CN-122016261-A - Method and equipment for measuring optical parameters of functional metal glass

CN122016261ACN 122016261 ACN122016261 ACN 122016261ACN-122016261-A

Abstract

The invention relates to the technical field of optical parameter analysis, in particular to an optical parameter measurement method and equipment for functional metal glass, which solve the technical problems that in the prior art, due to periodic texture diffraction and process rheological deformation of the molding surface of the functional metal glass, the measurement of intrinsic optical parameters of a material is out of alignment, and the process rheological state parameters cannot be obtained. The method comprises the steps of obtaining a multi-angle reflectivity data set of the surface of the metal glass element to be tested, separating a strong diffraction spectrum and a weak diffraction spectrum according to the multi-angle reflectivity data set, determining diffraction residual ratio, determining geometric deformation parameters of the surface of the metal glass element to be tested according to the strong diffraction spectrum, constructing simulated diffraction waveforms according to the geometric deformation parameters, and determining intrinsic optical parameters of the metal glass according to the weak diffraction spectrum, the diffraction residual ratio and the simulated diffraction waveforms.

Inventors

LI BOQIONG
CHENG PENG
LI YANG
Zhang Tianlv
ZHAO ZHE
XUE ZHENJIANG

Assignees

晋中学院

Dates

Publication Date: 20260512
Application Date: 20260415

Claims (10)

