CN-122021515-A - Method and device for operating grid Boolean, electronic equipment and storage medium

CN122021515ACN 122021515 ACN122021515 ACN 122021515ACN-122021515-A

Abstract

The invention relates to the technical field of grid processing, and provides a grid Boolean operation method, a device, electronic equipment and a storage medium, wherein the method comprises the steps of obtaining intersecting lines between triangle surface elements of a level set curved surface and triangle surface elements of an etched volume boundary curved surface; dividing each triangular surface element containing intersecting lines, dividing the triangular surface elements based on the intersecting lines, dividing the divided triangular surface elements and the triangular surface elements not containing the intersecting lines into a plurality of independent areas according to space positions, and combining the independent areas with the space positions being etching reserved areas based on the intersecting lines to obtain a grid Boolean operation result. The invention runs through the whole operation flow through intersecting lines, thereby not only realizing the targeted adaptation of open-closed curved surface combination and getting rid of the design limitation of the traditional grid Boolean operation, but also ensuring that each detail of the etching boundary can be accurately expressed through the accurate linkage of segmentation, partition and combination.

Inventors

LUO JIZHOU
XU XIAODONG
WEI YADONG
LIU FENGKAI
YANG JIANQUN
LI XINGJI
GAO BO

Assignees

哈尔滨工业大学

Dates

Publication Date: 20260512
Application Date: 20251231

Claims (10)

1. A method of operation of a gabor, comprising: Acquiring intersection lines between triangular surface elements of the level set curved surface and triangular surface elements of the etched volume boundary curved surface; dividing each triangular surface element containing the intersection line based on the intersection line; dividing the divided triangular surface elements into a plurality of independent areas according to the space positions, wherein the triangular surface elements do not contain the intersecting lines; and based on the intersecting lines, combining the independent areas with the space positions being etching reserved areas to obtain a grid Boolean operation result.
2. The method of claim 1, wherein the partitioning the triangle facet elements based on the intersection line for each triangle facet element containing the intersection line comprises: determining the intersection point of the intersection line on the edge of the triangle surface element; taking the intersection point as a new vertex, splitting the edge of the triangle surface element into a splitting edge and an intersecting line edge so as to split the triangle surface element into a plurality of facet elements; constructing an ordered adjacency list according to the facet elements and tracking to generate a polygon list; and removing the polygonal surface element with the largest area in the polygonal list to obtain the segmented triangular surface element.
3. The method of claim 2, wherein constructing an ordered adjacency list from the facet elements and tracking the generation of a list of polygons comprises: taking the intersection line side, the primary side and the splitting side of each facet element as input, constructing a projection plane of the facet element, and obtaining an included angle formed by the adjacent side of each vertex of the facet element on the projection plane; acquiring an initialized empty adjacency list, traversing all edges of the facet elements, and recording a bidirectional association relation among the vertexes to form an initial adjacency list; arranging the included angles into the initial adjacency list according to a anticlockwise sequence to obtain an ordered adjacency list; all edges in the ordered adjacency list are converted into directed edges, all the directed edges are traversed and tracked to form closed polygons, and a polygon list is formed.
4. The method of grid boolean operation according to claim 1, wherein the dividing the divided triangle surface elements and triangle surface elements not containing the intersection line into a plurality of independent areas by spatial locations comprises: And selecting a starting polygon from the divided triangle surface elements and triangle surface elements which do not contain the intersection line by adopting a depth-first search strategy, traversing the same-side polygons of the starting polygon until encountering the intersection line, and dividing all the same-side polygons into a plurality of independent areas.
5. The method of claim 1, wherein the combining the independent areas with the spatial positions being etching reserved areas based on the intersecting lines to obtain the result of the grid boolean operation includes: selecting a preset number of representative surface elements for each independent area, detecting the spatial positions of the surface elements by a ray method, and classifying the independent areas according to the spatial positions, wherein each independent area comprises an etching reserved area or an etching removal area; traversing all edges of the surface elements in each etching reserved area, recording the traversing times of each edge through a hash table, and screening out the intersecting line edge with the traversing times of 1 as an area boundary; and combining the etching reserved areas sharing the same area boundary to form an etched grid boundary, and obtaining a grid Boolean operation result.
6. The method of claim 1, wherein obtaining the intersection between the triangle surface element of the level set surface and the triangle surface element of the etched volume boundary surface comprises: Tracking the boundary of an etching area by adopting a level set method to obtain a symbol distance function, and discretizing the symbol distance function by a moving cube algorithm to generate the level set curved surface consisting of the triangular surface elements; Traversing all surface elements of a tetrahedral mesh in a preset etching area, recording the traversing times of each surface element through a hash table, and screening out the surface elements with the traversing times of 1 to obtain an etching volume boundary curved surface; And detecting the intersection relation of each triangular surface element in the level set curved surface and each triangular surface element in the etched volume boundary curved surface by adopting the combination of a Muller algorithm and a Hulde algorithm, and obtaining the intersection line.
7. The method of claim 6, wherein detecting the intersection of each triangle surface element in the level set surface and each triangle surface element in the etched volume boundary surface by using a combination of a moller algorithm and a helter algorithm to obtain the intersection comprises: Preliminary intersection is carried out on the triangle surface element pairs in the horizontal set curved surface and the etched volume boundary curved surface through the Mueller algorithm, and an initial intersection line is obtained; verifying and correcting the initial intersecting line through the Hulde algorithm; and obtaining an initial intersecting line confirmed by the Hulde algorithm to obtain the intersecting line.
8. A mesh boolean operation device, comprising: the acquisition module is used for acquiring intersection lines between the triangular surface elements of the horizontal set curved surface and the triangular surface elements of the etched volume boundary curved surface; The segmentation module is used for segmenting each triangular surface element containing the intersecting line based on the intersecting line; The dividing module is used for dividing the divided triangular surface elements into a plurality of independent areas according to the space positions of the triangular surface elements which do not contain the intersecting lines; and the operation module is used for combining the independent areas with the space positions being etching reserved areas based on the intersecting lines to obtain a grid Boolean operation result.
9. An electronic device comprising a memory and a processor; the memory is used for storing a computer program; the processor for implementing the method of operation of the gabor of any one of claims 1 to 7 when executing the computer program.
10. A computer readable storage medium, characterized in that the storage medium has stored thereon a computer program which, when executed by a processor, implements the mesh boolean operation method according to any of claims 1 to 7.

