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CN-122017526-A - Chip testing equipment and chip testing method

CN122017526ACN 122017526 ACN122017526 ACN 122017526ACN-122017526-A

Abstract

The invention relates to the technical field of chip testing, in particular to chip testing equipment and a chip testing method, which comprise a motor arranged in a processing table, wherein the output end of the motor is in transmission connection with a rotary table, the top end of the processing table is provided with a connecting frame, the outer side of the connecting frame is fixedly connected with two groups of first guide rods, the outer side of the first guide rods is in sliding connection with a transverse plate, the inner side of the transverse plate is fixedly connected with a tester, the chip testing equipment further comprises at least four groups of suction pipes fixedly connected in the rotary table, the top end of each suction pipe is provided with a plurality of groups of suction holes, and the periphery of each suction pipe is provided with a suction mechanism for sucking chips. According to the invention, through the structural design of the linkage mechanism, the linkage mechanism controls the tester to press the chip only under the detection position, and the chip is kept separate in the transfer process, so that the mechanism avoids continuous friction between the chip and the tester during chip conveying, ensures the contact during the test, effectively reduces unnecessary abrasion, thereby protecting the chip and the tester and improving the durability of equipment.

Inventors

  • YAN BIAO
  • HU ZHIJUN
  • WANG WENBING

Assignees

  • 深圳市容微精密电子有限公司

Dates

Publication Date
20260512
Application Date
20260129

Claims (10)

  1. 1. The utility model provides a chip test equipment, including installing at inside motor (2) of processing platform (1), motor (2) output transmission is connected with revolving stage (3), and link (4) are installed on processing platform (1) top, and link (4) outside rigid coupling has two sets of guide bars one (6), and guide bar one (6) outside sliding connection has diaphragm (7), and the inside rigid coupling of diaphragm (7) has tester (8), its characterized in that still includes: At least four groups of suction pipes (9) fixedly connected in the turntable (3), hollow concave blocks are fixedly connected on the outer sides of the suction pipes (9), a plurality of groups of adsorption holes (10) are formed in the top ends of the suction pipes (9), and an adsorption mechanism for adsorbing chips is arranged on the periphery of the suction pipes (9); the mechanical arm (11) is arranged at the top end of the processing table (1), the sucker (12) is arranged at the output end of the mechanical arm (11), and the periphery of the sucker (12) is provided with a dust removing mechanism for blowing away impurities on the surface of the chip; the buffer mechanism is used for relieving impact force generated when the dust removing mechanism moves downwards; the isolation plate (13) is slidably connected inside the hollow concave block, a closing mechanism is arranged on the periphery of the isolation plate (13) and used for driving the isolation plate (13) to block an inner channel of the suction pipe (9) when the buffer mechanism operates, and the adsorption of the chip by the adsorption mechanism is removed.
  2. 2. The chip testing equipment according to claim 1, wherein the adsorption mechanism comprises a vacuum pump (14), a transmission pipe (15), a concave plate (16) and a connecting ring plate (17), the vacuum pump (14) is arranged at the top end of the processing table (1), the transmission pipe (15) is fixedly connected with the output end of the vacuum pump (14), one end of the transmission pipe (15) away from the vacuum pump (14) is fixedly connected with the inner part of the concave plate (16), the concave plate (16) is fixedly connected at the top end of the processing table (1), the connecting ring plate (17) is rotationally connected on the inner wall of the concave plate (16), and the inner part of the connecting ring plate (17) is fixedly connected with the outer side of the suction pipe (9).
  3. 3. The chip testing equipment according to claim 1, wherein the dust removing mechanism comprises a piston tube (18), a supporting frame (19), a piston rod (20), a piston plate (21), an air tube (22) and a first spring (23), the piston tube (18) is arranged on the outer side of the sucker (12), the supporting frame (19) is fixedly connected between the piston tube (18) and the sucker (12), the piston rod (20) is fixedly connected with the bottom end of the piston plate (21), the piston plate (21) is slidably connected on the inner wall of the piston tube (18), the air tube (22) is fixedly connected inside the piston tube (18), the air tube (22) is communicated with the inner part of the piston tube (18), and the first spring (23) is fixedly connected between the inner wall of the piston tube (18) and the piston plate (21).
  4. 4. A chip testing apparatus according to claim 3, wherein the buffer mechanism comprises a buffer plate (24), two groups of guide rods (25), two springs (26) and a pressing rod (27), the two groups of guide rods (25) are fixedly connected to the top end of the turntable (3), the two groups of guide rods (25) respectively slide through two ends of the buffer plate (24), the two springs (26) are sleeved on the outer side of the two guide rods (25), the two springs (26) are fixedly connected between the turntable (3) and the buffer plate (24), and the pressing rod (27) is fixedly connected to the bottom end of the buffer plate (24).
  5. 5. The chip testing apparatus according to claim 4, wherein the closing mechanism comprises a triangular block (28), two groups of guide rods (29) and a spring (30), the triangular block (28) is arranged at the bottom end of the pressing rod (27), the triangular block (28) is fixedly connected with one end of the isolation plate (13) far away from the suction pipe (9), two groups of guide rods (29) are fixedly connected with the outer side of the suction pipe (9), the two groups of guide rods (29) are respectively and slidably penetrated through the isolation plate (13), the isolation plate (13) is in an L-shaped arrangement, and the spring (30) is fixedly connected between the suction pipe (9) and the isolation plate (13).
  6. 6. A chip testing apparatus according to claim 5, wherein the elastic potential energy of the first spring (23) is greater than the sum of the elastic potential energy of the second (26) and third (30) sets of springs.
  7. 7. The chip testing device according to claim 1, wherein four groups of connecting rods (31) are fixedly connected to the top end of the turntable (3), one ends of the four groups of connecting rods (31) far away from the turntable (3) are fixedly connected with trapezoid blocks (32), a linkage mechanism matched with the trapezoid blocks (32) is arranged on the outer side of the transverse plate (7), and the linkage mechanism is used for driving the tester (8) to move downwards to attach the chip when the chip reaches the lower side of the tester (8).
  8. 8. The chip testing equipment according to claim 7, wherein the linkage mechanism comprises a connecting ball (33), side rods (34) and two groups of four springs (35), the connecting ball (33) is attached to the bottom end of the trapezoid block (32), the side rods (34) are fixedly connected between the connecting ball (33) and the transverse plate (7), the two groups of four springs (35) are respectively sleeved on the outer sides of the two groups of one guide rod (6), and the four springs (35) are fixedly connected between the transverse plate (7) and the connecting frame (4).
  9. 9. The chip testing apparatus according to claim 5, wherein the pressing bar (27) and the triangular block (28) are made of polyoxymethylene.
  10. 10. A chip testing method applied to a chip testing apparatus according to any one of claims 1 to 9, characterized in that the method comprises the steps of: s1, uniformly placing chips on a rotary table (3), starting a motor (2), driving the rotary table (3) to rotate, and driving the chips to move when the rotary table (3) rotates; S2, when the chip moves to the lower part of the tester (8), the turntable (3) drives the trapezoid block (32) to squeeze the linkage mechanism through the connecting rod (31); S3, the linkage mechanism is stressed to drive the tester (8) to move downwards, so that the tester (8) is attached to the chip, specific electric signal excitation is applied to the chip, and output response is monitored, so that whether the chip has defects or not and whether the performance meets the standards or not is judged.

