CN-122016895-A - X-ray back scattering signal acquisition circuit board of diffraction crystal

CN122016895ACN 122016895 ACN122016895 ACN 122016895ACN-122016895-A

Abstract

The invention discloses an X-ray back scattering signal acquisition circuit board of a diffraction crystal, which relates to the technical field of X-ray detection and comprises an acquisition unit integration module, a signal processing module, a judgment criterion module, a power consumption system building module and a mode switching module; according to the invention, through integrating the X-ray back scattering signal acquisition unit and the crystal weak current signal acquisition unit, two signals are synchronously acquired and subjected to filtering processing, and the characteristic matching degree is calculated after the characteristic parameters of the two signals are extracted, so that effective signals and interference signals are distinguished and a signal analysis result is formed.

Inventors

YU BOLIN
LIU YUANSEN
WU FEI
XIAO YONGXIANG

Assignees

上海琼玖探测技术有限公司

Dates

Publication Date: 20260512
Application Date: 20260305

Claims (9)

1. An X-ray back-scattered signal acquisition circuit board of a diffraction crystal, characterized in that the circuit board comprises: the acquisition unit integration module is used for integrating the X-ray back-scattering signal acquisition unit and the crystal weak current signal acquisition unit and synchronously acquiring an X-ray back-scattering signal and a crystal weak current signal generated by the diffraction crystal under X-ray irradiation; The signal processing module is used for processing the X-ray back-scattering signal and the weak current signal of the crystal, extracting characteristic parameters of the two signals, calculating characteristic matching degree, distinguishing the effective X-ray back-scattering signal and the interference signal of the diffraction crystal, and forming a signal analysis result; the judging criterion module is used for setting an intensity threshold value of the effective X-ray back-scattering signal, determining logic for fusion judgment of the X-ray back-scattering signal and the weak current signal of the crystal, and forming a threshold value judging criterion; the power consumption system construction module is used for constructing a dynamic power consumption intelligent regulation system based on a signal analysis result and a threshold judgment criterion, dividing three working modes of high-speed acquisition, low-power consumption standby and dormancy, configuring a power consumption monitoring unit, and determining the execution frequency after fine adjustment in each working mode according to power consumption data; and the mode switching module is used for switching to the corresponding working mode based on the judgment result of the threshold judgment criterion and adjusting the execution frequency of the circuit board in each working mode according to the execution frequency after fine adjustment.
2. The X-ray back-scattered signal collecting circuit board for diffraction crystal according to claim 1, wherein in the collecting unit integrating module, the X-ray back-scattered signal collecting unit adopts a silicon drift detector as a detecting element, the crystal weak current signal collecting unit is configured with a low noise pre-amplifying circuit, the X-ray back-scattered signal collecting unit and the crystal weak current signal collecting unit synchronously perform collecting operation through a time sequence triggering unit, and all adopt a multilayer wiring technology to perform circuit integration, so that a signal transmission path of the X-ray back-scattered signal collecting unit is physically isolated from a signal transmission path of the crystal weak current signal collecting unit.
3. The X-ray back-scattered signal collecting circuit board for diffraction crystal according to claim 1, wherein in the signal processing module, the X-ray back-scattered signal and the weak current signal of the crystal are respectively filtered, the amplitude characteristic parameter, the pulse width characteristic parameter and the rising edge characteristic parameter of the two filtered signals are extracted, the characteristic matching degree of the two signals is calculated through a bimodal signal characteristic matching degree formula, the effective X-ray back-scattered signal data is screened based on the characteristic matching degree, and the effective X-ray back-scattered signal data is integrated to form a signal analysis result.
4. The X-ray back-scattered signal acquisition circuit board of claim 3, wherein the signal processing module has a bimodal signal characteristic matching formula: , wherein, The degree of matching of the features, Is the first of the X-ray back-scattered signals The number of characteristic parameters of the device is, The first to be the weak current signal of the crystal The number of characteristic parameters of the device is, 、 Respectively mean values of the two signal characteristic parameters, 、 Is a weight coefficient; screening effective X-ray back scattering signal data based on feature matching degree When the diffraction crystal is judged to be effective in X-ray back scattering signal And judging the signal as an interference signal and performing secondary acquisition.
5. The diffraction crystal X-ray back-scatter signal acquisition circuit board of claim 1, wherein the determination criterion module has an effective X-ray back-scatter signal intensity threshold of The logic of the fusion judgment of the two signals is a double parallel judgment condition, the characteristic matching degree of the X-ray back-scattered signal and the weak current signal of the crystal and the condition that the intensity of the effective X-ray back-scattered signal meets the standard are taken as the quantitative judgment condition of mode switching, and the condition that the intensity of the effective X-ray back-scattered signal meets the standard is simultaneously satisfied, wherein the condition one is the characteristic matching degree of the X-ray back-scattered signal and the weak current signal of the crystal Condition II is the effective X-ray back-scattered signal intensity 。
6. The circuit board for collecting X-ray back-scattered signals of a diffraction crystal according to claim 5, wherein said judgment criterion module calculates an integrated judgment value of the effective signal by a bimodal effective signal judgment value formula based on satisfaction of a double parallel judgment condition Quantifying the reliability of the effective signal when When the signal is a high reliable effective signal When the signal is effective, when And is a low reliable valid signal, thereby forming a complete threshold decision criterion.
7. The X-ray back-scattered signal acquisition circuit board of claim 6, wherein in the determination criterion module, the bimodal effective signal determination value formula is: , wherein, For the comprehensive decision value of the effective signal, For the intensity of the effective X-ray backscatter signal, For an effective X-ray backscatter signal intensity threshold, The feature matching degree is 0.6 and 0.4 are judgment coefficients.
8. The X-ray back scattering signal acquisition circuit board of the diffraction crystal according to claim 1, wherein in the power consumption system construction module, three divided working modes are a high-speed acquisition mode, a low-power consumption standby mode and a sleep mode, the three working modes respectively correspond to effective signal reliability, the high-reliability effective signal corresponds to the high-speed acquisition mode, signal acquisition and processing operations are executed at the highest frequency, the medium-reliability effective signal corresponds to the low-power consumption standby mode, the execution frequency of signal acquisition and processing is reduced, only basic signal monitoring capability is maintained, the low-reliability effective signal corresponds to the sleep mode, a main power supply loop of each acquisition unit is cut off, and only micro-power consumption operation of a signal awakening function is reserved.
9. The X-ray back-scattered signal collecting circuit board for diffraction crystal according to claim 1, wherein in the power consumption system building module, power consumption data of the circuit board in different working modes are collected in real time through a power consumption monitoring unit, and the execution frequency after fine adjustment in each working mode is determined according to the power consumption data through a dynamic frequency adjustment formula, wherein the dynamic frequency adjustment formula is as follows: , wherein, In order to fine-tune the execution frequency, For the initial execution frequency in each mode, For a preset power consumption threshold in each mode, And collecting power consumption data for the power consumption monitoring unit in real time.

