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CN-122016281-A - Device for detecting foaming type rolling brush and detection method thereof

CN122016281ACN 122016281 ACN122016281 ACN 122016281ACN-122016281-A

Abstract

The invention provides a device and a method for detecting a foaming rolling brush, wherein the device comprises a detection unit, a bearing and positioning unit, a rotating unit, a water injection unit and a water collecting unit, wherein the detection unit comprises a partition pressure sensor with a pressing function and is used for collecting pressure feedback data of different areas of the foaming rolling brush in a rotating state, the bearing and positioning unit comprises a first mechanism for bearing the partition pressure sensor and a second mechanism for fixing the foaming rolling brush, the rotating unit is used for driving the second mechanism and driving the foaming rolling brush to be in the rotating state in a detection process, the water injection unit is used for injecting liquid into the foaming rolling brush in the detection process, and the water collecting unit comprises a water collecting box with a separation structure and is used for collecting effluent of the foaming rolling brush in real time. The invention realizes synchronous quantitative detection of various parameters such as concentricity of the rolling brush, surface friction force, uniformity of water outlet, cleanliness of water outlet and the like, and the detection result is more in line with the actual use scene of the rolling brush, thereby improving the detection precision.

Inventors

  • HUANG KE
  • ZHENG RUILIN

Assignees

  • 沐科恒益(江苏)电子制造有限责任公司

Dates

Publication Date
20260512
Application Date
20260210

Claims (10)

  1. 1. An apparatus for detecting a foaming-like rolling brush, characterized in that the apparatus comprises: The detection unit comprises a subarea pressure sensor with a pressing function and is used for collecting pressure feedback data of different areas of the foaming rolling brush in a rotating state; the bearing and positioning unit comprises a first mechanism for bearing the subarea pressure sensor and a second mechanism for fixing the foaming rolling brush; the rotating unit is used for driving the second mechanism and driving the foaming rolling brush to be in a rotating state in the detection process; The water injection unit is used for injecting liquid into the foaming rolling brush in the detection process; the water outlet collecting unit comprises a water collecting box with a separation structure and is used for collecting the water outlet of the foaming rolling brush in real time.
  2. 2. The device for detecting the foaming type rolling brush according to claim 1, wherein the number of the partition pressure sensors is 3-10, and the partition pressure sensors are uniformly contacted with the surface of the foaming type rolling brush in the detection process.
  3. 3. The device for detecting the foaming type rolling brush according to claim 2, wherein the partition pressure sensors are uniformly distributed on one side of a central shaft of the foaming type rolling brush; or the zoned pressure sensors are symmetrically and uniformly distributed on two sides of the central shaft of the foaming rolling brush.
  4. 4. A device for detecting a foaming type rolling brush according to any one of claims 1 to 3, wherein the first mechanism is a semicircular shell arranged at one side of a central shaft of the foaming type rolling brush; or the first mechanism is a semicircular shell symmetrically arranged at two sides of the central shaft of the foaming rolling brush.
  5. 5. The apparatus for detecting a foaming type rolling brush according to claim 4, wherein the second mechanism is a straight rod penetrating through a central shaft of the foaming type rolling brush; And/or the first mechanism and the second mechanism are parallel to each other.
  6. 6. A device for detecting a foaming type rolling brush according to any one of claims 1 to 3, wherein the rotating unit includes a driving motor; and/or at least 2 separation areas are uniformly distributed in the water collecting box and are used for detecting the uniformity of water yield of different areas of the foaming rolling brush in a rotating state; And/or the inner wall of the water collecting box is provided with an anti-adhesion coating.
  7. 7. A method for detecting a foaming type rolling brush by using the device as claimed in any one of claims 1 to 6, wherein the method comprises the following steps: (1) Pre-treatment, namely injecting ammonia water into the foaming rolling brush to ensure that the ammonia water fully permeates the whole rolling brush; (2) The method comprises the steps of fixing a pretreated foaming rolling brush in a detection unit through a second mechanism, starting a rotation unit, driving the second mechanism and driving the foaming rolling brush to be in a rotating state, injecting liquid into the foaming rolling brush through a water injection unit, driving a first mechanism and driving a partition pressure sensor to perform a pressing operation, collecting pressure feedback data of different areas of the foaming rolling brush in the rotating state, and collecting effluent of the foaming rolling brush in real time through an effluent collecting unit; (3) And data processing, namely forming a quantization parameter table through data fitting based on the linear relation between the pressure feedback data and the downward-pressing displacement data, and calculating the corresponding relation of the pressure, the surface friction force, the water yield and the concentricity of the foaming rolling brush in different areas under the rotating state.
  8. 8. The method for detecting a foaming type rolling brush according to claim 7, wherein the concentration of the ammonia water in the step (1) is 0.01-0.5wt%; And/or, the liquid in the step (2) comprises ammonia water and/or deionized water; and/or the ammonia water injection mode in the step (1) and the liquid injection mode in the step (2) respectively and independently comprise synchronous injection from two ends of a central shaft of the foaming rolling brush.
  9. 9. The method for detecting a foaming type rolling brush according to claim 7 or 8, wherein the rotating speed of the foaming type rolling brush in the step (2) in the detection process is 50-400 rpm; and/or, the downward pressure displacement of the partition pressure sensor in the detection process in the step (2) is 1-10 mm; And/or, the pressure feedback data acquisition frequency of the partition pressure sensor in the detection process in the step (2) is 1-100 times/second.
  10. 10. The method according to claim 7 or 8, wherein the data acquisition in step (2) further comprises detecting the cleanliness of the effluent of the foaming brush, and the detection index of the cleanliness of the effluent comprises pH, conductivity or large particle count; And/or, the data fitting mode in the step (3) comprises a least square method.