Description

Chip testing equipment and chip testing method Technical Field The present invention relates to the field of chip testing technologies, and in particular, to a chip testing apparatus and a chip testing method. Background The chip is an information processing, storing and transmitting carrier, the performance and quality of the chip directly determine the overall efficiency and reliability of the electronic product, in order to ensure that the functions of the manufactured chip meet the design specifications, chip testing is an indispensable key link in the integrated circuit industry chain, and the chip testing refers to applying specific electric signal excitation to the chip through special testing equipment after the chip is manufactured, and monitoring the output response of the chip, so that whether the chip has defects or not and whether the performance meets the standards or not is judged. In order to ensure the test stability, the chip test is usually carried out by adopting vacuum adsorption, however, the adsorption is removed after the test is finished, so that the vacuum pump is forced to be started and stopped frequently, and the repeated working state reduces the test efficiency, and the vacuum pump equipment is more likely to be worn out prematurely, so that the service life of the vacuum pump equipment is shortened. Disclosure of Invention The invention aims to solve the problem that after the test is finished, the adsorption of chips is complicated in the background technology, and provides chip test equipment and a chip test method. In a first aspect, the invention provides a chip testing device, comprising a motor installed inside a processing table, a turntable is connected with an output end of the motor in a transmission way, a connecting frame is installed at the top end of the processing table, two groups of first guide rods are fixedly connected to the outer side of the connecting frame, a transverse plate is slidingly connected to the outer side of the first guide rods, a tester is fixedly connected to the inner side of the transverse plate, and the chip testing device further comprises: at least four groups of suction pipes fixedly connected in the turntable, wherein hollow concave blocks are fixedly connected on the outer sides of the suction pipes, a plurality of groups of adsorption holes are formed in the top ends of the suction pipes, and an adsorption mechanism for adsorbing chips is arranged on the periphery of the suction pipes; the mechanical arm is arranged at the top end of the processing table, a sucker is arranged at the output end of the mechanical arm, and a dust removing mechanism for blowing away impurities on the surface of the chip is arranged at the periphery of the sucker; the buffer mechanism is used for relieving impact force generated when the dust removing mechanism moves downwards; the separation plate is connected inside the hollow concave block in a sliding mode, a closing mechanism is arranged on the periphery of the separation plate and used for driving the separation plate to block an inner channel of the suction pipe when the buffer mechanism operates, and the adsorption of the adsorption mechanism to the chip is removed. Optionally, adsorption equipment includes vacuum pump, transfer line, recess board and go-between, the top in processing platform is installed to the vacuum pump, transfer line and vacuum pump output rigid coupling, the one end and the inside rigid coupling of recess board of vacuum pump are kept away from to the transfer line, the top at processing platform is kept away from to the recess board rigid coupling, go-between rotates to be connected on the inner wall of recess board, and the inside and the outside rigid coupling of straw of go-between. Optionally, the dust removing mechanism includes piston tube, support frame, piston rod, piston plate, trachea and first spring, the piston tube sets up in the outside of sucking disc, the support frame rigid coupling is between piston tube and sucking disc, the bottom rigid coupling of piston rod and piston plate, piston plate sliding connection is on the inner wall of piston tube, the trachea rigid coupling is in the inside of piston tube, the inside of trachea and piston tube is link up, first spring rigid coupling is between the inner wall of piston tube and piston plate. Optionally, the buffer gear includes buffer board, two sets of guide bar two, spring two and depression bar, two sets of guide bar two equal rigid couplings are at the top of revolving stage, and two sets of guide bar two respectively slip run through the both ends of buffer board, spring two cover is established in the outside of guide bar two, and spring two rigid couplings are between revolving stage and buffer board, the depression bar rigid coupling is in the bottom of buffer board. Optionally, the closing mechanism includes triangular block, two sets of guide bars III and spring III, the triangular block sets u