CN-122016868-A - Double-shaft synchronous stable scanning detection method for TGV glass substrate

CN122016868ACN 122016868 ACN122016868 ACN 122016868ACN-122016868-A

Abstract

The invention discloses a dual-axis synchronous stable scanning detection method of a TGV glass substrate, which comprises the steps of firstly importing hole site coordinate data of the TGV glass substrate, dividing dense subareas and sparse subareas according to hole site space distribution density to generate variable density scanning paths to realize dynamic adaptation of detection speed and resolution, then driving the substrate to move by a dual-axis synchronous driving mechanism, automatically switching a light source state and a camera rotation angle according to a detection target type by a multi-degree-of-freedom visual scanning mechanism, synchronously collecting images, detecting the adsorption pressure in real time in the whole process, automatically reducing speed or alarming when the pressure is lower than a safety threshold value, guaranteeing the safety of the substrate, and finally finishing defect identification and classification by multi-frame image noise reduction, feature extraction and a support vector machine algorithm. The invention solves the problems of difficult compromise of efficiency and precision, easy damage to the substrate and low degree of automation in the traditional detection, realizes the high-efficiency, high-precision and low-damage batch detection of the TGV glass substrate, and is suitable for an online detection scene of a mass production line.

Inventors

LU JIANFENG
CAO JIAQI
Bai Longjiang
LIU JUNJUN
ZHENG LEI
MAN ZENGGUANG

Assignees

苏州工学院

Dates

Publication Date: 20260512
Application Date: 20260128

Claims (10)

1. The dual-axis synchronous stable scanning detection method for the TGV glass substrate is executed based on a detection device comprising a dual-axis synchronous driving mechanism, a substrate bearing and positioning mechanism, a multi-degree-of-freedom visual scanning mechanism and a control system, and is characterized by comprising the following steps of: (1) The control system acquires hole position coordinate data of the TGV glass substrate, divides a scanning area into a dense subarea and a sparse subarea according to the hole position space distribution density, generates a variable density scanning path, reduces the scanning speed of the dense subarea and improves the imaging resolution, and the sparse subarea improves the scanning speed and reduces the imaging resolution; (2) The double-shaft synchronous driving mechanism drives the substrate bearing positioning mechanism to move according to the variable density scanning path, the multi-degree-of-freedom visual scanning mechanism adjusts the light source and the rotation state according to the type of a detection target, wherein when the surface defect is detected, an annular light source in the multi-degree-of-freedom visual scanning mechanism is lightened, a strip light source is closed, a rotation adjusting assembly keeps the current angle, when the hole wall defect is detected, the strip light source in the multi-degree-of-freedom visual scanning mechanism is lightened, the annular light source is closed, the rotation adjusting assembly drives the linear array scanning camera to rotate around a Z axis so as to adjust the shooting angle, and the linear array scanning camera in the multi-degree-of-freedom visual scanning mechanism synchronously acquires images; (3) The flexible adsorption unit in the substrate bearing and positioning mechanism acquires adsorption pressure data in real time, and when the pressure is lower than a preset safety threshold, the control system reduces the current scanning speed to the safety speed or triggers an alarm; (4) And the control system performs defect identification on the acquired image and outputs a defect judgment result.
2. The method for detecting the dual-axis synchronous stable scanning of the TGV glass substrate according to claim 1, wherein the scanning speed of the dense subarea is reduced to 50% -70% of the reference speed, the imaging resolution is increased to 120% -150% of the reference resolution, the scanning speed of the sparse subarea is increased to 130% -150% of the reference speed, and the imaging resolution is reduced to 60% -80% of the reference resolution.
3. The method for detecting the dual-axis synchronous stable scanning of the TGV glass substrate, which is characterized in that the hole site space distribution density is calculated according to the number of holes in a unit area, the dense subarea is a region with the number of holes in the unit area being larger than a preset threshold value, and the sparse subarea is a region with the number of holes in the unit area being smaller than or equal to the preset threshold value.
4. The method for simultaneous, stable and dual-axis scanning of a TGV glass substrate according to claim 1, wherein when hole wall defects are detected, the rotation adjusting component drives the linear array scanning camera to rotate around the Z axis within an angle range of 0 DEG 360 DEG, and the angle adjusting precision is not more than +/-0.1 deg.
5. The method for detecting the dual-axis synchronous stable scanning of the TGV glass substrate according to claim 1, wherein the brightness of the annular light source and the strip light source is dynamically adjusted according to the surface reflectivity of the TGV glass substrate, the brightness adjusting range of the annular light source is 1000-5000lux, and the brightness adjusting range of the strip light source is 500-3000lux.
6. The method for dual-axis synchronous stable scanning detection of a TGV glass substrate according to claim 1, wherein the preset safety threshold is 0.02-0.05MPa, and the safety speed is 30% -50% of the current scanning speed.
7. The method for detecting the dual-axis synchronous stable scanning of the TGV glass substrate according to claim 1, wherein the defect identification in the step (4) comprises the steps of carrying out noise reduction and enhancement pretreatment on an acquired image, extracting defect characteristic parameters, and classifying defect types by adopting a support vector machine algorithm.
8. The method for detecting the dual-axis synchronous stable scanning of the TGV glass substrate according to claim 1, wherein the detection target type is judged according to hole position coordinate data, namely hole wall defect detection is judged when the current visual field position of the linear array scanning camera is coincident with the hole position coordinate, and surface defect detection is judged when the current visual field position is deviated from the hole position coordinate.
9. The method for detecting the dual-axis synchronous stable scanning of the TGV glass substrate according to claim 1, wherein the defect identification in the step (4) further comprises the steps of carrying out weighted average noise reduction on the continuously acquired multi-frame images, and fusing defect identification results of the multi-frame images to output final defect judgment.
10. The method for simultaneous, dual-axis and stable scanning detection of a TGV glass substrate according to claim 1, wherein said defect determination comprises identification and classification of cracks, pore diameter deviations, pore wall roughness superscripts, and metal filling insufficiency.