Description

Method and device for operating grid Boolean, electronic equipment and storage medium Technical Field The present invention relates to the field of grid processing technologies, and in particular, to a method and apparatus for performing a boolean operation on a grid, an electronic device, and a storage medium. Background In the field of semiconductor industry, process simulation software has become a key support for shortening the design and research and development period of semiconductor devices and reducing the production cost, and the accuracy of simulation results directly influences the structural design and final performance of the devices. As semiconductor device feature sizes continue to shrink to nanometer scale, three-dimensional architectures such as FinFET, GAA (gate-all-around transistor) and the like are widely used, and device electrical characteristics exhibit strong nonlinear coupling effects in three dimensions of channel width, length and height. The two-dimensional simplified model has difficulty in accurately describing key physical effects such as a fin side wall electric field, a grid three-dimensional surrounding structure, uneven stress distribution and the like, advanced manufacturing process steps can be truly reproduced through three-dimensional process simulation, the final morphology, doping distribution and stress state of a device are accurately predicted, a reliable physical basis is provided for subsequent three-dimensional device simulation, and therefore the necessity of the three-dimensional process simulation in the TCAD (technical computer aided design) field is increasingly highlighted. The etching process is used as a core step in the manufacture of a semiconductor device, the current three-dimensional etching process simulation scheme adopts a traditional grid Boolean operation and level set method to realize grid boundary evolution, namely a curved surface (LvlSurface) corresponding to an etching front edge is generated through the level set method, and then the traditional grid Boolean operation is used for cutting and cutting a volume boundary curved surface (EtchSurface) of an etching material. However, the existing three-dimensional etching process simulation technical path still faces a plurality of technical problems to be solved, namely, a horizontal collection curved surface is an open curved surface, an etching volume boundary curved surface is a closed curved surface, the special combination of the two open-closed surfaces is obviously different from a general design scene of a traditional grid Boolean operation aiming at the closed-closed curved surface, the three-dimensional etching process simulation has a severe requirement on precision, the precision generally needs to reach the level of 10e -8, so that details such as the intersection line of an etching front edge and a material boundary, a tiny triangle surface piece after splitting and the like are accurately captured, and the intersection line calculation and the precision performance of boundary condition processing of the traditional grid Boolean operation have a gap from the severe requirement. Disclosure of Invention The present invention solves at least one of the above-mentioned problems. In order to solve the problems, the invention provides a method and a device for operating a grid Boolean, an electronic device and a storage medium. In a first aspect, the present invention provides a method for performing a mesh boolean operation, comprising: Acquiring intersection lines between triangular surface elements of the level set curved surface and triangular surface elements of the etched volume boundary curved surface; dividing each triangular surface element containing the intersection line based on the intersection line; dividing the divided triangular surface elements into a plurality of independent areas according to the space positions, wherein the triangular surface elements do not contain the intersecting lines; and based on the intersecting lines, combining the independent areas with the space positions being etching reserved areas to obtain a grid Boolean operation result. Optionally, the partitioning the triangle surface elements based on the intersecting lines for each triangle surface element including the intersecting lines includes: determining the intersection point of the intersection line on the edge of the triangle surface element; taking the intersection point as a new vertex, splitting the edge of the triangle surface element into a splitting edge and an intersecting line edge so as to split the triangle surface element into a plurality of facet elements; constructing an ordered adjacency list according to the facet elements and tracking to generate a polygon list; and removing the polygonal surface element with the largest area in the polygonal list to obtain the segmented triangular surface element. Optionally, the constructing an ordered adjacency list according to th