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CN-122018250-A - OIS array-based laser direct writing imaging system and method

CN122018250ACN 122018250 ACN122018250 ACN 122018250ACN-122018250-A

Abstract

The embodiment of the invention provides a laser direct-write imaging system and method based on an OIS array, which are used for realizing laser direct-write imaging of an uneven exposure surface and improving the precision of the laser direct-write imaging. The method comprises the steps of obtaining 3D surface morphology model data of a substrate, generating Z-axis target coordinates of each position of each lithography head on a scanning path, generating X, Y mounting reference coordinates of each moving-magnet OIS unit according to arrangement of an OIS array to serve as initial position reference origins of each lithography head, obtaining X, Y parasitic offset of each moving-magnet OIS unit in a Z-axis focus tracking stroke before uniform scanning exposure, solidifying the parasitic offset into a three-dimensional position lookup table to be stored in a local edge computing node, entering a high-speed uniform scanning exposure stage, controlling the edge computing node connected with each moving-magnet OIS unit to apply compensation electric signals in real time and reversely according to the physical coordinates, and controlling a laser source to expose positions of exposure points.

Inventors

  • CHEN NAIQI
  • CHEN GANG
  • ZHANG XIANGFEI

Assignees

  • 深圳市先地图像科技有限公司

Dates

Publication Date
20260512
Application Date
20260331

Claims (10)

  1. 1. An OIS array-based laser direct-write imaging system, comprising: The OIS array comprises a plurality of moving magnetic OIS units which are arranged in an array manner, and the positions of focusing lenses of the laser light sources can be adjusted by the moving magnetic OIS units in the directions of X, Y, Z axes which are perpendicular to each other; the distributed edge computing module comprises a plurality of edge computing nodes, wherein each moving-magnetic OIS unit or each group of OIS units is connected with the configured independent edge computing nodes; The edge computing node is configured to receive a Z-axis target coordinate and X, Y installation reference coordinates issued by an upper computer, query a locally stored three-dimensional position query table in real time according to physical coordinates of a current moving-magnet OIS unit in a constant-speed scanning exposure stage, wherein the three-dimensional position query table stores X, Y parasitic offset corresponding to exposure points of the moving-magnet OIS unit under each depth of the Z axis, and calculate and control X, Y axes of the moving-magnet OIS unit to inject reverse compensation driving signals according to query results and X, Y installation reference coordinates, and control a laser light source to expose positions of exposure points.
  2. 2. The system of claim 1, further comprising: the host computer, the host computer is configured to: Before uniform scanning exposure, obtaining 3D surface morphology model data of a substrate; Generating Z-axis target coordinates of each position of each photoetching head on a scanning path according to the 3D surface morphology model data; And generating X, Y installation reference coordinates of each moving-magnetic OIS unit according to the physical arrangement layout of the OIS array, and using the installation reference coordinates as initial position reference origins of each moving-magnetic OIS unit.
  3. 3. The system of claim 1, wherein a composite antimagnetic isolation structure is arranged between adjacent units of the OIS array, the composite antimagnetic isolation structure comprises a rigid non-magnetic-conductive limiting layer and a high magnetic-conductive layer, the rigid non-magnetic-conductive limiting layer is used for constructing a gapped physical air gap space to avoid hard absorption of a mover, and the high magnetic-conductive layer is used for blocking magnetic line crosstalk of an adjacent motor.
  4. 4. The system of claim 3, wherein the highly magnetically permeable layer is a permalloy layer and the composite antimagnetic isolation structure is arranged in a stepped composite shielding grid.
  5. 5. The system of any one of claims 1 to 4, further comprising a thermal drift water cooling base integrated at the bottom of the system, wherein the thermal drift water cooling base comprises a constant temperature water cooling circulation channel and a composite shockproof base for controlling the micro-environment and the equipment temperature fluctuation within a preset range and eliminating accumulated thermal drift caused by long-term operation of the moving-magnet OIS unit.
  6. 6. The system of any one of claims 1 to 4, wherein the edge computation node is further configured to perform edge soft splice dithering by driving the moving magnet OIS unit to superimpose a high frequency minute oscillating signal in an axial direction perpendicular to the scan direction at the physically spliced edges of the two adjacent exposed webs to achieve a gradual smooth transition of the spot energy at the seam.
  7. 7. The system of any one of claims 1 to 4, wherein the edge computing node is implemented using an MCU or FPGA.
  8. 8. A laser direct-write imaging method based on OIS array, applied to the system of claim 1, characterized in that the method comprises: Acquiring 3D surface morphology model data of a substrate; Generating Z-axis target coordinates of each position of each photoetching head on a scanning path according to the 3D surface morphology model data; Generating X, Y mounting reference coordinates of each moving-magnetic OIS unit according to the physical arrangement layout of the OIS array, and using the mounting reference coordinates as initial position reference origins of each photoetching head; Before uniform scanning exposure, obtaining a X, Y parasitic offset corresponding to each moving-magnet OIS unit in a Z-axis focus tracking stroke, solidifying the parasitic offset into a three-dimensional position lookup table, and storing the three-dimensional position lookup table in a local edge computing node; And entering a high-speed uniform scanning exposure stage, controlling edge computing nodes connected with each moving-magnet OIS unit to compute in real time and reversely apply compensation electric signals on an X/Y axis according to the physical coordinates, counteracting parasitic offset, and controlling a laser light source to expose the position of an exposure point.
  9. 9. The method as recited in claim 8, further comprising: In the process that the adjacent moving-magnet OIS units travel and span the splicing gap, when the current coordinates are identified to be positioned at the boundary of the edge of the scanning band, a high-frequency micro-oscillation signal is superimposed in the control signal of the laser light source, so that the light spot energy forms continuous gradual change distribution at the splicing joint, and the smooth transition of the exposure energy of the adjacent breadth is realized.
  10. 10. The method of claim 8, wherein the acquiring 3D surface topography model data of the substrate comprises: And pre-scanning the surface of the substrate by a laser displacement sensor or a confocal sensor to obtain the 3D surface morphology model data of the substrate.

