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CN-122028643-A - Actuator with a spring

CN122028643ACN 122028643 ACN122028643 ACN 122028643ACN-122028643-A

Abstract

The present invention relates to an actuator for reducing stress at a bonding portion between a vibration plate and a support body. The actuator (10) is provided with a piezoelectric vibrator (100) and a support body (ST 1). The piezoelectric vibrator includes a plate member (31) having a surface (F311) and a surface (F312) facing each other, and a piezoelectric element disposed on the surface (F312). The support body has a ring shape in plan view. The support body has an inner peripheral surface and an outer peripheral surface each having a ring shape in plan view, and surfaces (FST 11, FST 12) connecting the inner peripheral surface and the outer peripheral surface. One face (FST 11) of the support body is bonded to the plate member. The plate member has a thin portion (31 TN). The thin wall portion is in a ring shape formed by a surface (F311) recessed toward a surface (F312), and has an inner peripheral end and an outer peripheral end. The outer peripheral end of the thin portion overlaps the inner peripheral surface of the support body when viewed in the thickness direction of the plate member.

Inventors

  • Tohda RIE
  • CAI PENG

Assignees

  • 株式会社村田制作所

Dates

Publication Date
20260512
Application Date
20251111
Priority Date
20241111

Claims (7)

  1. 1. An actuator, comprising: a piezoelectric vibrator includes a plate member having a first surface and a second surface facing each other, a piezoelectric element disposed on the second surface, and The support body is annular in shape in a plan view, The support body includes an inner peripheral surface and an outer peripheral surface each having a ring shape in a plan view, and end surfaces connecting the inner peripheral surface and the outer peripheral surface, One of the end faces of the support body is bonded to the plate member, The plate member is provided with a thin wall portion, The thin wall portion is in a ring shape formed by the shape of the first surface facing the second surface side recess, and has an inner peripheral end and an outer peripheral end, The outer peripheral end of the thin-walled portion overlaps the inner peripheral surface of the support body when viewed in the thickness direction of the plate member.
  2. 2. The actuator of claim 1, wherein, The adhesive is filled in the concave part formed by the concave shape.
  3. 3. The actuator of claim 2, wherein, The adhesive protrudes from the first face and is configured to be bonded to the inner peripheral face.
  4. 4. The actuator of claim 2, wherein, The elastic modulus of the adhesive is lower than that of the plate member.
  5. 5. The actuator according to any one of claims 1 to 4, wherein, In a side view of the plate member, a portion of the first surface corresponding to the thin portion has a curved shape recessed toward the second surface side.
  6. 6. The actuator according to any one of claims 1 to 5, wherein, The thickness of the thin-walled portion is 1/3 or more of the thickness of a portion of the plate member other than the thin-walled portion and is smaller than the thickness of a portion of the plate member other than the thin-walled portion.
  7. 7. The actuator according to any one of claims 1 to 6, wherein, The distance between the inner peripheral end and the outer peripheral end in the thin-walled portion is equal to or less than the thickness of a portion of the plate member other than the thin-walled portion.

Description

Actuator with a spring Technical Field The present invention relates to an actuator including a piezoelectric vibrator and a support body for supporting the piezoelectric vibrator. Background Patent document 1 describes a structure in which an outer edge portion of a vibration plate provided with a piezoelectric element is fixed to a housing case. The vibration plate is bonded to the housing case using an adhesive. Patent document 1 Japanese patent laid-open No. 10-220357 However, in the structure of patent document 1, stress generated when the vibration plate vibrates is concentrated on the fixing portion, and there is a possibility that damage may occur between the vibration plate and the fixing portion. Disclosure of Invention Accordingly, an object of the present invention is to reduce stress generated between a vibration plate and a fixing portion. An actuator according to an embodiment of the present invention includes a piezoelectric vibrator and a support. The piezoelectric vibrator includes a plate member having a first surface and a second surface that face each other, and a piezoelectric element disposed on the second surface. The support body has a ring shape in plan view. The support body has an inner peripheral surface and an outer peripheral surface each having a ring shape in plan view, and end surfaces connecting the inner peripheral surface and the outer peripheral surface. One end face of the support body is bonded to the plate member. The plate member includes a thin portion. The thin wall portion is annular and has an inner peripheral end and an outer peripheral end, and is formed in a shape recessed toward the second surface side. The outer peripheral end of the thin portion overlaps the inner peripheral surface of the support body when viewed in the thickness direction of the plate member. In this structure, stress related to the portion where the plate member and the support are bonded is dispersed to the thin portion. Thereby, the stress in the portion where the plate member and the support are bonded is reduced. According to the present invention, stress generated between the vibration plate and the support body can be reduced. Drawings Fig. 1 is an exploded perspective view of an actuator according to a first embodiment. Fig. 2 is an exploded perspective view of the actuator according to the first embodiment. Fig. 3 (a) is a cross-sectional view showing a part of the actuator according to the first embodiment, and fig. 3 (B) is a partial enlarged view of fig. 3 (a). Fig. 4 (a) is a cross-sectional view of the plate member, and fig. 4 (B) is a partial enlarged cross-sectional view of the plate member. Fig. 5 (a) is a diagram showing an example of the distribution of stress applied to the actuator according to the first embodiment, and fig. 5 (B) is a diagram showing an example of the distribution of stress due to vibration applied to the actuator of the comparative example. Fig. 6 is a cross-sectional view showing a part of an actuator according to a second embodiment. Fig. 7 is a cross-sectional view showing a part of an actuator according to a third embodiment. Fig. 8 is a cross-sectional view showing a part of an actuator according to a fourth embodiment. The reference numerals indicate 10, 10A, 10B, 10 c..the actuator, 21, 22..the piezoelectric element, 31, 32, 33..the plate member, 31TN, 32 tn..the thin wall portion, 40..the adhesive, 100..the piezoelectric vibrator, 210, 220..the piezoelectric body, 211, 212, 221, 222..the driving electrode, cov..the concave portion, F211, F212, F221, F222, F311, F312, F321, F322, FST11, FST12, FST21, FST 22..the surface, fe21, fe22, fe31, fe32, fe33..the outer edge, feST, fest 2..the outer peripheral surface, fiST, fest 2..the inner peripheral surface, iec..the inner peripheral end, c..the outer peripheral end, pad corner, po..21, po22, po31, po32, po 1, ST 2..the center support body. Detailed Description [ First embodiment ] An actuator according to a first embodiment of the present invention will be described with reference to the accompanying drawings. Fig. 1 and 2 are exploded perspective views of an actuator according to a first embodiment. Fig. 1 and 2 are views seen in mutually opposite directions in the stacking direction. Fig. 3 (a) is a cross-sectional view showing a part of the actuator according to the first embodiment, and fig. 3 (B) is a partial enlarged view of fig. 3 (a). Fig. 3 (a) is a view showing the position from the center of the actuator to one outer edge (support body) side. Further, the black dot marks of the respective figures representing dots (e.g., centers) represent geometric positions, and do not need to be objects that can be physically visually confirmed. In the following description, each component constituting the actuator 10 when viewed in the stacking direction is referred to as a plan view of each component. As shown in fig. 1, 2, 3 (a), and 3 (B), the actuator 10 includes a piezoelectric vibrator 100 an