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CN-122017524-A - Stage for probe station

CN122017524ACN 122017524 ACN122017524 ACN 122017524ACN-122017524-A

Abstract

The invention is suitable for semiconductor detection equipment, and provides an objective table for a probe table, which comprises an objective table body, a driving unit, an accuracy guarantee unit and a central control module; the driving unit is in transmission connection with the objective table body and is used for driving the objective table body to realize multi-degree-of-freedom motion; the precision guarantee unit is sequentially arranged along the motion transmission path and comprises a flexible self-adaptive transmission module, a real-time error detection and compensation module and a multi-dimensional collaborative calibration module; in the invention, the first weight is a flexible self-adaptive transmission module, and the gap of a transmission pair is eliminated through an elastic pre-tightening mechanism; the second is a real-time error detection and compensation module, and a dynamic compensation model is built based on the laser interferometry signals; thirdly, a multidimensional collaborative calibration module is used for realizing the depth correction of the spatial gesture and the motion trail; through progressive compensation design, the positioning error of the objective table is reduced from the micron level to the nanometer level, and the accuracy and the stability of the detection of the semiconductor device are effectively improved.

Inventors

  • WANG TINGYUN
  • ZHANG XIONG
  • WANG QIANGSHENG
  • FU GUOXING

Assignees

  • 海翔科技有限公司

Dates

Publication Date
20260512
Application Date
20260126

Claims (10)

  1. 1. The objective table for the probe station is characterized by comprising an objective table body (1), a driving unit (2), an accuracy guaranteeing unit (3) and a central control module (4); the driving unit (2) is in transmission connection with the objective table body (1) and is used for driving the objective table body (1) to realize multi-degree-of-freedom motion; the precision guarantee unit (3) is sequentially arranged along a motion transmission path and comprises a flexible self-adaptive transmission module (31), a real-time error detection and compensation module (32) and a multi-dimensional collaborative calibration module (33); the flexible self-adaptive transmission module (31) is connected in series between the driving unit (2) and the objective table body (1) and is used for eliminating a gap in the driving transmission process; The real-time error detection and compensation module (32) is connected with the objective table body (1) and is used for detecting the real-time motion error of the objective table body (1) and outputting a compensation signal; The multidimensional collaborative calibration module (33) is in signal connection with the real-time error detection and compensation module (32) and is used for carrying out space attitude calibration on the compensated motion trail; The driving unit (2) and the precision guarantee unit (3) are connected with the central control module (4) through signals, and the central control module (4) realizes progressive control on the motion of the object stage body (1) according to feedback signals of the triple modules.
  2. 2. The stage for a probe station according to claim 1, wherein the flexible adaptive transmission module (31) includes a transmission connector (311), an elastic pretensioner assembly (312), and a gap detector (313); the elastic pre-tightening assembly (312) is arranged inside the transmission connecting piece (311), the gap detection piece (313) is used for detecting a gap value between the transmission connecting piece (311) and the output end of the driving unit (2), and the pre-tightening force of the elastic pre-tightening assembly (312) meets the formula: , wherein, The target pretension force required for the elastic pretension assembly, Is the rigidity coefficient of the elastic pre-tightening component, For the clearance value between the transmission connection piece and the output end of the driving unit, Is the initial pre-tightening force.
  3. 3. The stage for a probe station according to claim 2, wherein the elastic pre-tightening assembly (312) comprises an elastic member (3121), an adjusting member (3122) and a pressure detecting member (3123), the adjusting member (3122) is connected with the transmission connecting member (311) in an adapting way, the elastic member (3121) is sleeved on the adjusting member (3122), and the pressure detecting member (3123) is arranged at the contact end of the elastic member (3121) and the transmission connecting member (311) for collecting the actual value of the pre-tightening force in real time and feeding back to the central control module (4).
  4. 4. The stage for a probe station according to claim 1, wherein the real-time error detection and compensation module (32) includes a linear error detection member (321), an attitude error detection member (322), and a compensation actuator (323); The linear error detection part (321) is used for detecting linear motion errors of the object stage body (1), and the attitude error detection part (322) is used for collecting attitude errors of the object stage body (1); The central control module (4) builds a dynamic compensation model based on the detection signals, and the compensation quantity meets the formula: wherein, delta is the total compensation quantity of dynamic motion, Is the linear motion error of the object stage body, Is the attitude error of the object stage body, Compensating for ambient disturbances.
  5. 5. The probe station stage according to claim 4, wherein the environmental disturbance compensation correction amount is obtained by acquiring an environmental parameter difference between the stage body (1) and the environment by the environmental detection member (324), and the specific formula is: , wherein, The correction amount is compensated for the environmental disturbance, Is the characteristic coefficient of the object stage body material, For the effective length of movement of the stage body, Is the difference between the object stage body and the environmental parameters of the environment.
  6. 6. The probe stage according to claim 4, wherein the compensation actuator (323) is a high-precision telescopic actuator, and the high-precision telescopic actuator is connected to the stage body (1) and has a telescopic amount linearly corresponding to the compensation amount outputted from the central control module (4).
  7. 7. The stage for a probe station according to claim 1, wherein the multi-dimensional cooperative calibration module (33) includes a positioning recognition unit (331), a spatial posture detection unit (332), and a cooperative calibration execution unit (333); the positioning and identifying component (331) is used for collecting the position information of a reference mark of a workpiece to be detected on the object stage body (1), and the space gesture detecting piece (332) is used for collecting the space gesture parameters of the object stage body (1); The central control module (4) constructs a space coordinate system based on the information, and the calibration quantity meets the formula: , wherein, For the total calibration quantity of the spatial pose, For the spatial displacement deviation of the stage body in the x direction, For the spatial displacement deviation of the stage body in the y direction, Is arranged on the object stage body The deviation of the spatial displacement of the direction, Is the attitude angle deviation of the object stage body.
  8. 8. The stage for a probe station of claim 7, wherein the positioning recognition unit (331) includes an image pickup element (3311) and an optical magnifying element (3312), and the image pickup element (3311) is configured to recognize the fiducial mark with high accuracy.
  9. 9. The probe stage according to claim 1, wherein the central control module (4) comprises a signal processing unit (41) and a motion control unit (42), the signal processing unit (41) is used for realizing real-time processing of signals of the triple modules and calculation of compensation amounts and calibration amounts, and the motion control unit (42) is used for realizing motion control of the driving unit (2) and each execution assembly.
  10. 10. The objective table for the probe station according to claim 1, wherein the objective table body (1) is made of a material with high rigidity and low expansion coefficient, the surface of the objective table body is subjected to precision machining, and a workpiece fixing structure (11) is arranged on the objective table body (1) and used for fixing a workpiece to be detected.