Description

Double-shaft synchronous stable scanning detection method for TGV glass substrate Technical Field The invention relates to a dual-axis synchronous stable scanning detection method for a TGV glass substrate. Background With the development of advanced packaging technology, TGV (ThroughGlassVia, glass via) technology is a key process for high-density interconnection packaging due to its excellent electrical performance, thermal performance and mechanical stability. In the preparation process of the TGV glass substrate, a plurality of working procedures such as drilling, metallization filling and the like are needed, so that defects such as hole wall cracks, aperture deviation, surface scratches, incomplete metal filling and the like are easy to occur. Therefore, it is important to perform high-efficiency and high-precision defect detection on the TGV glass substrate in the mass production process. The existing TGV glass substrate detection technology mainly has the following defects: (1) The detection efficiency and the precision are difficult to be compatible. The traditional detection equipment adopts a single-axis scanning or static detection mode, and can only detect the local area of a single substrate at a time, so that the batch detection requirement of a mass production line is difficult to meet. Although continuous scanning can be realized by part of automatic detection equipment, a uniform scanning strategy is mostly adopted, and adaptive adjustment cannot be performed according to density characteristics of through hole distribution on a TGV glass substrate, so that the scanning speed of a dense hole area is too high to reduce imaging quality, or the scanning speed of a sparse hole area is too low to reduce efficiency. In addition, the light source configuration and the camera shooting angle of the existing equipment are relatively fixed, and different optical requirements of surface defect detection (requiring a uniform surface light source) and hole wall defect detection (requiring a specific angle directional light source) are difficult to meet at the same time, so that the hole wall deep hole defect omission ratio is high. (2) There is a conflict between substrate positioning and protection. TGV glass substrate material is fragile, thickness is thin (0.1-1 mm in general), and current positioning mechanism adopts rigidity centre gripping or simple vacuum adsorption mode mostly. The rigid clamping is easy to generate stress concentration to cause substrate cracking, and if vacuum adsorption lacks real-time pressure monitoring and motion linkage protection, the substrate is easy to slip or deform and damage when scanning vibration or acceleration changes. (3) Detecting mode switching lacks flexibility. When the existing equipment detects surface defects and hole wall defects, the type of a light source is often required to be manually interfered to be switched or the angle of a camera is often required to be adjusted, the type of a current detection area is difficult to automatically identify according to hole position coordinate data, detection parameters are adjusted in real time, and the degree of automation and the detection continuity are insufficient. Therefore, a scanning detection method capable of adaptively adjusting a scanning strategy according to the structural characteristics of a TGV glass substrate hole, satisfying the requirements of detecting defects of a surface and a hole wall, and having a flexible safety protection mechanism is needed, so as to realize high-efficiency, high-precision and low-damage batch detection. Disclosure of Invention The invention aims to solve the problems in the prior art and provides a dual-axis synchronous stable scanning detection method for a TGV glass substrate. The invention adopts the technical scheme that: The dual-axis synchronous stable scanning detection method for the TGV glass substrate is executed based on a detection device comprising a dual-axis synchronous driving mechanism, a substrate bearing and positioning mechanism, a multi-degree-of-freedom visual scanning mechanism and a control system, and comprises the following steps of: (1) The control system acquires hole position coordinate data of the TGV glass substrate, divides a scanning area into a dense subarea and a sparse subarea according to the hole position space distribution density, generates a variable density scanning path, reduces the scanning speed of the dense subarea and improves the imaging resolution, and the sparse subarea improves the scanning speed and reduces the imaging resolution; (2) The double-shaft synchronous driving mechanism drives the substrate bearing positioning mechanism to move according to the variable density scanning path, the multi-degree-of-freedom visual scanning mechanism adjusts the light source and the rotation state according to the type of a detection target, wherein when the surface defect is detected, an annular light source in the multi-d