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CN-122017537-A - Butt joint device and test equipment

CN122017537ACN 122017537 ACN122017537 ACN 122017537ACN-122017537-A

Abstract

The application relates to the technical field of semiconductor testing, and discloses a butt joint device and testing equipment, the butt joint device comprises a mounting seat, a supporting plate movably arranged on the mounting seat along a first direction, a first pushing piece movably arranged on the mounting seat along a second direction, a first guiding part arranged on the supporting plate and in sliding connection with the first pushing piece, a second guiding part arranged on the first pushing piece and a driving mechanism. The driving mechanism comprises a rotating piece and a driving assembly, wherein the rotating piece is connected with the driving assembly, the rotating piece is rotationally arranged on the mounting seat, the second guide part is movably arranged on the rotating piece along a second track line segment and is rotationally connected with the rotating piece, and the driving assembly is used for driving the rotating piece to rotate so as to drive the second guide part to move along a direction parallel to the second direction. During the movement of the support plate along the first direction, the second guide portion approaches the first axis along the second track line segment. By the mode, the embodiment of the application can improve the abutting stability of the probe and the circuit board and reduce the occupied space of the abutting device.

Inventors

  • ZHOU JIANGMIN

Assignees

  • 深圳精智达半导体技术有限公司

Dates

Publication Date
20260512
Application Date
20260407

Claims (15)

