CN-122018576-A - Flow regulation and control method, system, terminal and medium for etching solution preparation

CN122018576ACN 122018576 ACN122018576 ACN 122018576ACN-122018576-A

Abstract

The invention discloses a flow regulation method, a system, a terminal and a medium for etching solution preparation, and relates to the technical field of etching solution preparation. The main technical scheme includes that initial ammonia water concentration in an additive stirring tank is obtained, organic acid is discharged into ammonia water diluent according to initial organic acid target flow, target parameters in the additive stirring tank are collected in real time, the target parameters comprise real-time temperature and real-time ammonia water concentration, updated organic acid target flow is generated according to the initial organic acid target flow, a temperature early warning value, the real-time temperature, the real-time ammonia water concentration and the initial ammonia water concentration, and the updated organic acid target flow is used for replacing the initial organic acid target flow. The aim of realizing the full utilization of the temperature control safety margin released by the reduction of the concentration of the reactant by dynamically improving the flow is expected to be achieved, so that the risk of maintaining the low-efficiency conservative flow for a long time in the later period of the reaction is effectively reduced, the preparation time of single-batch etching liquid is greatly shortened, and the yield and the utilization rate of equipment are improved.

Inventors

LI RUI
HU SHENGWANG
WANG SHAOGUO
Jia Kelong
KONG XIAODONG
LI JIAN

Assignees

四川江化微电子材料有限公司

Dates

Publication Date: 20260512
Application Date: 20260414

Claims (7)

1. The flow control method for etching liquid preparation is characterized by comprising the following operations: S1, obtaining initial ammonia water concentration in ammonia water diluent in an additive stirring tank; S2, controlling a discharge regulating valve in the organic acid storage tank to discharge the organic acid into the ammonia water diluent according to the initial organic acid target flow, and uniformly stirring; s3, collecting target parameters in the additive stirring tank in real time, wherein the target parameters comprise real-time temperature and real-time ammonia water concentration; S4, generating updated organic acid target flow according to the initial organic acid target flow, the temperature early warning value, the real-time temperature, the real-time ammonia water concentration and the initial ammonia water concentration; s5, replacing the initial organic acid target flow with the updated organic acid target flow; And S6, repeating the steps S2 to S5 until the accumulated total amount of the organic acid discharged into the ammonia water diluent reaches the organic acid demand.
2. The method according to claim 1, wherein the step S5 is preceded by dynamically adjusting the stirring speed in the additive stirring tank based on the updated target flow rate of the organic acid and the initial target flow rate of the organic acid.
3. The flow control method according to claim 2, wherein the method for dynamically adjusting the stirring speed in the additive stirring tank comprises judging whether the updated organic acid target flow is greater than the initial organic acid target flow, increasing the stirring speed in the additive stirring tank if the updated organic acid target flow is greater than the initial organic acid target flow, maintaining the stirring speed in the additive stirring tank if the updated organic acid target flow is equal to the initial organic acid target flow, and decreasing the stirring speed in the additive stirring tank if the updated organic acid target flow is less than the initial organic acid target flow.
4. The method of controlling flow according to claim 1, wherein the initial target flow of the organic acid is generated based on the temperature pre-warning value, the organic acid demand, the heat dissipation rate, the initial temperature in the additive agitation tank, the surface area in the additive agitation tank, the temperature outside the additive agitation tank, the mixing ratio heat capacity, and the ammonia demand.
5. A flow control system for etching liquid preparation, wherein the flow control system is adapted to the flow control method according to any one of claims 1 to 4, the flow control system comprising: The acquisition module is used for executing S1 to acquire the initial ammonia water concentration in the ammonia water diluent in the additive stirring tank, The control module is used for executing S2 so as to control a discharge regulating valve in the organic acid storage tank, discharging the organic acid into the ammonia water diluent according to the initial organic acid target flow, and uniformly stirring; the system comprises an acquisition module, a control module and a control module, wherein the acquisition module is used for executing S3 to acquire target parameters in an additive stirring tank in real time, wherein the target parameters comprise real-time temperature and real-time ammonia water concentration; The generation module is used for executing S4 to generate updated organic acid target flow according to the initial organic acid target flow, the temperature early warning value, the real-time temperature, the real-time ammonia water concentration and the initial ammonia water concentration; The setting module is used for executing S5, and replacing the initial organic acid target flow with the updated organic acid target flow; and the execution module is used for executing the step S6 to repeatedly execute the steps S2 to S5 until the accumulated total amount of the organic acid discharged into the ammonia water diluent reaches the organic acid demand.
6. A terminal, comprising: A processor and a memory for storing processor-executable instructions; wherein the processor is configured to invoke the instructions stored in the memory to perform the flow regulation method of any of claims 1-4.
7. A computer readable storage medium, on which computer program instructions are stored, which computer program instructions, when executed by a processor, implement a flow regulation method according to any of claims 1-4.

