CN-122017692-A - Imaging device and method based on diamond NV color center

CN122017692ACN 122017692 ACN122017692 ACN 122017692ACN-122017692-A

Abstract

The invention provides an imaging device and method based on a diamond NV color center, wherein the imaging device comprises a diamond containing the NV color center, an objective lens assembly, an optical detection module, a displacement platform and a microwave module, the objective lens assembly comprises an objective lens turntable, an objective lens and a suction tube, the objective lens turntable is arranged on the objective lens turntable, the objective lens turntable can switch the objective lens or the suction tube to a working position, negative pressure is introduced into the suction tube, the displacement platform is arranged below the objective lens assembly, the upper surface of the displacement platform is used for placing a piece to be detected and can regulate the position of the piece to be detected, the diamond is arranged on the piece to be detected and is arranged below the working position of the objective lens assembly, when the suction tube is switched to the working position, an opening at the lower end of the suction tube faces the diamond, and the diamond can be adsorbed or released through the negative pressure in a control tube. The realization mode is simple and convenient, the use of other auxiliary equipment is reduced, the occupied space is simplified, and the accurate and efficient operation of diamond adsorption and release can be ensured. The device can realize multiple imaging scanning of the large-size to-be-detected piece.

Inventors

KAN YI
JIA ANQI
SUN MENGQIANG
MA TENGFEI
ZHAO BOWEN
ZHANG SHAOCHUN
Yang Wanyang
CHEN BAOLIANG
Ling Shaoxu
XIE ZHENGSHENG

Assignees

安徽省国盛量子科技有限公司

Dates

Publication Date: 20260512
Application Date: 20260413

Claims (10)

1. The imaging device based on the diamond NV color center is characterized by comprising a diamond containing the NV color center, an objective lens assembly, an optical detection module, a displacement platform and a microwave module; The objective lens assembly comprises an objective lens rotary table, an objective lens and a suction tube, wherein the objective lens rotary table is arranged on the objective lens assembly, the objective lens rotary table can switch the objective lens or the suction tube to a working position, and the suction tube is used for introducing negative pressure; the displacement platform is positioned below the objective lens component, the upper surface of the displacement platform is used for placing a piece to be measured, and the position of the piece to be measured can be regulated and controlled; The diamond is arranged on the piece to be detected and positioned below the working position of the objective lens assembly, when the suction pipe is switched to the working position, the opening at the lower end of the suction pipe faces the diamond, and the diamond can be adsorbed or released through the negative pressure in the control pipe; The optical detection module is used for irradiating excitation light to the objective lens positioned at the working position, the excitation light irradiates the diamond positioned below the objective lens after being transmitted by the objective lens to excite fluorescence, and the optical detection module is also used for collecting the fluorescence through the objective lens to image and outputting imaging data; The microwave module is used for radiating microwaves to the diamond.
2. The imaging device of claim 1, wherein the objective lens assembly further comprises negative pressure means for providing negative pressure into the suction tube.
3. The imaging device based on diamond NV color center of claim 1 or 2, wherein the upper ends of the objective lens and the suction tube are fixedly mounted on a rotating disk of the objective lens turntable, and the objective lens or the suction tube can be switched to the working position by rotating the rotating disk.
4. The imaging device of claim 3, wherein the side wall of the suction tube is provided with a hollow connector communicating with the lumen of the suction tube for receiving negative pressure.
5. The imaging device based on diamond NV color center of claim 1, wherein the lower end of the suction tube is made of flexible material, and the diameter of the lower port is 1mm-2mm.
6. The imaging device based on diamond NV color center of claim 1, wherein the optical detection module comprises an excitation light source, a bicolor plate and an imaging module, the excitation light source is used for generating excitation light, the excitation light irradiates the bicolor plate, the excitation light is reflected by the bicolor plate and then transmitted by an objective lens positioned at a working position to irradiate the diamond, and fluorescence generated by the diamond sequentially passes through the objective lens and the bicolor plate and then enters the imaging module to be collected and imaged.
7. The imaging device based on diamond NV color center of claim 1, wherein the microwave module comprises a microwave source and a microwave antenna, the microwave source transmits microwaves to the microwave antenna, the microwave antenna is used for radiating microwaves to diamond, the radiation end of the microwave antenna is provided with a through hole, the through hole faces the objective lens positioned at the working position, and the diamond is positioned below the through hole or in the through hole.
8. The imaging device of claim 1, further comprising a bias magnetic field module for applying a bias magnetic field to the diamond.
9. A method of imaging scanning based on diamond NV colour centre, characterised in that it is carried out with an imaging device based on diamond NV colour centre as claimed in any one of claims 1 to 8, the method comprising: when the detection area of the to-be-detected part needs to be replaced, the imaging detection operation is stopped, the suction pipe is switched to a working position, the height of the displacement platform is adjusted to enable the lower port of the suction pipe to contact the upper surface of the diamond, negative pressure in the suction pipe is controlled to adsorb and hold the diamond, the displacement platform is adjusted to enable the to-be-detected part to reach a new preset horizontal position, the negative pressure in the suction pipe is controlled to release the diamond to the upper surface of the to-be-detected part, the height of the displacement platform is adjusted to enable the diamond to be located at an initial position, and the imaging detection operation is started.
10. A nondestructive testing method based on diamond NV color center is characterized by comprising the steps of adopting the imaging scanning method of claim 9 to complete imaging scanning under a low-magnification objective lens for the whole piece to be tested, collecting magnetic field intensity distribution graphs of all detection areas obtained by scanning in one graph, analyzing and judging whether the piece to be tested has defects, taking the area where the defects are located as a target area for further detection if the defects exist, and then utilizing the imaging scanning method of claim 9 to complete imaging scanning under a high-magnification objective lens for the target area to obtain magnetic field intensity distribution of the target area, thereby obtaining the distribution of the defects.