  1. 1. A docking device, comprising: a mounting base; the support plate is movably arranged on the mounting seat along the first direction; the first pushing piece is movably arranged on the mounting seat along the second direction; The first guide part is arranged on the supporting plate and is in sliding connection with the first pushing piece, and the first pushing piece is used for pushing the first guide part so as to drive the supporting plate to move along the first direction; The second guide part is arranged on the first pushing piece; The driving mechanism comprises a rotating piece and a driving component which are connected, the rotating piece is rotationally arranged on the mounting seat around a first axis, the first axis is parallel to the first direction, a moving track of the second guiding part when moving along with the first pushing piece relative to the mounting seat is a first track line segment, the first axis is positioned at one side of the first track line segment along a third direction, the rotating piece is rotationally connected with the second guiding part, the second guiding part is movably arranged on the rotating piece, the moving track of the second guiding part when moving relative to the rotating piece is a second track line segment, the second track line segment is perpendicular to the first direction, an extension line of the second track line segment intersects with the first axis, and the driving component is used for driving the rotating piece to rotate so as to drive the second guiding part to move along the first track line segment; during the movement of the support plate along the first direction, the second guide part approaches the first axis along the second track line segment; the first direction, the second direction and the third direction are perpendicular to each other.
  2. 2. A docking apparatus according to claim 1 wherein, The driving assembly comprises a telescopic rod and a driving part, the telescopic rod is telescopically arranged at one end of the driving part, one end of the telescopic rod, which is far away from the driving part, is rotationally connected with the rotating part, and the driving part is rotationally connected with the mounting seat; When the second guiding part is positioned at the tail end of the second track line segment far away from the first axis, the power arm of the driving force acting on the rotating piece is L1, and when the second guiding part is positioned at the tail end of the second track line segment near the first axis, the power arm of the driving force acting on the rotating piece is L2, and L1 is more than L2.
  3. 3. A docking apparatus according to claim 2 wherein, The telescopic link is kept away from the one end of drive division is located around the second axis rotates the rotating member, the drive division keep away from the one end of telescopic link around the third axis with the mount pad rotates to be connected, the second axis with the third axis is all parallel to the first axis, the axis perpendicular to of telescopic link the second axis, the axis of telescopic link with the second axis intersects.
  4. 4. A docking apparatus according to any one of claims 1 to 3 wherein, The mounting seat comprises a mounting plate, the mounting plate and the supporting plate are oppositely arranged along the first direction, the first pushing piece is arranged on one side of the supporting plate along the third direction, the driving mechanism is arranged on one side of the mounting plate opposite to the supporting plate, the mounting plate is provided with a first strip-shaped hole extending along the second direction, and the second guiding part penetrates through the first strip-shaped hole.
  5. 5. A docking apparatus according to claim 4 wherein, The rotating piece is provided with a second strip-shaped hole, and the second guide part penetrates through the first strip-shaped hole and is then inserted into the second strip-shaped hole.
  6. 6. A docking apparatus according to claim 5 wherein, The second guiding part comprises a first shaft sleeve, a connecting shaft and a second shaft sleeve, one end of the connecting shaft is connected with the first pushing piece, the first shaft sleeve and the second shaft sleeve are sleeved on the connecting shaft, the first shaft sleeve and the second shaft sleeve can rotate relative to the connecting shaft, the first shaft sleeve and the second shaft sleeve are sequentially arranged along the direction of the mounting plate from the support plate, the first shaft sleeve is at least partially arranged in the first strip-shaped hole, and the second shaft sleeve is at least partially arranged in the second strip-shaped hole.
  7. 7. A docking apparatus according to claim 4 wherein, Including the second impeller, the second impeller with actuating mechanism connects, the second impeller is followed the second direction is movably located the mounting panel, the second impeller is followed the third direction is located the backup pad is dorsad one side of first impeller, interfacing apparatus includes third guide, third guide is located the backup pad, third guide with second impeller sliding connection, third guide can be relative the second impeller slides, so as to drive the backup pad is followed the first direction is relative the mounting panel removes.
  8. 8. A docking apparatus according to claim 7 wherein, The butt joint device comprises a linkage rod, the linkage rod is rotationally arranged on one side of the mounting plate, which is opposite to the supporting plate, around a fourth axis, the butt joint device comprises a fourth guide part, the fourth guide part is arranged on the second pushing piece, the moving track of the fourth guide part along with the second pushing piece moving relative to the mounting seat is a third track line segment, the fourth axis is positioned between the first track line segment and the third track line segment along the third direction, one end of the linkage rod is provided with a first sliding groove extending along the axial direction of the linkage rod, the other end of the linkage rod is provided with a second sliding groove extending along the axial direction of the linkage rod, the second guide part is slidably arranged on the first sliding groove, the fourth guide part is slidably arranged on the second sliding groove, and the linkage rod is used for enabling the first pushing piece and the second pushing piece to synchronously move along the opposite directions.
  9. 9. A docking apparatus according to claim 8 wherein, The mounting plate is provided with a third strip-shaped hole extending along the second direction, and the fourth guide part penetrates through the third strip-shaped hole and then is slidably arranged in the second chute.
  10. 10. A docking apparatus according to claim 9 wherein, The number of the driving mechanisms, the number of the second guide parts, the number of the fourth guide parts, the number of the first strip-shaped holes and the number of the third strip-shaped holes are two, the first pushing piece comprises a first end part and a second end part which are sequentially arranged along the second direction, the second pushing piece comprises a third end part and a fourth end part which are sequentially arranged along the second direction, one second guide part is arranged at the second end part, the other second guide part is arranged at the third end part, one fourth guide part is arranged at the first end part, and the other fourth guide part is arranged at the fourth end part; along the second direction, the two driving mechanisms are oppositely arranged, one second guiding part is movably arranged on one rotating part along one second track line segment, one rotating part is rotationally connected with one second guiding part, one second guiding part is slidably arranged on one first strip-shaped hole, and one fourth guiding part is slidably arranged on one third strip-shaped hole; when one driving mechanism drives the second guiding part arranged at the second end part to move along the second direction, the other driving mechanism drives the second guiding part arranged at the third end part to move along the direction opposite to the second direction.
  11. 11. A docking apparatus according to claim 7 wherein, The first pushing piece is provided with a first guide groove, the first guide part is slidably arranged in the first guide groove, the second pushing piece is provided with a second guide groove, the third guide part is slidably arranged in the second guide groove, the second guide groove can be overlapped with the first guide groove after rotating 180 degrees around a reference shaft, the reference shaft is parallel to the first direction and is located along the third direction, and the reference shaft is located between the first pushing piece and the second pushing piece.
  12. 12. A docking apparatus according to claim 4 wherein, The guide rod is arranged on the mounting plate, the guide rod penetrates through the support plate along the first direction, and the support plate can slide back and forth along the direction parallel to the first direction relative to the guide rod.
  13. 13. A docking apparatus according to claim 1 wherein, The first pushing piece is provided with a first guide groove, the first guide groove is provided with a first inclined surface which is arranged towards the first direction, the first inclined surface comprises a first starting end and a first tail end which are sequentially arranged along the direction opposite to the second direction, and the first tail end is inclined towards the first direction compared with the first starting end.
  14. 14. The docking apparatus of claim 13 wherein the docking apparatus comprises a housing, The first guide groove is provided with a second inclined surface which is arranged towards the first direction, the second inclined surface comprises a second starting end and a second tail end which are sequentially arranged along the direction opposite to the second direction, the second tail end is inclined towards the first direction compared with the second starting end, the second inclined surface and the first inclined surface are sequentially arranged along the second direction, and the inclination angle of the first inclined surface is larger than that of the second inclined surface.
  15. 15. A test apparatus comprising a docking device according to any one of claims 1 to 14.

