CN-122018242-A - Beam brake pad ampere meter control box and electron beam exposure machine

CN122018242ACN 122018242 ACN122018242 ACN 122018242ACN-122018242-A

Abstract

The invention discloses a beam gate meter control box and an electron beam exposure machine, wherein the beam gate meter control box comprises a shell, a first circuit board, a second circuit board and a switching power supply, wherein the first circuit board is arranged in the shell, a single chip microcomputer and a meter control circuit are arranged on the first circuit board, the single chip microcomputer is connected with the meter control circuit, the second circuit board is arranged in the shell, the beam gate control circuit is arranged on the second circuit board, the beam gate control circuit is connected with the single chip microcomputer, and the switching power supply is arranged in the shell and is respectively connected with the first circuit board and the second circuit board. According to the invention, the picoammeter control circuit and the beam brake control circuit are integrated in one device, so that a user can realize high-voltage control and test on electron beam current on the same device, and convenience is provided for the user. The adjustable beam gate high voltage can eliminate the charge and discharge problems of imaging and exposure caused by the long-term fixed point bombardment of the diaphragm by the deflected electron beam.

Inventors

PENG XIAOCHONG
Fan Liufei
HUANG LONG

Assignees

深圳市鲲腾易必目科技有限责任公司

Dates

Publication Date: 20260512
Application Date: 20260130

Claims (10)

1. The utility model provides a restraint floodgate skin ampere meter control box which characterized in that includes: A housing; The first circuit board is arranged in the shell, a singlechip and a picoammeter control circuit are arranged on the first circuit board, and the singlechip is connected with the picoammeter control circuit; The second circuit board is arranged in the shell, and is provided with a beam brake control circuit which is connected with the singlechip; the switch power supply is arranged in the shell and is respectively connected with the first circuit board and the second circuit board.
2. The beam brake picometer control box of claim 1, further comprising a picometer indicator head, a high voltage meter indicator head, a temperature alarm indicator light and a beam current turn-off indicator light, wherein, The Pian indicator head is connected with the singlechip; The high-voltage indicating gauge head is connected with the beam brake control circuit; the temperature alarm indicator lamp is connected with the picoammeter control circuit; the beam turn-off indicator light is connected with the beam brake control circuit.
3. The beam brake pad safety meter control box of claim 2, further comprising an adjustable high voltage varistor and a high voltage control knob, wherein, The adjustable high-voltage rheostat is connected with the beam brake control circuit; the high-voltage control knob is arranged on the shell and is connected with the adjustable high-voltage rheostat.
4. The beam brake picometer control box according to claim 1, wherein the picometer control circuit comprises a picometer current detection module, a singlechip signal amplification module, a serial port communication module, a temperature detection module and an LED signal output module, The Pi-an ammeter current detection module is connected with the singlechip and used for converting input current into voltage signals and inputting the voltage signals to the singlechip; The single chip microcomputer signal amplification module is connected with the single chip microcomputer and the beam gate control circuit and is used for generating a high-voltage control signal to the beam gate control circuit so as to set the high-voltage of the beam gate; the serial port communication module is connected with the singlechip and is used for realizing communication between the singlechip and the upper computer; The temperature detection module is connected with the singlechip and is used for detecting the working temperature; the LED signal output module is connected with the singlechip signal amplification module and used for alarming when the working temperature exceeds a temperature threshold.
5. The beam brake picometer control box of claim 3, wherein the beam brake control circuit comprises a half-bridge drive module, a high voltage supply module, a beam brake status LED module, a high voltage indicator header interface module, and a slide rheostat power supply interface module, wherein, The half-bridge driving module is used for accessing TTL level signals, and outputting beam gate control signals to control the on-off of the beam gate according to the TTL level signals; the high voltage supply module is connected with the beam brake state LED module and is used for generating a high voltage value; The beam brake state LED module is respectively connected with the half-bridge driving module and the beam current turn-off indicator lamp and is used for displaying the working state of the half-bridge driving module; The high-voltage indicating gauge head interface module is connected with the high-voltage indicating gauge head and is used for transmitting a high-voltage value to the high-voltage indicating gauge head; and the sliding rheostat power supply interface module is connected with the high-voltage control knob.
6. The beam brake picometer control box of claim 4, wherein the picometer current detection module comprises a first resistor, a second resistor, a third resistor, a fourth resistor, a fifth resistor, a sixth resistor, a first capacitor and a first operational amplifier; One end of the first resistor is connected with current, and the other end of the first resistor is connected with one end of the second resistor; The other end of the second resistor is connected with the inverting input end of the first operational amplifier, the output end of the first operational amplifier is connected with one end of the third resistor, and the non-inverting input end of the first operational amplifier is grounded; the other end of the third resistor is connected with the singlechip; One end of the fourth resistor is connected with the other end of the third resistor, and the other end of the fourth resistor is grounded; the first capacitor is connected with the fourth resistor in parallel; the fifth resistor is connected between the first operational amplifier and one end of the sixth resistor, and the other end of the sixth resistor is connected with one end of the second resistor.
7. The beam gate meter control box according to claim 4, wherein the serial port communication module comprises a digital isolator, a receiving chip and a serial communication interface, wherein the digital isolator is connected with the single chip microcomputer and the receiving chip, the receiving chip is connected with the serial communication interface, and the serial communication interface is used for being connected with an upper computer.
8. The beam brake skin ampere meter control box according to claim 4, wherein the single chip microcomputer signal amplifying module comprises a first signal amplifying chip, a seventh resistor, an eighth resistor and a beam brake high-voltage control interface; The first signal amplifying chip is connected with the singlechip; one end of the seventh resistor is connected with the first signal amplifying chip, the other end of the seventh resistor is connected with the beam gate high voltage control interface, one end of the eighth resistor is connected with one end of the seventh resistor, and the other end of the eighth resistor is grounded.
9. The beam dump meter control box of claim 5, wherein the half-bridge driving module comprises an inverter chip, a half-bridge driving chip, a ninth resistor, a tenth resistor, a first MOS transistor, a second MOS transistor, a first diode and a second diode, wherein, The inverter chip is connected with the half-bridge driving chip and is used for accessing TTL level signals; The half-bridge driving chip is respectively connected with one end of the tenth resistor at one end of the ninth resistor, the other end of the ninth resistor is connected with the grid electrode of the first MOS tube, and the other end of the tenth resistor is connected with the grid electrode of the second MOS tube; the cathode of the first diode is connected with the drain electrode of the first MOS tube, the anode of the first diode is connected with the cathode of the second diode, and the anode of the second diode is connected with the source electrode of the second MOS tube; The high-voltage supply module comprises a high-voltage chip and a high-voltage control interface; the high-voltage chip is connected with the high-voltage control interface and the beam brake state LED module; The high-voltage control interface is also connected with the adjustable high-voltage rheostat and the singlechip.
10. An electron beam exposure machine comprising a beam brake pad ampere meter control box according to any of claims 1-9.

