CN-122016273-A - Gas spray header detection device and detection method

CN122016273ACN 122016273 ACN122016273 ACN 122016273ACN-122016273-A

Abstract

The invention discloses a gas spray head detection device and a detection method, which relate to the technical field of semiconductor manufacturing and comprise a data acquisition assembly, a gas source conveying assembly and a detection tool, wherein the gas source conveying assembly comprises a pump connected with a gas source, the output end of the pump is sequentially connected with a hand valve, a pressure reducing valve and a needle valve, the output end of the needle valve is connected with the detection tool, the data acquisition assembly comprises a data acquisition system, a pressure sensor, a gas inlet flowmeter and a gas outlet flowmeter, the detection tool comprises a gas inlet tool, a clamping assembly and a gas outlet collection tool, the gas inlet tool is connected with the needle valve through a pipeline, and the gas outlet flowmeter is arranged in the gas outlet collection tool. The complete detection flow framework is provided, the accurate control and adjustment of the pressure and flow of the input gas are realized, the total inlet flow, the total outlet flow and the key node pressure data can be synchronously and accurately acquired, and a foundation is laid for evaluating the overall performance of the spray header.

Inventors

MA JIAQI
WU SHIBIAO
ZHENG JUNQI
LIU KAI
Zhi Jiacai
LIU TUO
GE YANG

Assignees

西安航天远征流体控制股份有限公司

Dates

Publication Date: 20260512
Application Date: 20260122

Claims (9)

1. The gas spray head detection device is characterized by comprising a data acquisition assembly, a gas source conveying assembly and a detection tool; The air source conveying assembly comprises a pump (11) connected with an air source, a hand valve (12), a pressure reducing valve (13) and a needle valve (14) are sequentially connected to the output end of the pump (11), and the output end of the needle valve (14) is connected with the detection tool; the data acquisition assembly comprises a data acquisition system (15), a pressure sensor (16), an air inlet gas flowmeter (17) and an air outlet gas flowmeter (18), wherein the pressure sensor (16) is arranged in two, one is arranged between the hand valve (12) and the pressure reducing valve (13), the other is arranged between the pressure reducing valve (13) and the needle valve (14), the air inlet gas flowmeter (17) is arranged between the output end of the needle valve (14) and the detection tool, and the air outlet gas flowmeter (18) is arranged at the output end of the detection tool; the detection tool comprises an air inlet tool (19), a clamping assembly and an outlet collection tool, wherein the air inlet tool (19) is connected with the needle valve (14) through a pipeline, and the air outlet flow meter (18) is arranged in the outlet collection tool.
2. The gas shower head detection device according to claim 1, wherein a filter (20) is arranged on a pipeline connected with the needle valve (14) by the gas inlet tool (19), the gas inlet tool (19) is integrally a cover body and is connected with the filter (20) by the pipeline, and the gas inlet flowmeter (17) is arranged between the output end of the needle valve (14) and the filter (20).
3. The gas shower head detection device according to claim 2, wherein the outlet collection tool comprises a sealing gasket (21), the sealing gasket (21) is fit with a lower end cover of the shower head porous structure, a plurality of sampling ports (22) are formed in the sealing gasket (21), and the gas outlet flowmeter (18) is connected with the sampling ports (22) through a pipeline joint.
4. A gas shower head detection apparatus according to claim 3, wherein 1 sampling area (26) is arranged at the center position with the center of the lower end cover of the shower head porous structure as a reference, 3 circles of sampling areas (26) are arranged around the center area from inside to outside, 4 and 6 sampling areas (26) are respectively arranged from inside to outside, and the number of the sampling ports (22) on the sealing gasket (21) is the same as that of the sampling areas (26) to be detected and corresponds to one.
5. A gas shower head detection apparatus according to claim 3, wherein the clamping assembly comprises a positioning pin (23) provided at the edge of the sealing gasket (21), a screw (24) and a nut (25) are further provided, and the screw (24) passes through the positioning pin (23) and the gas inlet fixture (19) and is fixed by the nut (25).
6. The gas shower head detection device according to claim 3, wherein the sampling tool is made of a corrosion-resistant metal material, and the inner wall of the sampling tool is polished to have a roughness Ra of less than or equal to 0.8 μm.
7. A detection method using the device of any one of claims 1 to 6, comprising the steps of: Step S1, assembling a detection device, setting air inlet pressure according to requirements, primarily debugging air inlet and outlet flow, detecting the adaptation degree of each sensor and a data acquisition system (15), and checking zero drift and range errors of a pressure sensor (16), an air inlet flow meter (17) and an air outlet flow meter (18) through the data acquisition system (15); Step S2, according to the matching of the corresponding sealing gasket (21) in the area to be detected, fixing the shower head to be detected on the detection tool through the clamping assembly, calibrating the sampling port (22) and the area to be detected (26), and connecting the sampling port (22) and the air outlet flowmeter (18); Step S3, starting a gas supply system, initially testing pressure, introducing gas, and after the gas flow is stable, acquiring data of a pressure sensor (16), an inlet gas flowmeter (17) and an outlet gas flowmeter (18) by a data acquisition system (15), and performing primary screening on the acquired data to remove abnormal values; S4, counting sampling data, calculating the average value and variance of the data, comparing the calculated average value and variance with a preset standard value, and judging that the spray header is qualified only when the calculation result accords with the set value; and S5, displaying the gas flow data, the average value, the variance and the comparison result with the standard value of each sampling area (26) in a graph form, providing a data comparison analysis function, and transversely comparing the detection data of different batches and different types of spray heads.
8. The method for detecting a gas shower head according to claim 7, wherein in the step S3, the preliminary screening data specifically includes performing outlier detection and processing on the collected data, and if the difference between a certain data and the average value exceeds three times of standard deviation, determining that the data is outlier and eliminating the outlier so as to avoid the big influence of the outlier on the final result, and the system automatically optimizes the outlier determination threshold according to the multiple detection data.
9. The method for detecting a gas shower head according to claim 7, wherein in the step S4, if the average value is within ±5% of the set standard average value and the variance is smaller than the set maximum variance value, the shower head is judged to be qualified, the preset standard value is obtained by statistical analysis of a plurality of measurement data of the inlet shower head under the same test condition, and meanwhile, a reasonable fluctuation range is set in combination with the actual demand of the semiconductor CVD process for the gas flow, so that the verification result has better referential and practicability, the history qualified data is analyzed through a machine learning model, the standard value threshold is automatically corrected, and the standard parameter is timely adjusted according to industrial technical development and process improvement.

