CN-122018106-A - Optical element unit, method for manufacturing optical element unit, and optical device

Abstract

The invention relates to an optical element unit, a method for manufacturing the optical element unit, and an optical device. An optical element unit including a first optical element and a second optical element is provided, wherein the first optical element and the second optical element are bonded to each other by interposing a bonding portion formed by solid phase bonding of an inorganic substance between a peripheral portion of the first optical element and a peripheral portion of the second optical element, and wherein the optical element unit has a hollow portion formed inside the peripheral portion between the first optical element and the second optical element bonded to each other.

Inventors

• HOSHINO KAZUHIRO
• Fukuba Hirotaka

Assignees

• 佳能株式会社

Dates

Publication Date

20260512

Application Date

20251112

Priority Date

20241112

Claims (20)

1. 1. An optical element unit includes a first optical element and a second optical element, Wherein the first optical element and the second optical element are bonded to each other by interposing a bonding portion formed by solid phase bonding of an inorganic substance between a peripheral portion of the first optical element and a peripheral portion of the second optical element, and Wherein the optical element unit has a hollow portion formed inside the peripheral portion between the first optical element and the second optical element that are bonded to each other.
2. 2. The optical element unit according to claim 1, wherein the bonding portion is an inorganic film formed by solid phase bonding between an inorganic layer provided at a peripheral portion of the first optical element and an inorganic layer provided at a peripheral portion of the second optical element.
3. 3. The optical element unit according to claim 2, wherein the inorganic film comprises at least one selected from the group consisting of a metal film, an oxide film, a nitride film, and a fluoride film.
4. 4. The optical element unit according to claim 2, wherein the inorganic film comprises a dielectric film.
5. 5. The optical element unit according to claim 4, wherein the dielectric film includes at least one selected from the group consisting of an oxide film, a nitride film, and a fluoride film.
6. 6. The optical element unit according to claim 5, wherein the oxide film contains carbon atoms and hydrogen atoms.
7. 7. The optical element unit of claim 4, wherein the dielectric film comprises at least one of SiO 2 、Al 2 O 3 、Nb 2 O 5 、Ta 2 O 5 、HfO 2 、MgO、Y 2 O 3 、ZrO 2 、ZnO、MgF 2 、AlF 3 、AlN、Si 3 N 4 and SiOC.
8. 8. The optical element unit according to claim 1, wherein the humidity of the hollow portion is lower than the humidity of the atmospheric environment.
9. 9. The optical element unit according to claim 1, wherein the joint portion is provided in an area that is located at a peripheral edge portion of the first optical element and a peripheral edge portion of the second optical element and is outside an optically effective area.
10. 10. The optical element unit according to claim 1, wherein the hollow portion is formed at an optical axis position of the optical element unit.
11. 11. The optical element unit according to claim 1, wherein the absolute humidity by weight of the hollow portion is 2g/kg or less.
12. 12. The optical element unit according to claim 1, further comprising a dielectric film between the joint and at least one of the first optical element and the second optical element.
13. 13. The optical element unit according to claim 1, wherein the joint extends between the hollow and at least one of the first optical element and the second optical element.
14. 14. The optical element unit according to claim 1, wherein a thickness of the joint is 0.1nm or more and less than 1 μm.
15. 15. The optical element unit according to claim 1, wherein the hollow portion has a pressure equal to or less than atmospheric pressure.
16. 16. The optical element unit according to claim 1, further comprising a third optical element, Wherein the second optical element and the third optical element are bonded to each other by interposing a bonding portion formed by solid phase bonding of another inorganic substance between a peripheral portion of the second optical element and a peripheral portion of the third optical element.
17. 17. The optical element unit according to claim 16, wherein the optical element unit has another hollow portion formed inside the peripheral portion between the second optical element and the third optical element that are bonded to each other.
18. 18. A manufacturing method of an optical element unit that manufactures an optical element unit by joining a first optical element and a second optical element at peripheral portions thereof, the manufacturing method comprising: Preparing the first optical element and the second optical element, wherein an inorganic layer is provided in an area including a peripheral edge portion of a joining side surface of at least one of the first optical element and the second optical element, and The prepared peripheral edge portions of the first optical element and the second optical element are joined so that a hollow portion is formed between the first optical element and the second optical element inside the peripheral edge portion.
19. 19. The manufacturing method of an optical element unit according to claim 18, wherein the bonding is performed in vacuum.
20. 20. The manufacturing method of an optical element unit according to claim 18, wherein the humidity of the hollow portion is lower than the humidity of the atmospheric environment.

