CN-122018064-A - Low phase difference metal reflector suitable for space environment and preparation method and application thereof

CN122018064ACN 122018064 ACN122018064 ACN 122018064ACN-122018064-A

Abstract

The invention relates to the technical field of optical films, in particular to a low-phase-difference metal reflecting mirror suitable for a space environment, a preparation method and application. The optical substrate comprises an optical substrate, a bonding layer, a metal layer, a first protective layer, a first low refractive index layer, a high refractive index layer, a second low refractive index layer and a second protective layer which are plated on the optical substrate in sequence, wherein the optical substrate is silicon, the bonding layer is made of nickel and chromium, the metal layer is made of silver, the first protective layer and the second protective layer are made of aluminum oxide, the first low refractive index layer is made of silicon dioxide, the second low refractive index layer is made of silicon dioxide, and the high refractive index layer is made of niobium pentoxide. According to the invention, high reflectivity in a wide band range is realized through the metal layer, phase difference regulation and control design is carried out by utilizing an asymmetric equivalent layer theory in an optical film design method, phase difference regulation and control of a communication band is realized, and adaptability and stability of an optical element under a space environment condition are improved by utilizing an outermost protective layer.

Inventors

LI DAQI
YANG QINGLIN
DUAN WEIBO
LIU BAOJIAN
YU DEMING
YU TIANYAN
CHEN GANG
ZHANG DEJIAN
ZHAO TONGYU
DONG XIAOHUI

Assignees

中国科学院上海技术物理研究所

Dates

Publication Date: 20260512
Application Date: 20260413

Claims (10)

1. The low phase difference metal reflecting mirror suitable for the space environment is characterized by comprising an optical substrate, and an adhesive layer, a metal layer, a first protective layer, a first low refractive index layer, a high refractive index layer, a second low refractive index layer and a second protective layer which are plated on the optical substrate in sequence; The optical substrate is made of silicon, the bonding layer is made of nickel and chromium, the metal layer is made of silver, the first protective layer and the second protective layer are made of aluminum oxide, the first low-refractive-index layer is made of silicon dioxide, the second low-refractive-index layer is made of silicon dioxide, and the high-refractive-index layer is made of niobium pentoxide.
2. The low-phase-difference metal reflector suitable for space environment according to claim 1, wherein the thickness of the bonding layer is 5-10 nm, and the thickness of the metal layer is 130-150 nm.
3. The low phase difference metal reflecting mirror suitable for space environment according to claim 1, wherein the thickness of the first protective layer is 35nm, the thickness of the second protective layer is 4-6 nm, the thickness of the first low refractive index layer is 115nm, the thickness of the second low refractive index layer is 125nm, and the thickness of the high refractive index layer is 160nm.
4. The low phase difference metal mirror suitable for use in a space environment according to claim 1, wherein the material of the adhesion layer is 80Ni20Cr.
5. The low-phase-difference metal reflecting mirror suitable for the space environment according to claim 1, wherein the working angle of the low-phase-difference metal reflecting mirror suitable for the space environment is 45 degrees, the reflectivity of the low-phase-difference metal reflecting mirror suitable for the space environment in the range of 750-160 nm is more than 98%, and the phase difference of signal wavelengths of the low-phase-difference metal reflecting mirror suitable for the space environment in 780+/-2 nm, 842+/-2 nm, 854+/-2 nm and 1540+/-2 nm is within 2 degrees.
6. A method for manufacturing a low phase difference metal reflecting mirror suitable for use in a space environment as claimed in any one of claims 1 to 5, comprising the steps of: Placing the optical substrate into a vacuum coating machine, vacuumizing, and performing ion pre-bombardment treatment after the vacuum degree reaches a set value; Then vacuum coating is carried out, and an adhesive layer, a metal layer and a first protective layer are deposited in sequence; Then starting an ion source, and sequentially depositing a first low refractive index layer, a high refractive index layer, a second low refractive index layer and a second protective layer under the condition of keeping the bombardment of the ion source; And finally, closing the ion source, maintaining the vacuum state for at least one half hour, and taking out the optical substrate to obtain the low phase difference metal reflecting mirror suitable for the space environment.
7. The method for manufacturing the low-phase-difference metal reflecting mirror suitable for the space environment according to claim 6, wherein the deposition rate of the bonding layer is 0.3-0.5 nm/s, the deposition rate of the metal layer is 0.8-1.2 nm/s, the deposition rates of the first protective layer and the second protective layer are 0.6-0.8 nm/s, the deposition rate of the high-refractive-index layer is 0.11-0.13 nm/s, and the deposition rates of the first low-refractive-index layer and the second low-refractive-index layer are 0.6-0.8 nm/s.
8. The method of claim 6, wherein the adhesive layer and the metal layer are deposited by thermal evaporation, the first protective layer is deposited by electron beam evaporation, and the second protective layer, the high refractive index layer, the first low refractive index layer and the second low refractive index layer are deposited by radio frequency ion beam assisted electron beam evaporation.
9. The method for manufacturing a low phase difference metal reflecting mirror suitable for a space environment according to claim 8, wherein the vacuum degree of the deposition is 1.0-1.5×10 -3 Pa.
10. The use of a low phase difference metal mirror according to any one of claims 1 to 5 in the field of spatial laser communication and quantum communication systems.

