CN-122025496-A - Ion beam screening apparatus, ion beam screening method, and ion implanter

CN122025496ACN 122025496 ACN122025496 ACN 122025496ACN-122025496-A

Abstract

The embodiment of the disclosure provides ion beam screening equipment, an ion beam screening method and an ion implanter, wherein the ion beam screening equipment comprises an energy screening magnetic field device, the energy screening magnetic field device comprises a support shell, a rotating device and a first collecting electrode group, the support shell comprises two side walls which are opposite along a first direction, the rotating device comprises two rotating shafts which are opposite along the first direction, the two rotating shafts are respectively and vertically arranged on the two side walls, the first collecting electrode group comprises two first collecting electrodes which are opposite along the first direction, the two first collecting electrodes are respectively fixed at the top ends of the two rotating shafts, a first magnetic field is generated between the two first collecting electrodes, the length of a contact surface of the first collecting electrodes and the ion beam along a third direction controls the electric field intensity of the first magnetic field on the ion beam transmitted along the second direction, the first direction is perpendicular to the side walls, and the second direction and the third direction are parallel to the side walls and are mutually perpendicular.

Inventors

LIAN FAMING
YI ZHONGZHOU
XU WEI

Assignees

深圳市鹏芯微集成电路制造有限公司

Dates

Publication Date: 20260512
Application Date: 20241112

Claims (10)

1. The ion beam screening device is characterized by comprising an energy screening magnetic field device, wherein the energy screening magnetic field device comprises a supporting shell, a rotating device and a first collecting electrode group, The support housing includes two sidewalls opposite in a first direction; The rotating device comprises two rotating shafts which are opposite along the first direction, and the two rotating shafts are respectively and vertically arranged on the two side walls; The first collecting electrode group comprises two first collecting electrodes which are opposite along the first direction, the two first collecting electrodes are respectively fixed at the top ends of the two rotating shafts, a first magnetic field is generated between the two first collecting electrodes, the length of a contact surface of the first collecting electrodes and the ion beam along a third direction controls the electric field intensity of the first magnetic field to the ion beam transmitted along a second direction, the first direction is perpendicular to the side wall, and the second direction and the third direction are parallel to the side wall and perpendicular to each other.
2. The ion beam screening apparatus of claim 1, wherein, The number of the first collecting electrode groups is one or more; The rotating shafts drive the corresponding first collecting electrodes to rotate, and the rotating angle of each first collecting electrode is independently controlled.
3. The ion beam screening apparatus of claim 1, wherein said energy screening magnetic field means further comprises a fixture and a second collector group; the fixing device comprises two fixing shafts which are opposite along the first direction, and the two fixing shafts are respectively arranged on the two side walls; The second collector group comprises two second collectors opposite along a third direction, two ends of each second collector are respectively connected to the two side walls through two fixed shafts, and the two second collectors generate a second magnetic field to control the morphology of the ion beam.
4. The ion beam screening apparatus of claim 3, wherein, The number of the second collector groups is one or more; The second collector electrode comprises one or a plurality of sub-electrodes which are sequentially connected along the first direction, and the voltage on each sub-electrode is independently controlled.
5. The ion beam screening apparatus of any one of claims 1 to 4, further comprising a detection device, a control device, and a motor; the detection device is connected to the output end of the ion beam screening equipment and is used for detecting the appearance of the screened ion beam; the control device is connected between the detection device and the motor and is used for controlling the rotation of the motor according to the shape of the ion beam; and the motor is connected with the two rotating shafts and used for controlling the rotation angle of the rotating shafts along the central axis.
6. The ion beam screening apparatus of claim 5, wherein, The control device comprises a machine controller and a motor controller, wherein the machine controller is connected with the detection device and used for outputting a control signal according to the shape of the ion beam; The detection device comprises a Faraday cup, wherein the Faraday cup is used for detecting the equivalent current of the ion beam, and the detection device is also used for determining the morphology of the ion beam based on the equivalent current of the ion beam.
7. The ion beam screening apparatus of claim 1, wherein, The energy screening magnetic field device further comprises two grounding electrodes which are opposite along the first direction, wherein the two grounding electrodes are respectively arranged on the two side walls; the support shell further comprises a top surface and a bottom surface, and graphite is coated on the inner walls of the side walls, the top surface and the bottom surface.
8. An ion beam screening method, applied to the ion beam screening apparatus according to any one of claims 1 to 7, wherein the profile of the ion beam includes a degree of tilting of the ion beam edge, the method comprising: When the tilting degree of the edge of the ion beam exceeds a preset range, the motor is used for controlling the two first focusing electrodes to rotate, so that the length of the contact surface of the two first focusing electrodes and the ion beam along the third direction is increased.
9. The ion beam screening method of claim 8, wherein when the degree of warping of the ion beam edge is outside a predetermined range, the method further comprises: And increasing the voltage of the sub-electrode corresponding to the ion beam edge.
10. An ion implanter according to any of claims 1 to 7, comprising an ion beam screening apparatus.

