CN-122016839-A - Apparatus for detecting front opening unified pod and method for detecting defects of front opening unified pod

Abstract

The invention provides equipment for detecting a front opening wafer transfer box, which comprises a detection chamber, a carrying platform, a first image capturing device and a plurality of second image capturing devices. The detection chamber includes a bottom plate having a first opening, a first side plate connected to the bottom plate, a second side plate connected to the bottom plate and the first side plate, and a third side plate connected to the bottom plate and opposite the second side plate. The carrier moves up and down relative to the base plate through the first opening. The first image capturing device is arranged on the carrying platform. The second image capturing devices are arranged at a plurality of corners in the detection chamber. The equipment for detecting the front opening wafer transfer box can realize the automatic detection flow of the front opening wafer transfer box.

Inventors

• Huang Rizheng
• LIN SHIZHI
• WU HONGRU

Assignees

• 南亚科技股份有限公司

Dates

Publication Date

20260512

Application Date

20260212

Priority Date

20251007

Claims (19)

1. 1. An apparatus for inspecting a front opening unified pod, comprising: A detection chamber including a bottom plate having a first opening, a first side plate connected to the bottom plate, a second side plate connected to the bottom plate and the first side plate, and a third side plate connected to the bottom plate and opposite to the second side plate; a stage moving up and down with respect to the base plate through the first opening; a first image capturing device arranged on the carrier and The second image capturing devices are arranged at a plurality of corners in the detection chamber.
2. 2. The apparatus for inspecting a front opening unified pod of claim 1, further comprising: The third image capturing device is arranged outside the detection chamber and faces the second opening of the first side plate.
3. 3. The apparatus for inspecting a front opening unified pod of claim 2, further comprising: The fourth image capturing device is arranged outside the detection chamber, is adjacent to the third image capturing device and faces the second opening of the first side plate.
4. 4. The apparatus for inspecting a front opening unified pod of claim 3, wherein the fourth image capture device is mounted on a retractable, bendable, and rotatable robot.
5. 5. The apparatus for inspecting a front opening unified pod of claim 2, further comprising: the fourth image capturing device is arranged outside the detection chamber and below the bottom plate.
6. 6. The apparatus for inspecting a front opening unified pod according to claim 1, wherein the number of the plurality of second image capturing devices is four, and the plurality of second image capturing devices are respectively disposed at four corners in the inspection chamber away from the first side plate.
7. 7. The apparatus for inspecting a front opening unified pod of claim 6, further comprising: a plurality of fixtures disposed around the first opening.
8. 8. The apparatus for inspecting a front opening unified pod of claim 7, wherein the number of the plurality of fixtures is four.
9. 9. The apparatus for inspecting a front opening unified pod of claim 1, further comprising: And the loading port is arranged beside the detection chamber.
10. 10. The apparatus for inspecting a front opening unified pod of claim 9, further comprising: The automatic conveying device is arranged between the loading port and the detection chamber and is connected with the loading port and the detection chamber.
11. 11. A method of detecting defects in a front opening unified pod, the method comprising: placing the front opening unified pod in a detection chamber of an apparatus for detecting the front opening unified pod, wherein the apparatus comprises: the detection chamber is provided with a bottom plate, and a first opening is arranged on the bottom plate; a stage moving up and down with respect to the base plate through the first opening; a plurality of fixing devices arranged around the first opening, and The first image capturing device is arranged on the carrier; Fixing the front opening unified pod using the plurality of fixing devices, and The bottom appearance image of the front opening wafer transfer box is captured by the first image capturing device.
12. 12. The method of claim 11, wherein the apparatus further comprises a plurality of second image capturing devices disposed at corners in the detection chamber, and the method further comprises: and capturing a plurality of surface appearance images of the front opening wafer transfer box through the plurality of second image capturing devices.
13. 13. The method of claim 12, wherein the apparatus further comprises a third image capture device disposed outside the detection chamber and facing the second opening of the first side plate connected to the bottom plate, and the method further comprises: and capturing the cover surface appearance image of the front opening wafer transfer box through the third image capturing device.
14. 14. The method of claim 13, wherein the apparatus further comprises a fourth image capture device disposed outside the detection chamber and below the floor, and the method further comprises: After capturing the appearance image of the cover surface of the front opening wafer transfer box through the third image capturing device, opening the cover of the front opening wafer transfer box; Suspending the lid under the floor of the detection chamber, and Capturing an image of the inner surface of the cover by the fourth image capturing device.
15. 15. The method of claim 13, wherein the apparatus further comprises a fourth image capture device mounted on a flexible, bendable, rotatable robot arm and disposed outside the detection chamber and adjacent to the third image capture device, the fourth image capture device being exposed from the second opening, and the method further comprising: And capturing a plurality of inner surface images of the front opening wafer transfer box through the fourth image capturing device.
16. 16. The method of claim 15, wherein capturing the plurality of interior surface images of the front opening unified pod by the fourth image capturing device comprises: bending the mechanical arm to enable the fourth image capturing device to enter the detection chamber, and The mechanical arm is extended and rotated to enable the fourth image capturing device to enter the front opening wafer transfer box and capture the plurality of inner surface images.
17. 17. The method of claim 11, further comprising: judging whether the bottom appearance image has defects by using a deep learning object detection model to generate a detection result, and The detection result is transmitted to a host of the automatic material handling system.
18. 18. The method of claim 11, further comprising: the front opening unified pod is unloaded from the detection chamber of the apparatus for detecting the front opening unified pod by an automated material handling system.
19. 19. The method of claim 11, further comprising: The front opening unified pod is placed into the inspection chamber of the apparatus for inspecting the front opening unified pod by an automated material handling system.

