CN-122019281-A - Processing method, system and medium for wafer chip probe test data

CN122019281ACN 122019281 ACN122019281 ACN 122019281ACN-122019281-A

Abstract

The invention discloses a processing method, a system and a medium of wafer chip probe test data, relates to the technical field of integrated circuit data detection, and aims to solve the problem that whether a chip is good or not cannot be intuitively detected. A processing method of wafer chip probe test data comprises the following steps of receiving original test data obtained by testing chips on a wafer by a chip probe, carrying out data screening processing on the original test data, extracting effective test data, obtaining a parameter judgment result according to a parameter preset condition, writing the parameter judgment result into a new table, carrying out statistical analysis on the new table, and obtaining and displaying a statistical result table. After the wafer chips are subjected to the probe test, the data are visually displayed in the table, so that technicians can visually know the states of the chips on the wafer which are not cut, the error rate can be reduced, and the production efficiency can be improved.

Inventors

XIE YUANLU
Ji Lanlong
XU XIAOXIN
WANG YAN
DONG DANIAN
LU NIANDUAN
HU HONGYANG

Assignees

中国科学院微电子研究所

Dates

Publication Date: 20260512
Application Date: 20251219

Claims (10)

1. The processing method of the wafer chip probe test data is characterized by comprising the following steps of: receiving original test data obtained by testing chips on a wafer by a chip probe; performing data screening processing on the original test data, extracting effective test data, obtaining a parameter judgment result according to a parameter preset condition, and writing the parameter judgment result into a newly built table; and carrying out statistical analysis on the newly built table to obtain and display a statistical result table.
2. The method for processing wafer chip probe test data according to claim 1, wherein the performing data screening processing on the original test data, extracting valid test data, obtaining a parameter judgment result according to a parameter preset condition, and writing the parameter judgment result into a newly created table, further comprises: Extracting the effective test data from the original test data according to a data screening preset condition, and writing the effective test data into a temporary file; Reading the temporary file into a memory, and judging whether the effective test data accords with the parameter preset conditions according to the parameter preset conditions to obtain a parameter judgment result; And writing the parameter judgment result into a newly built table.
3. The method for processing wafer chip probe test data according to claim 2, wherein the extracting the valid test data from the original test data according to the data filtering preset condition, and writing the valid test data into a temporary file, further comprises: Finding all exposure fields in the raw test data; Establishing a temporary file correspondingly for each exposure field according to the exposure field number; extracting effective test data of each test point in each exposure field from the original test data according to the data screening preset conditions, wherein the effective test data at least comprises an exposure field number, a test point number, a test item and a test value; And writing the effective test data into the corresponding temporary file according to the exposure field number.
4. The method according to claim 3, wherein said screening preset conditions according to said data extracts valid test data for each test point in each exposure field from said raw test data, further comprising: reading the original test data row by row; when the original test data of the current row meets the data screening preset condition, determining the row of data as a row of effective test data; and traversing each test point in each exposure field to acquire all the valid test data.
5. The method for processing wafer chip probe test data according to claim 3, wherein the step of reading the temporary file into a memory, and determining whether the valid test data meets the parameter preset condition according to the parameter preset condition, to obtain a parameter determination result, further comprises: reading all the temporary files into a memory; Extracting all the valid test data in the temporary file; judging whether the effective test data accords with the parameter preset conditions, wherein the parameter preset conditions are the data qualification range of each test item: and when the test value of each test item corresponding to the test point in the effective test data meets the parameter preset condition, the parameter judgment result of the test point is qualified.
6. The method for processing wafer chip probe test data according to claim 3, wherein said performing statistical analysis on said newly created table to obtain and display statistical results, further comprises: obtaining directory paths, and reading the newly built tables one by one; writing the exposure field number, the test point number, the test item and the corresponding parameter judgment result into the statistical result table.
7. The method for processing wafer chip probe test data according to claim 6, wherein the performing statistical analysis on the newly created table to obtain and display a statistical result, further comprises: and carrying out yield statistics, and writing the yield into the statistical result table.
8. The method for processing wafer chip probe test data according to claim 6, wherein the step of performing statistical analysis on the newly created table to obtain and display a statistical result further comprises: And distinguishing and displaying the parameter judgment results in the statistical result table according to different categories.
9. A system for processing wafer chip probe test data, comprising: The ATE automatic detection module is used for receiving original test data obtained by testing the chips on the wafer by the chip probes; the data processing module is used for carrying out data screening processing on the original test data, extracting effective test data, obtaining a parameter judgment result according to a parameter preset condition, and writing the parameter judgment result into a newly-built table; And the result statistics module is used for carrying out statistical analysis on the newly-built table to obtain and display a statistical result table.
10. A computer readable storage medium having instructions stored therein which, when executed, implement a method of processing wafer chip probe test data according to any one of claims 1-8.