Description

Ion beam screening apparatus, ion beam screening method, and ion implanter Technical Field The present disclosure relates to the field of ion implanters, and relates to, but is not limited to, an ion beam screening apparatus, method and ion implanter. Background The energy screening magnetic field (Energy Purity Magnet, EPM) is a deceleration and energy filtering system in an ion implanter that can act on charged ions in an ion beam through a static electric field to cause the ion beam to be horizontally focused or diverged, improving the ion beam transport efficiency in the parallel lens region. In the related art, the edge position of the ion beam is easy to diverge, and the converging electrode controls the divergence of the ion beam in the vertical and horizontal directions, but the length of the contact position between the converging electrode and the edge of the ion beam is smaller, so that the field intensity at the edge of the ion beam is larger, the ion beam is extruded, the edge of the ion beam is easy to tilt, and the uniformity of the ion beam is reduced. Disclosure of Invention In view of the foregoing, embodiments of the present disclosure provide an ion beam screening apparatus, a method and an ion implanter. In a first aspect, embodiments of the present disclosure provide an ion beam screening apparatus comprising an energy screening magnetic field device and a motor; the energy screening magnetic field device comprises a supporting shell, a rotating device and a first collecting electrode group, wherein, The support housing includes two sidewalls opposite in a first direction; The rotating device comprises two rotating shafts which are opposite along the first direction, and the two rotating shafts are respectively and vertically arranged on the two side walls; The first collecting electrode group comprises two first collecting electrodes which are opposite along the first direction, and the two first collecting electrodes are respectively fixed at the top ends of the two rotating shafts; a first magnetic field generated between the two first focusing electrodes, wherein the length of the contact surface of the first focusing electrodes and the ion beam along the third direction controls the electric field intensity of the first magnetic field to the ion beam transmitted along the second direction; The first direction is perpendicular to the side wall, and the second direction and the third direction are parallel to the side wall and perpendicular to each other. In some embodiments, the first aggregate electrode group is one or more in number; The rotating shafts drive the corresponding first collecting electrodes to rotate, and the rotating angle of each first collecting electrode is independently controlled. In some embodiments, the energy screening magnetic field device further comprises a fixture and a second collector group; the fixing device comprises two fixing shafts which are opposite along the first direction, and the two fixing shafts are respectively arranged on the two side walls; The second collector group comprises two second collectors opposite along a third direction, two ends of each second collector are respectively connected to the two side walls through two fixed shafts, and the two second collectors generate a second magnetic field to control the morphology of the ion beam. In some embodiments, the number of second collector groups is one or more; The second collector electrode comprises one or a plurality of sub-electrodes which are sequentially connected along the first direction, and the voltage on each sub-electrode is independently controlled. In some embodiments, the ion beam screening apparatus further comprises a detection device, a control device, and a motor; the detection device is connected to the output end of the ion beam screening equipment and is used for detecting the appearance of the screened ion beam; the control device is connected between the detection device and the motor and is used for controlling the rotation of the motor according to the shape of the ion beam; and the motor is connected with the two rotating shafts and used for controlling the rotation angle of the rotating shafts along the central axis. In some embodiments, the control device comprises a machine controller and a motor controller, wherein the machine controller is connected with the detection device and used for outputting a control signal according to the shape of the ion beam; The detection device comprises a Faraday cup, wherein the Faraday cup is used for detecting the equivalent current of the ion beam, and the detection device is also used for determining the morphology of the ion beam based on the equivalent current of the ion beam. In some embodiments, the energy screening magnetic field device further comprises two grounding electrodes opposite along the first direction, wherein the two grounding electrodes are respectively arranged on the two side walls; the suppor