Description

Stage for probe station Technical Field The invention belongs to semiconductor detection equipment, and particularly relates to an objective table for a probe station. Background The probe station is core equipment in the detection process of the semiconductor device, and the positioning accuracy of the object stage for the probe station directly determines the contact accuracy of the probe and the pins of the device, thereby affecting the reliability of the detection result. Along with the development of the semiconductor technology to micro-nano level, the requirement on the positioning precision of the objective table for the probe station is increasingly improved, the positioning precision of the objective table for the main flow probe station in the current market is difficult to meet the detection requirement of the prior process device, and the prior art has the following problems to be solved in a urgent way: The basic positioning deviation caused by transmission gaps is that the prior object stage for the probe station mostly adopts mechanical transmission structures such as a screw rod, a guide rail and the like, and the transmission pairs inevitably have gaps; in the prior art, a fixed pre-tightening mode adopted by the prior art cannot be adaptively adjusted according to the dynamic change of the gap, the pre-tightening force is too large to easily increase transmission resistance, the abrasion of parts is aggravated, and the gap cannot be effectively eliminated due to too small pre-tightening force; The precision attenuation caused by dynamic errors and environmental interference is that the object stage for the probe station is influenced by factors such as vibration, load change, temperature fluctuation and the like of a driving motor in the motion process, so that dynamic displacement errors and attitude deviation can be generated; The whole precision caused by the space attitude deviation is insufficient, the precision guarantee of the existing objective table for the probe table is concentrated on single-dimensional displacement compensation, and the space attitude change (such as pitching, rolling, rotating and the like) of the objective table in the motion process is ignored; Thus, a stage for a probe station is required to solve the above-described problems. Disclosure of Invention An objective of an embodiment of the present invention is to provide a stage for a probe station to solve the above-mentioned problems in the background art. In order to achieve the above purpose, the present invention provides the following technical solutions: The objective table for the probe table comprises an objective table body, a driving unit, an accuracy guarantee unit and a central control module; The driving unit is in transmission connection with the objective table body and is used for driving the objective table body to realize multi-degree-of-freedom motion; the precision guarantee unit is sequentially arranged along the motion transmission path and comprises a flexible self-adaptive transmission module, a real-time error detection and compensation module and a multi-dimensional collaborative calibration module; the flexible self-adaptive transmission module is connected in series between the driving unit and the objective table body and is used for eliminating a gap in the driving transmission process; the real-time error detection and compensation module is connected with the objective table body and is used for detecting the real-time motion error of the objective table body and outputting a compensation signal; the multidimensional collaborative calibration module is in signal connection with the real-time error detection and compensation module and is used for carrying out space attitude calibration on the compensated motion track; The driving unit and the precision guarantee unit are connected with the central control module through signals, and the central control module realizes progressive control on the motion of the object stage body according to feedback signals of the triple modules. According to a further technical scheme, the flexible self-adaptive transmission module comprises a transmission connecting piece, an elastic pre-tightening assembly and a gap detection piece; The elastic pre-tightening assembly is arranged inside the transmission connecting piece, the gap detection piece is used for detecting the gap value between the transmission connecting piece and the output end of the driving unit, and the pre-tightening force of the elastic pre-tightening assembly meets the formula: , wherein, The target pretension force required for the elastic pretension assembly,Is the rigidity coefficient of the elastic pre-tightening component,For the clearance value between the transmission connection piece and the output end of the driving unit,Is the initial pre-tightening force. According to a further technical scheme, the elastic pre-tightening assembly comprises an elastic piece, an