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CN-122022575-A - Semiconductor chemical supply modularization method and system based on wireless identification

CN122022575ACN 122022575 ACN122022575 ACN 122022575ACN-122022575-A

Abstract

The application discloses a semiconductor chemical supply modularization method and system based on wireless identification, and relates to the technical field of semiconductor chemical supply object identification. The method comprises the steps of obtaining basic information of materials through a wireless identification technology, checking completeness and conforming to storage conditions to generate a preliminary identification data set, binding the data set with process nodes to generate a correlation identifier through a position correlation technology, extracting authorized personnel information, establishing a supply record containing a distribution plan after passing multi-factor authentication, calculating a requirement fluctuation value based on real-time requirement data, dynamically adjusting distribution quantity and updating inventory when exceeding a threshold value, tracking a material track, alarming and correcting a distribution time sequence when deviating, obtaining multi-batch circulation data based on the corrected time sequence, updating a supply state and generating a supply continuity index after matching with an emergency response mechanism. The method realizes the modularized control of the whole supply process, improves the supply accuracy and stability, ensures the suitability of the semiconductor manufacturing process, and has good practicability and safety.

Inventors

  • MA LEI
  • LONG HU

Assignees

  • 威海奥牧智能科技有限公司

Dates

Publication Date
20260512
Application Date
20260128

Claims (15)