Description

Butt joint device and test equipment Technical Field The present application relates to the field of semiconductor testing technologies, and in particular, to a docking device and a testing apparatus. Background In the chip test process, the docking device is used for bearing and lifting the probe so that the probe is abutted with the conductive part of the circuit board, and thus, a circuit and a signal channel are connected for testing. Because the abutting end of the probe is provided with a spring structure, and in order to improve efficiency, the supporting plate usually needs to bear a plurality of probes at the same time, so that a larger elastic force needs to be overcome in the abutting stage of the probes and the PCB connector. In the related art, a supporting plate for supporting the probe is directly and vertically pushed upwards by an air cylinder, so that the probe is abutted and conducted with a plug of the PCB after moving upwards. The mode that the cylinder vertically set up is not only in vertical direction occupation space big, and the thrust of cylinder output does not have any mechanical gain, for the stability that improves probe and PCB plug electricity and be connected, need increase the power of cylinder or increase cylinder quantity, this occupation space that will increase interfacing apparatus by a wide margin is unfavorable for test equipment's miniaturized design. Disclosure of Invention In view of the above problems in the background, it is an object of the present application to provide a docking device and a testing apparatus, which overcomes or at least partially solves the above problems. According to a first aspect of the present application, there is provided a docking device comprising a mount, a support plate, a first pusher, a first guide, a second guide, and a drive mechanism. The support plate is movably arranged on the mounting seat along the first direction. The first pushing piece is movably arranged on the mounting seat along the second direction. The first guide part is arranged on the supporting plate and is in sliding connection with the first pushing piece, and the first pushing piece is used for pushing the first guide part and then driving the supporting plate to move along the first direction. The second guiding part is arranged on the first pushing piece. The driving mechanism comprises a rotating piece and a driving component which are connected, the rotating piece is rotationally arranged on the mounting seat around a first axis, the first axis is parallel to a first direction, a moving track of the second guiding part when moving along with the first pushing piece relative to the mounting seat is a first track line segment, the first axis is located on one side of the first track line segment along a third direction, the rotating piece is rotationally connected with the second guiding part, the second guiding part is movably arranged on the rotating piece, the moving track of the second guiding part when moving relative to the rotating piece is a second track line segment, the second track line segment is perpendicular to the first direction, an extension line of the second track line segment is intersected with the first axis, and the driving component is used for driving the rotating piece to rotate so as to drive the second guiding part to move along the first track line segment. During the movement of the support plate along the first direction, the second guide portion approaches the first axis along the second track line segment. The first direction, the second direction and the third direction are perpendicular to each other. In one or more of the above alternative embodiments, the driving assembly includes a telescopic rod and a driving part, the telescopic rod is telescopically disposed at one end of the driving part, one end of the telescopic rod away from the driving part is rotatably connected with the rotating member, and the driving part is rotatably connected with the mounting seat. When the second guiding part is positioned at the tail end of the second track line segment far away from the first axis, the power arm of the driving force acting on the rotating piece is L2, and when the second guiding part is positioned at the head end of the second track line segment near to the first axis, the power arm of the driving force acting on the rotating piece is L1, and L1 is more than L2. In one or more of the above optional embodiments, an end of the telescopic rod away from the driving portion is rotatably disposed on the rotating member around a second axis, an end of the driving portion away from the telescopic rod is rotatably connected with the mounting seat around a third axis, the second axis and the third axis are both parallel to the first axis, the axis of the telescopic rod is perpendicular to the second axis, and the axis of the telescopic rod intersects with the second axis. In one or more of the above optional embodiments, the