CN-122016771-A - Method for detecting metal and other impurities in clean dust-free cloth

Abstract

The invention relates to the technical field of impurity detection, in particular to a method for detecting metal and other impurities in clean dust-free cloth, which comprises the steps of weighing initial mass M 0 of a corrosion-resistant container, placing the dust-free cloth to be detected in the container, measuring total mass M 1 , adding soaking liquid into the container to enable the dust-free cloth to be completely immersed, placing the container on a heating device for constant-temperature heating treatment, enabling metal and other impurity elements in the dust-free cloth to be released into the soaking liquid, taking out the dust-free cloth after the treatment is finished, obtaining a solution to be detected, detecting element content of the solution to be detected, synchronously performing blank experiments, respectively obtaining detection results C 1 and C 0 , and calculating the content of each element in the dust-free cloth according to the detection results, the volume of the soaking liquid and mass difference. The invention can improve the accuracy and repeatability of the detection result, thereby realizing the accurate determination of the content of each element in the dust-free cloth.

Inventors

• WANG CHUNMING
• ZHANG JUAN
• ZHANG YUQUAN
• MENG KUN

Assignees

• 江苏中能硅业科技发展有限公司

Dates

Publication Date

20260512

Application Date

20260331

Claims (8)

1. 1. The method for detecting metal and other impurities in clean dust-free cloth is characterized by comprising the following steps: Weighing an initial mass M 0 of a corrosion-resistant container, placing dust-free cloth to be tested into the container, and measuring a total mass M 1 ; placing the container on a heating device for constant-temperature heating treatment, so that metals and other impurity elements in the dust-free cloth are released into the soaking liquid, and taking out the dust-free cloth after the treatment is finished to obtain a solution to be measured; detecting element content of the solution to be detected, and synchronously performing blank tests to obtain detection results C 1 and C 0 respectively; And calculating the content of each element in the dust-free cloth according to the detection result, the volume of the soaking liquid and the mass difference.
2. 2. The method of claim 1, wherein the immersion liquid is a mixed acid solution prepared by mixing hydrofluoric acid, nitric acid and ultrapure water.
3. 3. The method for detecting the surface of a substrate according to claim 2, wherein the volume ratio of the components in the immersion liquid is hydrofluoric acid, nitric acid, ultrapure water=3:5:92.
4. 4. The method of claim 2 or 3, wherein the mass fraction of hydrofluoric acid is 48.8% -49.2%, and the mass fraction of nitric acid is 69% -71%.
5. 5. The method according to claim 1, wherein the heating treatment is carried out at a temperature of 50-70 ℃ for a heating time of 5-15 minutes.
6. 6. The method of claim 1, wherein the element content is measured by inductively coupled plasma spectrometry.
7. 7. The method of claim 1, wherein the corrosion resistant container is a PFA beaker.
8. 8. The detection method according to claim 1, wherein the content of each element in the dust-free cloth is calculated according to the detection result, the volume V of the soaking liquid and the mass difference, wherein the content of each element is calculated according to the following formula, W= (C 1 -C 0 )×V/(M 1 -M 0 ), wherein W is the content of the element in the dust-free cloth, M 1 -M 0 is the mass difference, and V is the volume of the soaking liquid.

Description

Method for detecting metal and other impurities in clean dust-free cloth Technical Field The invention relates to the technical field of impurity detection, in particular to a method for detecting metal and other impurities in clean dust-free cloth. Background With the rapid development of the semiconductor manufacturing industry, the electronic information industry and the high-end equipment manufacturing field, the requirement on the cleanliness of the production environment is increasingly increased. The clean dust-free cloth is used as one of key consumables, is widely applied to process links such as wafer surface cleaning, precise device wiping and the like, and the self-cleaning performance of the clean dust-free cloth directly influences the product yield and the device reliability. In the prior art, the performance evaluation of the dust-free cloth is mainly focused on the aspects of particle release, electrostatic performance, corrosion resistance and the like, and a corresponding detection standard and evaluation system are formed, but the detection of the impurity content of metals and other elements in the dust-free cloth is still in a relatively weak stage. In the prior art, for detecting trace elements in materials, a method of combining acid leaching with instrument analysis is generally adopted, for example, a single acid system or a simple mixed acid system is used for carrying out soaking treatment on a sample, and then inductively coupled plasma spectroscopy and other means are used for measuring the element content in the solution. However, when the method is applied to a dust-free cloth material, due to the complex fiber structure characteristics and impurity occurrence states, the problems of insufficient element release, large fluctuation of a detection result, difficult effective elimination of background interference and the like often exist, so that the accuracy and stability of the detection result are affected, and the requirement on trace pollutant control under the application scene of high cleanliness is difficult to meet. Disclosure of Invention The invention aims to provide a method for detecting metals and other impurities in clean dust-free cloth so as to realize efficient release and accurate quantification of trace metals and other elements in the dust-free cloth. In order to achieve the technical purpose, the invention provides the following technical scheme: The invention provides a method for detecting metal and other impurities in clean dust-free cloth, which comprises the following steps: Weighing an initial mass M 0 of a corrosion-resistant container, placing dust-free cloth to be tested into the container, and measuring a total mass M 1; placing the container on a heating device for constant-temperature heating treatment, so that metals and other impurity elements in the dust-free cloth are released into the soaking liquid, and taking out the dust-free cloth after the treatment is finished to obtain a solution to be measured; detecting element content of the solution to be detected, and synchronously performing blank tests to obtain detection results C 1 and C 0 respectively; And calculating the content of each element in the dust-free cloth according to the detection result, the volume of the soaking liquid and the mass difference. Preferably, the soaking solution is a mixed acid solution prepared by mixing hydrofluoric acid, nitric acid and ultrapure water. Further preferably, the volume ratio of each component in the soaking solution is hydrofluoric acid to nitric acid to ultrapure water=3:5:92. Based on the above, it is further preferable that the mass fraction of the hydrofluoric acid is 48.8% -49.2%, and the mass fraction of the nitric acid is 69% -71%. Preferably, the temperature of the heating treatment is 50-70 ℃ and the heating time is 5-15 minutes. Preferably, the elemental content detection is determined using inductively coupled plasma spectrometry. Preferably, the corrosion resistant vessel is a PFA beaker. The method comprises the steps of calculating the content of each element in the dust-free cloth according to a detection result, the volume V of the soaking liquid and the mass difference, wherein the content of each element is calculated according to the following formula, W= (C 1-C0)×V/(M1-M0), wherein W is the content of the element in the dust-free cloth, M 1-M0 is the mass difference, and V is the volume of the soaking liquid. The beneficial effects of the invention are as follows: 1. According to the invention, dust-free cloth is arranged in the soaking liquid and is subjected to heating treatment under the constant temperature condition, so that metals and other impurity elements in the dust-free cloth are released into a liquid phase from a fiber matrix in an accelerating way, a blank experiment is combined to deduct background signals, and quantitative calculation is performed based on detection results, the volume of the soaking liquid