CN-122016257-A - TFT/OLED panel defect detection method, system and medium

CN122016257ACN 122016257 ACN122016257 ACN 122016257ACN-122016257-A

Abstract

The application relates to the technical field of TFT/OLED detection and discloses a method, a system and a medium for detecting defects of a TFT/OLED panel, wherein the system comprises a light source irradiation module for irradiating the TFT/OLED panel to be detected; the method comprises the steps of a first acquisition module for initial image, an illumination optimization module for positioning bubble defect candidate areas, a second acquisition module for adjusting adjustable light sources of multi-wavelength channels to acquire multi-spectrum multi-polarization images, an image processing module for orthogonal polarization filtering processing, a candidate area identification module for generating bubble feature data, and a defect judgment module for judging the existence state of bubble defects in a TFT/OLED panel to be detected. According to the application, the light energy is reasonably distributed according to the actual requirements of defects, invalid strong light irradiation is avoided, and the detection efficiency of the whole process is improved.

Inventors

YANG YEBO
SUN QIBING
GUO HAO
HU XIAOFENG
OU CHENGGANG
GONG ZHENG
JIANG HAN
LIU QIANKUN

Assignees

广东仁恩宇光电技术有限公司

Dates

Publication Date: 20260512
Application Date: 20260326

Claims (10)

1. A TFT/OLED panel defect detection system, comprising: the light source irradiation module is used for irradiating the TFT/OLED panel to be detected through the adjustable light source of the multi-wavelength channel according to the initial illumination parameters; The first acquisition module is used for acquiring an initial image of the TFT/OLED panel to be detected under the irradiation of the adjustable light source; The illumination optimization module is used for positioning a bubble defect candidate region according to the initial image, extracting scattering intensity distribution data and polarization response characteristics of each wavelength channel based on the bubble defect candidate region, determining the scattering intensity contrast ratio and the polarization extinction ratio of each wavelength channel based on the scattering intensity distribution data and the polarization response characteristics, and generating a channel contribution analysis result; The second acquisition module is used for adjusting the adjustable light source of the multi-wavelength channel according to the illumination optimization instruction, irradiating the TFT/OLED panel to be detected according to the adjusted adjustable light source, and acquiring multispectral multi-polarization images; The image processing module is used for carrying out orthogonal polarization filtering processing according to the multispectral multi-polarization image, identifying candidate areas and generating bubble characteristic data; And the defect judging module is used for judging the existence state of the bubble defect in the TFT/OLED panel to be detected according to the bubble characteristic data and outputting a detection result.
2. The TFT/OLED panel defect detection system of claim 1, wherein the illumination optimization module extracts scattering intensity distribution data and polarization response characteristics for each wavelength channel, comprising: carrying out pixel intensity statistics on the image data of the bubble defect candidate region under each wavelength channel, determining the average intensity value and the intensity discrete degree in the bubble defect candidate region, and generating scattering intensity distribution data; And acquiring image intensity data of the bubble defect candidate region under parallel polarization configuration and image intensity data under orthogonal polarization configuration, determining a difference value of image intensities under the two polarization configurations, and generating polarization response characteristics.
3. The TFT/OLED panel defect detection system of claim 2, wherein when the illumination optimization module generates channel contribution analysis results, comprising: determining a difference value between the average intensity value of the bubble defect candidate region and the average intensity value of the adjacent background region based on the scattering intensity distribution data, and determining a ratio of the difference value to the average intensity value of the background region as a scattering intensity contrast; Determining the ratio of the image intensity data in the parallel polarization configuration to the image intensity data in the orthogonal polarization configuration as a polarization extinction ratio based on the polarization response characteristics; And according to the scattering intensity contrast ratio and the polarization extinction ratio, carrying out quantitative sequencing on the detection contribution capacity of each wavelength channel, and generating a channel contribution analysis result.
4. The TFT/OLED panel defect detection system of claim 3, wherein the illumination optimization module, when determining the optimal light intensity parameter and polarization angle parameter for each wavelength channel, comprises: Marking wavelength channels with scattering intensity contrast larger than a contrast threshold and polarization extinction ratio smaller than an extinction ratio threshold as high-contribution channels, distributing first light intensity parameters for the high-contribution channels and distributing second light intensity parameters for other wavelength channels, wherein the first light intensity parameters are larger than the second light intensity parameters; And determining the polarization angle parameters of each wavelength channel according to the polarization extinction ratio and the scattering intensity contrast ratio corresponding to each wavelength channel.
5. The TFT/OLED panel defect detection system of claim 1, wherein when the image processing module generates bubble characterization data, comprising: Performing pixel-level difference operation on a parallel polarization configuration image and an orthogonal polarization configuration image in the multispectral image to generate a scattering enhancement image, extracting continuous closed areas through self-adaptive threshold segmentation and morphological closing operation based on the scattering enhancement image to generate a candidate area set, and calculating annular highlight intensity ratio and internal gray standard deviation of each area in the candidate area set to generate bubble feature data.
6. The TFT/OLED panel defect detection system of claim 1, wherein when the defect determination module determines the presence of a bubble defect in the TFT/OLED panel to be detected, comprising: The bubble characteristic data comprise an annular highlight intensity ratio and an internal gray scale standard deviation; And when the annular highlighting intensity ratio is larger than the annular characteristic threshold value and the internal gray standard deviation is smaller than the uniformity threshold value, judging that the current candidate region is a bubble defect.
7. The TFT/OLED panel defect detection system of claim 1, wherein the light source illumination module, when illuminating the TFT/OLED panel to be detected with a multi-wavelength channel tunable light source, comprises: acquiring initial illumination parameters, wherein the initial illumination parameters comprise initial light intensity set values and initial polarization angle set values of all wavelength channels; and each LED light source in the multi-wavelength channel adjustable light source independently outputs a corresponding initial light intensity set value, and drives the polarization adjusting unit to rotate to a corresponding initial polarization angle set value so as to irradiate the TFT/OLED panel to be detected.
8. The TFT/OLED panel defect detection system of claim 1, wherein the second acquisition module, when acquiring the multispectral multi-polarization image, comprises: and acquiring a single frame of image, and performing associated storage to generate a multispectral multi-polarization image data set.
9. A TFT/OLED panel defect detection method applied to the TFT/OLED panel defect detection system as claimed in any one of claims 1 to 8, comprising: according to the initial illumination parameters, the TFT/OLED panel to be detected is irradiated through an adjustable light source of a multi-wavelength channel; collecting an initial image of a TFT/OLED panel to be detected under the irradiation of an adjustable light source; based on the bubble defect candidate region, scattering intensity distribution data and polarization response characteristics under each wavelength channel are extracted, the scattering intensity contrast ratio and the polarization extinction ratio of each wavelength channel are determined based on the scattering intensity distribution data and the polarization response characteristics, and a channel contribution analysis result is generated; according to the adjustable light source after adjustment irradiates the TFT/OLED panel to be detected, and multispectral multi-polarization images are collected; carrying out orthogonal polarization filtering treatment according to the multispectral multi-polarization image, identifying candidate areas and generating bubble characteristic data; And judging the existence state of the bubble defect in the TFT/OLED panel to be detected according to the bubble characteristic data, and outputting a detection result.
10. A computer readable storage medium having instructions stored thereon, which when executed by a processor, implement the TFT/OLED panel defect detection system of any one of claims 1 to 8.