Description

Device for detecting foaming type rolling brush and detection method thereof Technical Field The invention belongs to the technical field of equipment detection, and relates to a device for detecting a foaming rolling brush and a detection method thereof. Background In high-end industrial fields such as precision manufacturing, semiconductor processing, electronic component cleaning, etc., the performance stability of the roll brush as a cleaning and grinding tool directly affects the yield and quality of the end product. Among them, PVA (polyvinyl alcohol) foam type roller brushes are widely used in the fields of wafer polishing, precision instrument surface cleaning, and the like, which have strict requirements on tool precision, because of their characteristics such as excellent flexibility, strong water absorption, and high wear resistance. The key performance indexes (such as the degree of similarity, the surface friction, the uniformity of water yield and the cleanliness) of the rolling brush are highly related to the use effect. For example, the concentricity deviation can cause uneven stress during cleaning or grinding to cause scratches on the surface of a processed workpiece, the surface friction fluctuation can influence the cleaning efficiency and consistency, the uneven water yield can easily cause incomplete local cleaning or liquid residue, and the unqualified cleanliness can directly pollute high-precision workpieces, even cause great production loss. At present, the production and detection technology of PVA foaming rolling brushes still has a plurality of problems to be solved urgently. In the aspect of performance detection, the prior art mostly adopts a distributed detection mode, namely concentricity detection depends on manual visual or simple tool positioning, only can judge 'pass/fail', local deviation data cannot be quantified, surface friction force detection needs to be carried out by a special friction tester alone, only can obtain the overall average value of a rolling brush, friction force difference of different areas is difficult to reflect, local performance defects cannot be accurately positioned, water yield detection is carried out by collecting total water yield judgment once, key indexes of water yield uniformity of different areas are ignored, and cleaning dead angles of partial rolling brushes are caused in actual use due to local water yield abnormality. The independent and qualitative detection mode is low in efficiency, and cannot comprehensively reflect the whole and partial real performances of the rolling brush, so that hidden quality hazards are buried for subsequent use. In the aspect of mildew-proof preservation, in the production process of PVA foaming type rolling brushes, in order to improve the foaming effect and the forming stability, starch is generally adopted as a foaming auxiliary agent. However, starch is used as a natural organic matter, and is easy to absorb moisture in a storage environment to grow mold, and the mold can damage the foaming structure of the rolling brush, so that the elasticity and the water absorbability of the rolling brush are reduced, spores are easy to fall off in the use process, and cleaned precision parts are polluted, so that the deadly influence is caused to industries such as semiconductors, electronic components and the like. The existing mildew-proof means mainly comprises ammonia water soaking, but the ammonia water can only be attached to the surface of the rolling brush and is difficult to permeate into an internal pore structure, so that internal starch is still in a mildew-proof state, the mildew-proof effect is short and limited, and long-term storage requirements cannot be met. In the aspect of detecting scene suitability, the existing detection is performed in a static environment, and the rolling brush is required to be in a high-speed rotation state (such as grinding rotation during wafer cleaning and rotation friction during pipeline cleaning) during actual working. The static detection can not simulate the key factors such as centrifugal force, dynamic pressure distribution and the like in actual use, so that the deviation between the detection result and the actual use effect is larger. For example, the rolling brush which is qualified in static state can be subjected to local stress overload due to concentricity deviation during actual rotation, or cleaning consistency is affected due to dynamic friction fluctuation, so that the reference value of a detection result is severely restricted. In addition, no integrated technical scheme is formed in the industry, links such as detection, mildew-proof preservation and the like are mutually independent, special equipment and independent working procedures are needed, the complexity of the production flow and the input cost of the equipment are increased, and the production efficiency is low due to the working procedure connection. Meanwhile, the prior art focu