CN-122018151-A - Imaging mode management system and method based on porous diaphragm

CN122018151ACN 122018151 ACN122018151 ACN 122018151ACN-122018151-A

Abstract

The invention relates to the technical field of diaphragm imaging, in particular to an imaging mode management system and method based on a porous diaphragm, wherein the system comprises an angle deviation extraction module for determining hole position transition and direction logic, a same-direction electromotive force analysis module for extracting a uniform rotation action sequence, the hole site switching instruction construction module generates a coherent driving instruction, the offset trend extraction module acquires physical offset readings and constructs a retaining segment diagram, and the mode management generation module matches the compensation command with the driving schedule to generate a porous diaphragm imaging mode management set. According to the invention, through combing the corresponding relation between the hole sites and the rotating direction, unifying the direction sequence and the execution sequence, establishing clear transfer logic and continuous engagement characteristics in the switching process, keeping the multi-hole switching in the same direction and continuing, reducing control uncertainty, integrating path and physical offset data, identifying the offset change keeping section, providing clear basis for imaging compensation, maintaining rotating predictability under complex conditions, and improving the scheduling stability and control precision of the imaging mode.

Inventors

GAO FUYONG
GAO YIFEI
ZHAO HONGYU
CHEN XUESONG
GUO CHUNLONG

Assignees

水木未来(北京)科技有限公司
水木科仪(北京)科技有限公司

Dates

Publication Date: 20260512
Application Date: 20260410

Claims (9)

