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CN-122018245-A - Manual tool for taking mask plate of photoetching machine

CN122018245ACN 122018245 ACN122018245 ACN 122018245ACN-122018245-A

Abstract

The invention discloses a manual mask taking tool of a photoetching machine, which comprises a lower layer structure, a lower layer structure and a lower layer structure, wherein the lower layer structure comprises a mask leading-in part and a mask bearing part which are connected; the reticle introduction member is located at the front end. The upper layer structure positioned above the lower layer structure comprises a mask plate moving part formed by a screw rod and a screw rod sleeve, wherein the screw rod sleeve is sleeved on the screw rod, the inner side surface of the screw rod sleeve is used for contacting with the side surface of the mask plate and clamping the mask plate, and the screw rod rotates to drive the screw rod sleeve to move and further drive the mask plate to move. The invention can reduce the risk of carrying out manual taking of the mask plate from a region with a narrow manual operation space, ensure the safety of the mask plate and avoid error risks caused by manual operation.

Inventors

  • HAN YANG
  • HUANG JUN
  • XU XIAOMIN

Assignees

  • 上海华力集成电路制造有限公司

Dates

Publication Date
20260512
Application Date
20260309

Claims (18)

  1. 1. A manual reticle handling tool for a lithographic apparatus, comprising: the lower layer structure comprises a mask plate leading-in part and a mask plate bearing part which are connected, wherein the mask plate leading-in part is positioned at the front end; The upper structure is positioned above the lower structure and comprises a mask plate moving part formed by a screw rod and a screw rod sleeve, the screw rod sleeve is sleeved on the screw rod, the inner side surface of the screw rod sleeve is used for contacting with the side surface of the mask plate and clamping the mask plate, and the screw rod is rotated to drive the screw rod sleeve to move and drive the mask plate to move.
  2. 2. The manual reticle pick-up tool of claim 1, wherein the reticle lead-in member is a ramp structure.
  3. 3. The manual reticle picking tool of claim 2, wherein the top surface of the reticle receiving member is a planar structure, and wherein the highest position of the ramp structure is level with the top surface of the reticle receiving member.
  4. 4. The manual reticle handling tool of claim 3 wherein the lower layer includes at least two first bar structures, each first bar structure including a corresponding one of the reticle lead-in member and the reticle receiving member.
  5. 5. The manual reticle picking tool of claim 1, wherein the material of the screw sleeve comprises rubber.
  6. 6. The manual reticle handling tool of claim 1 wherein the end of each of the first bar structures is secured to an end panel.
  7. 7. A manual reticle handling tool according to claim 6 wherein the superstructure comprises two of the reticle moving parts, the inner sides of the screw sleeves of the two reticle moving parts being opposite and adapted to clamp the reticle from both sides of the reticle when the reticle is handled.
  8. 8. The manual reticle picking tool of claim 7, wherein each of the plurality of screws is coupled to a motor, the motor driving the plurality of screws to rotate.
  9. 9. The manual reticle picking tool of claim 8, wherein the motor is disposed outside of the end panel.
  10. 10. The manual reticle handling tool of claim 8 further comprising two side end plates, the two side end plates being secured to respective ends of the end plates and forming a front opening frame structure with the end plates, an inner frame of the frame structure being sized according to a size of the reticle to ensure compliance with a fit requirement of the reticle when the reticle is handled.
  11. 11. The manual reticle handling tool of claim 10 wherein the first bar structures on both sides are secured to the side end plates on the respective sides.
  12. 12. The manual reticle picking tool of claim 11, wherein the material of each of the first bar structures, each of the side end panels and the end panels comprises acrylic.
  13. 13. The manual reticle picking tool of claim 10, wherein each of the reticle moving members is disposed inside an inner surface of the side end plate on a corresponding side.
  14. 14. The manual reticle handling tool of claim 11 further comprising two stop devices disposed on the first bar-like structures on both sides, respectively, wherein a distance between a front end surface of each stop device and a front end surface of the reticle introduction member is equal to or greater than a side length of the reticle.
  15. 15. The manual reticle handling tool of claim 14 wherein the stop means is a rubber ring and is secured to the first bar structure.
  16. 16. The manual reticle pick tool of claim 9, wherein a plurality of motor control buttons are provided on the end panel, the motor control buttons including a forward button and a reverse button, the motor control buttons being configured to manually control movement of the reticle while the reticle is being picked.
  17. 17. The manual reticle picking tool of claim 16, wherein a handle is further provided on the end panel.
  18. 18. The manual reticle picking tool of claim 17, wherein the handle comprises a bar.

