CN-122026219-A - Packaging cavity, packaging structure, light source module and semiconductor device

Abstract

The application relates to the packaging field, and discloses a packaging cavity, a packaging structure, a light source module and semiconductor equipment, wherein the packaging cavity forms a mounting cavity, a crystal is arranged in the mounting cavity, and the packaging cavity comprises: the encapsulation cavity has a viewing window for providing a viewing channel for the debug beam so that a person can view the position of the beam incident on the crystal from outside the encapsulation cavity. Because the crystal sets up in the installation cavity of encapsulation cavity, encapsulation cavity is equipped with visual window, and visual window provides the observation passageway for debugging light path for the debugging personnel can observe the light beam in real time from the outside of encapsulation cavity and incident the position of crystal, thereby make the visual of adjusting luminance, solved the blindness and the complexity of light path regulation, improved the adjustment efficiency of light path.

Inventors

• DU YING
• ZHANG YINUO
• LI ZHAN
• CHENG LIANG

Assignees

• 深圳市新凯来工业机器有限公司

Dates

Publication Date

20260512

Application Date

20260214

Claims (15)

1. 1. An encapsulation cavity forming an installation cavity in which a crystal is installed, comprising: the encapsulation cavity has a viewing window for providing a viewing channel for the debug beam so that a person can view the position of the beam incident on the crystal from outside the encapsulation cavity.
2. 2. The package of claim 1, wherein the viewing window is a non-metallic transparent window.
3. 3. The packaging cavity according to claim 1 or 2, wherein the viewing window constitutes part or all of the packaging cavity.
4. 4. A packaging cavity according to claim 3, wherein the viewing window forms part of the packaging cavity, the viewing window being provided in a side wall of the packaging cavity.
5. 5. The package of claim 4, wherein the viewing window is offset from a radial projection of the crystal in the package.
6. 6. The package according to any one of claims 1 to 5, wherein both the inner and outer surfaces of the viewing window are polished.
7. 7. A package structure, comprising: the package cavity of any of claims 1-6.
8. 8. The package structure of claim 7, further comprising a heat sink assembly including a base and an extension, the bottom of the package cavity being provided with a first through hole, the extension extending into the package cavity through the first through hole, the base being located outside the package cavity, the extension being provided with a second through hole extending along an optical axis, the crystal being mounted in the second through hole.
9. 9. The package structure of claim 8, wherein the heat sink assembly includes a temperature control member, a bottom of the base is provided with a recess, and the temperature control member is mounted in the recess.
10. 10. The package structure according to claim 9, wherein the package cavity includes two supporting portions disposed on both sides of the temperature control member along an axis of the package cavity.
11. 11. The package structure according to claim 10, wherein a lowest point of the temperature control is higher than a lowest point of the two supporting portions in a vertical direction.
12. 12. The package structure according to any one of claims 7 to 11, wherein a fourth through hole is provided in a side wall of the package cavity, the package structure further comprising an absorber bonded to the fourth through hole, or the package structure further comprising a lead-out member bonded to the fourth through hole.
13. 13. The package structure of claim 12, wherein the fourth through hole provides a radial projection area of the first or second louver in the package cavity.
14. 14. A light source module, comprising: the package structure of any one of claims 7 to 13.
15. 15. A semiconductor device, characterized by comprising: the light source module of claim 14.

Description

Packaging cavity, packaging structure, light source module and semiconductor device Technical Field The present application relates to the field of packaging, and in particular, to a packaging cavity, a packaging structure, a light source module, and a semiconductor device. Background In laser systems and optoelectronic devices, crystals are core optical elements for generating, modulating, and converting optical signals, and are required to be tightly packaged in a closed cavity to isolate environmental interference. The current encapsulation cavity adopts metal or non-transparent ceramic material to realize high leakproofness generally, but this kind of encapsulation cavity has shielded inside light path completely for the debugging personnel can't follow the inside incident position of laser beam direct observation crystal from the cavity outside, leads to the light beam to debug the complexity height, and light path adjustment inefficiency. Therefore, how to solve the above technical problems should be of great interest to those skilled in the art. Disclosure of Invention The application discloses a packaging cavity, a packaging structure, a light source module and semiconductor equipment, which are used for solving the problems of high complexity and low adjustment efficiency of light beam debugging. In a first aspect, the application provides a packaging cavity which forms a mounting cavity, wherein a crystal is mounted in the mounting cavity, and the packaging cavity comprises a viewing window, wherein the viewing window is used for providing a viewing channel for a debugging light beam, so that a debugger can observe the position of the light beam entering the crystal from the outside of the packaging cavity. Because the crystal sets up in the installation cavity of encapsulation cavity, encapsulation cavity is equipped with visual window, and visual window provides the observation passageway for debugging light path for the debugging personnel can observe the light beam in real time from the outside of encapsulation cavity and incident the position of crystal, thereby make the visual of adjusting luminance, solved the blindness and the complexity of light path regulation, improved the adjustment efficiency of light path. In one possible embodiment, the viewing window is a non-metallic transparent window. The nonmetallic transparent window is transparent, so that the visibility of the observation window is improved, and a debugger can clearly observe the position of the light beam incident on the crystal from the outside of the packaging cavity, so that the light path is regulated more smoothly and simply, and the regulating efficiency of the light path is further improved. In addition, the nonmetallic transparent window is made of nonmetallic materials and has the characteristics of being low in heat conductivity, capable of improving the heat insulation effect of the packaging cavity, enhancing the environment interference resistance, achieving the effect of small temperature fluctuation without controlling the external environment, low in density, capable of reducing the weight of the packaging cavity, easy to find and match a high-precision electric displacement table for the packaging cavity, convenient for replacing a crystal position, free of heat influence on a motor, stable in physical and chemical properties, suitable for a high-temperature cleaning environment, capable of avoiding organic matter residues to a great extent, reducing the light pollution degree and prolonging the service life of laser. In one possible embodiment, the viewing window forms part or all of the encapsulation cavity. When the observation window forms part of the packaging cavity, the part of the shell of the packaging cavity can be invisible because the part of the observation window is visible, so that the requirement on the shell can be reduced, and the complexity of the packaging cavity is reduced. When the observation window constitutes the whole of encapsulation cavity, the observation window can be as the casing of encapsulation cavity, because the observation window is as the whole of encapsulation cavity, so whole encapsulation cavity is visual this moment, and the debugging personnel can observe the position of light beam incidence crystal from different positions in real time to the debugging personnel of being convenient for adjusts luminance more. In a possible embodiment, the viewing window forms part of the encapsulation cavity, the viewing window being arranged on a side wall of the encapsulation cavity. Because the observation window is arranged on the side wall of the packaging cavity, a debugger can observe the light beam injected into the packaging cavity at the side of the packaging cavity, and the observation sight is perpendicular to the propagation direction of the light beam, so that the trend, the collimation, the shape and the position of a light spot in a crystal and the like of the ligh