1. An imaging modality management system based on a porous diaphragm, the system comprising: the angle offset extraction module is used for acquiring the current and target hole site numbers on the diaphragm disc, positioning a rotation direction preset instruction, reading the rotation direction, arranging a direction switching sequence, analyzing a conversion relation, pushing into a control process, and generating a diaphragm hole site direction change logic sequence; The same-direction EMF analysis module extracts rotation motions in a continuous path according to the rotation direction sequence information in the diaphragm hole position direction change logic sequence, identifies direction consistency, refines direction consistency motions, and generalizes a rotation direction propulsion mode to obtain a rotation same-direction change stable direction sequence; The hole position switching instruction construction module is used for calling the path number and the rotation direction information in the rotation homodromous change stable direction sequence, extracting path continuous action hole position numbers, simulating an initial instruction sequence, generating a driving instruction, planning continuous actions and processing connection to obtain a multi-aperture path switching instruction set; and the migration trend extraction module is used for acquiring the action sequence of each hole site according to the hole site numbers and the rotation path information in the multi-aperture path switching instruction set, driving equipment to continuously rotate and acquire physical migration readings, integrating continuous migration data into the action time sequence, reconstructing the migration trend and forming a hole site switching migration holding section diagram.
2. The imaging mode management system based on the porous diaphragm according to claim 1, wherein the diaphragm hole position direction change logic sequence comprises logic step distance information, a direction switching sequence, a physical execution sequence, a transition hole position sequence and a rotation direction mapping relation, the rotation homodromous change stable direction sequence comprises a direction coherent segment identifier, a rotation action type set, a time continuity feature and a direction consistency label, the porous diaphragm path switching instruction set comprises a starting hole position number, a continuous rotation command sequence, an action engagement rule and a path number mapping table, and the hole position switching offset holding segment map comprises a physical offset trend sequence, a rotation direction holding segment, an offset data integration set and an action time sequence mapping.
3. The imaging mode management system based on the porous diaphragm according to claim 1, wherein the angle offset extraction module comprises a hole site matching sub-module, a direction chain construction sub-module and a task sequence pushing sub-module; The hole position matching sub-module is used for acquiring a current hole position number and a target hole position number on the diaphragm disc, calling a hole position recording sequence in diaphragm rotation driving equipment, searching the relative position of the target number in the sequence, marking all intermediate number items between the current number and the target number, and arranging a number path according to the recording sequence to generate a number path structure sequence; the direction chain construction submodule searches the rotating direction instruction corresponding to each number according to the number path structure sequence, extracts the action direction information and the instruction arrangement sequence mark in the direction instruction, calls the instruction arrangement table to determine the sequence of the direction instruction in the execution flow, and sequentially links the actions in each direction according to the path numbers to generate a rotating direction action chain; And the task sequence pushing sub-module invokes the direction and number sequence information in the rotating direction action chain, performs execution path collection operation on each group of actions, establishes a task execution flow chart, combines each item of direction information in the action chain with the corresponding hole position number to form a control step sequence, gathers the whole flow and writes the whole flow into the current rotating task control program to obtain a diaphragm hole position direction change logic sequence.
4. The imaging mode management system based on the porous diaphragm according to claim 1, wherein the equidirectional EMF analysis module comprises a direction sequence extraction sub-module, a path coherent identification sub-module and a stable direction collection sub-module; The direction sequence extraction submodule acquires the rotation direction sequence information in the diaphragm hole position direction change logic sequence, sequentially reads the marks of the rotation action starting point and the end point of each path in the sequence, extracts the corresponding rotation action type from the path marks, arranges the action type list according to the reading sequence, marks and gathers the sequence information of the action types in the adjacent path sections, and establishes a direction action sequence diagram; The path continuity identifying sub-module is used for calling path action type information according to the direction action sequence diagram, identifying direction consistency marks of continuous action types in path paragraphs, extracting start and stop numbers of the path paragraphs with the consistent directions, comparing the consistency degree of sequence labels of the action types and the direction marks, and carrying out grouping operation by combining the number of direction repetition and the path length to obtain a continuity direction section set; And the stable direction collection sub-module reads the repeated intervals of the direction marks according to the coherent direction section set, classifies numbered sections with consistent continuous directions in the path action set, screens the direction path group meeting continuous coverage conditions, arranges the direction marks in the classified path group according to the original sequence to generate a direction pushing record table, and acquires a rotary homodromous change stable direction sequence.
5. The imaging mode management system based on the porous diaphragm according to claim 1, wherein the hole site switching instruction construction module comprises a path number extraction sub-module, a driving command generation sub-module and an action engagement planning sub-module; the path number extraction submodule invokes the path number and the rotation direction continuity information in the rotation homodromous change stable direction sequence, extracts hole site numbers corresponding to the continuous rotation direction marks in the sequence according to the path number sequence, sorts the hole site numbers consistent with adjacent directions into a number combination group according to the path sequence, and performs combination processing on the number segments with repeated marks in the combination group to obtain a continuous path number set; The driving command generation submodule calls an instruction triggering structure in the diaphragm rotation driving equipment according to the serial number combination of each segment in the serial path serial number set, sequentially generates rotation action commands corresponding to each hole site according to the serial number sequence, establishes binding mapping between the hole site serial numbers and the rotation commands, screens serial number segments with continuous actions and fills in vacant command information to obtain a hole site driving command set; And the action engagement planning sub-module extracts command distribution information among the numbered sections according to the hole site driving command set, calls start-stop command identifiers and sequence marks of the sections, marks out command transition positions needing to be continuously executed, establishes an engagement list of adjacent command pairs according to the direction consistency and the numbering sequence, integrates command corresponding numbering combinations in all path sections, and acquires the multi-aperture path switching command set.
