CN-122018254-A - Roll-to-roll mask exposure energy equalization method for flexible reinforcement

CN122018254ACN 122018254 ACN122018254 ACN 122018254ACN-122018254-A

Abstract

The invention discloses a roll-to-roll mask exposure energy balancing method for a flexible reinforcement, which relates to the technical field of flexible electronic manufacturing and comprises the following steps: performing exposure test on the exposure sample, and obtaining standard exposure parameters; acquiring an exposure sub-region and a soft part sub-region, and controlling the light intensity when mask exposure is carried out in the exposure region based on the exposed parameters of the soft part sub-region and the standard exposure parameters; the method is used for solving the problems that in the existing roll-to-roll mask exposure energy balancing method, the height structure of the surface to be exposed and the time of the surface to be exposed in an exposure area are not analyzed, so that whether the exposure time of the flexible reinforcing piece is sufficient cannot be judged based on exposure standards, the flexible reinforcing piece is overexposed or underexposed, and the performance of the flexible reinforcing piece is affected.

Inventors

WU XIPENG
WANG ZHENHUA
ZHU XIAOBAO

Assignees

深圳市盛鸿运科技有限公司

Dates

Publication Date: 20260512
Application Date: 20260413

Claims (10)

1. The roll-to-roll mask exposure energy equalization method for the flexible reinforcement piece is characterized by comprising the following steps of: Acquiring a sample corresponding to the flexible reinforcement piece to be exposed, and marking the sample as an exposure sample, performing an exposure test on the exposure sample based on the process requirement, and acquiring standard exposure parameters corresponding to the exposure sample based on the result of the exposure test; When the flexible reinforcement piece is subjected to roll-to-roll mask exposure in the exposure area, the flexible reinforcement piece entering the exposure area is subjected to partition treatment, and a flexible piece sub-area is obtained based on a partition result; And acquiring the exposed parameters of each soft part sub-region in real time, and controlling the light intensity when mask exposure is carried out in the exposure region based on the exposed parameters of the soft part sub-region and the standard exposure parameters.
2. The roll-to-roll mask exposure energy equalization method for a flexible stiffener of claim 1, wherein the exposure test comprises: Moving an exposure sample from a conveyor belt to an exposure area based on process requirements, and placing a camera at an inlet of the exposure area, namely a height sensing camera, wherein the position of the height sensing camera is parallel to the upper surface of the conveyor belt, and the orientation of the height sensing camera is perpendicular to the side edge of the conveyor belt; when the height sensing camera is started, the midpoint in the image recorded by the height sensing camera is marked as a sensing midpoint, and the vertical line segment where the sensing midpoint in the image recorded by the height sensing camera is located is marked as a sensing center line.
3. The roll-to-roll mask exposure energy equalization method for a flexible stiffener of claim 2, wherein the exposure test further comprises: When the exposure sample moves from a conveyor belt at the entrance of the exposure area to the exposure area, starting a height sensing camera, and when any area of the exposure sample is overlapped with a sensing center line, starting to record images by using the height sensing camera; all the highly analyzed images of the exposed sample were obtained after complete passage of the belt at the entrance of the exposure zone.
4. The roll-to-roll mask exposure energy equalization method for a flexible stiffener of claim 3, wherein the exposure test further comprises: For any one of the height analysis images, a plane rectangular coordinate system with an abscissa of s and an ordinate of mm is established and is marked as a height analysis coordinate system, the time length of the height analysis image is marked as T, for an image A corresponding to any frame in the height analysis image, the overlapping length of an exposure sample and an induction center line in the image A is marked as the sample height of the image A, the time of the frame in which the image A is positioned corresponding to the frame in the height analysis image is marked as T, and the point with the coordinate (T, the sample height) in the height analysis coordinate system is marked as the height point of the image A; And in the height analysis coordinate system, acquiring height points of images corresponding to all frames in the height analysis image, and marking a curve obtained by fitting all the height points as a height characteristic curve of the height analysis image.
5. The roll-to-roll mask exposure energy equalization method for a flexible stiffener of claim 4, wherein the exposure test further comprises: The method comprises the steps of obtaining the light intensity of an exposure sample when mask exposure is carried out in an exposure area based on process requirements, and marking the light intensity as standard light intensity, marking the time when the exposure sample starts to be recorded in a high-level analysis image as sample entering time, marking the time when the front end of the exposure sample contacts an outlet of the exposure area in the high-level analysis image as sample removing time, marking the second corresponding to the difference value between the sample entering time and the sample removing time as the exposure time corresponding to the high-level analysis image, and marking the product of the exposure time and the standard light intensity as the characteristic exposure dose of the high-level analysis image; And acquiring all the height analysis images obtained by exposing the sample, and recording the height characteristic curves and the characteristic exposure doses corresponding to all the height analysis images as standard exposure parameters of the exposing sample.