Description

TFT/OLED panel defect detection method, system and medium Technical Field The invention relates to the technical field of TFT/OLED detection, in particular to a TFT/OLED panel defect detection method, a TFT/OLED panel defect detection system and a TFT/OLED panel defect detection medium. Background In the precise manufacturing process of the TFT/OLED panel, bubble defects (such as air gaps at the interface of the package layer, micro bubbles at the pixel layer, etc.) are key hidden dangers affecting the reliability and display quality of the product. Such defects are typically small in size, very low in optical contrast, and highly coupled in scattering properties with panel inherent structures (e.g., metal wire specular reflection, pixel array periodic texture, color filter spectral interference), resulting in serious challenges for automated optical inspection. The current mainstream detection system in industry mostly adopts an optical imaging scheme with fixed parameters, namely, a light source module irradiates a panel with a preset wavelength combination and a fixed polarization angle, and an image acquisition unit acquires a single-mode reflection/transmission image and then performs defect identification by means of a post-processing algorithm. The prior detection technology generally adopts fixed illumination parameters and unidirectional acquisition-post-processing flow, is difficult to dynamically adapt to the specific scattering and polarization optical response of bubble defects, cannot adaptively optimize illumination conditions along with defect characteristics, so that key signals are hidden by panel structure interference at the early stage of imaging, single spectrum or polarization mode image data has insufficient dimensionality, so that defects, textures, light reflection and other background characteristics are difficult to effectively separate, an image processing link and optical acquisition lack of collaborative design, the feature extraction signal-to-noise ratio is low, the judgment basis is fuzzy, and the high-reliability property management and control requirement of a high-end TFT/OLED panel is difficult to meet. Therefore, there is a need to design a method, system and medium for detecting defects of a TFT/OLED panel to solve the problems in the prior art. Disclosure of Invention In view of the above, the invention provides a method, a system and a medium for detecting defects of a TFT/OLED panel, which aim to solve the problems that dynamic adaptation is difficult to be carried out on specific scattering and polarization optical response of bubble defects, illumination conditions cannot be optimized along with defect characteristics in a self-adaptive manner, and defects are difficult to be effectively separated from background characteristics such as textures, light reflection and the like. In a first aspect, the present invention provides a TFT/OLED panel defect detection system, including: the light source irradiation module is used for irradiating the TFT/OLED panel to be detected through the adjustable light source of the multi-wavelength channel according to the initial illumination parameters; The first acquisition module is used for acquiring an initial image of the TFT/OLED panel to be detected under the irradiation of the adjustable light source; The illumination optimization module is used for positioning a bubble defect candidate region according to the initial image, extracting scattering intensity distribution data and polarization response characteristics of each wavelength channel based on the bubble defect candidate region, determining the scattering intensity contrast ratio and the polarization extinction ratio of each wavelength channel based on the scattering intensity distribution data and the polarization response characteristics, and generating a channel contribution analysis result; The second acquisition module is used for adjusting the adjustable light source of the multi-wavelength channel according to the illumination optimization instruction, irradiating the TFT/OLED panel to be detected according to the adjusted adjustable light source, and acquiring multispectral multi-polarization images; The image processing module is used for carrying out orthogonal polarization filtering processing according to the multispectral multi-polarization image, identifying candidate areas and generating bubble characteristic data; And the defect judging module is used for judging the existence state of the bubble defect in the TFT/OLED panel to be detected according to the bubble characteristic data and outputting a detection result. Further, when the illumination optimization module extracts scattering intensity distribution data and polarization response characteristics under each wavelength channel, the illumination optimization module includes: carrying out pixel intensity statistics on the image data of the bubble defect candidate region under each wavelength ch