CN-122016188-A - Sealing ring leakage self-checking system and method for vacuum sealing equipment

CN122016188ACN 122016188 ACN122016188 ACN 122016188ACN-122016188-A

Abstract

The invention relates to a seal ring leakage self-checking system and a seal ring leakage self-checking method of vacuum sealing equipment, wherein the seal ring leakage self-checking system comprises a detection unit and a control unit, the vacuum sealing equipment comprises a vacuum cavity, a sealing door, a main vacuum pump and at least two seal rings, the seal rings are arranged on one side of the sealing door facing the vacuum cavity, the two adjacent seal rings, the inner wall of the sealing door and the wall of the vacuum cavity are enclosed together to form a closed and independent detection cavity, the detection unit is communicated with the detection cavity, and the control unit is electrically connected with the detection unit and the vacuum sealing equipment, receives detection data of the detection unit and executes leakage judgment logic. The automatic detection device has the advantages that the active pre-detection of the sealing state of the sealing ring, the real-time monitoring in operation and the accurate positioning of the leakage point are realized, the fault detection time is obviously shortened, the equipment shutdown loss and the maintenance cost are reduced, and the automatic detection device is suitable for various vacuum sealing equipment such as PVD (physical vapor deposition) coating cavities, vacuum furnaces and the like.

Inventors

YAO SHUN
ZHAO CHANGXIN
YAO LIJUN
WANG YUCONG
SHEN DONGDONG

Assignees

浙江景昇薄膜科技有限公司
宁波江丰电子材料股份有限公司

Dates

Publication Date: 20260512
Application Date: 20260227

Claims (10)

1. A seal ring leakage self-checking system of vacuum sealing equipment is characterized by comprising a detection unit and a control unit, wherein the vacuum sealing equipment comprises a vacuum cavity, a sealing door, a main vacuum pump and at least two seal rings, the seal rings are arranged on one side of the sealing door facing the vacuum cavity, the two adjacent seal rings, the inner wall of the sealing door and the wall of the vacuum cavity are enclosed together to form a closed and independent detection cavity, the detection unit is communicated with the detection cavity, and the control unit is electrically connected with the detection unit and the vacuum sealing equipment, receives detection data of the detection unit and executes leakage judgment logic.
2. The seal ring leakage self-test system according to claim 1, wherein the detection unit comprises a vacuum gauge and a detection vacuum pump.
3. The seal ring leakage self-checking system according to claim 1 or 2, wherein a pressure range is preset in the control unit, and the control unit compares the detection data with the pressure range to output a leakage judgment result.
4. A seal ring leakage self-checking system according to any one of claims 1-3, wherein the vacuum cavity and the detection cavity are further provided with independent air release holes respectively, and an air release valve is arranged on each air release hole.
5. The seal ring leakage self-test system according to any one of claims 2 to 4, wherein the detection vacuum pump comprises any one of a vortex pump, a diaphragm pump, a micro dry pump, or an adsorption pump.
6. The seal ring leakage self-test system according to any one of claims 2-5, wherein the vacuum gauge comprises a pirani gauge or a capacitance diaphragm gauge.
7. The gasket leakage self-test system according to any one of claims 1 to 6, wherein the control unit comprises a programmable logic controller, an industrial computer, or an embedded system.
8. A seal ring leakage self-checking method using the seal ring leakage self-checking system according to any one of claims 1 to 7, wherein the seal ring leakage self-checking method comprises door closing pre-checking and real-time detection in operation.
9. The seal ring leakage self-test method according to claim 8, wherein the door closing pre-test comprises: (1) Before the vacuum sealing equipment operates, a sealing door is closed to form a detection cavity, and the detection cavity is vacuumized and pressure detected by a detection unit; (2) And judging leakage, judging that the sealing ring is well sealed when the pressure falls into a preset pressure range, normally starting the equipment, judging that the sealing ring is leaked when the pressure is larger than the preset pressure range, and giving an alarm.
10. The seal ring leakage self-test method according to claim 8, wherein the running real-time detection comprises: (1) The real-time pressure detection is carried out on the detection cavity in the operation of the vacuum sealing equipment; (2) And judging leakage, namely judging that the sealing ring is sealed well when the pressure falls into a preset pressure range, judging that the inner ring sealing ring is leaked when the pressure is smaller than the preset pressure range, giving an alarm, and judging that the outer ring sealing ring is leaked when the pressure is larger than the preset pressure range, giving an alarm.

