CN-122017346-A - Method for measuring volume resistivity of aluminum nitride ceramic disc of electrostatic chuck

CN122017346ACN 122017346 ACN122017346 ACN 122017346ACN-122017346-A

Abstract

The invention discloses a method for measuring volume resistivity of an aluminum nitride ceramic disc of an electrostatic chuck, which belongs to the technical field of electrostatic chucks and comprises the steps of S1, preparing an aluminum nitride ceramic disc by a sample, fully soaking the aluminum nitride ceramic disc in isopropanol to remove dirt on the surface of the aluminum nitride ceramic disc, taking out and drying for standby, S2, preparing high-temperature sintered silver paste by preparing silver paste, wherein the solid content of the silver paste is 70-80%, S3, printing and fixing a printing screen plate, precisely printing electrode patterns on the aluminum nitride ceramic disc, S4, drying the printed sample by heat treatment, performing heat treatment in a sintering furnace, and keeping the temperature of the heat treatment at 500-850 ℃ for 0.5-1.5 h, wherein the silver layer printed by the electrode patterns is changed from a non-conductive green body to a compact, bright silver electrode with excellent conductivity and adhesion, and S5, installing and connecting the sample printed with the electrode, and sequentially measuring the volume resistivity and the surface resistivity at normal temperature and high temperature by adjusting a muffle furnace.

Inventors

SHI ZHEYUAN
OUYANG CHU
LI JUN

Assignees

君原电子科技(海宁)有限公司

Dates

Publication Date: 20260512
Application Date: 20251227

Claims (5)

1. A method for measuring volume resistivity of an aluminum nitride ceramic disc for an electrostatic chuck, the method comprising: Step S1 sample preparation Preparing an aluminum nitride ceramic wafer, fully soaking the aluminum nitride ceramic wafer in isopropanol to remove dirt on the surface of the aluminum nitride ceramic wafer, and taking out and drying for later use; Step S2, preparing silver paste Preparing high-temperature sintering type silver paste, wherein the solid content of the silver paste is 70-80%; Step S3 printing After fixing the printing screen, accurately printing electrode patterns on the aluminum nitride ceramic wafer; step S4 heat treatment Drying the printed sample, and performing heat treatment in a sintering furnace at the temperature of 500-850 ℃ for 0.5-1.5 h, wherein the silver layer printed by the electrode pattern is changed from a non-conductive green body into a compact, bright silver electrode with excellent conductivity and adhesive force; step S5, mounting And (3) installing and connecting the samples with the printed electrodes, and sequentially measuring the volume resistivity and the surface resistivity at normal temperature and high temperature by adjusting a muffle furnace.
2. The method for measuring volume resistivity of an aluminum nitride ceramic disc for an electrostatic chuck according to claim 1, wherein the method for preparing silver paste in the step S2 comprises uniformly mixing silver powder particles, glass frit, an organic binder and a solvent to prepare conductive silver paste.
3. The method for measuring volume resistivity of aluminum nitride ceramic disc for electrostatic chuck according to claim 2, wherein in the step S4, the heat treatment comprises: And drying the printed sample at the temperature of 100-150 ℃ to evaporate the solvent, and then performing heat treatment at the temperature of 700-850 ℃ in a sintering furnace, wherein in the process, the organic binder is burnt out, the glass powder is melted, the silver particles are firmly bonded on the aluminum nitride ceramic sheet, and the silver particles are mutually fused to form the continuous, compact and good-conductivity silver electrode.
4. The method according to claim 1, wherein in the step S3, silver paste is printed on the aluminum nitride ceramic plate according to the designed electrode pattern by printing screen.
5. The method for measuring volume resistivity of an aluminum nitride ceramic disk for an electrostatic chuck according to claim 4, wherein said electrode pattern is printed according to a shape of an electrode silver block used at the time of measurement, said electrode silver block comprising an annular silver block and a disk-shaped silver block, said electrode pattern comprising an annular electrode pattern mated with said annular silver block, and a circular electrode pattern mated with said disk-shaped silver block.

