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CN-122025500-A - Magnetic field control system applied to plasma etcher

CN122025500ACN 122025500 ACN122025500 ACN 122025500ACN-122025500-A

Abstract

The embodiment of the application relates to the technical field of semiconductor equipment, in particular to a magnetic field control system applied to a plasma etching machine, which comprises a controller and at least one channel driving module, wherein each channel driving module is electrically connected with a coil and is used for driving the connected coil to generate a magnetic field in an etching cavity, a coil assembly comprises a first coil, and the first channel driving module corresponding to the first coil comprises a first coil driving circuit, a first high-end current detection circuit, a first low-end current detection circuit and a first signal processing circuit. In the embodiment of the application, when the coil in the coil assembly is abnormal, the controller detects that the first current detection signal and the second current detection signal are inconsistent, and generates the first coil abnormal information so as to realize timely identifying the occurrence of the problem of the coil assembly.

Inventors

  • Request for anonymity
  • Request for anonymity

Assignees

  • 深圳市华芯半导体装备技术有限公司

Dates

Publication Date
20260512
Application Date
20260414

Claims (10)

  1. 1. Be applied to magnetic field control system of plasma etching machine, a serial communication port, plasma etching machine includes etching chamber and coil pack, the coil pack includes coil tray and stacks the setting and be in at least one coil on the coil tray, the coil tray is fixed in outside the etching chamber, just at least one coil all overlaps to establish outside the etching chamber, magnetic field control system includes controller and at least one passageway drive module, and a coil is connected to every passageway drive module electricity for the coil that the drive is connected is in the etching intracavity produces the magnetic field, the coil pack includes first coil, first passageway drive module that first coil corresponds includes: The first coil driving circuit comprises a first current branch and a second current branch, and is configured to transmit current to the first coil through the first current branch so that the current flows back to the grounding end of the first coil driving circuit through the second current branch after passing through the first coil; The first high-end current detection circuit is electrically connected to the first current branch and is configured to detect current flowing through the first current branch to obtain a first current detection signal; the first low-end current detection circuit is electrically connected to the second current branch and is configured to detect current flowing through the second current branch to obtain a second current detection signal; And the first signal processing circuit is electrically connected with the first coil driving circuit, the first high-side current detection circuit and the first low-side current detection circuit respectively and is configured to transmit the first current detection signal and the second current detection signal to the controller so that first coil abnormality information is generated when the controller detects that the first current detection signal and the second current detection signal are inconsistent.
  2. 2. The magnetic field control system of claim 1, wherein the coil assembly further comprises a second coil, the second coil corresponding second channel drive module comprising: The second coil driving circuit comprises a third current branch and a fourth current branch, and is configured to transmit current to the second coil through the third current branch so that the current flows back to the grounding end of the second coil driving circuit through the fourth current branch after passing through the second coil; the second high-end current detection circuit is electrically connected to the third current branch and is configured to detect the current flowing through the third current branch to obtain a third current detection signal; The second low-end current detection circuit is electrically connected to the fourth current branch and is configured to detect the current flowing through the fourth current branch to obtain a fourth current detection signal; and the second signal processing circuit is respectively and electrically connected with the second coil driving circuit, the second high-side current detection circuit and the second low-side current detection circuit and is configured to transmit the third current detection signal and the fourth current detection signal to the controller so as to generate second coil abnormality information when the controller detects that the third current detection signal and the fourth current detection signal are inconsistent.
  3. 3. The magnetic field control system of claim 2, wherein the magnetic field control system comprises, The controller is further configured to determine that a first breakage point occurs in the first coil when the first current detection signal is greater than the second current detection signal; Determining that the first coil is interfered by an external magnetic field when the first current detection signal is smaller than the second current detection signal; when the third current detection signal is larger than the fourth current detection signal, determining that a second breakage point occurs to the second coil; determining that the second coil is interfered by an external magnetic field when the third current detection signal is smaller than the fourth current detection signal; And determining that the first coil is shorted with the second coil through the coil tray when a difference between the first current detection signal and the second current detection signal is equal to a difference between the third current detection signal and the fourth current detection signal.
  4. 4. The magnetic field control system of claim 1, wherein the first signal processing circuit comprises: A digital-to-analog converter electrically connected to the controller and the first coil drive circuit, respectively, and configured to output a target drive signal in an analog form to the first coil drive circuit based on a drive control command input by the controller in response to the drive control command, so that the first coil drive circuit transmits a current to the first coil based on the target drive signal; and the analog-to-digital converter is respectively and electrically connected with the first high-side current detection circuit, the first low-side current detection circuit and the controller and is configured to perform analog-to-digital conversion processing on the first current detection signal or the second current detection signal.
  5. 5. The magnetic field control system of claim 4, wherein the first coil drive circuit further comprises: The voltage conversion circuit is respectively and electrically connected with the first current branch and the digital-to-analog converter and is configured to respond to the target driving signal, and current is transmitted through the first current branch so that the current flows back to the grounding end of the voltage conversion circuit through the second current branch after passing through the first coil; A relay circuit electrically connected to the first current branch and also electrically connected to the first coil and the controller, respectively, and configured to change a direction of a current flowing through the first coil in response to a switching value signal transmitted from the controller, so that the first coil generates a magnetic field; And a polarity detection circuit electrically connected to the relay circuit and the controller, respectively, and configured to send a polarity detection signal to the controller based on a current direction flowing through the first coil, so that the controller generates switch state detection information based on the switching value signal and the polarity detection signal, wherein the switch state detection information is used for indicating whether a current switch state of the relay circuit matches a current expected switch state.
  6. 6. The magnetic field control system of claim 1, wherein the first high-side current detection circuit has a circuit configuration that is identical to a circuit configuration of the first low-side current detection circuit, wherein the first high-side current detection circuit comprises: a first sampling circuit electrically connected to the first current branch and configured to collect a current flowing through the first current branch and convert the current of the first current branch into a first intermediate signal; The first operational amplifier unit is connected to two ends of the first sampling circuit and is electrically connected with the first signal processing circuit, and is configured to amplify the first intermediate signal and output a first current detection signal to the first signal processing circuit.
  7. 7. The magnetic field control system of claim 6, wherein the first op-amp unit comprises: a first differential input network connected across the first sampling circuit configured to suppress common-mode interference introduced by current flowing through the first current branch; A first operational amplifier electrically connected to the first differential input network and configured to amplify the first intermediate signal and output a first current detection signal to the first signal processing circuit; and the first compensation unit is electrically connected with the first operational amplifier and is configured to perform frequency phase compensation on the first current detection signal so as to offset signal phase offset generated by the first current detection signal.
  8. 8. The magnetic field control system of claim 7, wherein the first compensation unit comprises a first capacitor and a second capacitor, a first end of the first capacitor being connected to the non-inverting input of the first operational amplifier, a second end of the first capacitor being connected to the inverting input of the first operational amplifier, a first end of the second capacitor being connected to the non-inverting input of the first operational amplifier, and a second end of the second capacitor being connected to the inverting input of the first operational amplifier.
  9. 9. The magnetic field control system of claim 1, wherein each of the channel drive modules further comprises an overvoltage protection circuit electrically connected to the first current branch and the first coil drive circuit, respectively, and configured to output an enable control signal to the first coil drive circuit to deactivate the first coil drive circuit in response to a current flowing through the first current branch being greater than a preset current.
  10. 10. The magnetic field control system of any of claims 1-9, wherein each of the channel drive modules further comprises: The fan driving circuit is respectively and electrically connected with the controller and a preset fan and is configured to drive the fan to rotate; The fan detection circuit is electrically connected with the controller and is configured to collect working current flowing through the fan to obtain a current feedback signal, and the current feedback signal is input to the controller so that the controller controls the fan driving circuit to adjust the rotating speed of the fan according to a preset fan control model and the current feedback signal.

