CN-122018170-A - Illumination optical system for super surface

Abstract

The invention relates to the technical field of non-imaging optical design, in particular to an illumination optical system for a super-surface, which comprises halogen lamp beads, an ellipsoidal reflector, an integrator square rod and a relay lens group which are sequentially arranged, wherein the halogen lamp beads emit wide-spectrum light covering visible-near infrared bands, the wide-spectrum light is converged by the ellipsoidal reflector and is coupled to the integrator square rod to carry out light field homogenization and square shaping, and then beam shrinkage is completed by the relay lens group, and the angle of marginal light and the uniformity of light spots are synchronously controlled.

Inventors

• TAN XIN
• LI JIGUO
• JIAO QINGBIN
• ZHANG XIN
• JIANG SIJIA
• MA DING
• GU MINGHUI
• LIU CHAO
• Huang Huansong

Assignees

• 中国科学院长春光学精密机械与物理研究所

Dates

Publication Date

20260512

Application Date

20260130

Claims (10)

1. 1. The illumination optical system for the super surface is characterized by comprising halogen lamp beads, an ellipsoidal reflector, an integrator square rod and a relay lens group; The halogen lamp beads emit wide-spectrum light covering visible-near infrared bands, the wide-spectrum light is converged by the ellipsoidal reflector and coupled to the integrating square rod to perform light field homogenization and square shaping, beam shrinking is completed through the relay lens group, meanwhile, the edge light angle and light spot uniformity of the wide-spectrum light are controlled through the relay lens group, and light spots are output.
2. 2. The illumination optical system for a super surface as claimed in claim 1, wherein the major axis of the ellipsoidal mirror is 77.5mm, the minor axis of the ellipsoidal mirror is 45.83mm, the half focal length of the ellipsoidal mirror is 62.5mm, the front opening diameter of the ellipsoidal mirror is 12mm, and the rear opening diameter of the ellipsoidal mirror is 63.38mm.
3. 3. The illumination optical system for a super surface as set forth in claim 1, wherein said edge ray angle controlled by said relay lens group is + -10.21 DEG, said spot uniformity is not less than 95%, and said spot is a rectangular spot.
4. 4. The illumination optical system for a super surface as claimed in claim 1, wherein said integrator square bar is a square bar having a cross-sectional dimension of 2mm, and 0.6 x-ray is completed by said relay lens group.
5. 5. The illumination optical system for a super surface as recited in claim 1, wherein the relay lens group includes a first lens, a second lens, a third lens, and a fourth lens which are disposed in this order, a front surface of the first lens being a surface away from the second lens, a front surface of the first lens being a plane, the second lens and the third lens being combined to form a double cemented lens group, a front surface of the third lens being a surface combined with the second lens, a rear surface of the third lens being a plane.
6. 6. The illumination optical system for a super surface as claimed in claim 5, wherein an object distance of said relay lens group is 35.95mm, and an effective focal length of said relay lens group is 22.98mm.
7. 7. The illumination optical system for a super surface as claimed in claim 5, wherein an object aperture angle of the relay lens group is 6.57 degrees, an outgoing ray angle of the relay lens group is controlled within 10.21 degrees, and a rear intercept of the relay lens group is 14.98mm.
8. 8. An illumination optical system for a super surface as recited in claim 5, wherein a radius of curvature of a front surface of said first lens is infinite, a radius of curvature of a rear surface of said first lens is-16.471 mm, a radius of curvature of said second lens is 91.556mm, a radius of curvature of a front surface of said third lens is-8.347 mm, a radius of curvature of a rear surface of said third lens is infinite, a radius of curvature of a front surface of said fourth lens is 20.619mm, and a radius of curvature of a rear surface of said fourth lens is-23.583 mm.
9. 9. An illumination optical system for a super surface as claimed in claim 5, wherein the thickness of the first lens is 2.618mm, the distance between the first lens and the integrator square bar is 37.08mm, the distance between the first lens and the second lens is 0.5mm, the thickness of the second lens is 3.304mm, the thickness of the third lens is 2.48mm, the distance between the third lens and the fourth lens is 18.015mm, the thickness of the fourth lens is 2.584mm, and the distance between the fourth lens and the image plane is 15mm.
10. 10. The illumination optical system for a super surface as recited in claim 5, wherein the first lens is H-LAF2, the second lens is HZLAF C, the third lens is H-ZLAF C, and the fourth lens is H-QK1.

