CN-122016893-A - Dual charged particle and energy dispersive spectroscopic imaging using diamond film

Abstract

The present invention provides an apparatus, device and method for simultaneous imaging in charged particle microscopy. The method further includes directing a charged particle beam toward the target by a charged particle beam source, wherein interaction of the charged particle beam with the target generates charged particle emissions and electromagnetic emissions. The method further includes receiving, by the film detector, the charged particle emissions and the electromagnetic emissions, wherein the film detector at least partially absorbs a portion of the charged particle emissions and is at least partially transparent to the electromagnetic emissions. The method further includes outputting, by the film detector, charged particle signal data based at least in part on the portion of the charged particle emissions received by the film detector. The method further includes outputting, by the electromagnetic emission detector, electromagnetic signal data based at least in part on electromagnetic emissions passing through the membrane detector.

Inventors

• V. Maher
• B. Straka
• L. Nowak
• P. Helavenca

Assignees

• FEI公司

Dates

Publication Date

20260512

Application Date

20251021

Priority Date

20241111

Claims (20)

1. 1. A method for imaging in charged particle microscopy, the method comprising: directing a charged particle beam by a charged particle beam source towards a target, wherein interaction of the charged particle beam with the target generates charged particle emissions and electromagnetic emissions; receiving, by a film detector, the charged particle emissions and the electromagnetic emissions, wherein the film detector at least partially absorbs a portion of the charged particle emissions and is at least partially transparent to the electromagnetic emissions; Outputting, by the film detector, charged particle signal data based at least in part on the portion of the charged particle emissions received by the film detector; Outputting electromagnetic signal data by an electromagnetic emission detector based at least in part on the electromagnetic emission through the film detector, and Target data is generated based at least in part on i) the charged particle signal data, ii) the electromagnetic signal data, or both i) and ii).
2. 2. The method of claim 1, wherein the film detector is a diamond film detector, and wherein outputting the charged particle signal data further comprises: absorbing electrons from the charged particle emission by the diamond film detector, and Image data is generated based at least in part on the electrons, wherein the target data includes the image data.
3. 3. The method of claim 1, wherein the electromagnetic emission detector is an Energy Dispersive Spectroscopy (EDS) detector and the electromagnetic emissions are X-ray emissions, and wherein outputting the electromagnetic signal data further comprises: receiving the X-ray emission passing through the membrane detector by the EDS detector, and Target characterization data is generated based at least in part on the X-ray emissions, wherein the target data includes the target characterization data.
4. 4. The method of claim 1, further comprising: electrons having energies in the energy range between 1 kiloelectron volt (keV) and 100keV are detected by the film detector.
5. 5. The method of claim 1, wherein directing the charged particle beam toward the target further comprises: A channel for directing the charged particle beam through a pole member; Directing the charged particle beam through a first aperture in the electromagnetic emission detector, and The charged particle beam is directed through a second aperture in the film detector, wherein the channel, the first aperture, and the second aperture are coaxially aligned along an axis passing through the channel, the first aperture, and the second aperture.
6. 6. The method of claim 5, wherein generating the target data occurs without moving the pole member, the electromagnetic emission detector, or the film detector relative to one another, and wherein outputting the charged particle signal data and the electromagnetic signal data occur substantially simultaneously.
7. 7. The method of claim 1, further comprising: Generating a topological map of the target using the charged particle emission, and An Energy Dispersive Spectroscopy (EDS) spectral correction is generated by at least partially applying the topological mapping to the target data.
8. 8. An apparatus for imaging in charged particle microscopy, the apparatus comprising: a charged particle source configured to generate a charged particle beam configured to interact with a target to generate charged particle emissions and electromagnetic emissions; A film detector configured to receive the charged particle emissions and the electromagnetic emissions, wherein the film detector at least partially absorbs a portion of the charged particle emissions and is at least partially transparent to the electromagnetic emissions, wherein the film detector is further configured to output charged particle signal data based at least in part on an interaction of the film detector with the charged particle emissions; An electromagnetic emission detector configured to output electromagnetic signal data based at least in part on the electromagnetic emission through the film detector, and A controller configured to generate target data based at least in part on i) the charged particle signal data, ii) the electromagnetic signal data, or both i) and ii).
9. 9. The apparatus of claim 8, wherein the controller is further configured to generate an image of the target based at least in part on i) the charged particle signal data, ii) the electromagnetic signal data, or both i) and ii).
10. 10. The apparatus of claim 8, wherein the electromagnetic emission detector is a silicon drift detector.
11. 11. The apparatus of claim 8, wherein the membrane detector is configured to be biased with a potential relative to the target to change an electron detection threshold.
12. 12. The apparatus of claim 8, wherein the membrane detector is configured with segmented electrodes for angled electronic detection.
13. 13. The apparatus of claim 8, wherein the membrane detector has a first configuration, and wherein the apparatus further comprises: a second membrane detector having a second configuration, wherein the first configuration is different from the second configuration.
14. 14. The apparatus of claim 13, wherein the first configuration comprises i) a first thickness of the film detector, ii) a first bias of the film detector, iii) a first position of the film detector, or a combination thereof, and wherein the second configuration comprises i) a second thickness of the second film detector, ii) a second bias of the second film detector, iii) a second position of the second film detector, or a combination thereof.
15. 15. An apparatus for imaging in charged particle microscopy, the apparatus comprising: A film detector configured for placement relative to a charged particle beam that generates charged particle emissions and electromagnetic emissions upon interaction with a target, wherein the film detector is configured to at least partially absorb the charged particle emissions and to be at least partially transparent to the electromagnetic emissions, wherein the film detector is further configured to output charged particle signal data based at least in part on the interaction of the film detector with the charged particle emissions, and An electromagnetic emission detector configured to output electromagnetic signal data based at least in part on the electromagnetic emissions passing through the film detector.
16. 16. The apparatus of claim 15, wherein the membrane detector comprises: Segment area, and A thin diamond film detector coupled to the segmented region, wherein the segmented region is configured to apply a bias voltage across the thin diamond film detector.
17. 17. The device of claim 15, wherein the film detector has a thickness in a range between 100 nanometers (nm) and 100 micrometers (μιη).
18. 18. The apparatus of claim 15, wherein the film detector comprises a first aperture and the electromagnetic emission detector comprises a second aperture, wherein the first aperture and the second aperture are substantially aligned and configured to receive the charged particle beam therethrough.
19. 19. The apparatus of claim 15, wherein the film detector is configured to be coupled to a surface of the electromagnetic emission detector.
20. 20. The apparatus of claim 15, wherein the film detector comprises an aperture, and wherein during operation of the charged particle beam: The film detector being positioned such that the charged particle beam passes through the aperture, and The electromagnetic emission detector is positioned obliquely with respect to the charged particle beam such that the charged particle beam is prevented from passing through the electromagnetic emission detector.