Description

Sealing ring leakage self-checking system and method for vacuum sealing equipment Technical Field The invention relates to the technical field of vacuum sealing equipment, in particular to a sealing ring leakage self-checking system and method of vacuum sealing equipment. Background In the fields of semiconductors, optical coating, vacuum heat treatment and the like, the sealing performance of vacuum equipment is the key of technological success and failure. Currently, the door seal of the vacuum cavity is commonly sealed by adopting a single-channel or double-channel O-shaped ring. Its tightness monitoring is entirely dependent on the vacuum gauge monitoring the main cavity. Only when the leakage is large enough to affect the vacuum of the main cavity will it be perceived. The method for monitoring the sheep in the method cannot meet the requirements of modern industry on high efficiency and pre-maintenance. An inner sealing ring and an outer sealing ring are arranged on the sealing door, and the sealing reliability is improved. When one sealing ring fails, the other sealing ring can still play a role of sealing, and is used as a safety redundancy. Although the double seal ring provides redundancy, it does not have diagnostic functionality. The sealing state cannot be predicted before the equipment is started, and leakage can be found only after the equipment is vacuumized to a certain degree through abnormal readings of the main vacuum gauge, so that production cycle delay and material waste are caused. When a leak is found, it cannot be quickly determined whether the inside or outside seal ring fails, and even whether it is a seal ring problem cannot be determined. Maintenance personnel need to adopt modes such as complicated helium mass spectrum leak hunting or sectional smearing leak hunting liquid to check one by one, and fault diagnosis time is long, and equipment shutdown loss is big. In the prior art, the problems of delay in leakage discovery and difficult positioning of leakage points exist, so that the problems of active pre-detection of the sealing state of a sealing ring of vacuum sealing equipment, real-time monitoring of leakage in operation and accurate positioning of the leakage points are solved, production delay and material waste caused by the operation of equipment with diseases are avoided, the fault diagnosis time is shortened, and the shutdown loss of the equipment is reduced, and the problems to be solved are urgently needed at present. Disclosure of Invention In order to solve the technical problems, the invention realizes the active pre-detection of the sealing state of the sealing ring of the vacuum sealing equipment, the real-time monitoring in operation and the accurate positioning of the leakage point by constructing the detection cavity and combining the synergistic effect of the detection unit and the control unit, effectively solves the problems of delay in leakage discovery and difficult positioning of the leakage point in the prior art, avoids production delay and material waste caused by operation when the equipment is primarily leaked, shortens the fault diagnosis time, and reduces the equipment shutdown loss and maintenance cost. To achieve the purpose, the invention adopts the following technical scheme: The invention provides a seal ring leakage self-checking system of vacuum sealing equipment, which comprises a detection unit and a control unit, wherein the vacuum sealing equipment comprises a vacuum cavity, a sealing door, a main vacuum pump and at least two seal rings, the seal rings are arranged on one side of the sealing door facing the vacuum cavity, the two adjacent seal rings, the inner wall of the sealing door and the wall of the vacuum cavity are enclosed together to form a closed and independent detection cavity, the detection unit is communicated with the detection cavity, and the control unit is electrically connected with the detection unit and the vacuum sealing equipment, receives detection data of the detection unit and executes leakage judgment logic. According to the invention, the detection cavity is formed by two adjacent sealing rings, the pressure in the detection cavity is monitored by the vacuum gauge of the detection unit, whether leakage occurs or not is judged by the pressure value, and the leakage condition of the sealing rings can be detected before and during the operation of the equipment by the position of the leakage point on the sealing ring. The following is a preferred technical scheme of the present invention, but not a limitation of the technical scheme provided by the present invention, and the following preferred technical scheme can better achieve and achieve the objects and advantages of the present invention. As a preferable technical scheme of the invention, the detection unit comprises a vacuum gauge and a detection vacuum pump. The invention vacuumizes the detection cavity through the detection vacuum pump, simultaneous