CN-122017693-A - Self-adaptive multi-precision wide-field imaging device, scanning system and method

CN122017693ACN 122017693 ACN122017693 ACN 122017693ACN-122017693-A

Abstract

The invention provides a self-adaptive multi-precision wide-field imaging device, a scanning system and a method, wherein the imaging device comprises diamond containing an NV color center, an objective lens turntable, a plurality of objective lenses with different multiplying powers, an optical detection module and a microwave radiation device, the microwave radiation device comprises a plurality of microwave antennas and a turntable, the plurality of microwave antennas are arranged on the turntable at intervals, the radiation end of each microwave antenna extends out of the turntable, the radiation end of each microwave antenna can be placed between the diamond and the objective lens positioned at a working position in a switchable manner by rotating the turntable, the radiation end is provided with a through hole facing the diamond, the aperture is reduced along with the increase of the multiplying power of the objective lens, and the radiation performance of the microwave antenna is enhanced along with the reduction of the aperture. The radiation performance of the microwave antenna corresponding to the high-magnification objective lens is effectively improved while the view field requirement is considered. And a suction pipe for adsorbing or releasing diamond is arranged on the objective turntable, so that imaging and diamond sucking and releasing operations are realized, and scanning imaging of a piece to be detected is realized.

Inventors

KAN YI
JIA ANQI
MA TENGFEI
SUN MENGQIANG
ZHAO BOWEN
ZHANG SHAOCHUN
Yang Wanyang
CHEN BAOLIANG
Ling Shaoxu
XIE ZHENGSHENG

Assignees

安徽省国盛量子科技有限公司

Dates

Publication Date: 20260512
Application Date: 20260413

Claims (10)

1. The self-adaptive multi-precision wide-field imaging device is characterized by comprising diamond containing NV color center, an objective lens turntable, a plurality of objective lenses with different multiplying powers, an optical detection module and a microwave radiation device; A plurality of objective lenses with different multiplying powers are arranged on the objective lens turntable, and the objective lenses with the required multiplying powers can be switched to working positions; The diamond is used for being placed on the piece to be tested and placed below the objective lens located at the working position; The microwave radiation device comprises a plurality of microwave antennas and a rotary table, the plurality of microwave antennas are arranged on the rotary table at intervals, each microwave antenna is provided with a radiation end for radiating microwaves to the diamond, the radiation end extends out of the rotary table, the rotary table can place the radiation end between the diamond and an objective lens positioned at a working position in a switchable manner, the radiation end is provided with through holes for the diamond, the aperture of each through hole is matched with the multiplying power of the corresponding objective lens one by one, the aperture is reduced along with the increase of the multiplying power of the objective lens, and the radiation performance of the microwave antenna is enhanced along with the reduction of the aperture; The optical detection module is used for irradiating excitation light to the objective lens positioned at the working position, the excitation light irradiates the diamond positioned below the objective lens after being transmitted by the objective lens to excite fluorescence, and the optical detection module is also used for collecting the fluorescence through the objective lens to image and outputting imaging data.
2. The adaptive multi-precision wide-field imaging device of claim 1, wherein the microwave antenna is a microstrip antenna, and the bottom surface of the radiation end is provided with radiation patches distributed along the circumferential direction of the through hole.
3. The adaptive multi-precision wide field imaging apparatus as set forth in claim 1 or 2, wherein the microwave radiation device further comprises a switch switchably connected to the plurality of microwave antennas for transmitting the received microwaves to the microwave antennas connected thereto.
4. The adaptive multi-precision wide-field imaging device according to claim 1 or 2, wherein the feeding end of the microwave antenna is positioned on the rotary table, the microwave radiation device further comprises a spring pressing needle, a feeding support and an antenna adapter plate, the antenna adapter plate is arranged on the upper surface of the feeding support, the first end of the feeding support is positioned above the rotary table, the second end of the feeding support is fixedly arranged, the upper end of the spring pressing needle is arranged at the first end of the feeding support, the top end of the spring pressing needle is connected with the antenna adapter plate, the bottom end of the spring pressing needle is in compressible abutting connection with a feeding connection point of the microwave antenna positioned below the spring pressing needle, and the antenna adapter plate is used for receiving microwaves and transmitting the microwaves to the spring pressing needle.
5. The adaptive multi-precision wide-field imaging device of claim 4, wherein a slope structure with an inclined slope is arranged on two sides of a mounting area on the rotary table for mounting each microwave antenna, the highest side of the slope is adjacent to the mounting area and is connected with a plane where a feed connection point of the microwave antenna is located and is flush, and the lowest side of the slope is connected with a table top of the rotary table.
6. The adaptive multi-precision wide-field imaging apparatus of claim 1, wherein the mounting areas on the turntable for mounting each microwave antenna are arranged at intervals along the circumferential direction of the turntable, and the same type of feed connection points of the plurality of microwave antennas are mounted on the same circumference.
7. The adaptive multi-precision wide field imaging apparatus of claim 1 further comprising a bias magnetic field module for applying a bias magnetic field to the diamond.
8. An adaptive multi-precision imaging scanning system is characterized by comprising an adaptive multi-precision wide-field imaging device and a displacement platform, wherein the adaptive multi-precision wide-field imaging device and the displacement platform are any one of claims 1-7, a suction tube is further arranged on an objective turntable, the objective turntable can switch an objective or the suction tube to a working position, negative pressure is introduced into the suction tube, when the suction tube is switched to the working position, the opening at the lower end of the suction tube faces to diamond, the diamond can be adsorbed or released through the negative pressure in a control tube, the upper surface of the displacement platform is used for placing a piece to be tested, and the position of the piece to be tested can be regulated and controlled.
9. A method of imaging scanning based on diamond NV colour centre, implemented with an adaptive multi-precision imaging scanning system as claimed in claim 8, the method comprising: when the detection area of the to-be-detected piece needs to be replaced, the imaging detection operation is stopped, the suction pipe is switched to a working position, the radiation end of the adaptive microwave antenna is moved away from the upper side of the diamond, the height of the displacement platform is adjusted, the lower port of the suction pipe is enabled to be in contact with the upper surface of the diamond, negative pressure in the suction pipe is controlled to adsorb and keep the diamond, the displacement platform is adjusted to enable the to-be-detected piece to reach a new preset horizontal position, the negative pressure in the suction pipe is controlled to release the diamond to the upper surface of the to-be-detected piece, the height of the displacement platform is adjusted to enable the diamond to be located at an initial position, the required objective lens is switched to the working position, the radiation end of the adaptive microwave antenna is moved to the upper side of the diamond, and the imaging detection operation is started.
10. A nondestructive testing method based on diamond NV color center is characterized by comprising the steps of adopting the imaging scanning method of claim 9 to complete imaging scanning under a low-magnification objective lens for the whole piece to be tested, collecting magnetic field intensity distribution graphs of all detection areas obtained by scanning in one graph, analyzing and judging whether the piece to be tested has defects, taking the area where the defects are located as a target area for further detection if the defects exist, and then utilizing the imaging scanning method of claim 9 to complete imaging scanning under a high-magnification objective lens for the target area to obtain magnetic field intensity distribution of the target area, thereby obtaining distribution information of the defects.