Description

Gas spray header detection device and detection method Technical Field The invention relates to the technical field of semiconductor manufacturing. Background In the field of semiconductor fabrication, chemical Vapor Deposition (CVD) equipment is a critical core piece of equipment, wherein the showerhead, as a critical component in the CVD equipment, has properties that directly affect the uniformity, quality, and final performance of the deposited film. With the rapid growth of the semiconductor industry, the performance requirements for CVD showerheads are increasing. At present, a CVD showerhead is generally disc-shaped and is divided into an upper layer and a lower layer and is distributed with a porous structure, after the CVD showerhead is machined, the detection method is to detect the aperture through optical equipment, and the gas quality of the outlet of the showerhead is determined by the small-aperture quality, but the size detection cannot represent the overall performance effect of the showerhead, which often lacks of systematicness and pertinence, and cannot comprehensively and accurately detect and evaluate the key performance indexes such as the gas flow distribution of the showerhead in the actual working state, and the like of the small-aperture surface quality, the form and position tolerance, the burrs, and the like of the showerhead, so that the machined showerhead cannot meet the strict requirements of the semiconductor CVD process, and the quality of the whole CVD equipment and the yield of semiconductor manufacturing may be affected. Disclosure of Invention In order to solve the technical problems, the invention provides a gas spray head detection device and a detection method. The invention adopts the following technical scheme for realizing the purposes: A gas spray head detection device comprises a data acquisition assembly, a gas source conveying assembly and a detection tool; The air source conveying assembly comprises a pump connected with an air source, the output end of the pump is sequentially connected with a hand valve, a pressure reducing valve and a needle valve, and the output end of the needle valve is connected with the detection tool; The data acquisition assembly comprises a data acquisition system, a pressure sensor, an air inlet gas flowmeter and an air outlet gas flowmeter, wherein the pressure sensor is arranged in two, one of the pressure sensors is arranged between the hand valve and the pressure reducing valve, the other pressure sensor is arranged between the pressure reducing valve and the needle valve, the air inlet gas flowmeter is arranged between the output end of the needle valve and the detection tool, and the air outlet gas flowmeter is arranged at the output end of the detection tool; The detection tool comprises an air inlet tool, a clamping assembly and an outlet collection tool, wherein the air inlet tool is connected with the needle valve through a pipeline, and the air outlet flow meter is arranged in the outlet collection tool. Through the scheme, the air source is driven by the pump, sequentially flows through the hand valve, the temperature and pressure reducing valve and the needle valve for finely adjusting the flow, and finally enters the detection tool. The two pressure sensors respectively monitor the pressure before and after the pressure reducing valve, so that the stability and the accuracy of pressure regulation are ensured. The inlet gas flowmeter is arranged behind the needle valve and before the detection tool, and is used for directly measuring the total gas flow entering the detection tool. The gas outlet flowmeter is arranged in the outlet collecting tool of the detecting tool and used for measuring the gas flow flowing out of the spray header. The data acquisition system is responsible for acquiring the data of all the sensors in real time. The complete detection flow framework is provided, the accurate control and adjustment of the pressure and flow of the input gas are realized, the total inlet flow, the total outlet flow and the key node pressure data can be synchronously and accurately acquired, and a foundation is laid for evaluating the overall performance of the spray header. Further, a filter is arranged on a pipeline connected with the needle valve, the whole air inlet tool is a cover body and is connected with the filter through the pipeline, and the air inlet gas flowmeter is arranged between the output end of the needle valve and the filter. Through the scheme, before entering the air inlet tool, the air passes through the filter arranged on the pipeline. The filter is positioned behind the needle valve output end and before the air inlet tooling, and is mainly used for intercepting impurities such as particles possibly existing in the air. The subsequent detection tool and flowmeter are effectively protected from pollution or blockage, and the detection reliability and the equipment life are improved. Further, t