  1. 1. A wireless identification-based semiconductor chemical supply modularization method, characterized in that the method comprises the following steps: S1, acquiring material basic information from a material container through a wireless identification technology, checking the integrity of the material basic information, and if the material basic information is complete and accords with preset storage conditions, performing data entry to generate a primary identification data set; S2, binding the preliminary identification data set with the process nodes by adopting a position association technology according to the preliminary identification data set to generate an associated process node identifier; S3, extracting authorized personnel information from the associated process node identifiers, performing authority verification by adopting a multi-factor authentication mechanism, and if the verification is passed, creating a supply record containing a distribution plan; S4, aiming at the distribution plan in the supply record, acquiring demand data of a current process node through a real-time demand acquisition technology, acquiring a demand fluctuation value based on the demand data, if the demand fluctuation value exceeds a preset fluctuation threshold value, calculating dynamic distribution quantity, and updating the current process node based on the dynamic distribution quantity to acquire new inventory allowance; s5, tracking a moving track of the material container through a wireless identification technology, triggering an alarm and updating to obtain a new process node identifier if the moving track deviates from a target process node, and generating an updated distribution time sequence based on the new inventory allowance and the new process node identifier; S6, acquiring multi-batch material circulation data based on the updated distribution time sequence, forming a related data set of batch numbers and time stamps, judging whether the batch numbers of the materials corresponding to the time stamps in the related data set meet the corresponding batch number triggering conditions in a pre-stored emergency demand response mechanism template, obtaining a data matching result, and updating the state of the integral supply module and generating a final supply continuity index if the data matching result is consistent.
  2. 2. A method of modularizing semiconductor chemical supply based on wireless identification as recited in claim 1, further comprising: Extracting a verification reference library from the supply continuity index, comparing the data in the real-time monitoring data set with the historical reference data in the verification reference library, and calculating the deviation value of the real-time distribution quantity and the dynamic distribution quantity; If the deviation value does not exceed the preset deviation threshold, judging that the distribution quantity is effective in calculation, and maintaining the existing supply scheme; Generating a multi-dimensional path optimization alternative scheme based on the trigger path optimization instruction; And comprehensively scoring the alternative path schemes to generate a final adjusted supply execution scheme.
  3. 3. A wireless identification based semiconductor chemical supply modularization method according to claim 1, the method is characterized in that the step S1 comprises the following steps: Reading material information from a material container through a wireless identification technology, wherein the material basic information comprises a material batch number, material concentration parameters and valid period data; Judging the integrity of the material information, and if the data is complete, extracting the preset storage requirement of the material according to the material information and carrying out consistency matching on the preset storage requirement and the current actual storage condition; if the preset storage requirement of the material is matched with the actual storage condition, judging that the material meets the preset storage condition, and carrying out standardized entry on the material information which is complete in data and meets the preset storage condition according to a preset data set format to generate a primary identification data set.
  4. 4. A wireless identification based semiconductor chemical supply modularization method according to claim 1, the method is characterized in that the step S2 comprises the following steps: extracting material basic information from the primary identification data set, and acquiring real-time material position information by utilizing an auxiliary positioning module on the material container; When the real-time position information of the material container enters the signal coverage range of the process node position sensing unit and the stay time length is greater than or equal to the preset time length, triggering a position correlation technical process; The real-time position coordinates of the materials are compared with pre-stored physical coordinates of process nodes to obtain coordinate deviation values, if the coordinate deviation values are smaller than or equal to a preset deviation threshold value, initial binding node pairs of the materials and the process nodes are generated; Based on the effective binding node pair, an associated process node identifier is generated according to a preset hierarchical coding rule, wherein the process node identifier comprises a process node code, material basic information, binding time and authorized personnel information.
  5. 5. A wireless identification based semiconductor chemical supply modularization method according to claim 1, the method is characterized in that the step S3 comprises the following steps: extracting authorized personnel information from the associated process node identifiers, and verifying the authorized personnel information by adopting a multi-factor authentication mechanism; if the verification is passed, creating a supply record containing material basic information and process node code associated information based on the preliminary identification data set and the associated process node identification, and generating a distribution plan record, wherein the distribution plan record at least contains distribution time, target process nodes and distribution quantity.
  6. 6. The wireless identification-based semiconductor chemical supply modularization method according to claim 5, wherein the authentication of authorized personnel information by using a multi-factor authentication mechanism comprises password authentication, RFID tag authentication and biometric factor authentication.
  7. 7. A wireless identification based semiconductor chemical supply modularization method according to claim 1, the method is characterized in that the step S4 comprises the following steps: Extracting a preset demand reference value from the distribution plan record, performing difference operation on the acquired real-time demand data and the demand reference value to obtain a demand fluctuation value, and judging whether the demand fluctuation value exceeds a preset fluctuation threshold value; if the demand fluctuation value exceeds the preset fluctuation threshold value, calculating the adjusted dynamic distribution amount by adopting a dynamic distribution amount method based on the deviation direction of the demand fluctuation value and the deviation fluctuation value and combining the process characteristic parameters of the current process; And obtaining a material demand gap of the target process node based on the current actual inventory balance and the dynamic delivery quantity of the target process node, and updating the inventory balance of the target process node based on the material demand gap.
  8. 8. The wireless identification-based semiconductor chemical supply modularization method according to claim 5, wherein the obtaining the material demand gap of the target process node based on the current actual inventory balance and the dynamic distribution amount of the target process node comprises: the material demand gap is the absolute value of the difference between the dynamic delivery quantity and the current actual stock allowance.
  9. 9. A wireless identification based semiconductor chemical supply modularization method according to claim 1, the method is characterized in that the step S5 comprises the following steps: acquiring a real-time moving path of a material container through a wireless tracking technology, and judging whether the real-time moving path accords with a preset range of a process node; if the real-time moving path deviates from the preset range of the process node, generating a corresponding node adjustment instruction; Updating the process node identification to obtain a new node identification according to the node adjustment instruction; Based on the influence degree of the real-time moving path deviating from the preset range of the process node, judging whether the subsequent distribution time sequence needs to be adjusted, if the distribution time sequence needs to be adjusted, calculating an updated value of the distribution time sequence by combining the inventory balance and the new node identifier, and obtaining the updated distribution time sequence.
  10. 10. The wireless identification-based semiconductor chemical supply modularization method according to claim 9, wherein the degree of influence of the deviation of the real-time moving path from the predetermined range of the process node comprises: And evaluating the deviation influence degree based on a preset rule, wherein the preset rule is obtained based on a two-dimensional weighting of the deviation distance and the delivery delay time.
  11. 11. A wireless identification based semiconductor chemical supply modularization method according to claim 1, the method is characterized in that the step S6 comprises the following steps: Based on the updated distribution time sequence, acquiring multi-batch material circulation data in a corresponding time range, wherein the material circulation data at least comprises circulation time stamps of materials in each batch, process node residence time, material remaining amount and process node binding records; extracting the batch number of each batch of materials and the corresponding circulation time stamp from the acquired circulating data of the batches of materials to form an associated data set of the batch number and the time stamp; searching based on the associated data set of the batch number and the time stamp, obtaining a pre-stored emergency demand response mechanism template, and judging whether the batch number of the material corresponding to the time stamp in the associated data set accords with the triggering condition of the corresponding batch number in the pre-stored emergency demand response mechanism template or not, so as to obtain a data matching result; If all the batches are matched, judging that the matching results of the whole data are consistent, if any batch is not matched, judging that the matching results of the whole data are not consistent, and triggering an abnormal checking flow; If the overall data matching results are consistent, updating the overall supply module state, and generating a final supply continuity index by combining continuity data of the material circulation of multiple batches based on the updated supply module state.
  12. 12. A modular system for semiconductor chemical supply based on wireless identification, the system comprising: The system comprises a preliminary identification data set generation module, a data input module and a data input module, wherein the preliminary identification data set generation module acquires material basic information from a material container through a wireless identification technology, verifies the integrity of the material basic information, and performs data input to generate a preliminary identification data set if the material basic information is complete and accords with preset storage conditions; the process node association module is used for binding the preliminary identification data set with the process nodes by adopting a position association technology according to the preliminary identification data set to generate associated process node identifiers; the supply record creation module extracts authorized personnel information from the associated process node identification, performs authority verification by adopting a multi-factor authentication mechanism, and creates a supply record containing a distribution plan if the verification is passed; The inventory balance updating module is used for acquiring demand data of a current process node through a real-time demand acquisition technology according to a distribution plan in the supply record, acquiring a demand fluctuation value based on the demand data, calculating a dynamic distribution amount and updating the current process node based on the dynamic distribution amount to acquire a new inventory balance if the demand fluctuation value exceeds a preset fluctuation threshold; The distribution time sequence correction module is used for tracking the moving track of the material container through a wireless identification technology, triggering an alarm and updating to obtain a new process node identifier if the moving track deviates from a target process node, and generating an updated distribution time sequence based on the new inventory allowance and the new process node identifier; The supply continuity index generation module acquires multi-batch material circulation data based on the updated distribution time sequence, forms a related data set of batch numbers and time stamps, judges whether the material batch numbers corresponding to the time stamps in the related data set meet the corresponding batch number triggering conditions in the pre-stored emergency demand response mechanism template, obtains a data matching result, and updates the state of the integral supply module and generates a final supply continuity index if the data matching result is consistent.
  13. 13. A modular system for semiconductor chemical supply based on wireless identification as set forth in claim 12, further comprising: the supply execution scheme generation module is used for extracting a verification reference library from the supply continuity index, comparing the data in the real-time monitoring data set with the historical reference data in the verification reference library, and calculating the deviation value of the real-time distribution quantity and the dynamic distribution quantity; If the deviation value does not exceed the preset deviation threshold, judging that the distribution quantity is effective in calculation, and maintaining the existing supply scheme; Generating a multi-dimensional path optimization alternative scheme based on the trigger path optimization instruction; And comprehensively scoring the alternative path schemes to generate a final adjusted supply execution scheme.
  14. 14. A wireless identification-based semiconductor chemical supply modular device, the device comprising: one or more processors; a storage means for storing one or more programs; The one or more programs, when executed by the one or more processors, cause the one or more processors to implement the wireless identification-based semiconductor chemical supply modularization method of any of claims 1-11.
  15. 15. A computer readable storage medium, characterized in that the computer readable storage medium comprises a stored computer program, wherein the computer program, when run, controls a device in which the computer readable storage medium is located to perform the wireless identification based semiconductor chemical provisioning modularization method according to any of claims 1-11.