1. A method for measuring optical parameters of a functional metallic glass, comprising: Acquiring a multi-angle reflectivity data set of the surface of a functional metal glass element to be tested; separating a strong diffraction spectrum and a weak diffraction spectrum according to the multi-angle reflectivity data set, and determining a diffraction residual ratio, wherein the strong diffraction spectrum is the reflectivity spectrum with the largest standard deviation of spectrum intensity in the multi-angle reflectivity data set, and the weak diffraction spectrum is the reflectivity spectrum with the smallest standard deviation of spectrum intensity in the multi-angle reflectivity data set; determining geometric deformation parameters of the surface of the functional metal glass element to be detected according to the Jiang Yanshe spectrum, and constructing a simulated diffraction waveform according to the geometric deformation parameters, wherein the geometric deformation parameters are used for quantifying the size and the shape change of the surface periodic structure caused by a compression molding process, and the simulated diffraction waveform is used for representing diffraction energy distribution caused by the surface periodic structure only; and determining the intrinsic optical parameters of the functional metallic glass according to the weak diffraction spectrum, the diffraction residual ratio and the simulated diffraction waveform.
2. The method for measuring optical parameters of a functional metallic glass according to claim 1, wherein the separation of the strong diffraction spectrum and the weak diffraction spectrum and the determination of the diffraction residual ratio comprises: determining the standard deviation of the spectral intensity of the reflectivity spectrum corresponding to each azimuth in the multi-angle reflectivity dataset; Determining a reflectance spectrum corresponding to the maximum spectral intensity standard deviation in the multi-angle reflectance dataset as the Jiang Yanshe spectrum; determining a reflectance spectrum corresponding to the minimum spectrum intensity standard deviation in the multi-angle reflectance dataset as the weak diffraction spectrum; And determining the diffraction residual ratio according to the ratio of the minimum spectrum intensity standard deviation to the maximum spectrum intensity standard deviation.
3. The method according to claim 1, wherein the geometric deformation parameters comprise a period reduction rate and a waveform deflection factor, wherein the period reduction rate is used for representing the whole size shrinkage degree of the surface periodic structure, and the waveform deflection factor is used for representing the shape asymmetry degree of a single periodic unit of the surface periodic structure; according to the Jiang Yanshe spectrum, determining geometric deformation parameters of the surface of the functional metallic glass element to be detected, including: Determining a theoretical trough position set according to a preset die period value or period information extracted from the strong diffraction spectrum; extracting an actual measurement trough position set from the strong diffraction spectrum; Establishing a mapping relation between the actual measured trough position and the theoretical trough position in a mode of minimizing the overall matching deviation between the actual measured trough position set and the theoretical trough position set; Determining the period reduction rate according to the ratio of the matched actual measurement trough position to the theoretical trough position in the mapping relation; And determining the waveform deflection factor according to the left half width difference and the right half width difference of the actually measured trough corresponding to the mapping relation in the strong diffraction spectrum.
4. The method for measuring optical parameters of functional metallic glass as set forth in claim 3, wherein determining the set of theoretical trough positions based on the preset value of the mold cycle comprises: And determining theoretical wavelengths of the multilevel diffraction wave troughs appearing in a preset wavelength range based on a grating diffraction relation according to the preset value of the die period and a fixed incident angle adopted during measurement, and forming the theoretical wave trough position set.
5. The method for measuring optical parameters of a functional metallic glass according to claim 3, wherein determining the waveform skew factor based on a difference in left and right half-widths of actually measured valleys in the strong diffraction spectrum corresponding to the mapping relation comprises: for each actually measured trough in the mapping relation, determining the corresponding wavelength when the intensity of the left side and the right side of the center position of the actually measured trough is raised to half of the trough depth on the strong diffraction spectrum; And determining a waveform skew factor corresponding to the actually measured trough according to the difference between the right wavelength and the center wavelength and the difference between the center wavelength and the left wavelength and the ratio of the left total bandwidth and the right total bandwidth of the actually measured trough.
6. The method for measuring optical parameters of functional metallic glass according to claim 3, wherein constructing a simulated diffraction waveform from the geometric deformation parameters comprises: Constructing a plurality of unimodal contour functions according to the position and depth of the actually measured wave trough and the corresponding waveform deflection factors in the mapping relation, wherein the line width of each unimodal contour function is modulated by the full wave width of the corresponding actually measured wave trough and the waveform deflection factors; And superposing the constructed multiple unimodal profile functions to generate the simulated diffraction waveform.
7. The method for measuring an optical parameter of a functional metallic glass according to claim 6, wherein determining an intrinsic optical parameter of the functional metallic glass from the weak diffraction spectrum, the diffraction residual ratio, and the simulated diffraction waveform comprises: Determining a corrected reflectance spectrum from a weighted sum of the weak diffraction spectrum, the diffraction residual ratio, and the simulated diffraction waveform; And fitting by using an amorphous dispersion model according to the corrected reflection spectrum, and determining the refractive index and the extinction coefficient of the functional metal glass as the intrinsic optical parameters.
8. The method for measuring an optical parameter of a functional metallic glass according to claim 7, further comprising: And generating forming quality evaluation information of the to-be-tested functional metallic glass element according to at least one of the period reduction rate, the waveform deflection factor and the intrinsic optical parameter.
9. The method for measuring optical parameters of a functional metallic glass according to claim 1, wherein obtaining a multi-angle reflectance dataset of a surface of a functional metallic glass element to be measured comprises: And rotating the to-be-detected functional metallic glass element around the surface normal direction under the condition of a fixed incidence angle, and collecting the reflectivity spectrum of the surface in a preset wavelength range at a plurality of continuous or discrete azimuth positions to form the multi-angle reflectivity data set.
10. An optical parameter measurement apparatus for a functional metallic glass, comprising: the data acquisition unit is used for acquiring a multi-angle reflectivity data set of the surface of the metal glass element to be tested; The signal separation unit is used for separating a strong diffraction spectrum and a weak diffraction spectrum according to the multi-angle reflectivity data set and determining a diffraction residual ratio, wherein the strong diffraction spectrum is the reflectivity spectrum with the largest standard deviation of spectrum intensity in the multi-angle reflectivity data set, and the weak diffraction spectrum is the reflectivity spectrum with the smallest standard deviation of spectrum intensity in the multi-angle reflectivity data set; The geometric modeling unit is used for determining geometric deformation parameters of the surface of the functional metal glass element to be detected according to the Jiang Yanshe spectrum and constructing a simulated diffraction waveform according to the geometric deformation parameters, wherein the geometric deformation parameters are used for quantifying the size and the shape change of the surface periodic structure caused by the compression molding process, and the simulated diffraction waveform is used for representing diffraction energy distribution caused by the surface periodic structure only; and the parameter inversion unit is used for determining the intrinsic optical parameters of the functional metallic glass according to the weak diffraction spectrum, the diffraction residual ratio and the simulated diffraction waveform.

