CN-122018147-A - Optical imaging device with soft X-ray radiation imaging capability and preparation method thereof

CN122018147ACN 122018147 ACN122018147 ACN 122018147ACN-122018147-A

Abstract

The invention relates to an optical imaging device with soft X-ray radiation imaging capability and a preparation method thereof, comprising an optical lens, a scintillation film layer and an imaging sensor, wherein the scintillation film layer is plated on the outer side of an incident surface of the optical lens and is used for converting incident soft X-rays into visible light in situ, the scintillation film layer comprises a doped yttrium aluminum garnet material, the optical lens is used for amplifying or shrinking the visible light converted by the scintillation film layer to form images, and the imaging sensor is used for receiving the visible light imaged by the optical lens to obtain a space distribution image of the soft X-rays. The invention has the beneficial effects that the scintillation film is directly plated at the forefront end of the lens, so as to realize soft X-ray in-situ conversion, thoroughly avoid the spatial diffusion of optical signals caused by an independent scintillation screen, remarkably improve the imaging resolution, shorten the optical path and reduce the signal loss.

Inventors

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Assignees

杭州云栖极耀科技有限公司

Dates

Publication Date: 20260512
Application Date: 20260225

Claims (10)

1. An optical imaging device with soft X-ray radiation imaging capability is characterized by comprising an optical lens, a scintillation film layer and an imaging sensor; the scintillation film layer is plated on the outer side of the incident surface of the optical lens and is used for converting incident soft X-rays into visible light in situ; the optical lens is used for amplifying or shrinking the visible light converted by the scintillation film layer to form images; The imaging sensor is used for receiving the visible light imaged by the optical lens so as to obtain a space distribution image of soft X-rays.
2. The optical imaging device with soft X-ray radiation imaging capability of claim 1, wherein the doped yttrium aluminum garnet material is cerium doped yttrium aluminum garnet or terbium doped yttrium aluminum garnet, the doped atomic concentration of the cerium doped yttrium aluminum garnet ranges from 0.1% to 1.5%, and the doped atomic concentration of the terbium doped yttrium aluminum garnet ranges from 0.5% to 10%.
3. The optical imaging device with soft X-ray radiation imaging capability of claim 2, wherein the thickness of the scintillation film layer is 100 nm to 2 μm.
4. The optical imaging device with soft X-ray radiation imaging capability of claim 3, further comprising an index matching layer disposed between an optical lens entrance surface and said scintillation film layer.
5. The optical imaging device with soft X-ray radiation imaging capability of claim 4, wherein the material of the index matching layer is hafnium oxide, titanium dioxide or optical polyimide, the index of refraction of the index matching layer ranges from 1.60 to 1.75, and the thickness of the index matching layer ranges from 100 nm μm to 2 μm.
6. The optical imaging apparatus with soft X-ray radiation imaging capability according to claim 5, wherein the optical lens is a zoom lens or a fixed focal length lens group, and the magnification or reduction imaging of the visible light in the range of 1-100 times is achieved by focal length adjustment or optical path combination.
7. The optical imaging device with soft X-ray radiation imaging capability of claim 6, wherein the imaging sensor is a CMOS image sensor or a CCD image sensor.
8. A method of making an optical imaging device having soft X-ray radiation imaging capabilities according to any one of claims 1 to 7, comprising: S1, providing an optical lens; S2, depositing a scintillation film layer outside the incident surface of the optical lens, wherein the scintillation film layer comprises a doped yttrium aluminum garnet material; S3, assembling the optical lens plated with the scintillation film layer, the matched optical path component and the imaging sensor according to the requirement of enlarging/reducing imaging, and adjusting the optical path focal length and the coupling precision to complete the construction of the optical imaging device.
9. The method of claim 8, further comprising, prior to S2, depositing an index matching layer on an entrance surface of the optical lens, S2 being specifically depositing the scintillation thin film layer on the index matching layer.
10. The method of claim 9, wherein in S2 the scintillation thin film layer is deposited by magnetron sputtering with the assistance of high temperature atmospheric annealing or pulsed laser in situ growth.