Description

Method for measuring volume resistivity of aluminum nitride ceramic disc of electrostatic chuck Technical Field The invention relates to the technical field of electrostatic chucks, in particular to a method for measuring volume resistivity of an aluminum nitride ceramic disc of an electrostatic chuck. Background Volume resistivity and surface resistivity are important parameters for measuring the electrical properties of materials, and are widely applied to the fields of semiconductors, new energy sources, automobile electronics, material chemistry, component detection technologies and the like. The conventional simple aluminum nitride ceramic high-temperature volume resistivity measurement mode is to use a muffle furnace and a high-resistance meter, however, the phenomenon that the current is abnormal and the interface is displayed as VAL (meaning invalid value) occurs, and the problem of poor contact between a sample and an electrode exists. Disclosure of Invention The invention aims to provide a method for measuring volume resistivity of an aluminum nitride ceramic disc of an electrostatic chuck, so as to solve the problems in the background art. In order to solve the technical problems, the technical scheme of the invention is as follows: a method for measuring volume resistivity of an aluminum nitride ceramic disk for an electrostatic chuck, the method comprising: Step S1 sample preparation Preparing an aluminum nitride ceramic wafer, fully soaking the aluminum nitride ceramic wafer in isopropanol to remove dirt on the surface of the aluminum nitride ceramic wafer, and taking out and drying for later use; Step S2, preparing silver paste Preparing high-temperature sintering type silver paste, wherein the solid content of the silver paste is 70-80%; Step S3 printing After fixing the printing screen, accurately printing electrode patterns on the aluminum nitride ceramic wafer; step S4 heat treatment Drying the printed sample, and performing heat treatment in a sintering furnace at the temperature of 500-850 ℃ for 0.5-1.5 h, wherein the silver layer printed by the electrode pattern is changed from a non-conductive green body into a compact, bright silver electrode with excellent conductivity and adhesive force; step S5, mounting And (3) installing and connecting the samples with the printed electrodes, and sequentially measuring the volume resistivity and the surface resistivity at normal temperature and high temperature by adjusting a muffle furnace. Preferably, in the step S2, the method for preparing the silver paste comprises the step of uniformly mixing silver powder particles, glass powder, an organic binder and a solvent to prepare the conductive silver paste. Preferably, in the step S4, the heat treatment includes: And drying the printed sample at the temperature of 100-150 ℃ to evaporate the solvent, and then performing heat treatment at the temperature of 700-850 ℃ in a sintering furnace, wherein in the process, the organic binder is burnt out, the glass powder is melted, the silver particles are firmly bonded on the aluminum nitride ceramic sheet, and the silver particles are mutually fused to form the continuous, compact and good-conductivity silver electrode. Preferably, in the step S3, silver paste is printed on the aluminum nitride ceramic sheet according to the designed electrode pattern by printing screen. Preferably, the electrode pattern is printed according to the shape of an electrode silver block used in measurement, the electrode silver block includes a ring-shaped silver block and a disc-shaped silver block, and the electrode pattern includes a ring-shaped electrode pattern mated with the ring-shaped silver block and a circular electrode pattern mated with the disc-shaped silver block. By adopting the technical scheme, the method has the following beneficial effects: According to the invention, the electrode pattern with a protective effect is introduced, the interference of surface leakage current is shielded, the accuracy of volume resistivity measurement is remarkably improved, a printing silver plating process is adopted between an aluminum nitride ceramic wafer sample and an electrode, the contact resistance is reduced to a negligible level, the systematic error caused by poor electric contact is avoided, and the temperature conversion is carried out through a muffle furnace, so that the accurate measurement of the volume resistivity and the surface resistivity under normal temperature and high temperature conditions is realized. Drawings FIG. 1 is a schematic diagram of a method for measuring volume resistivity of an aluminum nitride ceramic disk for an electrostatic chuck according to the present invention; FIG. 2 is a schematic diagram of the structure of the shape of a printed electrode pattern; FIG. 3 is a schematic diagram of a structure for measuring volume resistivity; Fig. 4 is a schematic structural diagram of measuring surface resistivity. Detailed Description The f