CN-122016245-A - Method, system and computer program product for detecting performance of optical element

CN122016245ACN 122016245 ACN122016245 ACN 122016245ACN-122016245-A

Abstract

The invention relates to the technical field of lens performance detection, in particular to a performance detection method, a system and a computer program product of an optical element, wherein the method comprises the following steps of carrying out field scanning shooting on a sample placed at a measuring position and irradiated by a light source based on preset field scanning parameters so as to acquire image data of the sample at different field scanning positions; selecting a target area from the image data, performing a scan field superposition processing on the image data of the target area to generate a scan field superposition graph, and determining the performance parameters of the sample based on the scan field superposition graph. The invention can sweep the field of the sample, and then carries out the sweep superimposed graph and the focusing plane display on the image data of the sample obtained by the sweep, thereby realizing the automatic analysis aiming at the micro lens and realizing the digitization, standardization and traceability of the measurement process.

Inventors

ZHANG XIAOJUN
LU YUANDA
YIN HAIWEI

Assignees

上海复享光学股份有限公司

Dates

Publication Date: 20260512
Application Date: 20260107

Claims (10)

1. A method of detecting performance of an optical element, the method comprising: Based on preset sweeping parameters, carrying out sweeping shooting on a sample placed at a measuring position and irradiated by a light source so as to acquire image data of the sample at different sweeping positions; Selecting a target area from the image data, and performing a scan superposition process on the image data of the target area to generate a scan superposition graph; And determining the performance parameters of the sample based on the sweep field superposition map.
2. The method for detecting the performance of an optical element according to claim 1, further comprising: Determining a focusing position of the sample based on the scan field superposition graph, and further determining a focusing plane of the sample; And/or the number of the groups of groups, Displaying at least one of image data of the sample, a generation process of the scan field overlay, and a focal plane of the sample in real time.
3. The method for detecting the performance of an optical element according to claim 1, wherein the set scan parameters include a movement range of the sample in the Z-axis direction and a movement step size; And/or the number of the groups of groups, The selecting a target area from the image data comprises the steps of drawing a selection frame capable of enclosing a bright spot on the displayed image data of the sample, designating a straight line path in the selection frame, acquiring coordinate sets of all pixel points forming the straight line path, and taking an area corresponding to the coordinate sets as the target area; And/or the number of the groups of groups, The method for scanning the sample based on the preset scanning parameters to acquire the image data of the sample at different scanning positions comprises the steps of controlling the image acquisition device to generate relative movement with the sample based on the preset scanning parameters to execute scanning shooting so as to acquire the image data of the sample at different scanning positions.
4. A method of detecting performance of an optical element, the method comprising: Image acquisition is carried out on a sample placed at a measuring position and irradiated by a light source, so as to obtain original image data of the sample; Removing the sample and keeping the illumination of the light source for image acquisition to obtain light source image data; Removing the sample, and closing the light source to acquire images to obtain background image data; A performance parameter of the sample is determined based on the image data, the light source image data, and the background image data.
5. The method for detecting the performance of an optical element according to claim 4, further comprising: image acquisition is carried out on a sample, and reference image data of the sample are obtained; performing Fourier transform on the reference image data to generate a spatial spectrogram of the sample; adjusting the position of the sample based on a sharpness of the spatial spectrogram, the sharpness characterized by quantifying high frequency component intensities or edge sharpness of the spatial spectrogram; and (3) through iterative adjustment, determining the spatial position of the sample at the moment as a measurement position until the definition reaches an optimal value.
6. A computer program product comprising computer instructions or a computer program, at least part of which, when executed by a processor, is capable of implementing a method of performance detection or a method of phase analysis of an optical element according to any one of claims 1 to 5.
7. A performance inspection system for an optical element, the system comprising: The sweeping parameter setting unit is used for setting sweeping parameters; The scanning control unit is connected with the scanning parameter setting unit and is used for carrying out scanning shooting on the sample placed at the measuring position and irradiated by the light source according to the set scanning parameters so as to obtain image data of the sample at different scanning positions; and the field distribution calculation unit is connected with the field sweeping control unit and is used for selecting a target area in the image data, carrying out field sweeping superposition processing on the image data of the target area to generate a field sweeping superposition graph, and determining the performance parameters of the sample based on the field sweeping superposition graph.
8. The system of claim 7, wherein the field distribution calculation unit is further configured to determine a focal position of the sample based on the swept field overlay, thereby determining a focal plane of the sample; And/or the number of the groups of groups, The device also comprises a display unit connected with the scan field control unit and the field distribution calculation unit and used for displaying at least one of image data of the sample, a generation process of the scan field superposition graph and a focusing plane of the sample in real time.
9. The system for detecting the performance of an optical element according to claim 7, wherein the scan parameters set by the scan parameter setting unit include a movement range of the sample in the Z-axis direction and a movement step size; And/or the number of the groups of groups, The input unit is connected with the field distribution calculation unit; the input unit is used for inputting a selection frame which is drawn on the displayed image data of the sample and can enclose a bright spot; The field distribution calculation unit is used for designating a straight line path in the selection frame, acquiring coordinate sets of all pixel points forming the straight line path, and taking a region corresponding to the coordinate sets as the target region; And/or the number of the groups of groups, The scanning control unit is used for controlling the image acquisition device and the sample to generate relative movement based on the preset scanning parameters so as to execute scanning shooting, thereby acquiring image data of the sample at different scanning positions.
10. A performance inspection system for an optical element, the system comprising: The device comprises a scanning field control unit, a background image data acquisition unit and a scanning field control unit, wherein the scanning field control unit is used for carrying out image acquisition on a sample placed at a measuring position and irradiated by a light source to obtain original image data of the sample; And the optical parameter performance calculation unit is connected with the sweeping control unit and is used for determining the performance parameters of the sample based on the image data, the light source image data and the background image data.

