, and a complex compensation circuit is needed to eliminate the temperature drift. Therefore, there is a limitation in the design of the six-dimensional force sensor in the prior art. Disclosure of Invention The application aims to overcome the defects in the prior art and provide an eddy current type force sensor so as to solve the problem of the practical need that the design of a six-dimensional force sensor in the prior art has certain limitation. In order to achieve the above purpose, the technical scheme adopted by the embodiment of the application is as follows: in a first aspect, an embodiment of the present application provides an eddy current force sensor, including a signal acquisition circuit board and a metal structural member; the signal acquisition circuit board is detachably connected with the metal structural part, and a plurality of eddy current induction areas are formed between the signal acquisition circuit board and the metal structural part; The metal structural member is used for generating deformation under the action of force and driving the signal acquisition circuit board to generate displacement; the signal acquisition circuit board is used for generating and outputting sine wave signals corresponding to the eddy current sensing areas when displacement is generated, and the frequency of the sine wave signals is used for representing the six-dimensional component of force. As an alternative implementation manner, the signal acquisition circuit board comprises a first signal acquisition circuit board and a second signal acquisition circuit board; A plurality of first eddy current induction areas are formed between the first signal acquisition circuit board and the metal structural part; a plurality of second eddy current induction areas are formed between the second signal acquisition circuit board and the metal structural part; the first signal acquisition circuit board is used for generating and outputting first sine wave signals corresponding to each first eddy current induction area when displacement is generated, and the frequency of the first sine wave signals is used for representing three translation components of force; The second signal acquisition circuit board is used for generating and outputting second sine wave signals corresponding to each second eddy current sensing area when displacement is generated, and the frequency of the second sine wave signals is used for representing three rotation components of force. As an alternative implementation manner, the first signal acquisition circuit board comprises a first signal acquisition circuit and a first planar coil; When an alternating current signal passes through the first plane coil, the first signal acquisition circuit board is used as a first polar plate, the metal structural part is used as a second polar plate, and the first signal acquisition circuit board and the metal structural part form a plurality of first equivalent inductors; The first signal acquisition circuit is used for acquiring the inductance variation of each first equivalent inductor when the first signal acquisition circuit board generates displacement, and generating and outputting a first sine wave signal corresponding to each first equivalent inductor according to the inductance variation of each first equivalent inductor. As an alternative implementation manner, the second signal acquisition circuit board comprises a second signal acquisition circuit and a second planar coil; When an alternating current signal passes through the second plane coil, the second signal acquisition circuit board is used as a third polar plate, the metal structural member is used as a fourth polar plate, and the second signal acquisition circuit board and the metal structural member form a plurality of second equivalent inductors; The second signal