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CN-122026681-A - Magnetic levitation device and magnetic levitation voice coil motor

CN122026681ACN 122026681 ACN122026681 ACN 122026681ACN-122026681-A

Abstract

The application relates to the technical field of semiconductor equipment, and discloses a magnetic levitation device and a magnetic levitation voice coil motor. The magnetic levitation device comprises a first component and a second component, wherein the first component and the second component can move relatively along a first direction. The first assembly includes a first bracket and first and second magnets mounted on the first bracket, and the second assembly includes a second bracket and third and fourth magnets mounted on the second bracket. The first support and/or the second support are/is an adjustable support, the adjustable support comprises two sectional supports, the two sectional supports are movably connected along the first direction, two magnets in the first/second assembly are respectively located in the two sectional supports, the gap (axial gap) between the two magnets in the first direction can be increased or reduced through the two sectional supports, and the magnetic buoyancy generated by the magnetic levitation device is changed along with the change of the axial gap, so that the magnetic buoyancy of the magnetic levitation device can be adjusted.

Inventors

  • FU ZHAODI
  • HU BING
  • PENG RENQIANG
  • CHEN XIAOQIANG
  • GUO XING
  • JIANG XUCHU

Assignees

  • 上海隐冠半导体技术股份有限公司
  • 广东粤极科技有限责任公司

Dates

Publication Date
20260512
Application Date
20251223

Claims (10)

  1. 1. A magnetic levitation device characterized by comprising a first component (10) and a second component (20), wherein the first component (10) and the second component (20) are coaxially arranged and have a first axis, the first component (10) and the second component (20) can move relatively along a first direction, and the first direction is parallel or coincident with the first axis; The first assembly (10) comprises a first bracket (101) and a first magnet (110) and a second magnet (120) which are arranged on the first bracket (101), wherein the first magnet (110) and the second magnet (120) are coaxial and are arranged at intervals along the first direction; the second assembly (20) comprises a second bracket (201) and a third magnet (210) and a fourth magnet (220) which are arranged on the second bracket (201), wherein the third magnet (210) and the fourth magnet (220) are coaxial and are arranged along the first direction, and the first bracket (101) is sleeved outside the second bracket (201); wherein the first bracket (101) and/or the second bracket (201) are/is an adjustable bracket, The first bracket (101) is an adjustable bracket, the first bracket (101) comprises a first section bracket (1011) and a second section bracket (1012) which are movably connected along the first direction, and the first magnet (110) and the second magnet (120) are respectively positioned on the first section bracket (1011) and the second section bracket (1012); the second support (201) is an adjustable support, the second support (201) comprises a third segmented support (2011) and a fourth segmented support (2012) which are movably connected along the first direction, and the third magnet (210) and the fourth magnet (220) are respectively positioned on the third segmented support (2011) and the fourth segmented support (2012).
  2. 2. The magnetic levitation apparatus of claim 1, wherein an end of the first segmented bracket (1011) and an end of the second segmented bracket (1012) are threadedly coupled in the first direction; And/or, in the first direction, one end of the third segmented bracket (2011) and one end of the fourth segmented bracket (2012) are in threaded connection.
  3. 3. The magnetic levitation apparatus of claim 1, wherein the first segmented bracket (1011) and the second segmented bracket (1012) are connected by a first locking member (30) in a radial direction, the radial direction being perpendicular to the first direction; and/or the third segmented bracket (2011) and the fourth segmented bracket (2012) are connected along the radial direction by a second locking member.
  4. 4. The magnetic levitation apparatus of claim 1, wherein the first magnet (110) and the second magnet (120) are both radially magnetized or are both parallel magnetized and the magnetization directions are opposite; The third magnet (210) and the fourth magnet (220) are axially magnetized, and the magnetizing directions are opposite.
  5. 5. The magnetic levitation apparatus of claim 1 or 4, wherein a plane in which a center of the first magnet (110) is located is coplanar with a plane in which a center of the third magnet (210) is located; and/or the plane of the centers of the two magnets is coplanar with the plane of the center of the fourth magnet (220).
  6. 6. The magnetic levitation apparatus of claim 1, wherein the second assembly (20) further comprises a fifth magnet (230) and a sixth magnet (240) disposed coaxially with the third magnet (210), the fourth magnet (220), wherein the fifth magnet (230) is located on a side of the third magnet (210) facing away from the fourth magnet (220) along the first direction and the sixth magnet (240) is located on a side of the fourth magnet (220) facing away from the third magnet (210) along the first direction; The fifth magnet (230) and the third magnet (210) have the same magnetizing direction, and the sixth magnet (240) and the fourth magnet (220) have the same magnetizing direction.
  7. 7. The magnetic levitation apparatus of claim 6, wherein the fifth magnet (230) and the sixth magnet (240) have the same size in a radial direction, the fifth magnet (230) or the sixth magnet (240) having a first inner diameter in the radial direction, the radial direction being perpendicular to the first direction; The third magnet (210) and the fourth magnet (220) have the same size along the radial direction, the third magnet (210) or the fourth magnet (220) has a second inner diameter along the radial direction, Wherein the first inner diameter is greater than the second inner diameter.
  8. 8. The magnetic levitation apparatus of claim 1, wherein in the first direction, the third magnet (210) and the fourth magnet (220) have a gap or a close fit therebetween.
  9. 9. A magnetic levitation voice coil motor, characterized by comprising a magnetic levitation device and a coil as set forth in any one of claims 1 to 8, The coil is located between the first magnet (110) and the second magnet (120) along the first direction.
  10. 10. The voice coil motor of claim 9, wherein a gap or close fit is provided between a fifth magnet (230) and the third magnet (210), and a gap or close fit is provided between a sixth magnet (240) and the fourth magnet (220).