Description

Self-adaptive multi-precision wide-field imaging device, scanning system and method Technical Field The invention relates to the field of quantum sensing, in particular to a self-adaptive multi-precision wide-field imaging device, a scanning system and a method. Background Quantum wide-field imaging based on diamond NV color center, exciting the NV color center from a ground state to an excited state by using excitation light, radiating fluorescence, and controlling by microwaves, wherein when the microwave frequency is equal to |0>When the transition frequency of the I+ -1 > is in resonance, fluorescence changes, and the Zeeman splitting effect caused by the magnetic field enables the resonance frequency to generate offset related to the magnetic field, and a wide-field imaging in a large range can be realized by combining microscopic elements such as an objective lens, a camera and the like. For imaging with different precision requirements, objective lenses with different multiplying powers are selected, and the corresponding required field size is changed. To achieve uniform microwave radiation, microstrip antennas are generally used, the radiation end of which is located above the diamond, and through holes are opened in the radiation end facing the diamond so that the objective lens excites the diamond through the holes and collects fluorescence. The size of the through hole directly influences the size of the available view field, the through hole with the largest diameter is generally selected to be matched with the objective lens with different multiplying power, and as the diamond is positioned under the through hole, the increase of the aperture weakens the radiation intensity and the distribution uniformity of the radiation intensity in the central area of the hole, and for the objective lens with high multiplying power, the unnecessary radiation performance can be lost under the condition that the objective lens with high multiplying power does not need a large view field, so that the objective lens with high multiplying power is not beneficial to obtaining better imaging effect. Disclosure of Invention In view of the above-mentioned drawbacks of the prior art, an object of the present invention is to provide a self-adaptive multi-precision wide-field imaging device, scanning system and method, which are used for solving the problems that when quantum wide-field imaging is implemented in the prior art, a microstrip antenna with a large aperture through hole is selected to be suitable for a field of view required by an objective lens without magnification, the radiation intensity and uniformity of the center of the aperture are weakened due to the increase of the aperture, and a better imaging effect is not obtained by the objective lens with high magnification. To achieve the above and other related objects, a first aspect of the present invention provides an adaptive multi-precision wide-field imaging device, including a diamond containing an NV color center, an objective lens turntable, a plurality of objective lenses with different magnifications, an optical detection module, and a microwave radiation device; A plurality of objective lenses with different multiplying powers are arranged on the objective lens turntable, and the objective lenses with the required multiplying powers can be switched to working positions; The diamond is used for being placed on the piece to be tested and placed below the objective lens located at the working position; The microwave radiation device comprises a plurality of microwave antennas and a rotary table, the plurality of microwave antennas are arranged on the rotary table at intervals, each microwave antenna is provided with a radiation end for radiating microwaves to the diamond, the radiation end extends out of the rotary table, the rotary table can place the radiation end between the diamond and an objective lens positioned at a working position in a switchable manner, the radiation end is provided with through holes for the diamond, the aperture of each through hole is matched with the multiplying power of the corresponding objective lens one by one, the aperture is reduced along with the increase of the multiplying power of the objective lens, and the radiation performance of the microwave antenna is enhanced along with the reduction of the aperture; The optical detection module is used for irradiating excitation light to the objective lens positioned at the working position, the excitation light irradiates the diamond positioned below the objective lens after being transmitted by the objective lens to excite fluorescence, and the optical detection module is also used for collecting the fluorescence through the objective lens to image and outputting imaging data. Further, the microwave antenna is a microstrip antenna, and the bottom surface of the radiation end is provided with radiation patches which are distributed along the circumferential directio