Description

Flow regulation and control method, system, terminal and medium for etching solution preparation Technical Field The invention relates to the technical field of etching solution preparation, in particular to a flow regulation method, a system, a terminal and a medium for etching solution preparation. Background The etching liquid may be classified into a compatible etching liquid, an acetic acid etching liquid, an oxalic acid etching liquid, and the like. Among them, oxalic acid etching solution is mainly obtained by mixing and stirring oxalic acid, etching solution additive and ultrapure water, and organic acid, such as n-caproic acid, ammonia water and ultrapure water, is often simply mixed and prepared when preparing the etching solution additive. The prior art discloses a flow automatic control method and system for preparing oxalic acid ITO etching solution, comprising the steps of calculating solution preparation demand according to ITO etching solution demand, discharging ammonia water into additive ultrapure water and uniformly mixing the additive ultrapure water to obtain ammonia water diluent, calculating organic acid target flow according to a temperature early warning value and organic acid demand, discharging organic acid into the ammonia water diluent by using a discharge regulating valve, the organic acid target flow and the organic acid demand to uniformly stir the ammonia water diluent to obtain etching solution additive, discharging ultrapure water into an etching solution stirring tank to obtain etching solution ultrapure water, discharging oxalic acid into the etching solution ultrapure water, and discharging the etching solution additive into the etching solution stirring tank to uniformly stir the etching solution to obtain oxalic acid ITO etching solution. However, in the actual use process, when the organic acid is gradually discharged into the ammonia water diluent according to the target flow of the organic acid, the organic acid reacts with the ammonia water, so that the concentration of the ammonia water in the mixed solution gradually decreases, and the reaction rate between the organic acid and the ammonia water is reduced, so that the heat release rate when the organic acid reacts with the ammonia water is gradually reduced, and the temperature rising rate in the additive stirring tank is reduced. At this time, the organic acid is still added at the original target flow rate of the organic acid, which greatly reduces the preparation efficiency of the etching solution. Disclosure of Invention The invention aims to provide a flow regulation method, a system, a terminal and a medium for etching liquid preparation, which solve the problem that the existing flow automatic control method and system for oxalic acid ITO etching liquid preparation can greatly reduce the etching liquid preparation efficiency in the actual use process. In order to solve the technical problems, the invention adopts the following technical scheme: in a first aspect, a flow control method for etching solution preparation is provided, including the following operations: S1, obtaining initial ammonia water concentration in ammonia water diluent in an additive stirring tank; S2, controlling a discharge regulating valve in the organic acid storage tank to discharge the organic acid into the ammonia water diluent according to the initial organic acid target flow, and uniformly stirring; s3, collecting target parameters in the additive stirring tank in real time, wherein the target parameters comprise real-time temperature and real-time ammonia water concentration; S4, generating updated organic acid target flow according to the initial organic acid target flow, the temperature early warning value, the real-time temperature, the real-time ammonia water concentration and the initial ammonia water concentration; s5, replacing the initial organic acid target flow with the updated organic acid target flow; And S6, repeating the steps S2 to S5 until the accumulated total amount of the organic acid discharged into the ammonia water diluent reaches the organic acid demand. The scheme is that before S5, the method further comprises the step of dynamically adjusting the stirring speed in the additive stirring tank according to the updated organic acid target flow and the original organic acid target flow. The method for dynamically adjusting the stirring speed in the additive stirring tank comprises the steps of judging whether the updated organic acid target flow is larger than the initial organic acid target flow, increasing the stirring speed in the additive stirring tank if the updated organic acid target flow is larger than the initial organic acid target flow, maintaining the stirring speed in the additive stirring tank if the updated organic acid target flow is equal to the initial organic acid target flow, and reducing the stirring speed in the additive stirring tank if the updated organic acid target flow is smal