CN-122016707-A - Terahertz super-surface biosensor

Abstract

The application discloses a terahertz super-surface biosensor, which relates to the technical field of biosensors and comprises a plurality of unit structures which are periodically arranged, wherein each unit structure comprises a basal layer and a metal functional layer, the metal functional layer in any unit structure is deposited on the upper surface of the basal layer, the metal functional layer is in a symmetrical split resonant ring array structure, the symmetrical split resonant ring array structure comprises a left metal vertical bar, a double-split rectangular ring and a right metal vertical bar, and the left metal vertical bar and the right metal vertical bar are respectively arranged on two sides of the double-split rectangular ring. The application has high sensitivity and high detection precision, and realizes rapid, label-free and high-precision detection of biological small molecules.

Inventors

• ZHOU QIANGGUO
• SHI BO
• HAN QING
• LI XIAOXIAO
• HUANG YU
• WANG ZHIWEN
• Chang Yankui
• WANG JIBIN

Assignees

• 蚌埠医科大学

Dates

Publication Date

20260512

Application Date

20260313

Claims (10)

1. 1. The terahertz super-surface biosensor is characterized by comprising a plurality of unit structures which are periodically arranged, wherein each unit structure comprises a basal layer and a metal functional layer, and any unit structure comprises: the metal functional layer is deposited on the upper surface of the basal layer, and the metal functional layer is of a symmetrical split-ring resonant ring array structure; The symmetrical split resonant ring array structure comprises a left metal vertical bar, a double-split rectangular ring and a right metal vertical bar, wherein the left metal vertical bar and the right metal vertical bar are respectively arranged on two sides of the double-split rectangular ring.
2. 2. The terahertz subsurface biosensor as claimed in claim 1, wherein the double-opening rectangular ring comprises two rectangular rings with openings disposed opposite each other.
3. 3. The terahertz subsurface biosensor as claimed in claim 2, wherein the opening width of each rectangular ring is 4 μm, the metal arm width of each rectangular ring is 6 μm, the width of the left side metal vertical bar and the width of the right side metal vertical bar are 6 μm, and the width of the left side metal vertical bar and the length of the right side metal vertical bar are 60 μm.
4. 4. The terahertz subsurface biosensor as claimed in claim 1, wherein the period of the unit structure is 80 μm.
5. 5. The terahertz subsurface biosensor as claimed in claim 1, wherein the substrate layer is made of polyimide material.
6. 6. The terahertz subsurface biosensor as claimed in claim 1, wherein the thickness of the base layer is 30 μm.
7. 7. The terahertz subsurface biosensor as claimed in claim 6, wherein the relative dielectric constant of the base layer is 3.5, and the loss tangent of the base layer is 0.001.
8. 8. The terahertz subsurface biosensor as claimed in claim 1, wherein the metallic functional layer is gold.
9. 9. The terahertz subsurface biosensor as claimed in claim 8, wherein the thickness of the metal functional layer is 0.2 μm.
10. 10. The terahertz subsurface biosensor as claimed in claim 8, wherein the metal functional layer has a conductivity of 4.56 x 10 7 S/m.

Description

Terahertz super-surface biosensor Technical Field The application relates to the technical field of biosensors, in particular to a terahertz super-surface biosensor. Background Terahertz waves (0.1 THz-10 THz) have the characteristics of non-ionization penetration capability of electromagnetic waves and fingerprint spectrum identification of molecular vibration/rotation modes, and are one of important technical means in the field of unmarked detection of biomolecules, however, the current terahertz biosensor still faces significant technical bottlenecks in practical application: On one hand, the conventional terahertz sensing structure has generally low refractive index responsivity to biological micromolecules, is difficult to capture tiny refractive index change caused by low-concentration samples, and cannot meet trace detection requirements, and on the other hand, the conventional super-surface sensing unit mostly adopts a single resonance structure, so that the concentration effect of a local electromagnetic field is weak, and the signal-to-noise ratio and detection accuracy of sensing signals are weakened. Taking biological small molecules (such as glucose, amino acid and the like) as core detection objects in the fields of medical diagnosis, food quality control and biological medicine, traditional detection methods (such as an electrochemical method and a fluorescent labeling method) generally depend on chemical reagents, are easily interfered by environment, and are difficult to realize label-free rapid detection. For example, one related study uses 500 μm silicon substrate as base, designs an asymmetric square Split ring (Split-Ring Resonator, SRR) array to successfully excite ultra-high Q value resonance mode, and by respectively incident electric fields along x-axis and y-axis, the structure can respectively generate quadrupole resonance and Fano resonance, the detection sensitivity reaches 23.9GHz/RIU and 36.7GHz/RIU, and another related study proposes an annular terahertz super-surface composed of Chinese Taiji rings, and the sensitivity can reach 258GHz/RIU. Therefore, the terahertz super-surface biosensor with high sensitivity and high detection precision is developed to realize rapid, label-free and high-precision detection of various biological small molecules, and has important practical value. Disclosure of Invention The application aims to provide a terahertz super-surface biosensor which has high sensitivity and high detection precision and can realize rapid, label-free and high-precision detection of biological small molecules. In order to achieve the above object, the present application provides the following solutions: the application provides a terahertz super-surface biosensor, which comprises a plurality of unit structures which are periodically arranged, wherein each unit structure comprises a basal layer and a metal functional layer, and any unit structure comprises: the metal functional layer is deposited on the upper surface of the basal layer, and the metal functional layer is of a symmetrical split-ring resonant ring array structure; The symmetrical split resonant ring array structure comprises a left metal vertical bar, a double-split rectangular ring and a right metal vertical bar, wherein the left metal vertical bar and the right metal vertical bar are respectively arranged on two sides of the double-split rectangular ring. In one embodiment, the double-opening rectangular ring comprises two rectangular rings with openings arranged opposite each other. In one embodiment, the width of the opening of each rectangular ring is 4 μm, the width of the metal arm of each rectangular ring is 6 μm, the width of the left metal vertical bar and the width of the right metal vertical bar are 6 μm, and the width of the left metal vertical bar and the length of the right metal vertical bar are 60 μm. In one embodiment, the cell structure has a period of 80 μm. In an embodiment, the material of the base layer is a polyimide material. In one embodiment, the base layer has a thickness of 30 μm. In one embodiment, the relative dielectric constant of the base layer is 3.5 and the loss tangent of the base layer is 0.001. In an embodiment, the metal functional layer is made of gold. In one embodiment, the metal functional layer has a thickness of 0.2 μm. In one embodiment, the conductivity of the metal functional layer is 4.56X10 7 S/m. According to the specific embodiment provided by the application, the application has the following technical effects: The application discloses a terahertz super-surface biosensor, wherein a metal functional layer adopts a symmetrical split resonant ring array formed by a left side metal vertical bar, a double split rectangular ring and a right side metal vertical bar. When terahertz waves are vertically incident, the metal functional layer and the electric field component of the terahertz waves are subjected to strong resonance coupling, and then a highly co