Description

Optical imaging device with soft X-ray radiation imaging capability and preparation method thereof Technical Field The invention belongs to the technical field of optical detection, and particularly relates to an optical imaging device with soft X-ray radiation imaging capability and a preparation method thereof. Background The soft X-ray radiation (the wavelength is usually in the wave band of 0-10 nm) has irreplaceable application value in the fields of photoetching, light source diagnosis, plasma physical research, material microstructure analysis and the like, and the imaging technology is a core means for acquiring the spatial distribution and micro-characteristic information of a target. The existing soft X-ray imaging schemes are mainly divided into two types, namely, a special soft X-ray detector (such as a CCD/CMOS back-illuminated modified device) is adopted, light convergence is realized by relying on a concave mirror or a Fresnel zone plate, and the defects of complex imaging operation, high cost, low quantum efficiency, special vacuum packaging and the like exist. The other type is that soft X-rays are converted into visible light through an independent flicker screen and then received by a visible light imaging system. However, this approach suffers from serious physical limitations in practical applications: 1. The limit of luminescence isotropy is that the scintillator has space randomness in the back excitation process of absorbing soft X-ray energy, and the generated fluorescence emits to 4 pi total space isotropy without the directivity of incident rays. In a separate flicker screen configuration, this omnidirectional emission characteristic results in a significant geometric spread of the bulk of the optical signal before it reaches the subsequent optical lens. 2. The contradiction between thickness and resolution, although increasing the scintillator thickness theoretically improves the absorption of high energy rays, for soft X-rays with very weak penetration, the effective excitation occurs only at the surface nanoscale layer. If the scintillator is thicker, the resulting visible photons will have severe lateral dispersion (cross talk) across the scintillator substrate, creating a "cone of light" effect, resulting in a dramatic broadening of the imaging Point Spread Function (PSF), greatly limiting the spatial resolution of the system. 3. The problem of integration level and loss is that the free space between the independent flicker screen and the imaging lens further enlarges the divergence angle of the light beam, so that the Numerical Aperture (NA) is difficult to match, the signal collection efficiency is low, the system structure is loose, and the compact optical system and the accurate enlarging/shrinking imaging requirements are difficult to adapt. 4. In the prior art, the obvious technical prejudice exists that the scintillator is generally considered to be arranged at the front end of an imaging light path as an independent component so as to avoid influencing the light transmittance, the surface precision and the imaging regulation function of the lens, and therefore, the technical path of directly plating the scintillation film at the forefront end of the lens is not considered. In addition, the conventional scintillating materials (such as gadolinium oxysulfide, cesium iodide and the like) have poor conversion efficiency in a soft X-ray wave band, are easy to generate cracks in the film preparation process and have insufficient adhesive force, and are difficult to meet the strict requirements of high-precision imaging on film uniformity and stability. Disclosure of Invention The invention aims to overcome the defects in the prior art and provide an optical imaging device with soft X-ray radiation imaging capability and a preparation method thereof. In a first aspect, an optical imaging device with soft X-ray radiation imaging capability is provided, comprising an optical lens, a scintillation film layer, and an imaging sensor; the scintillation film layer is plated on the outer side of the incident surface of the optical lens and is used for converting incident soft X-rays into visible light in situ; the optical lens is used for amplifying or shrinking the visible light converted by the scintillation film layer to form images; The imaging sensor is used for receiving the visible light imaged by the optical lens so as to obtain a space distribution image of soft X-rays. Preferably, the doped yttrium aluminum garnet material is cerium doped yttrium aluminum garnet or terbium doped yttrium aluminum garnet, the doped atomic concentration of the cerium doped yttrium aluminum garnet ranges from 0.1% to 1.5%, and the doped atomic concentration of the terbium doped yttrium aluminum garnet ranges from 0.5% to 10%. Preferably, the thickness of the scintillation film layer is 100 nm to 2 μm. Preferably, the optical lens further comprises an index matching layer arranged between the