6. The imaging mode management system based on the porous diaphragm according to claim 1, wherein the migration trend extraction module comprises an action sequence reading sub-module, an migration data acquisition sub-module and a trend segment reconstruction sub-module; The action sequence reading submodule extracts an action arrangement sequence corresponding to each hole position number in the rotating path according to the hole position number and the rotating path information in the multi-aperture path switching instruction set, marks the position of the adjacent hole position number in the path as a path execution sequence, establishes a numbered action path diagram according to the sequence, and acquires a hole position action sequence table; The offset data acquisition sub-module is used for controlling the diaphragm rotation driving equipment to continuously calibrate and rotate the diaphragm disc according to the hole position action sequence table, acquiring offset readings between the center of the diaphragm hole and the center of the imaging beam after each hole position action is completed, recording the number positions and direction marks of the corresponding actions, and arranging the acquisition data recording sequence according to the numbers to establish a continuous offset reading set; And the trend segment reconstruction submodule calls the rotation direction information of each data item in the continuous offset reading set, identifies the data segments with the rotation directions kept consistent, arranges path segments according to the position sequence of the data items in the execution sequence, combines numbered segments with the consistent directions into trend path units, draws a change track graph according to the data coverage of each path unit, and acquires a hole position switching offset keeping segment graph.
7. The multi-aperture based imaging modality management system of claim 1, wherein the system further comprises: the mode management generating module is used for calling the information and the action time sequence of the shift holding section in the shift holding section diagram of the hole site switching, extracting the sequence of the hole site numbers and the rotation directions in each group of shift holding sections, matching imaging compensation commands and corresponding hole site actions, identifying repeated paths and associating driving scheduling relations, and generating a multi-aperture imaging mode management set according to the sequence corresponding to the driving commands and the imaging operations; the multi-aperture diaphragm imaging mode management set comprises an offset maintaining section index, an imaging compensation command sequence, a corresponding relation between a hole position and a rotating direction, repeated hole position use record and drive scheduling information.
8. The imaging mode management system based on the porous diaphragm according to claim 7, wherein the mode management generation module comprises an instruction matching sub-module, a number grouping sub-module and an imaging scheduling sub-module; The instruction matching sub-module is used for calling the information and the action time sequence of the shift holding section in the shift holding section diagram of the hole site switching, extracting the sequence of the hole site numbers and the rotation directions contained in each group of shift holding sections, reading the position identifiers of the hole site actions in the shift holding sections, searching the diaphragm imaging compensation operation commands corresponding to the positions, establishing the corresponding relation between the actions of each section and the compensation commands, and obtaining an operation command pairing set; The number grouping sub-module screens hole site numbers repeatedly used in a plurality of offset maintaining sections and the rotating directions thereof according to the operation command pairing set, extracts the occurrence frequency of the repeated numbers in each section, records the corresponding direction sequence, establishes a repeated number index table, and performs merging operation on numbers with the same occurrence position and consistent direction marks to obtain a repeated number association group; And the imaging scheduling sub-module reads the diaphragm imaging operation command corresponding to each number according to the repeated number association group, combines the number action with the command sequence according to the action occurrence sequence in the rotation process, identifies the path distribution of instruction call in the continuous direction, establishes a control instruction call flow in combination with the number arrangement sequence, and acquires the porous diaphragm imaging mode management set.
9. A method for managing imaging modes based on a porous diaphragm, characterized in that the method is used for the imaging mode management system based on a porous diaphragm according to any one of claims 1 to 8, comprising the steps of: S1, acquiring current and target hole site numbers on a diaphragm disc, positioning a rotating direction preset instruction, reading the rotating direction, arranging a direction switching sequence, analyzing a conversion relation, pushing into a control process, and generating a diaphragm hole site direction change logic sequence; S2, extracting rotation motions in a continuous path according to rotation direction sequence information in the diaphragm hole position direction change logic sequence, identifying direction consistency, refining direction consistency motions, and inducing a rotation direction propulsion mode to obtain a rotation homodromous change stable direction sequence; S3, calling the path number and the rotation direction information in the rotation homodromous change stable direction sequence, extracting path continuous action hole position numbers, simulating an initial instruction sequence, generating a driving command, planning continuous actions and processing connection to obtain a multi-aperture path switching instruction set; S4, according to the hole position numbers and the rotation path information in the multi-aperture diaphragm path switching instruction set, obtaining the action sequence of each hole position, continuously rotating and collecting physical offset readings by driving equipment, integrating continuous offset data into the action time sequence, reconstructing an offset trend, and forming a hole position switching offset holding section diagram; S5, calling the information and the action time sequence of the shift holding section in the hole position switching shift holding section diagram, extracting the sequence of the hole position numbers and the rotation directions in each group of shift holding sections, matching imaging compensation commands and corresponding hole position actions, identifying repeated paths, associating driving scheduling relations, and generating a multi-aperture imaging mode management set according to the sequence corresponding to the driving commands and the imaging operations.