Description

Imaging device and method based on diamond NV color center Technical Field The invention relates to the field of quantum sensing, in particular to an imaging device and method based on diamond NV color center. Background With the rapid development of quantum precision measurement technology, precision sensing and detection technologies based on Nitrogen Vacancy (NV) color centers in diamond have been widely used. The wide-field imaging realized by utilizing the NV color center can be applied to large-scale magnetic field distribution measurement, has the advantages of high resolution and high precision, and has a great development prospect in the field of chip detection. In practical application, in order to obtain better measurement sensitivity, diamond is generally directly placed on a sample to be measured, such as the upper surface of a chip, and since the size of the chip generally detected is larger than that of the diamond, full coverage of the chip cannot be achieved through one-time detection, multi-area detection needs to be performed on the surface of the chip, at this time, the position of the diamond relative to the surface of the chip needs to be adjusted, and since the imaging device needs to be kept stable, the diamond and the chip need to be separated so as to adjust the position of the chip, and after the chip is adjusted to a new position, the diamond is placed in the original position. The diamond pick-and-place device can be used for adjusting the position of the chip in a mode of picking and placing the diamond before and after the movement of the chip, the problem that errors are large and the efficiency is low is obviously caused by manually picking and placing the diamond, and the problem that space is insufficient due to the fact that high-precision pick-and-place equipment is added in an imaging device is not beneficial to the purpose of miniaturization design, how to accurately and efficiently realize the pick-and-place of the diamond on a piece to be tested can be solved, and space can be saved. Disclosure of Invention In view of the above-mentioned drawbacks of the prior art, an object of the present invention is to provide an imaging device and method based on a diamond NV color center, which are used for solving the problems of large error and low efficiency existing in the prior art in the wide-field imaging based on the diamond NV color center, which are caused by manually picking and placing the diamond on the workpiece to be measured, and the purposes of insufficient space and unfavorable for miniaturization design existing in the imaging device when high-precision picking and placing equipment is added. To achieve the above and other related objects, a first aspect of the present invention provides an imaging device based on a diamond NV color center, including a diamond containing the NV color center, an objective lens assembly, an optical detection module, a displacement platform, and a microwave module; The objective lens assembly comprises an objective lens rotary table, an objective lens and a suction tube, wherein the objective lens rotary table is arranged on the objective lens assembly, the objective lens rotary table can switch the objective lens or the suction tube to a working position, and the suction tube is used for introducing negative pressure; the displacement platform is positioned below the objective lens component, the upper surface of the displacement platform is used for placing a piece to be measured, and the position of the piece to be measured can be regulated and controlled; The diamond is arranged on the piece to be detected and positioned below the working position of the objective lens assembly, when the suction pipe is switched to the working position, the opening at the lower end of the suction pipe faces the diamond, and the diamond can be adsorbed or released through the negative pressure in the control pipe; The optical detection module is used for irradiating excitation light to the objective lens positioned at the working position, the excitation light irradiates the diamond positioned below the objective lens after being transmitted by the objective lens to excite fluorescence, and the optical detection module is also used for collecting the fluorescence through the objective lens to image and outputting imaging data; The microwave module is used for radiating microwaves to the diamond. Further, the objective lens assembly further comprises negative pressure means for providing a negative pressure into the suction tube. Further, the upper ends of the objective lens and the suction tube are fixedly arranged on a rotating disc of the objective lens turntable, and the objective lens or the suction tube can be switched to a working position by rotating the rotating disc. Further, the side wall of the suction pipe is provided with a hollow joint communicated with the pipe cavity of the suction pipe for connecting negative pressure. Further