Description

Dual charged particle and energy dispersive spectroscopic imaging using diamond film Technical Field The present disclosure relates to charged particle microscope components, systems, and methods. More specifically, the present disclosure describes a dual detector charged particle microscope. Background In charged particle microscopy, scanning Electron Microscopy (SEM) uses electrons instead of light to generate images of the sample under investigation. To understand the working principle of SEM, it is important to grasp the concept of Back Scattered Electrons (BSE). BSE is a high-energy electron used to obtain high-resolution images showing the distribution of the various elements that make up the sample. Detection of BSE is typically performed by a detector using a semiconductor material (typically silicon) placed directly over the sample. Electrons striking the detector excite silicon electrons, thereby creating electron-hole pairs. Semiconductor detectors are sensitive to electrons having high energy, which is why they are used to detect backscattered electrons. The free electrons and electron pairs generated by the backscattered electrons may be separated prior to recombination, thereby generating an electrical current. The current may be measured by electronic circuitry and ultimately converted into a high resolution image containing information about the elemental composition of the sample. Alternatively, they will be reflected or "backscattered" out of the sample. In Energy Dispersive Spectroscopy (EDS) applications, it may also be useful to detect X-rays. The purpose of any EDS detector is to collect as many X-rays as possible. However, it has proven difficult to detect both backscattered electrons and X-rays because EDS detectors are vulnerable to electron damage and backscattered electron detectors block X-rays, so that there are small solid angle solutions that are not optimal and take a significant amount of time to acquire data. Disclosure of Invention In some embodiments, a method for imaging in charged particle microscopy. The method further includes directing a charged particle beam toward the target by a charged particle beam source, wherein interaction of the charged particle beam with the target generates charged particle emissions and electromagnetic emissions. The method further includes receiving, by the film detector, the charged particle emissions and the electromagnetic emissions, wherein the film detector at least partially absorbs a portion of the charged particle emissions and is at least partially transparent to the electromagnetic emissions. The method further includes outputting, by the film detector, charged particle signal data based at least in part on a portion of the charged particle emissions received by the film detector. The method further includes outputting, by the electromagnetic emission detector, electromagnetic signal data based at least in part on electromagnetic emissions passing through the membrane detector. The method further includes generating target data based at least in part on i) the charged particle signal data, ii) the electromagnetic signal data, or both i) and ii). In some embodiments, the film detector is a diamond film detector, and outputting the charged particle signal data may include emitting absorption electrons from the charged particles by the diamond film detector, and generating image data based at least in part on the electrons, such that the target data may include the image data. In some embodiments, the electromagnetic emission detector may be an Energy Dispersive Spectroscopy (EDS) detector, and the electromagnetic emission may be X-ray emission. In some examples, outputting the electromagnetic signal data may include receiving, by the EDS detector, X-ray emissions through the membrane detector, and generating target characterization data based at least in part on the X-ray emissions such that the target data includes the target characterization data. In some embodiments, the method may include detecting, by a film detector, electrons having energies in an energy range between 1 kiloelectron volt (keV) and 100 keV. In some embodiments, directing the charged particle beam toward the target may include directing the charged particle beam through a channel of a pole member, directing the charged particle beam through a first aperture in an electromagnetic emission detector, and directing the charged particle beam through a second aperture in a film detector. In some examples, the channel, the first aperture, and the second aperture may be coaxially aligned along an axis passing through the channel, the first aperture, and the second aperture. In some embodiments, generating the target data occurs without moving the pole member, the electromagnetic emission detector, or the film detector relative to one another, and wherein outputting the charged particle signal data and the electromagnetic signal data occurs substantially simultaneous