Description

OIS array-based laser direct writing imaging system and method Technical Field The invention relates to the technical field of data processing, in particular to a laser direct writing imaging system and method based on an OIS array. Background In the related art, a laser direct-writing imaging device (for example, a laser direct-printing plate making device for a planar screen printing plate disclosed in the application number 201310084860.3) reciprocally scans a photosensitive coating on an exposure surface back and forth in a preset horizontal direction of a plane in which a X, Y axis direction is located by controlling a laser array. The applicant found that the distance between each laser in the laser array in the related art and the vertical direction of the exposure surface is fixed, if the exposure surface is uneven or the exposure surface itself is undulating, the spot size of the exposure surface is changed due to the change of the object distance, so that the exposure precision is lost, or the existing laser direct writing imaging device cannot be used for exposure imaging of the undulating exposure surface at all. Disclosure of Invention The embodiment of the invention provides a laser direct-write imaging system and method based on an OIS array, which are used for realizing laser direct-write imaging of an uneven exposure surface and improving the precision of the laser direct-write imaging. A first aspect of an embodiment of the present invention provides a laser direct-write imaging system based on OIS arrays, which may include: The OIS array comprises a plurality of moving magnetic OIS units which are arranged in an array manner, and the positions of focusing lenses of the laser light sources can be adjusted by the moving magnetic OIS units in the directions of X, Y, Z axes which are perpendicular to each other; the distributed edge computing module comprises a plurality of edge computing nodes, wherein each moving-magnetic OIS unit or each group of OIS units is connected with the configured independent edge computing nodes; The edge computing node is configured to receive a Z-axis target coordinate and X, Y installation reference coordinates issued by an upper computer, query a locally stored three-dimensional position query table in real time according to physical coordinates of a current moving-magnet OIS unit in a constant-speed scanning exposure stage, wherein the three-dimensional position query table stores X, Y parasitic offset corresponding to exposure points of the moving-magnet OIS unit under each depth of the Z axis, and calculate and control X, Y axes of the moving-magnet OIS unit to inject reverse compensation driving signals according to query results and X, Y installation reference coordinates, and control a laser light source to expose positions of exposure points. Optionally, as a possible implementation manner, the OIS array-based laser direct-writing imaging system in the embodiment of the present invention may further include a host computer configured to: Before uniform scanning exposure, obtaining 3D surface morphology model data of a substrate; Generating Z-axis target coordinates of each position of each photoetching head on a scanning path according to the 3D surface morphology model data; And generating X, Y installation reference coordinates of each moving-magnetic OIS unit according to the physical arrangement layout of the OIS array, and using the installation reference coordinates as initial position reference origins of each moving-magnetic OIS unit. Optionally, as a possible implementation manner, in the embodiment of the present invention, a composite antimagnetic isolation structure is disposed between adjacent units of the OIS array, where the composite antimagnetic isolation structure includes a rigid non-magnetic-conductive limiting layer and a high magnetic-conductive layer, the rigid non-magnetic-conductive limiting layer is used for constructing a physical air gap space with a gap, so as to avoid hard absorption of a mover, and the high magnetic-conductive layer is used for blocking magnetic line crosstalk of an adjacent motor. Optionally, as a possible implementation manner, in an embodiment of the present invention, the high magnetic conductive layer is a permalloy layer, and the composite antimagnetic isolation structure is arranged in a stepped composite shielding grid. Optionally, as a possible implementation manner, the embodiment of the invention further comprises a thermal drift water cooling base integrated at the bottom of the system, wherein the thermal drift water cooling base comprises a constant temperature water cooling circulation channel and a composite shockproof base, and is used for controlling the micro-environment and the equipment temperature fluctuation within a preset range and eliminating accumulated thermal drift caused by long-term operation of the moving-magnet OIS unit. Optionally, as a possible implementation manner, the