Description

Magnetic levitation device and magnetic levitation voice coil motor Technical Field The application relates to the technical field of semiconductor equipment, in particular to a magnetic levitation device and a magnetic levitation voice coil motor. Background In the field of semiconductor manufacturing and detection, in particular to automatic wafer processing and detection equipment, a vertical displacement table of the equipment needs to ensure that an actuator realizes nano-scale precision and ultra-high speed positioning, and a structural scheme of coarse-fine motion combination can be applied to most of the equipment. The motor of the micro-motion stage is required to complete the high-precision positioning of the vertical driving module on the premise of compensating the vertical driving quality. Because the thermal deformation and the thermal drift of the micro-motion stage have more obvious influence on the overall precision of the equipment due to the fact that the distance from the wafer is relatively short, and the influence of the heating of the motor on the overall thermal deformation and the precision of the equipment cannot be compensated through an algorithm, the vertical motor is usually matched with a gravity compensation device (such as a magnetic levitation device), the vertical motor only needs to provide driving force for driving the vertical motion mechanism to vertically displace, but the compensation force provided by the gravity compensation device is usually offset from the gravity actually required to be compensated, so that the offset value of the part of the vertical motor needs to be compensated in the motion process, the total heating value of the motor is increased, and the positioning precision of the vertical displacement stage is reduced. In addition, in some semiconductor devices, there are application conditions of variable load, and the current gravity compensation device cannot adapt to different load gravities under different application conditions. Disclosure of Invention In order to solve the technical problems, the embodiment of the application provides a magnetic levitation device and a magnetic levitation voice coil motor. In a first aspect, an embodiment of the application provides a magnetic levitation device, which comprises a first component and a second component, wherein the first component and the second component are coaxially arranged and provided with a first axis, the first component and the second component can move relatively along a first direction, the first direction is parallel or coincident with the first axis, the first component comprises a first bracket and a first magnet and a second magnet which are arranged on the first bracket, the first magnet and the second magnet are coaxially arranged at intervals along the first direction, the second component comprises a second bracket and a third magnet and a fourth magnet which are arranged on the second bracket, the third magnet and the fourth magnet are coaxially arranged along the first direction, the first bracket is sleeved outside the second bracket, the first bracket and/or the second bracket is an adjustable bracket, the first bracket comprises a first sectional bracket and a second sectional bracket which are movably connected along the first direction, the first magnet and the second magnet are respectively arranged on the first sectional bracket and the second sectional bracket, the second bracket is an adjustable bracket, the third magnet and the fourth bracket are respectively arranged along the third direction, and the fourth bracket is respectively movably connected along the third direction, and the fourth bracket is respectively arranged on the fourth sectional bracket. It can be understood that the adjustable bracket comprises two sectional brackets, the two sectional brackets are movably connected along the first direction, two magnets in the first/second component are respectively positioned in the two sectional brackets, the gap (i.e. axial gap) between the two magnets in the first direction can be increased or reduced through the two sectional brackets, and the magnetic buoyancy generated by the magnetic levitation device is changed along with the change of the axial gap, so that the magnetic buoyancy of the magnetic levitation device can be adjusted, and the adjustment mode is simple and easy to operate. In a specific application scenario, the magnetic levitation device is used as a gravity compensation device for the vertical micro-motion stage. Because the magnetic buoyancy of the magnetic levitation device is adjustable, if the compensation force provided by the magnetic levitation device deviates from the gravity to be compensated actually, the gravity to be compensated actually can be met by adjusting the magnetic levitation device, and the deviation of the part is not required to be compensated by a vertical motor, so that the total heating value of the motor can be r