Description

X-ray back scattering signal acquisition circuit board of diffraction crystal Technical Field The invention relates to the technical field of X-ray detection, in particular to an X-ray back scattering signal acquisition circuit board of a diffraction crystal. Background In the fields of modern material science, semiconductor manufacturing, geological exploration and the like, the structural characterization requirement on diffraction crystals is continuously increased, an X-ray back scattering signal acquisition technology is used as a core means for acquiring crystal lattice information, and is widely applied to key scenes such as crystal defect detection, lattice parameter analysis and the like, and along with the continuous improvement of requirements of related industries on detection precision and stability, the application scene of diffraction crystal signal acquisition equipment is increasingly diversified, and the diffraction crystal signal acquisition equipment is expanded from laboratory precision analysis to industrial field real-time detection and becomes an important support for promoting the technical upgrading of the related fields. However, in the prior art, in the process of collecting the diffraction crystal X-ray back-scattered signals, a single signal collecting mode is adopted, only the X-ray back-scattered signals are collected and processed, the auxiliary judging effect of weak current signals generated by the excitation of the crystals by the X-rays is ignored, effective signals and environment stray interference signals are difficult to accurately distinguish, deviation of signal analysis results is easy to occur, meanwhile, the power consumption management mode of the traditional collecting circuit board is stiff, the running state cannot be adjusted according to the effective degree of the signals, the collecting operation is always carried out in a fixed mode, a real-time power consumption monitoring and frequency fine-tuning mechanism is lacked, and the adaptation of the collecting requirements and the running state cannot be realized. Disclosure of Invention The invention aims to make up the defects of the prior art and provides an X-ray back-scattered signal acquisition circuit board of a diffraction crystal, the invention synchronously acquires two signals and carries out filtering treatment by integrating an X-ray back-scattered signal acquisition unit and a crystal weak current signal acquisition unit, calculates the characteristic matching degree after extracting the characteristic parameters of the two signals, so as to distinguish effective signals and interference signals and form signal analysis results, the process relies on the homology and relevance of the two signals, realizes the accurate discrimination of effective signals by means of characteristic matching, avoids the condition that single signals are influenced by environmental stray factors during acquisition, ensures the stability and accuracy of signal analysis links, enables the acquired signals to truly reflect the lattice characteristics of diffraction crystals, and provides a stable and reliable signal basis for mode discrimination. The invention provides a technical scheme for solving the technical problems, which is that an X-ray back scattering signal acquisition circuit board of a diffraction crystal comprises: the acquisition unit integration module is used for integrating the X-ray back-scattering signal acquisition unit and the crystal weak current signal acquisition unit and synchronously acquiring an X-ray back-scattering signal and a crystal weak current signal generated by the diffraction crystal under X-ray irradiation; The signal processing module is used for processing the X-ray back-scattering signal and the weak current signal of the crystal, extracting characteristic parameters of the two signals, calculating characteristic matching degree, distinguishing the effective X-ray back-scattering signal and the interference signal of the diffraction crystal, and forming a signal analysis result; the judging criterion module is used for setting an intensity threshold value of the effective X-ray back-scattering signal, determining logic for fusion judgment of the X-ray back-scattering signal and the weak current signal of the crystal, and forming a threshold value judging criterion; the power consumption system construction module is used for constructing a dynamic power consumption intelligent regulation system based on a signal analysis result and a threshold judgment criterion, dividing three working modes of high-speed acquisition, low-power consumption standby and dormancy, configuring a power consumption monitoring unit, and determining the execution frequency after fine adjustment in each working mode according to power consumption data; and the mode switching module is used for switching to the corresponding working mode based on the judgment result of the threshold judgment criterion