Description

Manual tool for taking mask plate of photoetching machine Technical Field The invention relates to the field of semiconductor integrated circuit manufacturing, in particular to a manual taking tool of a mask plate (reticle) of a photoetching machine. Background In order to ensure high production efficiency, an internal reticle storage mechanism (INTER RETICLE Library, IRL) with a multi-layer tower structure component is designed inside the machine, as shown in fig. 1, which is a schematic diagram of an internal reticle storage mechanism of a conventional lithography machine, and one internal reticle storage mechanism 101 includes 6 lattice structures 102, where each lattice structure 102 is used for placing a reticle 201. When two internal mask storage mechanisms 101 shown in fig. 1 are arranged in the photoetching machine, 12 masks can be stored, so that the operation of frequently selecting the mask 201 from the outside of the machine can be avoided, the continuous operation of the photoetching machine can be ensured, and the working efficiency is improved. In actual operation, once the photolithography machine fails, the IRL, that is, the internal storage reticle 201 of the internal reticle storage mechanism 101 cannot be automatically transferred out, and needs to be manually taken out. The gap between the IRL internal mask plate and the hardware structure is extremely small, the horizontal direction is about 5mm, the vertical direction is about 2.5mm, the manual operation space is extremely narrow, the risk is extremely high, and the manual operation has human errors, so that the mask plate 201 is extremely easy to damage. The reticle 201 is expensive and has a unit price of about 100W RMB. Disclosure of Invention The technical problem to be solved by the invention is to provide the manual mask plate taking tool of the lithography machine, which can reduce the risk of manually taking the mask plate from a region with a small manual operation space, ensure the safety of the mask plate and avoid the error risk caused by manual operation. In order to solve the technical problems, the manual mask plate taking tool of the photoetching machine provided by the invention comprises: the lower layer structure comprises a mask plate leading-in part and a mask plate bearing part which are connected, wherein the mask plate leading-in part is positioned at the front end. The upper structure is positioned above the lower structure and comprises a mask plate moving part formed by a screw rod and a screw rod sleeve, the screw rod sleeve is sleeved on the screw rod, the inner side surface of the screw rod sleeve is used for contacting with the side surface of the mask plate and clamping the mask plate, and the screw rod is rotated to drive the screw rod sleeve to move and drive the mask plate to move. In a further improvement, the mask plate guiding component is of a slope structure. A further improvement is that the top surface of the reticle receiving member is a planar structure, and the highest position of the ramp structure is level with the top surface of the reticle receiving member. In a further improvement, the lower layer structure comprises at least two first strip structures, and each first strip structure comprises the corresponding mask plate leading-in part and the corresponding mask plate bearing part. A further improvement is that the material of the screw sleeve comprises rubber. A further improvement is that the ends of each of the first strip-like structures are secured to the end panels. In a further development, the superstructure comprises two reticle moving parts, the inner sides of the screw sleeves of which are opposite to and are used for clamping the reticles from the two sides of the reticles when the reticles are taken. The further improvement is that each screw rod is respectively connected with a motor, and the motor drives the screw rod to rotate. A further improvement is that the motor is arranged outside the end panel. The mask plate is characterized by further comprising two side end plates, wherein the two side end plates are respectively fixed at two ends of the tail end plate and form a frame structure with an opening at the front end with the tail end plate, and the size of an inner frame of the frame structure is set according to the size of the mask plate so as to ensure that the mask plate meets the attaching requirement of the mask plate when being taken. A further improvement is that the first strip-like structures on both sides are fixed with the side end panels on the corresponding sides, respectively. Further improvements are that the material of each of the first strip-like structures, each of the side end panels and the end panels comprises acrylic. In a further improvement, each of the reticle moving members is provided inside an inner surface of the side end plate on the corresponding side. The device is further improved in that the device further comprises two limitin