Description

Optical element unit, method for manufacturing optical element unit, and optical device Technical Field The present disclosure relates to an optical element unit in which a plurality of optical elements are combined. Background An optical element unit that combines and integrates a plurality of optical elements including lenses, mirrors, filters, sensors, and the like is widely used in cameras of cameras, telescopes, microscopes, and portable electronic products, and even in image sensor modules. In recent years, in order to improve imaging performance of an optical element unit, it is necessary to unify optical elements with high positional accuracy. In japanese patent laid-open No.2007-195167, in order to perform high-precision imaging control in an image sensor module and obtain an image of excellent quality, a plurality of spacers are provided between bonding layers to improve positional accuracy when bonding between lenses or bonding lenses to an image sensor chip. In japanese patent laid-open No.2005-292441, as a method of manufacturing an optical element unit in which two or more transparent resin lenses are bonded to each other, a method involving using a lens containing an infrared absorber as at least one of the transparent resin lenses, and irradiating a bonding portion with infrared rays to weld and bond the lens to another lens is disclosed. Disclosure of Invention The present disclosure relates to providing an optical element unit having high environmental resistance and good optical characteristics. In order to solve the above-described problems, according to one aspect of the present disclosure, there is provided an optical element unit including a first optical element and a second optical element, wherein the first optical element and the second optical element are bonded to each other by interposing a bonding portion formed by solid phase bonding of an inorganic substance between a peripheral portion of the first optical element and a peripheral portion of the second optical element, and wherein the optical element unit has a hollow portion formed inside the peripheral portion between the first optical element and the second optical element bonded to each other. According to another aspect of the present disclosure, there is provided a manufacturing method of an optical element unit that manufactures an optical element unit by joining a first optical element and a second optical element at peripheral portions thereof, the manufacturing method including preparing the first optical element and the second optical element, in which an inorganic layer is provided in an area including a peripheral portion of a joining side surface of at least one of the first optical element and the second optical element, and joining peripheral portions of the prepared first optical element and second optical element so that a hollow portion is formed between the first optical element and the second optical element, inside the peripheral portion. According to still another aspect of the present disclosure, there is provided a manufacturing method of an optical element unit that manufactures an optical element unit by joining a first optical element, a second optical element, and a third optical element at peripheral portions thereof, the manufacturing method including preparing the first optical element, the second optical element, and the third optical element, wherein an inorganic layer is provided in an area including a peripheral portion of a joining side surface of at least one of the first optical element and the second optical element, and another inorganic layer is provided in an area including a peripheral portion of a joining side surface of at least one of the second optical element and the third optical element, and joining the prepared peripheral portions of the first optical element, the second optical element, and the third optical element such that a hollow portion is formed inside the respective peripheral portions between the first optical element and the second optical element, and further between the second optical element and the third optical element. According to still another aspect of the present disclosure, there is provided an optical apparatus including the above optical element unit. Features of the present disclosure will become apparent from the following description of embodiments with reference to the accompanying drawings. The description of the embodiments below is set forth by way of example. Drawings Fig. 1 is a schematic cross-sectional view of an optical element unit according to the present disclosure. Fig. 2A is a schematic diagram for showing an example of an inorganic film for bonding an optical element in the present disclosure. Fig. 2B is a sectional view for illustrating an example of an optical element unit according to the present disclosure. Fig. 2C is a schematic diagram for illustrating an example of an inorganic film of an optical element unit in the present