Description

Apparatus for detecting front opening unified pod and method for detecting defects of front opening unified pod Technical Field The present invention relates to a detection apparatus and a detection method. And more particularly to an apparatus for detecting a front opening unified pod and a method for detecting a front opening unified pod defect. Background The container is used for accommodating and storing semiconductor wafers. These containers are typically used to be transported between locations within a fab (i.e., a semiconductor manufacturing facility) during operation of the fab. One or more semiconductor wafers within the container are removed from the container and received by the processing tool such that the semiconductor wafers are processed and refined into semiconductor devices (e.g., semiconductor chips, semiconductor dies, or some other similar or analogous type of semiconductor device). These containers are commonly referred to as front opening unified pods (i.e., front Opening Universal Pod (FOUPs)) or tape cassettes and are used in operation to hold one or more workpieces (e.g., unprocessed wafers, partially processed wafers, partially or fully processed wafer assemblies, or some other similar or similar type of workpiece processed by a wafer factory). These FOUPs or cassettes are typically used to hold one or more semiconductor wafers in operation, which may be inserted into or removed from the FOUP or cassette for storage, transport, and handling of one or more semiconductor wafers. Disclosure of Invention An aspect of the present invention provides an apparatus for inspecting a front opening unified pod. The apparatus includes a detection chamber, a stage, a first image capturing device, and a plurality of second image capturing devices. The detection chamber comprises a bottom plate with a first opening, a first side plate connected to the bottom plate, a second side plate connected to the bottom plate and the first side plate, and a third side plate connected to the bottom plate and opposite to the second side plate. The carrier moves up and down relative to the base plate through the first opening. The first image capturing device is arranged on the carrying platform. The second image capturing devices are arranged at a plurality of corners in the detection chamber. In some embodiments, the apparatus for inspecting a front opening unified pod further includes a third image capture device disposed outside the inspection chamber and facing the second opening of the first side plate. In some embodiments, the apparatus for inspecting a front opening unified pod further includes a fourth image capture device disposed outside the inspection chamber and adjacent to the third image capture device and facing the second opening of the first side plate. In some embodiments, the fourth image capturing device is mounted on a telescopic, bendable and rotatable robot arm. In some embodiments, the apparatus for inspecting a front opening unified pod further includes a fourth image capture device disposed outside the inspection chamber and below the floor. In some embodiments, the number of the plurality of second image capturing devices is four, and the plurality of second image capturing devices are respectively disposed at four corners in the detection chamber away from the first side plate. In some embodiments, the apparatus for inspecting a front opening unified pod further includes a plurality of fixtures disposed about the first opening. In some embodiments, the number of the plurality of fixtures is four. In some embodiments, the apparatus for inspecting a front opening unified pod further includes a load port disposed beside the inspection chamber. In some embodiments, the apparatus for inspecting a front opening unified pod further includes an automatic transfer device disposed between and connecting the load port and the inspection chamber. Another aspect of the present invention provides a method of detecting defects in a front opening unified pod, the method comprising the steps of. The front opening unified pod is placed in a detection chamber of an apparatus for detecting the front opening unified pod, wherein the apparatus includes the detection chamber, a stage, and a first image capture device. The detection chamber is provided with a bottom plate, and a first opening is formed in the bottom plate. The carrier moves up and down relative to the base plate through the first opening. The plurality of fixtures are disposed around the first opening. The first image capturing device is arranged on the carrying platform. The front opening unified pod is secured using the plurality of securing devices. The bottom appearance image of the front opening wafer transfer box is captured by the first image capturing device. In some embodiments, the apparatus further comprises a plurality of second image capture devices disposed at a plurality of corners in the detection chamber, and the method