Description

Method and equipment for measuring optical parameters of functional metal glass Technical Field The invention relates to the technical field of optical parameter analysis, in particular to a method and equipment for measuring optical parameters of functional metallic glass. Background The functional metallic glass has excellent thermoplastic forming capability in a supercooled liquid phase region, is an ideal material for manufacturing precise optical elements with sub-wavelength periodic microstructures, and can accurately re-etch grating textures on the surface of a die onto the surface of the metallic glass by using a manufacturing process of high-temperature die pressing and rapid cooling, so that the functional metallic glass is widely applied to the field of precise optics. In the actual manufacturing process, the periodic microstructure on the surface of the metallic glass element can induce a strong optical anisotropic diffraction effect, so that the actually measured reflection spectrum becomes a mixed response of intrinsic absorption of a material and geometric scattering of the structure, and meanwhile, the obvious volume shrinkage and the non-uniform rheological shearing effect existing in the cooling process can lead to nonlinear reduction of the surface texture period relative to a die design value, and asymmetric distortion of microscopic waveforms can also occur. The existing measurement technology is difficult to effectively distinguish the absorption loss caused by material crystallization and the diffraction loss caused by surface texture on the premise of not damaging a sample, and the traditional measurement model cannot accurately describe special optical artifacts induced by the process, so that good products are easily misjudged as material defects, and rheological state parameters reflecting the quality of the molding process cannot be obtained from spectrum data. Disclosure of Invention In order to solve the technical problems that in the prior art, due to periodic texture diffraction and technological rheological deformation of the molding surface of the functional metal glass, intrinsic optical parameters of materials are determined to be misaligned and technological rheological state parameters cannot be obtained, the invention aims to provide an optical parameter determination method and equipment for the functional metal glass, and the adopted technical scheme is as follows: According to the method, a multi-angle reflectivity data set of the surface of a functional metal glass element to be detected is obtained, a strong diffraction spectrum and a weak diffraction spectrum are separated according to the multi-angle reflectivity data set, diffraction residual ratio is determined, the strong diffraction spectrum is the reflectivity spectrum with the largest standard deviation of spectral intensity in the multi-angle reflectivity data set, the weak diffraction spectrum is the reflectivity spectrum with the smallest standard deviation of spectral intensity in the multi-angle reflectivity data set, the diffraction residual ratio is used for representing the amplitude proportion of geometric scattering signals remained in the weak diffraction spectrum, geometric deformation parameters of the surface of the functional metal glass element to be detected are determined according to the strong diffraction spectrum, simulated diffraction waveforms are constructed according to the geometric deformation parameters, the geometric deformation parameters are used for quantifying the size and the shape change of a surface periodic structure caused by a compression molding process, the simulated diffraction waveforms are used for representing diffraction energy distribution caused by the surface periodic structure only, and the intrinsic optical parameters of the functional metal glass are determined according to the weak diffraction spectrum, the diffraction residual ratio and the simulated diffraction waveforms. Based on the technical scheme, in the optical parameter determination method of the functional metallic glass, the multi-angle reflectivity data set is obtained, the strong diffraction spectrum, the weak diffraction spectrum and the diffraction residual ratio are separated, the surface geometric deformation parameter caused by the molding process is determined by combining the strong diffraction spectrum, the simulated diffraction waveform is constructed, and finally the intrinsic optical parameter is determined based on the weak diffraction spectrum, the diffraction residual ratio and the simulated diffraction waveform, so that the interference of surface periodic texture diffraction and process rheological deformation on the measurement of the intrinsic optical parameter of the material is effectively decoupled, the accurate determination of the intrinsic optical parameter under the condition that a sample is not damaged is realized, and meanwhile, the surface structure size and the