CN-122018952-A - Software updating method of semiconductor device, semiconductor device and storage medium

CN122018952ACN 122018952 ACN122018952 ACN 122018952ACN-122018952-A

Abstract

The invention provides a software updating method of a semiconductor device, the semiconductor device and a storage medium, and relates to the technical field of semiconductor manufacturing, wherein the method comprises the steps of determining a service process to be updated of a plurality of service processes to be updated based on a software updating instruction obtained by a control system, determining an active service process participating in the current operation task in the plurality of service processes based on the current operation task of a semiconductor process cavity obtained by the control system, responding to the service process to be updated belonging to an inactive service process to be updated and not belonging to a basic service process, executing software updating on the inactive service process to be updated, and simultaneously maintaining the active service process to continuously execute the current operation task. The method and the device can realize flexible updating of the service process to be updated while maintaining continuous execution of the current operation task, and give consideration to the operation requirement and the software updating requirement of the semiconductor equipment.

Inventors

JIANG WEI
LIU XIAODONG
ZHANG QILI
Dou Zizhuo
LI RONG
ZHAO YANPING

Assignees

上海微釜半导体设备有限公司

Dates

Publication Date: 20260512
Application Date: 20260413

Claims (10)

1. A software updating method of a semiconductor device, wherein the semiconductor device comprises a semiconductor process chamber and a control system, the control system operates a plurality of service processes, the plurality of service processes comprise a basic service process and a process execution process depending on the basic service process, the method comprises: Determining a service process to be updated of the plurality of service processes to be updated based on a software update instruction obtained by the control system; Determining an active service process participating in the current operation task in a plurality of service processes based on the current operation task of the semiconductor process cavity obtained by the control system; and responding to the service process to be updated belonging to the inactive service process to be updated and not belonging to the basic service process, executing software update on the inactive service process to be updated, and simultaneously maintaining the active service process to continue executing the current job task.
2. The software updating method of a semiconductor device according to claim 1, further comprising: Responding to the service process to be updated as the basic service process, and postponing executing software update on the basic service process until the current job task is ended; And in response to the service process to be updated being a process execution process, determining whether the process execution process is active or inactive according to whether the current job task is executed by the process execution process so as to update software of the inactive process execution process.
3. The method of software updating a semiconductor device of claim 2, wherein the process execution process and the base service process communicate via a process call, further comprising: And the process execution process serving as the active service process initiates a process call to the basic service process so as to transfer the job processing instruction of the current job task to the basic service process.
4. The software updating method of a semiconductor device according to claim 2, further comprising: the plurality of service processes further comprise service interaction processes which are connected between the input interface and other service processes in a communication mode and are used for determining process execution processes and/or basic service processes serving as service processes to be updated based on software updating instructions input by the input interface.
5. The method according to claim 1, wherein the plurality of service processes communicate with a middleware, and wherein the performing the software update on the inactive service process to be updated comprises: The plurality of service processes further comprises a service interaction process, wherein the service interaction process transmits a software update instruction to the middleware so as to transmit the software update instruction to an inactive service process to be updated in the plurality of service processes through the middleware.
6. The software updating method of a semiconductor device according to claim 5, further comprising: the service interaction process issues a message to the middleware; the service processes acquire messages corresponding to the service processes from the middleware; the information comprises at least one of a job request message, a job status message, a service status message, a log message, a data record message, an external communication message and a software update request message.
7. The method of software updating a semiconductor device according to claim 1, wherein the performing a software update on the inactive service process to be updated in response to the service process to be updated belonging to the inactive service process to be updated comprises: acquiring a current process flow to determine an execution time sequence of a service process in the current process flow; Determining the duration of each inactive service process to be updated to remain inactive state based on the execution timing; and determining the time length required by the software update of each inactive service process to be updated based on the software update instruction, and determining the service process to be updated, of which the time length meets the time length required by the software update, so as to perform the software update.
8. The software updating method of a semiconductor device according to claim 1, further comprising: Responding to the service process to be updated belonging to the active service process, and postponing executing software update on the service process to be updated; and in response to the service process to be updated changing to be inactive, executing software update of the service process to be updated.
9. A semiconductor device comprising a control system and a semiconductor process chamber, the control system being configured to control the semiconductor process chamber and the control system being configured to perform a software update method of the semiconductor device of any one of claims 1 to 8.
10. A computer-readable storage medium, characterized in that a computer program or instructions is stored, which is executed to perform a software updating method of a semiconductor device according to any one of claims 1 to 8.

Description

Software updating method of semiconductor device, semiconductor device and storage medium Technical Field The present disclosure relates to the field of semiconductor manufacturing technologies, and in particular, to a software update method for a semiconductor device, and a storage medium. Background In the field of semiconductor fabrication, semiconductor equipment typically controls semiconductor process chambers by a control system to perform current work tasks. With the continuous expansion of the functions of the equipment, a control system is generally integrated with various software functions such as process control, data recording, log processing, external communication and the like. The different software functions do not have the same impact on the current job task during the operation of the device. As software release iterations, functional optimizations, and exception repair requirements increase, related software functions in the control system typically require software updates. However, during the execution of a current task by a semiconductor device, it is often difficult for existing software update methods to reasonably determine the update object and update time in conjunction with the impact of different software functions on the current task. On the one hand, if the software functions are updated after unification, the updating mode is not flexible enough, and on the other hand, if the current operation task execution requirement is not fully considered, the current operation task is directly updated, and the influence is caused. Especially in vertical furnace facilities, processing hundreds of wafers simultaneously at a time may cause significant economic loss if the relationship between the process progress currently being performed by the facility and the software update is not properly processed. Disclosure of Invention In view of the above-described drawbacks of the related art, an object of the present disclosure is to provide a software updating method of a semiconductor device, and a storage medium, which solve the problems in the related art. The first aspect of the disclosure provides a software updating method of a semiconductor device, which is applied to the semiconductor device, wherein the semiconductor device comprises a semiconductor process cavity and a control system, the control system is operated with a plurality of service processes, the plurality of service processes comprise a basic service process and a process execution process depending on the basic service process, the method comprises the steps of determining a service process to be updated of the plurality of service processes to be updated based on a software updating instruction obtained by the control system, determining an active service process participating in the current operation task in the plurality of service processes based on a current operation task of the semiconductor process cavity obtained by the control system, responding to the service process to be updated to be an inactive service process which does not belong to the basic service process, executing software updating on the inactive service process to be updated, and simultaneously maintaining the active service process to continuously execute the current operation task. In an embodiment of the first aspect, in response to the service process to be updated being the basic service process, executing software update on the basic service process is delayed until the current job task ends, and in response to the service process to be updated being a process execution process, determining whether the process execution process is active or inactive according to whether the current job task is executed by the process execution process so as to update software of the inactive process execution process. In an embodiment of the first aspect, the process execution process and the basic service process communicate through process call, and the process execution process serving as the active service process initiates process call to the basic service process to transfer the job processing instruction of the current job task to the basic service process. In an embodiment of the first aspect, the plurality of service processes further includes a service interaction process, which is communicatively connected between the input interface and the other service processes, and is configured to determine, based on the software update instruction input by the input interface, a process execution process and/or a basic service process as the service process to be updated. In an embodiment of the first aspect, the plurality of service processes communicate with a middleware, and the executing software update on the inactive service process to be updated includes a service interaction process, where the service interaction process transmits a software update instruction to the middleware, so as to transmit the software update instruction to the inactive ser