Description

Semiconductor chemical supply modularization method and system based on wireless identification Technical Field The application relates to the technical field of object identification in semiconductor chemical supply, in particular to a semiconductor chemical supply modularization method based on wireless identification. Background In the semiconductor manufacturing process, the chemical supply directly affects the wafer yield and the process stability, and is a core link of the high-efficiency operation of the whole production line. As process nodes continue to shrink, there is an increasing demand for accuracy and real-time chemical management, ensuring that each batch of chemicals is supplied to the designated equipment at the correct time, location, and dosage, is critical to maintaining production continuity and product quality. Although digital tools are introduced in the current chemical supply management, most of the chemical supply management relies on manual input or bar code scanning, so that information update is delayed, human errors are prone to occur, and particularly when multiple batches of chemicals circulate in parallel, the real-time tracking and dynamic adjustment of the whole process are difficult to realize. The system often cannot automatically associate a specific process node when a chemical container moves to a different process node, resulting in a disjoint inventory record and actual use status, thereby affecting the accurate formulation of a supply plan. In semiconductor chemical supply, each chemical container needs to carry key information such as name, lot number, concentration, expiration date, and storage conditions, which directly determine whether the chemical can be safely and effectively used in a particular process. However, when a container enters a production line supply module, it is difficult for the system to automatically identify and immediately create a corresponding supply record while closely associating the record with the production equipment location and process node. If such automatic identification and correlation is not achieved, it is difficult for the supply plan to generate accurate dispense times, amounts and target process nodes based on real-time process requirements, which can easily lead to oversupply, shortages or mismatches of chemicals to mismatched equipment. In addition, in the process of creating the provisioning records, only authorized personnel need to be ensured to perform operations, otherwise unauthorized information entry or modification may occur, further exacerbating risks of information accuracy and security. This combination of entitlement control and automatic identification is more demanding and, once mishandled, can result in the entire supply flow losing reliability in a rapidly changing production environment. Therefore, how to realize the instant input of key information, the accurate creation of supply records, the real-time association of production process nodes and strict authority management through automatic identification when chemical containers enter a supply module becomes a key problem for improving the reliability and efficiency of a modularized semiconductor chemical supply system. Disclosure of Invention In order to solve the problems, the application provides a semiconductor chemical supply modularization method based on wireless identification, which comprises the following steps of S1, acquiring material basic information from a material container through a wireless identification technology, checking the integrity of the material basic information, if the material basic information is complete and accords with preset storage conditions, performing data entry to generate a preliminary identification data set, S2, binding the preliminary identification data set and process nodes through a position association technology according to the preliminary identification data set to generate associated process node identifications, S3, extracting authorized personnel information from the associated process node identifications, performing authority verification through a multi-factor authentication mechanism, if verification is passed, creating a supply record containing a distribution plan, S4, aiming at the distribution plan in the supply record, acquiring demand data of a current process node through a real-time demand acquisition technology, obtaining a demand fluctuation value based on the demand fluctuation value, if the demand fluctuation value exceeds a preset fluctuation threshold, calculating a dynamic distribution quantity and updating the current process node to obtain a new stock allowance based on the dynamic quantity, S5, comparing the current stock identification data set with a new stock number, and acquiring a new stock number sequence based on the new stock number, comparing the new stock number with a new stock number, and a new process number, and triggering a new process number, and comparing