6. The roll-to-roll mask exposure energy equalization method for a flexible stiffener of claim 5, wherein partitioning the exposure field and obtaining an exposure field, wherein partitioning the flexible stiffener entering the exposure field and obtaining a flex field based on a partitioning result when the flexible stiffener is subjected to roll-to-roll mask exposure in the exposure field comprises: the method comprises the steps of marking the area exposed by a mask in a conveyor belt as an exposable area, equally dividing the exposable area into k areas along the moving direction of the conveyor belt, marking the k areas as exposure sub-areas BZ 1 to BZ k in sequence, and marking the length of the exposure sub-areas as L; When the flexible reinforcing piece moves from the conveyor belt to the exposure area, the flexible reinforcing piece is divided once every L along the opposite direction of the moving direction of the conveyor belt from the forefront end of the flexible reinforcing piece, and a plurality of areas corresponding to the flexible reinforcing piece obtained after division are sequentially marked as a flexible piece sub-area RZ 1 to a flexible piece sub-area RZ r , wherein the product of L and r is marked as E, and E is more than or equal to the length of the flexible reinforcing piece in the conveyor belt.
7. The roll-to-roll mask exposure energy equalization method for flexible reinforcement of claim 6, wherein obtaining in real time the exposed parameters of each of the flexible sub-regions and controlling the intensity of light during the mask exposure in the exposure region based on the exposed parameters of the flexible sub-regions and the standard exposure parameters comprises: When the flexible reinforcement piece alpha moves from the conveyor belt to the exposure area, acquiring all height analysis images corresponding to the flexible reinforcement piece alpha by using a height sensing camera based on exposure test, and sequentially marking as real-time analysis images SF 1 to SF p ; And for any one of the real-time analysis images, acquiring a height characteristic curve corresponding to the real-time analysis image by using a height analysis coordinate system based on an exposure test, and marking the height characteristic curve as a real-time characteristic curve, marking the height analysis image corresponding to the height characteristic curve with the highest similarity of the real-time characteristic curve in standard exposure parameters as an exposure reference image of the real-time analysis image, and marking the characteristic exposure dose of the exposure reference image as an exposure reference value.
8. The roll-to-roll mask exposure energy equalization method for flexible reinforcement of claim 7, wherein obtaining in real time the exposed parameters of each of the flexible sub-regions and controlling the intensity of light during the mask exposure in the exposure region based on the exposed parameters of the flexible sub-regions and the standard exposure parameters further comprises: The region of the flexible reinforcement alpha in the real-time analysis image is marked as an image reinforcement region, and the flexible subarea corresponding to the image reinforcement region is marked as a subarea to be analyzed; For any one of the sub-areas to be analyzed and any one of the exposure sub-areas, the time from the first time of overlapping the foremost end of the sub-area to be analyzed with the exposure sub-area until the sub-area to be analyzed is completely positioned in the exposure sub-area is marked as the exposure time of the sub-area, the light intensity when mask exposure is carried out in the exposure sub-area is marked as the light intensity of the sub-area, and the product of the exposure time of the sub-area and the light intensity of the sub-area is marked as the real-time exposure dose corresponding to the sub-area to be analyzed and the exposure sub-area.
9. The roll-to-roll mask exposure energy equalization method for flexible reinforcement of claim 8, wherein obtaining in real time the exposed parameters of each of the flexible sub-regions and controlling the intensity of light during the mask exposure in the exposure region based on the exposed parameters of the flexible sub-regions and the standard exposure parameters further comprises: Sequentially obtaining real-time exposure doses corresponding to the to-be-analyzed sub-region and the exposure sub-region BZ 1 -to-exposure sub-region BZ k-1 , and marking the sum of the real-time exposure doses corresponding to the to-be-analyzed sub-region and the exposure sub-region BZ 1 -to-exposure sub-region BZ k-1 as an exposed parameter of the to-be-analyzed sub-region; When the exposure parameters of the subregion to be analyzed are obtained, the speed of a conveyor belt for conveying the flexible reinforcing piece alpha in the exposure region at the moment is recorded as V, and the value obtained by dividing L by V is recorded as final region exposure time; When the value of the last area exposure measurement divided by the last area exposure time is unequal to the light intensity when mask exposure is carried out in the exposure sub-area BZ k , the value of the last area exposure measurement divided by the last area exposure time is recorded as the exposure reinforcing light intensity, the light intensity when mask exposure is carried out in the exposure sub-area BZ k is adjusted to be the exposure reinforcing light intensity, and the light intensity when mask exposure is carried out in the exposure sub-area BZ k is called back until the sub-area to be analyzed is completely in the exposure sub-area BZ k .
10. The roll-to-roll mask exposure energy equalization method for flexible reinforcement of claim 9, wherein obtaining in real time the exposed parameters of each of the flexible sub-regions and controlling the intensity of light during the mask exposure in the exposure region based on the exposed parameters of the flexible sub-regions and the standard exposure parameters further comprises: Based on the number of the flexible subregion corresponding to the image reinforcing region in the flexible subregion RZ 1 to the flexible subregion RZ r from small to large, sequentially acquiring the exposure parameters of each subregion to be analyzed, and based on the newly acquired exposure parameters, adjusting the light intensity when mask exposure is carried out in the exposure subregion BZ k ; And sequentially processing the image reinforcement areas corresponding to the real-time analysis images SF 1 to SF p .