Description

Method, system and computer program product for detecting performance of optical element Technical Field The invention relates to the technical field of lens performance detection, in particular to a performance detection method, a system and a computer program product of an optical element. Background The micro lens is widely applied to the fields of photoelectron, imaging, communication and the like, and the optical performance of the micro lens directly influences the quality of a system. Along with the development of miniaturization and integration of devices, the requirements on measurement precision, efficiency and intellectualization are increasingly improved. The existing measurement is dependent on traditional instruments and manual operation, the flow is solidified, the existing measurement has low efficiency and poor repeatability, is easily affected by human errors, and is difficult to realize systematic analysis and quality tracing due to scattered measurement data. For batch devices such as micro lens arrays, the traditional method is complex in assembly and difficult to debug, and cannot meet the requirements of on-line detection and intelligent manufacturing. Therefore, the prior art has obvious defects in precision, efficiency and automation, and a scheme capable of realizing intelligent, efficient and high-precision measurement of the optical performance of the micro lens is urgently needed. Disclosure of Invention The invention aims to overcome the defects of the prior art, provides a performance detection method, a system and a computer program product of an optical element, and solves the problems that the existing manual measurement is low in efficiency, poor in repeatability, easy to be influenced by human errors, difficult to realize systematic analysis and quality tracing, complicated in assembly, difficult to debug, incapable of meeting the requirements of on-line detection and intelligent manufacturing and the like. The technical scheme for achieving the purpose is as follows: The invention provides a performance detection method of an optical element, which comprises the following steps: Based on preset sweeping parameters, carrying out sweeping shooting on a sample placed at a measuring position and irradiated by a light source so as to acquire image data of the sample at different sweeping positions; selecting a target area from the image data, and performing a scan field superposition process on the image data of the target area to generate a scan field superposition graph; And determining the performance parameters of the sample based on the sweep-field overlay. The further improvement of the performance detection method of the optical element is that the method further comprises the following steps: Determining a focusing position of the sample based on the scan field superposition graph, and further determining a focusing plane of the sample; And/or the number of the groups of groups, At least one of image data of the sample, a generation process of the scan field overlay, and a focal plane of the sample is displayed in real time. The invention further improves the performance detection method of the optical element in that the set sweeping field parameters comprise the moving range of the sample in the Z-axis direction and the moving step length; And/or the number of the groups of groups, Selecting a target area from the image data, wherein the selecting frame capable of enclosing a bright spot is drawn on the displayed image data of the sample; And/or the number of the groups of groups, The method comprises the steps of controlling the image acquisition device to generate relative movement between the image acquisition device and the sample based on preset sweeping parameters so as to execute sweeping shooting, thereby acquiring image data of the sample at different sweeping positions. The invention also provides a performance detection method of the optical element, which comprises the following steps: Image acquisition is carried out on a sample placed at a measuring position and irradiated by a light source, so as to obtain original image data of the sample; removing the sample and keeping the illumination of the light source for image acquisition to obtain light source image data; removing the sample, and turning off the light source to perform image acquisition to obtain background image data; a performance parameter of the sample is determined based on the image data, the light source image data, and the background image data. The further improvement of the performance detection method of the optical element is that the method further comprises the following steps: Image acquisition is carried out on the sample, and reference image data of the sample are obtained; performing Fourier transform on the reference image data to generate a spatial spectrogram of the sample; adjusting the position of the sample based on the sharpness of the spatial spectrogram, the sharpne