Description

Processing method, system and medium for wafer chip probe test data Technical Field The present invention relates to the field of integrated circuit data detection technologies, and in particular, to a method, a system, and a medium for processing wafer chip probe test data. Background In integrated circuit production development, eight or twelve inch wafer wafers are often used, and after photolithography operations are performed on the wafers, each wafer exhibits a plurality of exposure fields, each of which contains one or more chips. Before the chips are packaged for delivery, the chips on the uncut wafer are probed using ATE (Atomatic Test Equipment, automated inspection equipment). When the chip probe is tested, the ATE equipment is matched with the probe station, the probe card is used for testing the chips on the wafer, and once the probe card establishes electric connection, the probe access is finished once, and the test is finished once. In one probe touch, ATE test equipment is contacted with each leading-out end of a bare chip on a wafer through a probe on a probe card to form electric connection, then ATE automatically applies excitation to the tested chip and receives a response returned by the bare chip, and then the original electric characteristic data of the tested chip in the working process can be obtained. These data are not intuitive to the human eye and do not directly show the quality of the chip being tested. In the early stage of chip research and development, the method for detecting the test data of the chip probe by naked eyes is generally adopted to judge whether the chip is good or not, but the method has the defects of low efficiency, high difficulty and easy error. Disclosure of Invention The invention aims to provide a processing method, a system and a medium for wafer chip probe test data, which are used for solving the problem that whether a chip is good or not cannot be intuitively detected. In order to achieve the above object, the present invention provides the following technical solutions: In a first aspect, the present invention provides a method for processing wafer chip probe test data, including: receiving original test data obtained by testing chips on a wafer by a chip probe; performing data screening processing on the original test data, extracting effective test data, obtaining a parameter judgment result according to a parameter preset condition, and writing the parameter judgment result into a newly built table; and carrying out statistical analysis on the newly built table to obtain and display a statistical result table. The invention provides a processing method of wafer chip probe test data, which comprises the steps of receiving original test data obtained by testing chips on a wafer by a chip probe. The chip probe tests chips on a wafer, namely chip probe test, which is an automatic chip test method, and uses ATE (Atomatic Test Equipment, automatic detection equipment) to test the performance of chips on an uncut wafer. The original test data obtained by the chip probe test is the original electrical characteristic data of the tested chip in the working process, and sometimes the chip is tested for multiple times, so that the data volume of the original test data is huge, and the data redundancy degree is high. Therefore, the invention adopts the steps to screen the data, and reduces the data quantity of the follow-up data statistics. The invention performs data screening processing on the original test data to extract effective test data. Therefore, a large amount of redundant data is eliminated, and compared with the prior art, the data amount is greatly reduced. The invention also carries out statistical analysis on the newly built table to obtain and display a statistical result table, so that the data is displayed in the table in a visual way. Preferably, the data screening process is performed on the original test data, effective test data is extracted, a parameter judgment result is obtained according to a parameter preset condition, and the parameter judgment result is written into a newly built table, and the method further comprises the steps of: Extracting the effective test data from the original test data according to a data screening preset condition, and writing the effective test data into a temporary file; Reading the temporary file into a memory, and judging whether the effective test data accords with the parameter preset conditions according to the parameter preset conditions to obtain a parameter judgment result; And writing the parameter judgment result into a newly built table. In the field of chip testing, the original test data obtained by the probe test has a specific format, namely, data in a specific format defined by ATE equipment. By utilizing the characteristic that the original test data has a specific format, the specific format defined by ATE equipment can be used as a data screening preset condition, and the automat