Description

Roll-to-roll mask exposure energy equalization method for flexible reinforcement Technical Field The invention relates to the technical field of flexible electronic manufacturing, in particular to a roll-to-roll mask exposure energy balancing method for a flexible reinforcing piece. Background The roll-to-roll mask exposure refers to a technology of selectively exposing a surface coated with photoresist by using a mask plate and an ultraviolet light source in a moving process by unreeling and transmitting coiled flexible materials through automatic equipment, so as to define a required circuit or pattern, wherein the main application fields of roll-to-roll mask exposure comprise OLED display manufacturing, a flexible circuit board, a photovoltaic sensor and the like. The existing method for equalizing exposure energy of a roll-to-roll mask for a flexible reinforcing member generally aims at realizing unified mask exposure by adding a heterostructure and covering the whole surface by a photosensitive film during mask exposure, so as to solve the problems of optical path difference and uneven energy distribution caused by height difference during roll-to-roll mask exposure, and the improved method can perform more uniform exposure on a surface to be exposed during mask exposure, but when the flexible reinforcing member is subjected to mask exposure, the height structure of the surface to be exposed and the time of the surface to be exposed in an exposure area are not analyzed, so that whether the exposure time of the flexible reinforcing member is sufficient or not can not be judged based on exposure standards when the flexible reinforcing members with different structures are in the exposure area, and the problem that the flexible reinforcing member is subjected to overexposure or lack of exposure, so as to influence the performance of the flexible reinforcing member is solved, for example, in the patent application with the publication number of CN115968099A, the method for manufacturing the metal reinforcing plate for a lens module circuit board is disclosed by providing metal sheets; forming photosensitive film on the surface of the metal sheet with the grooves to avoid uneven energy distribution caused by height difference, and other improvement of the roll-to-roll mask exposure energy balancing method for flexible reinforcement, usually in terms of uneven exposure edge and central energy, still can not solve the problem that when the flexible reinforcement is subjected to mask exposure, the height structure of the surface to be exposed and the time of the surface to be exposed in the exposure area are not analyzed, so that when the flexible reinforcement with different structures is in the exposure area, whether the exposure time of the flexible reinforcement is sufficient can not be judged based on the exposure standard, the problem that the performance of the flexible reinforcing member is affected by overexposure or lack of exposure is caused, and in view of the problem, it is necessary to improve the existing roll-to-roll mask exposure energy balancing method for the flexible reinforcing member. Disclosure of Invention The invention aims to solve at least one of the technical problems in the prior art to a certain extent, and provides a roll-to-roll mask exposure energy balancing method for a flexible reinforcing member, which is used for solving the problems that in the conventional roll-to-roll mask exposure energy balancing method, when the flexible reinforcing member is subjected to mask exposure, the height structure of a surface to be exposed and the time of the surface to be exposed in an exposure area are not analyzed, so that when the flexible reinforcing members with different structures are in the exposure area, whether the exposure time of the flexible reinforcing member is sufficient or not can not be judged based on exposure standards, and the flexible reinforcing member is subjected to overexposure or lack of exposure, thereby influencing the performance of the flexible reinforcing member. In order to achieve the above object, the present application provides a roll-to-roll mask exposure energy equalization method for a flexible reinforcement, comprising the steps of: Acquiring a sample corresponding to the flexible reinforcement piece to be exposed, and marking the sample as an exposure sample, performing an exposure test on the exposure sample based on the process requirement, and acquiring standard exposure parameters corresponding to the exposure sample based on the result of the exposure test; When the flexible reinforcement piece is subjected to roll-to-roll mask exposure in the exposure area, the flexible reinforcement piece entering the exposure area is subjected to partition treatment, and a flexible piece sub-area is obtained based on a partition result; And acquiring the exposed parameters of each soft part sub-region in real time, and controlling the light intensity when m