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CN-122028642-A - Actuator with a spring

CN122028642ACN 122028642 ACN122028642 ACN 122028642ACN-122028642-A

Abstract

The invention provides an actuator. Vibration with large displacement is realized. The actuator includes a piezoelectric vibrator, a leaf spring, and a support. The piezoelectric vibrator is composed of a laminate of a plate member and a piezoelectric element, and has a surface (F101) and a surface (F102) that face each other. The leaf spring has a surface (F402) connected to the surface (F101), and a surface (F401) facing the surface (F402). The support body has a ring shape having an end face and a peripheral face. The leaf spring has a first region in the shape of a ring, and a second region surrounded by the first region. The first region has a third region on the outer edge side of the leaf spring and a fourth region on the second region side. The leaf spring is connected to the support and the piezoelectric vibrator in a state sandwiched by the end face of the support ST and the face of the piezoelectric vibrator in the third region. The leaf spring is connected to the piezoelectric vibrator in the fourth region and is not connected to the support. The leaf spring is not connected from the piezoelectric vibrator in the second region.

Inventors

  • Tohda RIE

Assignees

  • 株式会社村田制作所

Dates

Publication Date
20260512
Application Date
20251107
Priority Date
20241111

Claims (8)

  1. 1. An actuator, comprising: A piezoelectric vibrator including a laminate of a plate member and a piezoelectric element, and having a first surface and a second surface facing each other; A leaf spring having a third surface connected to the first surface and a fourth surface facing the third surface, and The support body is formed by a ring shape with an end surface and a peripheral surface, The leaf spring has a first region having a ring shape and a second region surrounded by the first region, The first region has a third region on the outer edge side of the leaf spring and a fourth region on the second region side, The leaf spring is connected to the support and the piezoelectric vibrator in a state of being sandwiched between the end surface of the support and the first surface of the piezoelectric vibrator in the third region, The fourth region is connected to the first surface of the piezoelectric vibrator and is not connected to the support, The second region is not connected to the piezoelectric vibrator.
  2. 2. The actuator of claim 1, wherein, The second region of the leaf spring has an average thickness smaller than that of the fourth region.
  3. 3. The actuator of claim 2, wherein, The second region has a fifth region including a center of the leaf spring, and a sixth region connecting the fifth region and the fourth region, The fifth region has a thickness smaller than an average thickness of the sixth region.
  4. 4. The actuator according to any one of claim 1 to 3, wherein, The distance from the center of the leaf spring to the connecting end of the fourth region in the second region is greater than the distance between the connecting end of the fourth region and the second region and the connecting end of the third region.
  5. 5. The actuator according to any one of claims 1 to 4, wherein, The second region of the leaf spring may have a region having a different thickness from the first region or may have a through hole.
  6. 6. The actuator of claim 5, wherein, The second region has a fifth region including a center of the leaf spring, and a sixth region connecting the fifth region and the fourth region, The through hole is disposed in the sixth region.
  7. 7. The actuator according to any one of claims 1 to 6, wherein, The piezoelectric element performs polarization inversion at a position at a predetermined distance from the center of the piezoelectric element toward the outer edge, The fourth region is disposed closer to the support than the position where the polarization is reversed, as viewed in the direction in which the support, the leaf springs, and the piezoelectric vibrators are arranged.
  8. 8. The actuator according to any one of claims 1 to 7, wherein, The leaf spring is made of metal.

Description

Actuator with a spring Technical Field The present invention relates to an actuator including a piezoelectric vibrator including a piezoelectric element and a plate member. Background Patent document 1 describes a structure including a piezoelectric element, a vibration substrate, and a diaphragm. The vibration substrate is disposed on the piezoelectric element. The vibration substrate is provided with a concave portion. The diaphragm is disposed at a position covering the recess of the vibration substrate. Patent document 1 Chinese utility model bulletin No. 208380823 specification In the structure of patent document 1, the vibration caused by the air resonance in the chamber formed by the vibration substrate and the diaphragm is utilized, and therefore the displacement amount of the vibration is limited. Disclosure of Invention Accordingly, an object of the present invention is to provide an actuator capable of obtaining vibration with a large displacement. An actuator according to an embodiment of the present invention includes a piezoelectric vibrator, a leaf spring, and a support body. The piezoelectric vibrator is formed of a laminate of a plate member and a piezoelectric element, and has a first surface and a second surface that face each other. The leaf spring has a third surface connected to the first surface and a fourth surface facing the third surface. The support body is formed in an annular shape having an end face and a peripheral face. The leaf spring has a first region in the shape of a ring, and a second region surrounded by the first region. The first region has a third region on the outer edge side of the leaf spring and a fourth region on the second region side. The leaf spring is connected to the support and the piezoelectric vibrator in a state of being sandwiched by the end surface of the support and the first surface of the piezoelectric vibrator in the third region. The leaf spring is connected to the piezoelectric vibrator in the fourth region and is not connected to the support. The leaf spring is not connected to the piezoelectric vibrator in the second region. In this structure, the leaf spring vibrates in synchronization with the vibration of the piezoelectric vibrator. At this time, the displacement amount of the leaf spring is larger than the displacement amount of the piezoelectric vibrator. According to the present invention, an actuator capable of obtaining vibration with a large displacement can be provided. Drawings Fig. 1 is an exploded perspective view of an actuator according to a first embodiment of the present invention. Fig. 2 is an exploded perspective view of an actuator according to a first embodiment of the present invention. Fig. 3 (a) and 3 (B) are partial cross-sectional views of an actuator according to a first embodiment of the present invention. Fig. 4 (a) is a plan view of a leaf spring according to a first embodiment of the present invention, fig. 4 (B) is a perspective view of a side view of the leaf spring, fig. 4 (C) is a cross-sectional view of the leaf spring, and fig. 4 (D) is a cross-sectional view of an enlarged buckling portion. Fig. 5 is a partial cross-sectional view showing an example of a vibration state of an actuator according to the first embodiment of the present invention. Fig. 6 is a partial cross-sectional view of an actuator according to a second embodiment of the present invention. Fig. 7 (a) and 7 (B) are diagrams showing the derivative shape of the leaf spring. Fig. 8 (a) is a plan view showing a derivative shape of the leaf spring, and fig. 8 (B) is a partial cross-sectional view thereof. Detailed Description First embodiment An actuator according to a first embodiment of the present invention will be described with reference to the drawings. Fig. 1 and 2 are exploded perspective views of an actuator according to a first embodiment of the present invention. Fig. 1 and 2 are views seen in opposite directions to each other in the stacking direction. Fig. 3 (a) and 3 (B) are partial cross-sectional views of an actuator according to a first embodiment of the present invention. Fig. 3 (a) and 3 (B) are views showing one outer edge (support) side from the center Po of the planar-view actuator. Further, the marks of black circles representing points (e.g., center points) of the respective figures represent geometric positions, and do not need to be physically visually identifiable objects. In the following description, each component constituting the actuator 10 when viewed in the stacking direction is referred to as a plan view of each component. As shown in fig. 1, 2, 3 (a), and 3 (B), the actuator 10 includes a piezoelectric vibrator 100, a leaf spring 40, and a support ST. The piezoelectric vibrator 100 is composed of a laminate of the piezoelectric element 21, the piezoelectric element 22, the plate member 31, the plate member 32, and the plate member 33. The piezoelectric vibrator 100 has a surface F101 and a surface F102 facing