Description

Illumination optical system for super surface Technical Field The invention belongs to the technical field of non-imaging optical design, and particularly relates to an illumination optical system for a super surface. Background The artificial two-dimensional metamaterial, namely the super surface, is used as a sub-wavelength artificial structure platform, and the key research direction in the field is realized by virtue of the advantages of microminiaturization integration, light field regulation and control efficiency and high sensitivity sensing. The supported Fano resonance and continuous domain bound state (BIC) electromagnetic modes can generate extremely high quality factor (Q value) and obvious local field enhancement, are core ways for realizing ultra-high sensitivity refractive index sensing, and have important significance in the fields of industry, agriculture, medical diagnosis, scientific research and the like. In the ultra-surface performance test and the practical application detection, the design of an illumination optical system is important to the realization of ultra-high sensitivity and high signal-to-noise ratio detection. The ultra-surface is generally composed of micro-nano structural units which are arranged periodically, the whole optical performance of the ultra-surface is macroscopically reflected by the amplitude and phase regulation of light waves by a plurality of micro-structural units, the excitation response of different areas of the ultra-surface is inconsistent due to uneven illumination, measurement errors are introduced, therefore, a high uniform illumination light spot is required to be provided, secondly, due to the fact that a spectrometer is used as a detection device for detection to acquire a transmission spectrum, an illumination light source is required to provide a continuous spectrum covering the whole detection band, in order to excite and maintain a specific electromagnetic resonance mode (namely, the contribution of magnetic dipoles is dominant) in the ultra-surface, the incident light angle is limited in a set range to ensure the extremely narrow line width of resonance peaks, finally, in view of the fact that the single maximum exposure write field of the electron beam exposure device for processing the ultra-surface chip at present is 1mm×1mm, the packaging size of the ultra-surface chip is 1mm 2 square for realizing the full caliber and no vignetting coverage of the area, and the necessary alignment tolerance is reserved to inhibit the edge effect, and the optical expansion of the illumination system is required to be matched with the ultra-surface. In the prior researches, students put forward various schemes for super-surface illumination, but have obvious limitations, such as integrating a refractive index sensing super-surface with an optical flow control device, adopting single-wavelength light illumination, realizing specific beam pattern detection, but not involving a light spot homogenizing design, being difficult to ensure uniform excitation of a large-area super-surface, constructing a wide-spectrum light test light path, combining a focusing light beam through a diaphragm and an objective lens, not controlling an edge light angle, possibly damaging Fano resonance stability, directly using an Olympic Bass BX53 microscope illumination system, simplifying the light path, but ensuring that a microscope is large in size, low in integration level and unfavorable for development of a portable detection instrument, and simply optimizing a scheme of a light source (using a 800-1650nm continuous spectrum laser or a collimating element (such as an aspheric collimating lens), wherein the general unaddressed scheme involves light spot shaping and light homogenizing mechanism, and the problem of mismatch between a light spot and a super-surface sensing area cannot be solved. Disclosure of Invention In view of the above, the invention provides an illumination optical system scheme specially designed for the super-surface, solves the problem of low sensing signal-to-noise ratio caused by mismatching of the light spot shape and uncontrolled incidence angle of the general illumination optical system scheme, breaks through the limitation of the general illumination optical system, completely meets the requirement of the super-surface experimental performance test in the output characteristic, and is suitable for the development of portable sensing instruments taking the super-surface as a core. In order to achieve the above purpose, the technical scheme of the invention is realized as follows: The invention provides an illumination optical system for a super surface, which comprises halogen lamp beads, an ellipsoidal reflector, an integrator square rod and a relay lens group, wherein the halogen lamp beads emit wide-spectrum light covering visible-near infrared bands, the wide-spectrum light is converged through the ellipsoidal reflector and coupled to the inte