Description

Low phase difference metal reflector suitable for space environment and preparation method and application thereof Technical Field The invention relates to the technical field of optical films, in particular to a low-phase-difference metal reflecting mirror suitable for a space environment, a preparation method and application. Background When light is obliquely incident, the effective refractive indices of P light and S light in the optical film are not uniform, so that energy separation is caused, and the greater the angle, the greater the separation. In this case, not only energy loss occurs, but also phase difference occurs due to polarization separation of the optical film, and the polarization state of light is changed due to the phase difference. Photons transmitted in quantum communication are manipulated into a specific polarization direction for transmission and decoding, and if the phase difference of the optical element is large, the bit error rate rise in the quantum communication system can be directly influenced. Therefore, the optical thin film element involved in the optical system needs to be subjected to phase adjustment. In the prior art, the scheme adopts a 750-900 nm wave band light source to carry out coding transmission, so that interference is reduced, and the transmission period is mostly night. In the present stage, in order to realize the working requirements of middle and high orbit all the day, the solar background noise suppression and the atmospheric transmission efficiency optimization are realized, and a telecom C wave band (about 1530-1565 nm) is adopted as a communication signal wave band. Therefore, the optical element in the optical system needs to satisfy the requirements of maintaining high reflectivity and low phase difference in the above band range, and has good space environment adaptability. Disclosure of Invention In order to solve the technical problems, the invention provides a low phase difference metal reflecting mirror suitable for a space environment. The reflecting mirror film has high reflectivity and low phase difference optical performance, and can adapt to the space environment of medium-high track height. The invention further aims to provide a preparation method and application of the low-phase-difference metal reflecting mirror suitable for the space environment. In order to achieve the above purpose, the invention adopts the following technical scheme: The low phase difference metal reflecting mirror suitable for the space environment comprises an optical substrate, an adhesive layer, a metal layer, a first protective layer, a first low refractive index layer, a high refractive index layer, a second low refractive index layer and a second protective layer which are plated on the optical substrate in sequence; The optical substrate is made of silicon, the bonding layer is made of nickel and chromium, the metal layer is made of silver, the first protective layer and the second protective layer are made of aluminum oxide, the first low-refractive-index layer is made of silicon dioxide, the second low-refractive-index layer is made of silicon dioxide, and the high-refractive-index layer is made of niobium pentoxide. The thickness of the bonding layer is 5-10 nm, and the thickness of the metal layer is 130-150 nm. The thickness of the first protective layer is 35nm, the thickness of the second protective layer is 4-6 nm, the thickness of the first low refractive index layer is 115nm, the thickness of the second low refractive index layer is 125nm, and the thickness of the high refractive index layer is 160nm. Wherein the material of the bonding layer is 80Ni20Cr. The working angle of the low-phase-difference metal reflecting mirror suitable for the space environment is 45 degrees, the reflectivity of the low-phase-difference metal reflecting mirror suitable for the space environment is larger than 98 percent in the range of 750-160 nm, and the phase difference of signal wavelengths of the low-phase-difference metal reflecting mirror suitable for the space environment is within 2 degrees in 780+/-2 nm, 842+/-2 nm, 854+/-2 nm and 1540+/-2 nm. The preparation method of the low phase difference metal reflecting mirror suitable for the space environment comprises the following steps: Placing the optical substrate into a vacuum coating machine, vacuumizing, and performing ion pre-bombardment treatment after the vacuum degree reaches a set value; Then vacuum coating is carried out, and an adhesive layer, a metal layer and a first protective layer are deposited in sequence; Then starting an ion source, and sequentially depositing a first low refractive index layer, a high refractive index layer, a second low refractive index layer and a second protective layer under the condition of keeping the bombardment of the ion source; And finally, closing the ion source, maintaining the vacuum state for at least one half hour, and taking out the optical substrate to obt