Description

Beam brake pad ampere meter control box and electron beam exposure machine Technical Field The invention relates to the technical field of photoetching, in particular to a beam brake pad security meter control box and an electron beam exposure machine. Background In the electron beam lithography process, the electron beam needs to be turned off or turned on at a high speed, the actuating mechanism of the part is a beam gate plate, when tens or hundreds of volts of high voltage is applied to the two ends of the beam gate plate, an electric field is generated in the beam gate plate to deflect the electron beam, the deflected electron beam is beaten on a diaphragm, and the electron beam is turned off at the moment. When no voltage exists at the two ends of the beam gate plate, the electron beam passes through the diaphragm hole, and the electron beam is opened at the moment. High speed control of this high voltage is required in electron beam lithography, and typically, the opening of the control high voltage is achieved by a beam lock control circuit. In addition, the beam current size directly determines the number of electrons that reach the sample per unit time, i.e., the exposure dose. If the beam current is too large, the resist may be overexposed, causing deformation of the pattern or uncontrolled line width, and if the beam current is too small, the resist may be underexposed, failing to form a clear pattern. Therefore, it is necessary to test the picoampere-level electron beam current through the faraday cup prior to electron beam lithography. However, the high-voltage control in the existing electron beam lithography process and the test of the electron beam current before the electron beam lithography are respectively implemented on different devices, and when in use, a user needs to operate two devices, which causes inconvenience to the user. Accordingly, the prior art is still in need of improvement and development. Disclosure of Invention In view of the above-mentioned shortcomings of the prior art, the present invention is directed to a beam brake pad security meter control box and an electron beam exposure machine, so as to solve the problem that the high voltage control in the existing electron beam lithography process and the test of the electron beam current before the electron beam lithography need to be respectively performed on different devices to cause inconvenience to users. The technical scheme of the invention is as follows: In a first aspect, the present invention provides a beam brake pad security meter control box comprising: A housing; The first circuit board is arranged in the shell, a singlechip and a picoammeter control circuit are arranged on the first circuit board, and the singlechip is connected with the picoammeter control circuit; The second circuit board is arranged in the shell, and is provided with a beam brake control circuit which is connected with the singlechip; the switch power supply is arranged in the shell and is respectively connected with the first circuit board and the second circuit board. The invention further provides a leather safety indicating gauge head, a high-voltage indicating gauge head, a temperature alarm indicating lamp and a beam turn-off indicating lamp, wherein, The Pian indicator head is connected with the singlechip; The high-voltage indicating gauge head is connected with the beam brake control circuit; the temperature alarm indicator lamp is connected with the picoammeter control circuit; the beam turn-off indicator light is connected with the beam brake control circuit. The invention further provides a high-voltage adjustable rheostat and a high-voltage control knob, wherein, The adjustable high-voltage rheostat is connected with the beam brake control circuit; the high-voltage control knob is arranged on the shell and is connected with the adjustable high-voltage rheostat. The invention further provides a picoammeter control circuit which comprises a picoammeter current detection module, a singlechip signal amplification module, a serial port communication module, a temperature detection module and an LED signal output module, wherein, The Pi-an ammeter current detection module is connected with the singlechip and used for converting input current into voltage signals and inputting the voltage signals to the singlechip; The single chip microcomputer signal amplification module is connected with the single chip microcomputer and the beam brake control circuit and is used for generating a high-voltage control signal to the beam brake control circuit so as to control the high voltage of the beam brake; the serial port communication module is connected with the singlechip and is used for realizing communication between the singlechip and the upper computer; The temperature detection module is connected with the singlechip and is used for detecting the working temperature; the LED signal output module is connected with the singlechip signal