Description

Magnetic field control system applied to plasma etcher Technical Field The embodiment of the application relates to the technical field of semiconductor equipment, in particular to a magnetic field control system applied to a plasma etching machine. Background In the magnetic field control system, since the resistance value of the load end is generally smaller, a separate high-end current detection mode is generally adopted to monitor and regulate the load current. When a load is in a problem, the high-end current detection resistor cannot identify that the load end is in a problem, and the error condition is fed back as a normal condition, so that the magnetic field control system is continuously driven according to the normal constant current mode, and the magnetic field control system is in a fault condition. Disclosure of Invention An object of an embodiment of the present application is to provide a magnetic field control system for a plasma etcher, so as to improve the technical problem that the related art cannot identify the problem at the load end. The invention provides a magnetic field control system applied to a plasma etching machine, the plasma etching machine comprises an etching cavity and a coil assembly, the coil assembly comprises a coil tray and at least one coil which is arranged on the coil tray in a stacking way, the coil tray is fixed outside the etching cavity, the at least one coil is sleeved outside the etching cavity, the magnetic field control system comprises a controller and at least one channel driving module, each channel driving module is electrically connected with one coil and is used for driving the connected coil to generate a magnetic field in the etching cavity, the coil assembly comprises a first coil, the first channel driving module corresponding to the first coil comprises a first coil driving circuit and a second current branch, the first coil driving circuit comprises a first current branch and a second current branch is configured to transmit current to the first coil through the first current branch, so that the current flows back to a grounding end of the first coil driving circuit through the second current branch after passing through the first coil; the first high-end current detection circuit is electrically connected to the first current branch and is configured to detect current flowing through the first current branch to obtain a first current detection signal, the first low-end current detection circuit is electrically connected to the second current branch and is configured to detect current flowing through the second current branch to obtain a second current detection signal, the first signal processing circuit is respectively and electrically connected with the first coil driving circuit, the first high-end current detection circuit and the first low-end current detection circuit and is configured to transmit the first current detection signal and the second current detection signal to the controller, and when the controller detects that the first current detection signal is inconsistent with the second current detection signal, generating first coil abnormality information. The embodiment of the application has the following technical effects that the current of the coil assembly is detected by monitoring the current of the channel driving module through the controller, particularly, the current of the first current branch and the current of the second current branch on the first coil driving circuit are detected through the first high-end current detecting circuit and the second low-end current detecting circuit respectively, the first signal processing circuit feeds back the first current detecting signal and the second current detecting signal to the controller, and compared with the situation that the single detection in the related art can not identify the problem at the load end, in the magnetic field control system of the embodiment of the application, when the coil in the coil assembly is abnormal, the controller detects that the first current detecting signal and the second current detecting signal are inconsistent, the first coil abnormal information is generated, the first coil abnormal information can be used for judging the damage of the first coil, so that the situation that the problem of the coil assembly is identified in time is realized, the constant current source of the magnetic field control system is prevented from being converted into an uncontrollable constant voltage source, the output voltage is rapidly increased, and the power switch device in the magnetic field control system is broken down. Drawings In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings that are needed in the description of the embodiments of the present application will be briefly described below, it being obvious that the drawings in the following description are only some embodiments o