Description

Imaging mode management system and method based on porous diaphragm Technical Field The invention relates to the technical field of diaphragm imaging, in particular to an imaging mode management system and method based on a porous diaphragm. Background The technical field of diaphragm imaging comprises the realization of precise regulation and control of beam propagation paths, flux control and spatial resolution characteristics in an imaging system through the design and configuration of diaphragm structures, and the core content of the technical field is to control imaging parameters in various imaging devices by utilizing diaphragm components with different aperture shapes, arrangement modes and functional integration, particularly in high-precision imaging systems such as a transmission electron microscope and the like, the intensity, the direction and the coverage area of an electron beam are controlled by components such as an objective diaphragm, a selected area diaphragm, a condenser diaphragm and the like, so that the technical system is suitable for the requirements of various imaging modes. The imaging mode management system and the method based on the porous diaphragm are characterized in that a plurality of diaphragm holes with different sizes and functions are distributed and arranged on a diaphragm disc in a non-linear mode, a plurality of types of hole sites exceeding the number of the traditional structure are integrated in a limited space, rapid switching among different imaging modes is realized by adopting an accurate control means, the electron beam control requirement from nano-level high resolution to low-dose imaging is met by an aperture coverage expansion strategy, the function integration degree is improved by introducing a double-beam structure, a wedge-shaped structure and a composite diaphragm with optical filtering performance, the hole site switching is controlled by adopting a non-linear distribution and short-stroke driving device, the coaxial positioning precision of the electron beam is enhanced, and the ultrahigh vacuum compatibility of the diaphragm system is improved by selecting a metal structure and a non-bonding mode. In the prior art, in the actual operation of a multi-aperture diaphragm imaging system, the prior art generally uses the hole site structural design and the precision of a driving device as main control bases, and lacks systematic arrangement on the continuity of the rotation direction in the hole site switching process, so that under the condition of nonlinear distribution or uneven hole site spacing, direction jump or path crossing easily occurs in the rotation action, the control system is difficult to recognize rotation trend change in time, so that offset calibration depends on single measurement results, errors are easily accumulated in a continuous switching scene, and when the imaging mode needs frequent adjustment or compensation operation superposition, the problems of unbalanced rotation rhythm, inconsistent hole site response, reduced imaging stability and the like are easily caused. Disclosure of Invention The invention aims to solve the defects in the prior art, and provides an imaging mode management system and method based on a porous diaphragm. In order to achieve the purpose, the invention adopts the following technical scheme that the imaging mode management system based on the porous diaphragm comprises: the angle offset extraction module is used for acquiring the current and target hole site numbers on the diaphragm disc, positioning a rotation direction preset instruction, reading the rotation direction, arranging a direction switching sequence, analyzing a conversion relation, pushing into a control process, and generating a diaphragm hole site direction change logic sequence; The same-direction EMF analysis module extracts rotation motions in a continuous path according to the rotation direction sequence information in the diaphragm hole position direction change logic sequence, identifies direction consistency, refines direction consistency motions, and generalizes a rotation direction propulsion mode to obtain a rotation same-direction change stable direction sequence; The hole position switching instruction construction module is used for calling the path number and the rotation direction information in the rotation homodromous change stable direction sequence, extracting path continuous action hole position numbers, simulating an initial instruction sequence, generating a driving instruction, planning continuous actions and processing connection to obtain a multi-aperture path switching instruction set; and the migration trend extraction module is used for acquiring the action sequence of each hole site according to the hole site numbers and the rotation path information in the multi-aperture path switching instruction set, driving equipment to continuously rotate and acquire physical migration readings, integrating continuo