CN-122018066-A - Self-cleaning optical filter, security lens and laser radar with bionic micro-nano structure

Abstract

The invention discloses a self-cleaning optical filter, a security lens and a laser radar of a bionic micro-nano structure, wherein the self-cleaning optical filter of the bionic micro-nano structure comprises an optical filter body, a plurality of micron-sized lotus leaf mastoid structures are formed on the optical filter body, a nano-sized moth eye array structure is formed on each micron-sized lotus leaf mastoid structure, and the micron-sized lotus leaf mastoid structures and the nano-sized moth eye array structures are all positioned on the outermost layer of the optical filter body. Therefore, the light transmittance of the optical filter is improved, the reflection of light is reduced, the optical filter has a self-cleaning function, the transmittance is reduced after pollutants are adhered to the surface of the optical filter, the normal function of an optical system is ensured, the performance degradation after the functional coating is aged is avoided, and the negative influence on the optical performance of the optical filter after the functional coating is aged can be avoided.

Inventors

• WANG HUI
• YANG CHAO
• ZHOU WEIJIE
• WANG WEISHI

Assignees

• 信利光电股份有限公司

Dates

Publication Date

20260512

Application Date

20260228

Claims (10)

1. 1. The self-cleaning optical filter with the bionic micro-nano structure is characterized by comprising an optical filter body, wherein a plurality of micron-sized lotus leaf mastoid structures are formed on the optical filter body, a nano-sized moth eye array structure is formed on each micron-sized lotus leaf mastoid structure, and the micron-sized lotus leaf mastoid structures and the nano-sized moth eye array structures are all located on the outermost layer of the optical filter body.
2. 2. The self-cleaning optical filter with the bionic micro-nano structure according to claim 1, wherein the optical filter body is a plurality of layers of dielectric films alternately stacked.
3. 3. The self-cleaning filter of a biomimetic micro-nano structure according to claim 1, wherein the micron-sized lotus leaf mastoid structure is a micron-sized bulge or fold structure.
4. 4. The self-cleaning filter of a bionic micro-nano structure according to claim 1, wherein the nano moth-eye array structure is a structure array formed by a plurality of nano cone structures or a plurality of nano pillar structures.
5. 5. The self-cleaning filter of the bionic micro-nano structure according to claim 1, wherein the sum of the heights of the micron lotus leaf mastoid structure and the nanometer moth eye array structure is 0.3 μm-1 μm.
6. 6. The self-cleaning filter of a biomimetic micro-nano structure according to claim 4, wherein the distance between the centers of two adjacent cone structures or pillar structures is 100nm-300nm.
7. 7. The self-cleaning filter of biomimetic micro-nano structure according to claim 1, wherein a plurality of the micro-scale lotus leaf mastoid structures and nano-scale moth eye array structures are formed by etching process.
8. 8. The self-cleaning filter of biomimetic micro-nano structure according to claim 7, wherein a plurality of the micro-scale lotus leaf mastoid structures and nano-scale moth eye array structures are formed by dry etching or wet etching process.
9. 9. A security lens, characterized in that it comprises a self-cleaning filter of bionic micro-nano structure as defined in any one of claims 1-8.
10. 10. A lidar comprising a self-cleaning filter of biomimetic micro-nano structure according to any of claims 1-8.

Description

Self-cleaning optical filter, security lens and laser radar with bionic micro-nano structure Technical Field The invention relates to the technical field of optical filters, in particular to a self-cleaning optical filter with a bionic micro-nano structure, a security lens and a laser radar. Background The optical filters are needed to be used for security monitoring lenses, automobile laser radars and military optical devices, and the optical filters in the equipment are all located on the outermost layers, so that the optical filters are almost exposed to a complex outdoor environment, and once pollutants (such as dust, water stains or greasy dirt and the like) are adhered to the surfaces of the optical lenses, the system transmittance is directly reduced, the signal-to-noise ratio is reduced or the imaging quality is poor, even misjudgment is caused, and the normal functions of the optical system are affected. There are currently generally two solutions to this problem: Passive cleaning, i.e., periodic manual wiping or cleaning of the surface with a cleaning agent, is inefficient, costly, and sometimes difficult to operate, such as overhead monitoring cameras. 2. The functional coating with water and oil repellent is to coat AF coating on the surface of the filter, which is organic matter and has effect in the initial stage of product use, but the organic matter is easy to age in the severe conditions of outdoor ultraviolet irradiation, acid rain flushing, temperature change, etc. to degrade the performance and even affect the antifouling function. More importantly, the damaged organic coating may introduce new interfaces, increase the reflection and scattering of the surface, and negatively affect the optical performance of the filter. Disclosure of Invention The invention aims to solve the technical problems of improving the light transmittance of the optical filter, reducing the reflection of light, enabling the optical filter to have a self-cleaning function, avoiding the reduction of the transmittance after adhering pollutants on the surface of the optical filter, ensuring the normal function of an optical system, avoiding the performance degradation of the optical filter after the aging of the functional coating, and further avoiding the negative influence on the optical performance of the optical filter after the aging of the functional coating. The technical problems to be solved by the invention are realized by the following technical scheme: In order to solve the technical problems, the invention provides a self-cleaning optical filter with a bionic micro-nano structure, which comprises an optical filter body, wherein a plurality of micron-sized lotus leaf mastoid structures are formed on the optical filter body, a nano-sized moth eye array structure is formed on each micron-sized lotus leaf mastoid structure, and the micron-sized lotus leaf mastoid structures and the nano-sized moth eye array structures are both positioned on the outermost layer of the optical filter body. As a preferred implementation mode of the self-cleaning filter with the bionic micro-nano structure, the filter body is provided with a plurality of layers of dielectric films which are alternately overlapped. As a preferred implementation mode of the self-cleaning filter with the bionic micro-nano structure, the micron-sized lotus leaf mastoid structure is a micron-sized bulge or fold structure. As a preferred implementation mode of the self-cleaning filter with the bionic micro-nano structure, the nano moth-eye array structure is a structure array formed by a plurality of nano cone structures or a plurality of nano column structures. As a preferred implementation mode of the self-cleaning filter with the bionic micro-nano structure, the sum of the heights of the micron lotus leaf mastoid structure and the nanometer moth eye array structure is 0.3-1 mu m. As a preferred implementation mode of the self-cleaning filter with the bionic micro-nano structure, the distance between the centers of two adjacent cone structures or column structures is 100nm-300nm. As a preferred implementation mode of the self-cleaning filter with the bionic micro-nano structure, a plurality of micro-lotus leaf mastoid structures and nano-moth eye array structures are formed through an etching process. As a preferred implementation mode of the self-cleaning filter with the bionic micro-nano structure, a plurality of micro-scale lotus leaf mastoid structures and nano-scale moth eye array structures are formed through dry etching or wet etching processes. The invention provides a security lens, which comprises the self-cleaning optical filter with the bionic micro-nano structure. The invention provides a laser radar which comprises a self-cleaning filter with a bionic micro-nano structure. The invention has the following beneficial effects: the lotus leaf mastoid structure is composed of micron-sized mastoid protrusions, a multi-stage coarse structure